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KR20130107670A - Semiconductor package heat slug structure for thermal dissipation and manufacturing this semiconductor package - Google Patents

Semiconductor package heat slug structure for thermal dissipation and manufacturing this semiconductor package
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KR20130107670A
KR20130107670AKR1020120029626AKR20120029626AKR20130107670AKR 20130107670 AKR20130107670 AKR 20130107670AKR 1020120029626 AKR1020120029626 AKR 1020120029626AKR 20120029626 AKR20120029626 AKR 20120029626AKR 20130107670 AKR20130107670 AKR 20130107670A
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semiconductor package
heat slug
heat
heat sink
package
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김영선
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김영선
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Abstract

PURPOSE: A semiconductor package heat slug structure for thermal dissipation and a method for manufacturing the semiconductor package are provided to improve a heat dissipation effect by extending the size of an outer heat sink. CONSTITUTION: A chip bonding pad (5) is electrically connected to an inner lead (6). A semiconductor package heat slug (7) is bonded to die paddles (2). An encapsulation process is performed in order to expose one part of the semiconductor package heat slug. An outer lead (9) is formed so that the semiconductor package heat slug faces upwards. An outside heat sink (10) is combined with the semiconductor package heat slug.

Description

Translated fromKorean
열방출을 위한 반도체 패캐지 방열판 구조 및 그 패캐지 제조 방법.{Semiconductor Package Heat Slug Structure for Thermal Dissipation and Manufacturing This Semiconductor Package}Semiconductor Package Heat Slug Structure for Thermal Dissipation and Manufacturing This Semiconductor Package}

본 발명은 반도체 패캐지 구조 및 그 제조에 관한 것으로, 보다 상세하게는 반도체 패캐지에서 열방출(thermal dissipation)을 위한 패캐지 자체 방열판(heat slug)에 나사screw) 홈을 형성하여 외부 방열판(heat sink/spreader)을 추가적으로 장착하기 쉽게함으로써, 방열을 원하는 반도체 패캐지 제품을 인쇄회로기판(PCB ; Printed Circuit Board)에 실장(mounting)하여 사용시, 보다 적은 비용으로 간편하고 효율적으로 사용할 수 있게 하면서 반도체 패캐지 몸체의 일부로 구성되는 방열판(heat slug) 구조에 관한 것이다.The present invention relates to a semiconductor package structure and to fabrication thereof, and more particularly, to an external heat sink / spreader by forming a screw groove in a package self heat slug for thermal dissipation in a semiconductor package. ), It is easy to install additional semiconductor package products to the printed circuit board (PCB) to heat dissipation, when used as a part of the semiconductor package body, making it possible to use easily and efficiently at a lower cost It relates to a heat slug structure that is configured.

종래기술의 반도체 패캐지에 형성되는 방열판(heat slug)은 패캐지 자체의 크기에 맞추어 제작한 후, 이를 사용하여 패캐지 완제품을 형성할 때, 방열판의 일부가 외부에 노출되도록 한다. 그리고 보다 더 큰 열방출을 위해 패캐지 외부로 노출된 방열판에 보조장치 등을 사용하여 외부 방열판(heat sink/spreader)을 추가로 부착하여 사용하기도 한다.The heat slug formed in the semiconductor package of the prior art is manufactured according to the size of the package itself, and when the finished package is formed using the heat slug, a part of the heat sink is exposed to the outside. In addition, an additional heat sink / spreader may be attached to the heat sink exposed to the outside of the package by using an auxiliary device for larger heat dissipation.

종래기술의 반도체 패캐지 제조시에 사용하는 방열판은, 주로 그 일부가 반도체 패캐지 몸체(package body)에 묻혀 있고 일부는 외부로 노출되어 있는 구조로 되어 있다. 따라서 좀 더 많은 양의 열을 방출하게 하기 위해서는, 외부 방열판을 부착시킬 수 있는 고정장치를 사용하여 반도체 패캐지 몸체에 추가로 외부 방열판을 부착하고 또한, 필요 시에는 공기의 흐름을 많게 하기위해 송풍 팬(cooling fan)을 부착하여 사용하기도 한다.The heat sink used in manufacturing a semiconductor package of the prior art has a structure in which a part thereof is mainly buried in a semiconductor package body and a part thereof is exposed to the outside. Therefore, in order to allow a larger amount of heat to be dissipated, an additional external heat sink is attached to the semiconductor package body using a fixing device capable of attaching an external heat sink, and a blower fan is used to increase the flow of air if necessary. It can also be used by attaching a cooling fan.

본 발명은, 종래기술로 이루어진 반도체 패캐지의 일부분으로 사용되는 방열판의 개선된 구조를 통하여, 반도체 패캐지 몸체에 추가로 부착되는 외부 방열판을 별도의 고정장치 없이 부착할 수 있도록 하며, 또한 열전달 효과가 있는 물질을 사용하여 외부 방열판을 밀착시키는 것보다 효과적으로 외부 방열판에 열을 전달할 수 있어, 한층 더 효과적으로 열방출(thermal dissipation)을 할 수 있게 한다.The present invention, through the improved structure of the heat sink used as part of the semiconductor package made in the prior art, it is possible to attach the external heat sink additionally attached to the semiconductor package body without a separate fixing device, and also has a heat transfer effect The material can be used to transfer heat to the external heat sink more effectively than to closely adhere the external heat sink, allowing for more efficient thermal dissipation.

반도체 패캐지 제조 시, 반도체 칩(chip)을 부착할 수 있게 하는 다이패들(die paddle)이 있는 리드프레임을 사용하거나 또는 인쇄회로기판(PCB) 형태의 반도체 패캐지용 기판(substrate)을 사용하는 패캐지 제품에 있어, 기판(substrate) 이나 다이패들 또는 칩(chip) 표면에 방열판(heat slug)을 추가로 부착하여 완성하는 패캐지 제품이 있다. 본 발명은 이러한 제품에 있어, 반도체 패캐지의 일부로 구성 또는 사용되는 방열판(heat slug)에 나사(screw)홈과 같은 구조를 형성한 방열판을 사용하여 패캐지 제품을 완성한 후, 패캐지 제품의 일부로 되어 있는 방열판(heat slug)에 추가로 외부 방열판(heat sink/spreader)을 부착할 수 있게 함으로써 ;When manufacturing a semiconductor package, a package using a lead frame with a die paddle for attaching a semiconductor chip or a substrate for a semiconductor package in the form of a printed circuit board (PCB) is used. In products, there is a packaged product that is completed by additionally attaching a heat slug to a substrate, die paddle or chip surface. According to the present invention, after a package product is completed using a heat sink having a structure such as a screw groove in a heat slug configured or used as a part of a semiconductor package, the heat sink is a part of the package product. by attaching an external heat sink / spreader in addition to the heat slug;

-별도의 고정장치 없이 외부 방열판을 손쉽게 부착할 수 있으며,-External heat sink can be easily attached without additional fixing device

-열전도성 물질을 사용하지 않고 패캐지 방열판(heat slug)과 외부 방열판(heat sink/spreader)을 밀착시킬 수 있어, 열전도성이 향상되어 방열효과가 증가하며,-The heat sink and the heat sink / spreader can be closely contacted without using heat-conductive material, so the heat conductivity is improved and the heat dissipation effect is increased.

-별도의 고정장치를 사용하지 않음으로써 비용을 줄일 수 있으며, 외부 방열판의 높이를 최소화 하면서 좌우로 외부 방열판의 크기를 확대하여 방열 면적을 증가시켜 방열효과를 증대시킬 수 있다.-By not using a separate fixing device, the cost can be reduced, and the heat dissipation effect can be increased by increasing the heat dissipation area by increasing the size of the external heat sink from side to side while minimizing the height of the external heat sink.

아울러, 외부 방열판 확대를 통해 반도체 패캐지 주변의 소자(electronic component)들에 대한 전자기파 차폐효과(EMI Shielding-Effect)를 갖게 할 수 있다.In addition, by expanding an external heat sink, EMI shielding effects may be provided on electronic components around the semiconductor package.

(도1)은 본 발명의 실시 예에 따른 반도체 패캐지 단면도.
(도2)는 본 발명의 실시 예에 따른 또 다른 반도체 패캐지 단면도.
(도3)은 " " " " .
(도4)은 " " " " .
(도5)는 " " " " .
(도6)는 종래기술의 실시 예에 따른 반도체 패캐지 단면도.
(도7)는 " " " " .
(도8)은 " " " " .
1 is a cross-sectional view of a semiconductor package according to an embodiment of the present invention.
2 is a cross-sectional view of another semiconductor package according to an embodiment of the present invention.
(Figure 3) is """".
(Figure 4) is """".
(FIG. 5) shows """".
6 is a cross-sectional view of a semiconductor package according to an embodiment of the prior art.
(FIG. 7) is """".
(FIG. 8) shows """".

본 발명은 반도체 패캐지의 일부를 이루고 있는 방열판(heat slug)에 외부 방열판(heat sink/spreader)을 탈/부착할 수 있도록 방열판(heat slug)에 나사(screw) 홈을 형성하여, 이를 패캐지용 방열판으로 사용한다. 즉 (도1)∼(도5)와 같이 ;The present invention forms a screw groove in the heat slug so that a heat sink / spreader can be attached to or detached from a heat slug that forms part of a semiconductor package. Used as That is, as shown in Figs. 1 to 5;

-반도체 칩(chip)(1) -다이 패들(die paddle/pad)(2)Semiconductor chip (1) Die paddle / pad (2)

-접착물질(adhesive material)(3) -미세금선(gold wire)(4)-Adhesive material (3)-gold wire (4)

-본딩 패드(bonding pad)(5) -인너 리드(inner lead)(6)Bonding pads (5) inner lead (6)

-패캐지 방열판(heat slug)(7) -봉지재(epoxy, EMC)(8)-Package heat slug (7)-encapsulant (epoxy, EMC) (8)

-아웃 리드(out lead, I/O)(9) -외부 방열판(heat sink/spreader)(10)-Out lead (I / O) (9) -heat sink / spreader (10)

-세라믹 몸체(ceramic body)(11) -나사(screw)홈(12)-Ceramic body (11) -screw groove (12)

-써브스트레이트(substrate)(13) -금속 뚜껑/덮개(metal lid)(14)-Substrate (13) -metal lid (14)

-열전도성 물질(thermal conductive material)(15)Thermalconductive material 15

등으로 이루어져 있다.Etc.

아울러, 본 발명인 방열판 구조를 사용한 반도체 패캐지 제조 공정의 예로서, (도9a)∼(도9f)와 같이 ;In addition, as an example of a semiconductor package manufacturing process using the heat sink structure of the present invention, as shown in Figs. 9A to 9F;

-반도체 패캐지용 리드프레임(lead frame)의 다이패들(die paddle)(2)에 접착물질(adhesive material)(3)을 사용하여, 반도체 칩(chip)(1)을 부착시킨다. ------ (9a)Thesemiconductor chip 1 is attached to thedie paddle 2 of the lead frame for semiconductor packaging using anadhesive material 3. ------ (9a)

-미세금선(gold wire)(4)을 사용하여, 칩의 본딩패드(bonding pad)(5)와 인너리드(inner lead)(6)를 전기적으로 연결시킨다. ------ (9b)Agold wire 4 is used to electrically connect thebonding pads 5 and theinner lead 6 of the chip. ------ (9b)

-접착물질(adhesive material)(3)을 사용하여, 나사(screw)홈(12)이 형성된 반도체 패캐지용 방열판(heat slug)(7)을 다이패들(die paddle)(2)에 부착시킨다. ------ (9c)Anadhesive material 3 is used to attach aheat pad 7 for the semiconductor package in which thescrew groove 12 is formed to thedie paddle 2. ------ (9c)

-몰드 금형(mold die)과 봉지재(epoxy, EMC ; Epoxy Molding ompound)(8)를 사용하여, 칩(1)과 미세금선(4) 및 인너리드(6)의 보호 및 방열판(7)의 일부분이 노출될 수 있도록 봉지(molding)를 실시한다. ------ (9d)Protection of the heat sink (7) and protection of the chip (1), fine gold wire (4) and inner lead (6) using a mold die and an encapsulant (epoxy, EMC; epoxy molding ompound) (8). Molding is performed to expose a portion. ------ (9d)

-반도체 패캐지 방열판(heat slug)(7)이 위로 향할 수 있도록 아웃리드(out lead, I/O)(9)를 형성(trimming & forming)시킨다. ------ (9e)-Trim out & form out lead (I / O) 9 so that the semiconductorpackage heat slug 7 is facing up. ------ (9e)

-필요시, 패캐지 방열판(heat slug)(7)에 결합할 수 있게 되어 있는 외부 방열판(heat slug/spreader)(10)을 패캐지 방열판(7)에 결합시킨다. ------ (9f)-If necessary, the heat slug /spreader 10, which can be coupled to thepackage heat slug 7, is coupled to thepackage heat sink 7. ------ (9f)

Claims (3)

Translated fromKorean
웨이퍼(wafer) 상태에서 절단(sawing)된 반도체 칩(chip)을 접착믈질(adhesive material)을 사용하여 리드프레임(lead-frame)의 다이패들(die paddle)에 부착시킨 후(필요시 경화시킴), 미세금선(gold wire)을 사용하여 칩(chip) 상의 본딩 패드(bonding pad)와 리드프레임의 인너리드(inner lead)를 와이어 본딩(wire bonding)을 실시하여 전기적으로 연결시킨 후, 나사(screw)홈이 형성된 패캐지용 방열판(heat slug)을 접착물질을 사용하여 다이패들의 한 쪽 면에 부착시킨 후, 몰드 금형(mold die)과 봉지재(epoxy, EMC ; Epoxy Molding Compound)를 사용하여 칩(chip)과 미세금선(gold wire) 및 인너리드(inner lead)를 보호하고 방열판(heat slug)의 일부가 노출될 수 있도록 봉지(molding)시키고, 방열판(heat slug)이 위로 향할 수 있도록 리드프레임의 아웃리드(out lead, I/O)를 형성하여 제작된 형태(구조)를 특징으로 하는 반도체 패캐지.A semiconductor chip sawed in a wafer state is attached to a die paddle of a lead-frame using an adhesive material (hardening if necessary). ), Using a gold wire to electrically connect the bonding pad on the chip and the inner lead of the leadframe by wire bonding, and then After attaching the grooved heat slug to the one side of the die pad using an adhesive material, a mold die and an encapsulant (epoxy, EMC; Epoxy Molding Compound) are used. Protects the chip, gold wire and inner lead, molds a portion of the heat slug to be exposed, and leads the heat slug up. Characterized by the shape (structure) produced by forming the out lead (I / O) of the frame Paekaeji conductor.반도체 패캐지 제조시, 패캐지 방열판(heat slug)에 나사 구조(형태) 또는 외부 방열판(heat sink/spreader)을 결합시킬 수 있는 어떠한 구조(형태)를 갖는 패캐지 방열판(heat slug)을 사용(포함)하는 것을 특징으로 하는 반도체 패캐지.In the manufacture of semiconductor packages, a package heat slug having any structure (shape) capable of joining a screw structure (shape) or an external heat sink (heat sink / spreader) to the package heat slug may be used (including). A semiconductor package, characterized in that.상기 1항에서, 패캐지 방열판(heat slug)을 와이어 본딩(wire bonding) 전에 다이패들(die paddle)에 부착하거나 또는, 봉지(molding) 공정 시 다이패들에 접촉(부착)되게 공정을 진행하는 것을 특징으로 하는 반도체 패캐지.The method of claim 1, wherein the package heat slug is attached to a die paddle before wire bonding, or the process is performed to contact (attach) the die paddle during a molding process. A semiconductor package, characterized in that.
KR1020120029626A2012-03-232012-03-23Semiconductor package heat slug structure for thermal dissipation and manufacturing this semiconductor packageCeasedKR20130107670A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
WO2022073884A1 (en)*2020-10-072022-04-14Vitesco Technologies GmbHSemiconductor assembly and method for producing a semiconductor assembly
US12087657B2 (en)2021-05-212024-09-10Samsung Electronics Co., Ltd.Semiconductor packages

Cited By (2)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
WO2022073884A1 (en)*2020-10-072022-04-14Vitesco Technologies GmbHSemiconductor assembly and method for producing a semiconductor assembly
US12087657B2 (en)2021-05-212024-09-10Samsung Electronics Co., Ltd.Semiconductor packages

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