본 발명은 반도체 패키지 및 그 제조방법에 관한 것으로서, 더욱 상세하게는 회로기판과 리드프레임을 접목시킨 형태의 기판으로써 공정의 단순화를 도모함과 더불어 보드 레벨의 신뢰성을 확보할 수 있는 새로운 구조의 반도체 패키지를 제공하기 위한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor package and a method of manufacturing the same. More specifically, the present invention relates to a semiconductor package having a structure in which a circuit board and a lead frame are combined, thereby simplifying the process and ensuring a board-level reliability. It is to provide.
일반적으로, 반도체 산업에서 집적회로에 대한 패키징 기술은 소형화에 대한 요구 및 실장 신뢰성을 만족시키기 위해 지금까지 계속 발전해오고 있다.In general, the packaging technology for integrated circuits in the semiconductor industry continues to evolve to meet the demand for miniaturization and mounting reliability.
즉, 소형화에 대한 요구는 칩 스케일에 근접한 패키지에 대한 개발을 가속화시키고 있으며, 실장 신뢰성에 대한 요구는 실장작업의 효율성 및 실장후의 기계적·전기적 신뢰성을 향상시킬 수 있는 패키지 제조 기술에 대한 중요성을 부각시키고 있다.In other words, the demand for miniaturization is accelerating the development of packages close to the chip scale, and the demand for mounting reliability emphasizes the importance of package manufacturing technology that can improve the efficiency of mounting work and the mechanical and electrical reliability after mounting. I'm making it.
한편, 일반적으로 반도체소자는 집적회로가 형성된 웨이퍼 상태에서 낱개의 칩으로 각각 분리된 후, 이것을 플라스틱 패키지나 세라믹 패키지에 탑재하여 기판에의 실장이 용이하도록 조립하는 패키징 공정을 거치게 된다.On the other hand, in general, semiconductor devices are separated into individual chips in a wafer in which integrated circuits are formed, and then mounted in a plastic package or a ceramic package, and then subjected to a packaging process for assembling the substrate to facilitate mounting on the substrate.
이와 같이 행해지는 반도체소자에 대한 패키징 공정의 주목적은 기판이나 소켓에 실장하기 위한 형상의 확보와 기능보호에 있다고 할 수 있다.The main purpose of the packaging step for the semiconductor element thus performed is to secure the shape and protect the function for mounting on the substrate or the socket.
또한, 최근에는 집적회로의 고집적화에 따라 다핀화, 미세조립기술, 또 실장형태의 다양화에 따른 패키지의 다종류화 등, 조립공정과 관련된 기술도 각각 세분된 분야에 따라 크게 변화하고 있다.In addition, in recent years, technologies related to the assembly process, such as multi-pinning, micro-assembly technology, and package variety due to the diversification of the mounting type according to the high integration of integrated circuits, are also greatly changed according to the subdivided fields.
반도체 조립공정의 개요에 대해 현재 가장 많이 사용되고 있는 플라스틱 타입의 반도체소자를 예로 들어 설명하면 다음과 같다.An overview of the semiconductor assembly process will be described below with an example of a plastic type semiconductor device which is most used.
먼저, 전기적 회로가 형성된 웨이퍼를 각각의 단일 칩으로 분리하는데, 이때 Si(실리콘)는 모스경도 7로서 딱딱하고 깨지기 쉬운 성질을 갖고 있으므로 웨이퍼의 제조시 미리 분리할 라인에 절단하기 위한 물질을 넣어두고 이 분리라인을 따라 브레이크 응력을 가해 파괴, 분리시키는 방법을 취하는 경우가 많다.First, the wafer on which the electrical circuit is formed is separated into each single chip, and Si (silicon) has a Mohs hardness of 7 and is hard and brittle, so that a material for cutting is placed in a line to be separated in advance in manufacturing the wafer. In many cases, a break stress is applied along this separation line to break and separate.
또한, 분리된 각각의 반도체 칩은 리드프레임의 다이패들에 본딩되고, 이때의 접합방법은 Au-Si 공정(共晶)법, 납땜법, 수지접착법 등이 있으며 용도에 따라 알맞은 방법이 선택되어 사용된다.In addition, each separated semiconductor chip is bonded to the die paddle of the lead frame, and the bonding method is Au-Si process, soldering method, resin bonding method, etc. It is used.
한편, 전술한 바와 같이 반도체 칩을 리드프레임의 다이패들에 접착하는 목적은 조립이 완료된 후 기판에 실장시키기 위해서 뿐만 아니라, 전기적 입출력단자나 어스(earth)를 겸하는 일도 있으며 소자의 동작시 발생하는 열의 방열통로로서도 필요로 하는 경우가 있기 때문이다.On the other hand, as described above, the purpose of bonding the semiconductor chip to the die paddle of the lead frame is not only to be mounted on the substrate after assembly is completed, but also to serve as an electrical input / output terminal or earth, which may occur during operation of the device. This is because the heat dissipation path may be required as well.
상기와 같이 반도체 칩을 본딩한 후에는 칩의 본딩패드와 리드프레임의 인너리드를 와이어로 본딩하므로써 연결하게 되며, 와이어 본딩의 방법으로 플라스틱 봉함 패키지에서는 일반적으로 골드 와이어를 사용한 열압착법 또는 열압착법과 초음파법을 혼용한 방법이 주로 이용되고 있다.After bonding the semiconductor chip as described above, the bonding pad of the chip and the inner lead of the lead frame are connected by wire bonding. In the plastic sealing package, the thermal bonding method or the thermocompression bonding using gold wire is generally performed. The method which mixed the method and the ultrasonic method is mainly used.
또한, 와이어 본딩에 의해 반도체 칩과 인너리드가 전기적으로 연결된 후에는 칩을 고순도의 에폭시 수지를 사용하여 성형 봉합하므로써 몰드바디를 형성시키는 몰딩공정이 수행되는데, 이때 사용되는 에폭시 수지는 집적회로의 신뢰성을 좌우하는 중요한 요소이며, 수지의 고순도화와 몰딩시 집적회로에 주어지는 응력을 저감시키기 위한 저응력화 등의 개선이 추진되고 있다.In addition, after the semiconductor chip and the inner lead are electrically connected by wire bonding, a molding process of forming a mold body by forming and sealing the chip using a high purity epoxy resin is performed. In addition, the improvement of the high purity of the resin and the reduction of the stress for reducing the stress applied to the integrated circuit during molding are being promoted.
그리고, 상기한 공정이 완료된 후에는 IC 패키지를 소켓이나 기판에 실장하기 위해 아웃터리드(outer lead)를 소정의 형상으로 절단하고 성형하는 공정이 행해지며, 아웃터리드에는 실장접합성(납땜성)을 향상시키기 위해 도금이나 납딥(dip)이 처리된다.After the above process is completed, a process of cutting and molding an outer lead into a predetermined shape is carried out to mount the IC package on a socket or a substrate, and the mount is improved in solderability. Plating or dip dips are applied to make them.
한편, 반도체 패키지는 실장형태 및 리드형태에 따라 여러 가지 유형으로 나뉘는데, 패키지의 대표적인 예로서는 전술한 DIP(Dual Inline Package)외에 QFP(Quad Flat Package), TSOP(Thin Small Outline Package), BGA 패키지( Ball Grid Array package), BLP(Bottom Leaded Package) 등이 있으며, 계속 다핀(多-pin)화 또는 경박단소(輕薄短小)화 되고 있다.On the other hand, semiconductor packages are divided into various types according to the mounting type and the lead type. As a representative example of the package, in addition to the above-described dual inline package (DIP), QFP (Quad Flat Package), TSOP (Thin Small Outline Package), and BGA package (Ball) Grid Array package (BLP), Bottom Leaded Package (BLP), and the like, continue to be multi-pin or light and thin.
상기한 패키지 타입중, BGA 패키지(Ball Grid Array package)는 반도체 칩이부착된 기판의 이면에 구형의 솔더볼을 소정의 상태로 배열(Array)하여 아웃터리드(outer lead) 대신으로 사용하게 되며, 상기 BGA 패키지는 패키지 몸체(Package Body) 면적을 QFP(Quad Flat Package) 타입보다 작게 할 수 있으며, QFP와는 달리 리드의 변형이 없는 장점이 있다.Among the above package types, the BGA package (Ball Grid Array package) is used to replace the outer lead by arranging a spherical solder ball in a predetermined state on the back side of the substrate on which the semiconductor chip is attached. The BGA package can make the package body area smaller than the QFP (Quad Flat Package) type, and unlike QFP, there is an advantage that there is no deformation of the lead.
대신, 상기 BGA 패키지는 기존의 리드프레임에 비해 값이 비싼 회로기판을 사용하므로 제조원가가 높아지고, 반도체 칩 및 골드 와이어의 보호를 위해 봉지공정 수행시 상형 및 하형에 의해 회로기판이 눌러져 솔더마스크에 크랙이 발생할 우려가 높아지는 등의 단점이 있다.Instead, the BGA package uses a circuit board that is more expensive than a conventional lead frame, thereby increasing manufacturing costs, and cracking the solder mask by pressing the upper and lower molds during the encapsulation process to protect the semiconductor chip and the gold wire. There are disadvantages such as a high possibility of occurrence.
한편, BLP(Bottom Leaded Package)는 패키지 몸체의 바텀면을 통해 노출된 리드를 이용하여 기판에 실장하므로, 패키지 몸체의 두께를 아웃터리드를 갖는 DIP나 QFP 타입에 비해 작게 할 수 있다.On the other hand, since BLP (Bottom Leaded Package) is mounted on the substrate using the lead exposed through the bottom surface of the package body, the thickness of the package body can be made smaller than that of the DIP or QFP type having an outlier.
그리고, 최근에는 μ-BGA등 반도체 패키지의 개발이 가속화되고 있으며, 상기한 각 반도체 패키지들은 실장면적, 입출력 단자수, 전기적 신뢰성, 제조공정의 유연성, 제조비용등에 있어 제각기 장점 및 단점을 갖고 있다.In recent years, development of semiconductor packages such as μ-BGA has been accelerated, and each of the semiconductor packages has advantages and disadvantages in terms of mounting area, number of input / output terminals, electrical reliability, manufacturing process flexibility, manufacturing cost, and the like.
따라서, 상기한 각 패키지들의 장점을 살리면서 단점을 해소한 새로운 타입의 반도체 패키지가 지속적으로 연구 개발되고 있는 실정이다.Therefore, a new type of semiconductor package that solves the disadvantages while making use of the advantages of the above-mentioned packages is constantly being researched and developed.
본 발명은 상기한 바와 같이 기존의 반도체 패키지가 갖는 장점을 최대한 살리면서 단점은 해소한 새로운 타입의 반도체 패키지를 제공하기 위한 것으로서, 회로기판과 리드프레임을 접목시킨 형태의 기판을 이용하므로써 공정의 단순화를 도모함과 더불어 보드 레벨의 신뢰성을 확보할 수 있는 새로운 구조의 반도체 패키지를 제공하는데 그 목적이 있다.The present invention is to provide a new type of semiconductor package, which maximizes the advantages of the existing semiconductor package and eliminates the disadvantages as described above, and simplifies the process by using a board in which a circuit board and a lead frame are combined. The purpose of the present invention is to provide a semiconductor package with a new structure that can achieve board-level reliability and secure board-level reliability.
도 1은 본 발명의 반도체 패키지를 나타낸 종단면도1 is a longitudinal cross-sectional view showing a semiconductor package of the present invention;
도 2a 내지 도 2h는 본 발명의 패키지 제조 과정을 나타낸 것으로서,Figure 2a to 2h shows a package manufacturing process of the present invention,
도 2a는 본 발명 반도체 패키지 제조에 적용되는 회로기판을 나타낸 평면도Figure 2a is a plan view showing a circuit board applied to the manufacture of the semiconductor package of the present invention
도 2b는 본 발명 반도체 패키지 제조에 적용되는 리드프레임을 나타낸 평면도Figure 2b is a plan view showing a lead frame applied to the semiconductor package manufacturing of the present invention
도 2c는 도 2b의 리드프레임 상부에 회로기판이 올려진 상태를 한 유니트를 예로 들어 나타낸 평면도FIG. 2C is a plan view illustrating a unit in which a circuit board is mounted on the lead frame of FIG. 2B as an example; FIG.
도 2d는 도 2c의 Ⅰ-Ⅰ선을 따른 종단면도FIG. 2D is a longitudinal sectional view along the line II of FIG. 2C
도 2e는 다이패들 상면에 칩이 어태치된 상태를 나타낸 종단면도2E is a longitudinal sectional view showing a state in which a chip is attached to an upper surface of the die paddle;
도 2f는 와이어 본딩후의 상태를 나타낸 종단면도2F is a longitudinal sectional view showing a state after wire bonding;
도 2g는 봉지후의 상태를 나타낸 종단면도Figure 2g is a longitudinal sectional view showing a state after sealing
도 2h는 트리밍 후의 상태를 나타낸 종단면도2H is a longitudinal sectional view showing a state after trimming;
도 3은 본 발명의 반도체 패키지가 마더보드에 실장된 상태를 나타낸 종단면도3 is a longitudinal sectional view showing a state in which a semiconductor package of the present invention is mounted on a motherboard;
도 4는 본 발명의 반도체 패키지가 스택된 상태를 나타낸 종단면도Figure 4 is a longitudinal cross-sectional view showing a stacked state of the semiconductor package of the present invention
* 도면의 주요부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings
1:칩 2:회로기판1: chip 2: circuit board
3:리드프레임 4:다이패들3: leadframe 4: die paddle
5:리드 6:와이어5: Lead 6: Wire
7:몰드바디 8:본드핑거7: Mold body 8: Bond finger
9:비어홀 10:윈도우9: Beer Hall 10: Windows
11:마더보드 12:솔더11: Motherboard 12: Solder
상기한 목적을 달성하기 위해, 본 발명은 칩이 안착되는 다이패들과, 상기 다이패들 주위에 배치되는 리드와, 상기 리드 상면에 부착되며 다이패들이 노출되도록 하는 윈도우와 와이어 본딩을 위한 본드핑거 및 리드와의 전기적 접속을 위한 비어홀이 구비된 회로기판과, 상기 칩의 본딩패드와 회로기판의 본드핑거를 전기적으로 연결하는 와이어와, 상기 칩과 와이어 및 본드핑거를 봉지하는 몰드바디를 포함하여서 됨을 특징으로 하는 반도체 패키지가 제공된다.In order to achieve the above object, the present invention provides a die paddle on which a chip is seated, a lead disposed around the die paddle, a bond attached to an upper surface of the lead and allowing the die pads to be exposed, and a bond for wire bonding. A circuit board including a via hole for electrical connection between a finger and a lead, a wire electrically connecting a bonding pad of the chip and a bond finger of the circuit board, and a mold body encapsulating the chip, the wire, and the bond finger. There is provided a semiconductor package characterized in that.
상기한 목적을 달성하기 위한 본 발명의 다른 형태에 따르면, 다이패들 및 리드를 구비한 리드프레임 상면에 다이패들 노출을 위한 윈도우와 와이어 본딩을 위한 본드핑거 및 리드와의 전기적 접속을 위한 비어홀이 구비된 회로기판 스트립을 부착하는 단계와, 상기 다이패들 상면에 칩을 부착하는 단계와, 상기 칩의 본딩패드와 회로기판의 본드핑거를 와이어를 이용하여 전기적으로 연결하는 단계와, 상기 칩과 와이어 및 본드핑거를 봉지제로 봉지하여 몰드바디를 형성하는 단계와, 상기 회로기판 스트립 및 리드프레임으로부터 각 유니트가 분리되도록 트리밍하는 단계를 포함하여서 됨을 특징으로 하는 반도체 패키지 제조방법이 제공된다.According to another aspect of the present invention for achieving the above object, a window for the die paddle exposed on the upper surface of the lead frame having the die paddle and the lead and the bond finger for wire bonding and the via hole for the electrical connection with the lead Attaching the provided circuit board strip, attaching the chip to the upper surface of the die paddle, electrically connecting the bonding pad of the chip and the bond finger of the circuit board using a wire, And encapsulating the wire and the bond finger with an encapsulant to form a mold body, and trimming the unit to be separated from the circuit board strip and lead frame.
이하, 본 발명의 실시예를 첨부도면 도 1 내지 도 4를 참조하여 설명하면 다음과 같다.Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings, FIGS. 1 to 4.
도 1은 본 발명의 반도체 패키지를 나타낸 종단면도로서, 칩(1)이 안착되는다이패들(4)과, 상기 다이패들(4) 주위에 배치되는 리드(5)와, 상기 리드(5) 상면에 부착되며 다이패들(4)이 노출되도록 하는 윈도우(10)와 와이어 본딩을 위한 본드핑거(8) 및 리드(5)와의 전기적 접속을 위한 비어홀(9)이 구비된 회로기판(2)과, 상기 칩(1)의 본딩패드와 회로기판(2)의 본드핑거(8)를 전기적으로 연결하는 와이어(6)와, 상기 칩(1)과 와이어(6) 및 본드핑거(8)를 봉지하는 몰드바디(7)를 포함하여 구성된다.1 is a longitudinal cross-sectional view illustrating a semiconductor package of the present invention, in which a die paddle 4 on which a chip 1 is seated, a lead 5 disposed around the die paddle 4, and the lead 5 A circuit board (2) having a window (10) attached to an upper surface and exposing the die paddle (4), a bond finger (8) for wire bonding, and a via hole (9) for electrical connection with the lead (5) ), A wire 6 electrically connecting the bonding pad of the chip 1 and the bond finger 8 of the circuit board 2, the chip 1, the wire 6, and the bond finger 8. It is configured to include a mold body 7 to seal the.
이 때, 회로기판(2)의 비어홀(9) 영역에는 비어홀(9)과 리드(5)가 접합되어 전기적으로 연결되도록 하는 솔더(12)가 도포된다.At this time, a solder 12 is applied to the via hole 9 of the circuit board 2 so that the via hole 9 and the lead 5 are bonded to each other and electrically connected to each other.
한편, 상기 리드(5)와 회로기판(2) 사이 및, 다이패들(4)과 칩(1) 사이에는 어드헤시브가 개재되며, 상기 어드헤시브로서는 접착테이프 또는 에폭시가 사용된다.Meanwhile, an adjuvant is interposed between the lead 5 and the circuit board 2 and between the die paddle 4 and the chip 1, and an adhesive tape or epoxy is used as the adjuvant.
한편, 상기 다이패들(4)은 회로기판(2)에 부착되는 타이바에 의해 지지되며, 몰드바디(7) 외측으로 노출된다.Meanwhile, the die paddle 4 is supported by a tie bar attached to the circuit board 2 and is exposed to the outside of the mold body 7.
이와 같이 구성된 본 발명 패키지의 제조 과정을 도 2a 내지 도 2h를 참조하여 설명하면 다음과 같다.Referring to Figures 2a to 2h manufacturing process of the package of the present invention configured as described above are as follows.
먼저, 도 2a에 도시된 바와 같이, 다이패들(4)이 노출되도록 하는 윈도우(10)와 와이어 본딩을 위한 본드핑거(8) 및 리드(5)와의 전기적 접속을 위한 비어홀(9)이 구비된 회로기판(2)을 준비한다.First, as shown in FIG. 2A, a window 10 through which the die paddle 4 is exposed, a bond finger 8 for wire bonding, and a via hole 9 for electrical connection with the lid 5 are provided. The prepared circuit board 2 is prepared.
이와 더불어, 도 2b에 도시된 바와 같이, 다이패들(4)과 이를 지지하기 위한 타이바 및 상기 다이패들(4) 주위에 배치되는 리드(5)를 구비한 리드프레임(3)을준비한다.In addition, as shown in FIG. 2B, a lead frame 3 having a die paddle 4, a tie bar for supporting the lead, and a lead 5 disposed around the die paddle 4 is prepared. do.
이 때, 리드(5)들에는 리드 록 테이프(13)가 부착되어 있다.At this time, a lead lock tape 13 is attached to the leads 5.
이와 같이 회로기판 스트립(200) 및 리드프레임(3)이 준비된 상태에서, 도 2c 및 도 2d에 나타낸 바와 같이 리드프레임(3) 상부면에 회로기판 스트립(200)을 부착한다.With the circuit board strip 200 and the lead frame 3 prepared in this manner, the circuit board strip 200 is attached to the upper surface of the lead frame 3 as shown in FIGS. 2C and 2D.
그 후, 도 2e에 나타낸 바와 같이, 상기 다이패들(4) 상면에 칩(1)을 어태치하고, 이어 도 2f에서와 같이 칩(1)의 본딩패드와 회로기판(2)의 본드핑거(8)를 골드와이어(6) 등으로 연결하는 와이어 본딩을 실시한다.Thereafter, as shown in FIG. 2E, the chip 1 is attached to the upper surface of the die paddle 4, and then, as shown in FIG. 2F, the bonding pad of the chip 1 and the bond finger of the circuit board 2 are attached. Wire bonding which connects (8) with the gold wire 6 etc. is performed.
그 다음, 도 2g에 나타낸 바와 같이, 칩(1)과 와이어(6)와 본드핑거(8)를 봉지제로써 봉지하여 몰드바디(7)를 형성한다.Then, as shown in Fig. 2G, the chip 1, the wire 6, and the bond finger 8 are sealed with an encapsulant to form a mold body 7.
상기, 몰드바디(7)는 트랜스퍼 몰딩에 의해 수행가능하며, 이 때 상기 다이패들(4) 저면은 몰드바디(7) 외측으로 노출되어 히트싱크 역할을 겸하게 된다.The mold body 7 may be performed by transfer molding, wherein the bottom of the die paddle 4 is exposed to the outside of the mold body 7 to serve as a heat sink.
한편, 몰드바디(7) 형성후에는, 도 2h에 나타낸 바와 같이 트리밍하여 리드를 리드프레임으로부터 분리시킴과 동시에 개별 유니트별로 분리하므로써 반도체 패키지를 완성하게 된다On the other hand, after the mold body 7 is formed, the semiconductor package is completed by trimming and separating the lead from the lead frame as shown in FIG.
상기와 같이 제조된 본 발명의 반도체 패키지는 마더보드(11)등에의 실장시, 도 3에 나타낸 바와 같이 트리밍된 비어홀(9) 영역에 솔더(12)를 도포하여 비어홀(9)과 리드(5)가 전기적으로 접속되도록 한 상태에서 실장하게 된다.In the semiconductor package of the present invention manufactured as described above, the solder 12 is applied to the trimmed via hole 9 region as shown in FIG. 3 when the semiconductor package 11 is mounted on the motherboard 11 or the like. ) Is mounted in an electrically connected state.
이와 같이 제조된 본 발명의 반도체 패키지는 리드프레임(3)을 사용하므로써 구조적으로 강하고, 리드(5)가 기판에 직접 접합되므로 접합 신뢰성이 향상된다.The semiconductor package of the present invention manufactured as described above is structurally strong by using the lead frame 3, and the bonding reliability is improved because the lead 5 is directly bonded to the substrate.
한편, 회로기판 스트립(200)과 리드프레임(3)을 단순 접합 후 와이어 본딩 및 몰딩을 이용하는 간단한 공정에 의해 제조하며, 스트립 상태에서 전공정을 끝낸 후 낱개로 분리하기 때문에 제조시간을 단축시킬 수 있게 된다.Meanwhile, the circuit board strip 200 and the lead frame 3 are manufactured by a simple process using wire bonding and molding after simple bonding, and the manufacturing time can be shortened because the strip is separated into pieces after finishing the entire process in the strip state. Will be.
또한, 본 발명의 패키지는 다이패들(4) 저면이 몰드바디(7) 외측으로 노출되어 히트싱크 역할을 함에 따라, 열방출 성능이 향상된다.In addition, in the package of the present invention, as the bottom of the die paddle 4 is exposed to the outside of the mold body 7 to serve as a heat sink, heat dissipation performance is improved.
한편, 본 발명의 반도체 패키지는 도 4에 도시한 바와 같은 형태로 스택 패키지를 구현할 수 있게 된다.On the other hand, the semiconductor package of the present invention can implement a stack package in the form as shown in FIG.
이상에서와 같이, 본 발명은 기존의 반도체 패키지가 갖는 장점을 최대한 살리면서 단점은 해소한 새로운 타입의 반도체 패키지를 제공하기 위한 것이다.As described above, the present invention is to provide a new type of semiconductor package, while making the most of the advantages of the existing semiconductor package while eliminating its disadvantages.
즉, 본 발명은 회로기판과 리드프레임을 접목시킨 형태의 기판으로써 공정의 단순화를 도모함과 더불어 보드 레벨의 신뢰성을 확보할 수 있는 새로운 구조의 반도체 패키지를 제공할 수 있게 된다.That is, the present invention can provide a semiconductor package having a new structure that can simplify the process and secure board-level reliability as a substrate in which a circuit board and a lead frame are combined.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020000079272AKR20020049944A (en) | 2000-12-20 | 2000-12-20 | semiconductor package and method for fabricating the same |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020000079272AKR20020049944A (en) | 2000-12-20 | 2000-12-20 | semiconductor package and method for fabricating the same |
| Publication Number | Publication Date |
|---|---|
| KR20020049944Atrue KR20020049944A (en) | 2002-06-26 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020000079272AWithdrawnKR20020049944A (en) | 2000-12-20 | 2000-12-20 | semiconductor package and method for fabricating the same |
| Country | Link |
|---|---|
| KR (1) | KR20020049944A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6833609B1 (en) | 1999-11-05 | 2004-12-21 | Amkor Technology, Inc. | Integrated circuit device packages and substrates for making the packages |
| US6847099B1 (en) | 2003-02-05 | 2005-01-25 | Amkor Technology Inc. | Offset etched corner leads for semiconductor package |
| US6927478B2 (en)* | 2001-01-15 | 2005-08-09 | Amkor Technology, Inc. | Reduced size semiconductor package with stacked dies |
| US7192807B1 (en) | 2002-11-08 | 2007-03-20 | Amkor Technology, Inc. | Wafer level package and fabrication method |
| US7361533B1 (en) | 2002-11-08 | 2008-04-22 | Amkor Technology, Inc. | Stacked embedded leadframe |
| US7473584B1 (en) | 2004-10-22 | 2009-01-06 | Amkor Technology, Inc. | Method for fabricating a fan-in leadframe semiconductor package |
| US7560804B1 (en) | 1998-06-24 | 2009-07-14 | Amkor Technology, Inc. | Integrated circuit package and method of making the same |
| US7572681B1 (en) | 2005-12-08 | 2009-08-11 | Amkor Technology, Inc. | Embedded electronic component package |
| US7687899B1 (en) | 2007-08-07 | 2010-03-30 | Amkor Technology, Inc. | Dual laminate package structure with embedded elements |
| US7723852B1 (en) | 2008-01-21 | 2010-05-25 | Amkor Technology, Inc. | Stacked semiconductor package and method of making same |
| US7732899B1 (en) | 2005-12-02 | 2010-06-08 | Amkor Technology, Inc. | Etch singulated semiconductor package |
| US7768135B1 (en) | 2008-04-17 | 2010-08-03 | Amkor Technology, Inc. | Semiconductor package with fast power-up cycle and method of making same |
| US7777351B1 (en) | 2007-10-01 | 2010-08-17 | Amkor Technology, Inc. | Thin stacked interposer package |
| US7808084B1 (en) | 2008-05-06 | 2010-10-05 | Amkor Technology, Inc. | Semiconductor package with half-etched locking features |
| US7829990B1 (en) | 2007-01-18 | 2010-11-09 | Amkor Technology, Inc. | Stackable semiconductor package including laminate interposer |
| US7847392B1 (en) | 2008-09-30 | 2010-12-07 | Amkor Technology, Inc. | Semiconductor device including leadframe with increased I/O |
| US7847386B1 (en) | 2007-11-05 | 2010-12-07 | Amkor Technology, Inc. | Reduced size stacked semiconductor package and method of making the same |
| US7875963B1 (en) | 2008-11-21 | 2011-01-25 | Amkor Technology, Inc. | Semiconductor device including leadframe having power bars and increased I/O |
| US7928542B2 (en) | 2001-03-27 | 2011-04-19 | Amkor Technology, Inc. | Lead frame for semiconductor package |
| US7956453B1 (en) | 2008-01-16 | 2011-06-07 | Amkor Technology, Inc. | Semiconductor package with patterning layer and method of making same |
| US7960818B1 (en) | 2009-03-04 | 2011-06-14 | Amkor Technology, Inc. | Conformal shield on punch QFN semiconductor package |
| US7977774B2 (en) | 2007-07-10 | 2011-07-12 | Amkor Technology, Inc. | Fusion quad flat semiconductor package |
| US7982298B1 (en) | 2008-12-03 | 2011-07-19 | Amkor Technology, Inc. | Package in package semiconductor device |
| US7982297B1 (en) | 2007-03-06 | 2011-07-19 | Amkor Technology, Inc. | Stackable semiconductor package having partially exposed semiconductor die and method of fabricating the same |
| US7989933B1 (en) | 2008-10-06 | 2011-08-02 | Amkor Technology, Inc. | Increased I/O leadframe and semiconductor device including same |
| US8008758B1 (en) | 2008-10-27 | 2011-08-30 | Amkor Technology, Inc. | Semiconductor device with increased I/O leadframe |
| US8026589B1 (en) | 2009-02-23 | 2011-09-27 | Amkor Technology, Inc. | Reduced profile stackable semiconductor package |
| US8058715B1 (en) | 2009-01-09 | 2011-11-15 | Amkor Technology, Inc. | Package in package device for RF transceiver module |
| US8067821B1 (en) | 2008-04-10 | 2011-11-29 | Amkor Technology, Inc. | Flat semiconductor package with half package molding |
| US8072050B1 (en) | 2008-11-18 | 2011-12-06 | Amkor Technology, Inc. | Semiconductor device with increased I/O leadframe including passive device |
| US8089159B1 (en) | 2007-10-03 | 2012-01-03 | Amkor Technology, Inc. | Semiconductor package with increased I/O density and method of making the same |
| US8089145B1 (en) | 2008-11-17 | 2012-01-03 | Amkor Technology, Inc. | Semiconductor device including increased capacity leadframe |
| US8125064B1 (en) | 2008-07-28 | 2012-02-28 | Amkor Technology, Inc. | Increased I/O semiconductor package and method of making same |
| US8184453B1 (en) | 2008-07-31 | 2012-05-22 | Amkor Technology, Inc. | Increased capacity semiconductor package |
| US8188584B1 (en) | 2002-11-08 | 2012-05-29 | Amkor Technology, Inc. | Direct-write wafer level chip scale package |
| US8294276B1 (en) | 2010-05-27 | 2012-10-23 | Amkor Technology, Inc. | Semiconductor device and fabricating method thereof |
| US8324511B1 (en) | 2010-04-06 | 2012-12-04 | Amkor Technology, Inc. | Through via nub reveal method and structure |
| US8390130B1 (en) | 2011-01-06 | 2013-03-05 | Amkor Technology, Inc. | Through via recessed reveal structure and method |
| US8440554B1 (en) | 2010-08-02 | 2013-05-14 | Amkor Technology, Inc. | Through via connected backside embedded circuit features structure and method |
| US8441110B1 (en) | 2006-06-21 | 2013-05-14 | Amkor Technology, Inc. | Side leaded, bottom exposed pad and bottom exposed lead fusion quad flat semiconductor package |
| US8487445B1 (en) | 2010-10-05 | 2013-07-16 | Amkor Technology, Inc. | Semiconductor device having through electrodes protruding from dielectric layer |
| US8552548B1 (en) | 2011-11-29 | 2013-10-08 | Amkor Technology, Inc. | Conductive pad on protruding through electrode semiconductor device |
| US8575742B1 (en) | 2009-04-06 | 2013-11-05 | Amkor Technology, Inc. | Semiconductor device with increased I/O leadframe including power bars |
| US8648450B1 (en) | 2011-01-27 | 2014-02-11 | Amkor Technology, Inc. | Semiconductor device including leadframe with a combination of leads and lands |
| US8674485B1 (en) | 2010-12-08 | 2014-03-18 | Amkor Technology, Inc. | Semiconductor device including leadframe with downsets |
| US8680656B1 (en) | 2009-01-05 | 2014-03-25 | Amkor Technology, Inc. | Leadframe structure for concentrated photovoltaic receiver package |
| US8791501B1 (en) | 2010-12-03 | 2014-07-29 | Amkor Technology, Inc. | Integrated passive device structure and method |
| US8796561B1 (en) | 2009-10-05 | 2014-08-05 | Amkor Technology, Inc. | Fan out build up substrate stackable package and method |
| US8853836B1 (en) | 1998-06-24 | 2014-10-07 | Amkor Technology, Inc. | Integrated circuit package and method of making the same |
| US8866278B1 (en) | 2011-10-10 | 2014-10-21 | Amkor Technology, Inc. | Semiconductor device with increased I/O configuration |
| US8937381B1 (en) | 2009-12-03 | 2015-01-20 | Amkor Technology, Inc. | Thin stackable package and method |
| US9048298B1 (en) | 2012-03-29 | 2015-06-02 | Amkor Technology, Inc. | Backside warpage control structure and fabrication method |
| US9129943B1 (en) | 2012-03-29 | 2015-09-08 | Amkor Technology, Inc. | Embedded component package and fabrication method |
| US9184118B2 (en) | 2013-05-02 | 2015-11-10 | Amkor Technology Inc. | Micro lead frame structure having reinforcing portions and method |
| US9184148B2 (en) | 2013-10-24 | 2015-11-10 | Amkor Technology, Inc. | Semiconductor package and method therefor |
| US9631481B1 (en) | 2011-01-27 | 2017-04-25 | Amkor Technology, Inc. | Semiconductor device including leadframe with a combination of leads and lands and method |
| US9673122B2 (en) | 2014-05-02 | 2017-06-06 | Amkor Technology, Inc. | Micro lead frame structure having reinforcing portions and method |
| US9691734B1 (en) | 2009-12-07 | 2017-06-27 | Amkor Technology, Inc. | Method of forming a plurality of electronic component packages |
| US9704725B1 (en) | 2012-03-06 | 2017-07-11 | Amkor Technology, Inc. | Semiconductor device with leadframe configured to facilitate reduced burr formation |
| US10811341B2 (en) | 2009-01-05 | 2020-10-20 | Amkor Technology Singapore Holding Pte Ltd. | Semiconductor device with through-mold via |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8853836B1 (en) | 1998-06-24 | 2014-10-07 | Amkor Technology, Inc. | Integrated circuit package and method of making the same |
| US7560804B1 (en) | 1998-06-24 | 2009-07-14 | Amkor Technology, Inc. | Integrated circuit package and method of making the same |
| US9224676B1 (en) | 1998-06-24 | 2015-12-29 | Amkor Technology, Inc. | Integrated circuit package and method of making the same |
| US8963301B1 (en) | 1998-06-24 | 2015-02-24 | Amkor Technology, Inc. | Integrated circuit package and method of making the same |
| US6833609B1 (en) | 1999-11-05 | 2004-12-21 | Amkor Technology, Inc. | Integrated circuit device packages and substrates for making the packages |
| US6927478B2 (en)* | 2001-01-15 | 2005-08-09 | Amkor Technology, Inc. | Reduced size semiconductor package with stacked dies |
| US7928542B2 (en) | 2001-03-27 | 2011-04-19 | Amkor Technology, Inc. | Lead frame for semiconductor package |
| US8102037B2 (en) | 2001-03-27 | 2012-01-24 | Amkor Technology, Inc. | Leadframe for semiconductor package |
| US8691632B1 (en) | 2002-11-08 | 2014-04-08 | Amkor Technology, Inc. | Wafer level package and fabrication method |
| US7361533B1 (en) | 2002-11-08 | 2008-04-22 | Amkor Technology, Inc. | Stacked embedded leadframe |
| US8188584B1 (en) | 2002-11-08 | 2012-05-29 | Amkor Technology, Inc. | Direct-write wafer level chip scale package |
| US7692286B1 (en) | 2002-11-08 | 2010-04-06 | Amkor Technology, Inc. | Two-sided fan-out wafer escape package |
| US9871015B1 (en) | 2002-11-08 | 2018-01-16 | Amkor Technology, Inc. | Wafer level package and fabrication method |
| US8501543B1 (en) | 2002-11-08 | 2013-08-06 | Amkor Technology, Inc. | Direct-write wafer level chip scale package |
| US7420272B1 (en) | 2002-11-08 | 2008-09-02 | Amkor Technology, Inc. | Two-sided wafer escape package |
| US8119455B1 (en) | 2002-11-08 | 2012-02-21 | Amkor Technology, Inc. | Wafer level package fabrication method |
| US9406645B1 (en) | 2002-11-08 | 2016-08-02 | Amkor Technology, Inc. | Wafer level package and fabrication method |
| US8298866B1 (en) | 2002-11-08 | 2012-10-30 | Amkor Technology, Inc. | Wafer level package and fabrication method |
| US9054117B1 (en) | 2002-11-08 | 2015-06-09 | Amkor Technology, Inc. | Wafer level package and fabrication method |
| US8952522B1 (en) | 2002-11-08 | 2015-02-10 | Amkor Technology, Inc. | Wafer level package and fabrication method |
| US7247523B1 (en) | 2002-11-08 | 2007-07-24 | Amkor Technology, Inc. | Two-sided wafer escape package |
| US8710649B1 (en) | 2002-11-08 | 2014-04-29 | Amkor Technology, Inc. | Wafer level package and fabrication method |
| US10665567B1 (en) | 2002-11-08 | 2020-05-26 | Amkor Technology, Inc. | Wafer level package and fabrication method |
| US7192807B1 (en) | 2002-11-08 | 2007-03-20 | Amkor Technology, Inc. | Wafer level package and fabrication method |
| US7932595B1 (en) | 2002-11-08 | 2011-04-26 | Amkor Technology, Inc. | Electronic component package comprising fan-out traces |
| US6847099B1 (en) | 2003-02-05 | 2005-01-25 | Amkor Technology Inc. | Offset etched corner leads for semiconductor package |
| US7473584B1 (en) | 2004-10-22 | 2009-01-06 | Amkor Technology, Inc. | Method for fabricating a fan-in leadframe semiconductor package |
| US7732899B1 (en) | 2005-12-02 | 2010-06-08 | Amkor Technology, Inc. | Etch singulated semiconductor package |
| US7572681B1 (en) | 2005-12-08 | 2009-08-11 | Amkor Technology, Inc. | Embedded electronic component package |
| US7977163B1 (en) | 2005-12-08 | 2011-07-12 | Amkor Technology, Inc. | Embedded electronic component package fabrication method |
| US8441110B1 (en) | 2006-06-21 | 2013-05-14 | Amkor Technology, Inc. | Side leaded, bottom exposed pad and bottom exposed lead fusion quad flat semiconductor package |
| US7829990B1 (en) | 2007-01-18 | 2010-11-09 | Amkor Technology, Inc. | Stackable semiconductor package including laminate interposer |
| US7982297B1 (en) | 2007-03-06 | 2011-07-19 | Amkor Technology, Inc. | Stackable semiconductor package having partially exposed semiconductor die and method of fabricating the same |
| US7977774B2 (en) | 2007-07-10 | 2011-07-12 | Amkor Technology, Inc. | Fusion quad flat semiconductor package |
| US8304866B1 (en) | 2007-07-10 | 2012-11-06 | Amkor Technology, Inc. | Fusion quad flat semiconductor package |
| US7687899B1 (en) | 2007-08-07 | 2010-03-30 | Amkor Technology, Inc. | Dual laminate package structure with embedded elements |
| US8283767B1 (en) | 2007-08-07 | 2012-10-09 | Amkor Technology, Inc. | Dual laminate package structure with embedded elements |
| US7872343B1 (en) | 2007-08-07 | 2011-01-18 | Amkor Technology, Inc. | Dual laminate package structure with embedded elements |
| US8319338B1 (en) | 2007-10-01 | 2012-11-27 | Amkor Technology, Inc. | Thin stacked interposer package |
| US7777351B1 (en) | 2007-10-01 | 2010-08-17 | Amkor Technology, Inc. | Thin stacked interposer package |
| US8089159B1 (en) | 2007-10-03 | 2012-01-03 | Amkor Technology, Inc. | Semiconductor package with increased I/O density and method of making the same |
| US8227921B1 (en) | 2007-10-03 | 2012-07-24 | Amkor Technology, Inc. | Semiconductor package with increased I/O density and method of making same |
| US7847386B1 (en) | 2007-11-05 | 2010-12-07 | Amkor Technology, Inc. | Reduced size stacked semiconductor package and method of making the same |
| US8729710B1 (en) | 2008-01-16 | 2014-05-20 | Amkor Technology, Inc. | Semiconductor package with patterning layer and method of making same |
| US7956453B1 (en) | 2008-01-16 | 2011-06-07 | Amkor Technology, Inc. | Semiconductor package with patterning layer and method of making same |
| US7906855B1 (en) | 2008-01-21 | 2011-03-15 | Amkor Technology, Inc. | Stacked semiconductor package and method of making same |
| US7723852B1 (en) | 2008-01-21 | 2010-05-25 | Amkor Technology, Inc. | Stacked semiconductor package and method of making same |
| US8067821B1 (en) | 2008-04-10 | 2011-11-29 | Amkor Technology, Inc. | Flat semiconductor package with half package molding |
| US8084868B1 (en) | 2008-04-17 | 2011-12-27 | Amkor Technology, Inc. | Semiconductor package with fast power-up cycle and method of making same |
| US7768135B1 (en) | 2008-04-17 | 2010-08-03 | Amkor Technology, Inc. | Semiconductor package with fast power-up cycle and method of making same |
| US7808084B1 (en) | 2008-05-06 | 2010-10-05 | Amkor Technology, Inc. | Semiconductor package with half-etched locking features |
| US8125064B1 (en) | 2008-07-28 | 2012-02-28 | Amkor Technology, Inc. | Increased I/O semiconductor package and method of making same |
| US8184453B1 (en) | 2008-07-31 | 2012-05-22 | Amkor Technology, Inc. | Increased capacity semiconductor package |
| US8299602B1 (en) | 2008-09-30 | 2012-10-30 | Amkor Technology, Inc. | Semiconductor device including leadframe with increased I/O |
| US7847392B1 (en) | 2008-09-30 | 2010-12-07 | Amkor Technology, Inc. | Semiconductor device including leadframe with increased I/O |
| US8432023B1 (en) | 2008-10-06 | 2013-04-30 | Amkor Technology, Inc. | Increased I/O leadframe and semiconductor device including same |
| US7989933B1 (en) | 2008-10-06 | 2011-08-02 | Amkor Technology, Inc. | Increased I/O leadframe and semiconductor device including same |
| US8823152B1 (en) | 2008-10-27 | 2014-09-02 | Amkor Technology, Inc. | Semiconductor device with increased I/O leadframe |
| US8008758B1 (en) | 2008-10-27 | 2011-08-30 | Amkor Technology, Inc. | Semiconductor device with increased I/O leadframe |
| US8089145B1 (en) | 2008-11-17 | 2012-01-03 | Amkor Technology, Inc. | Semiconductor device including increased capacity leadframe |
| US8072050B1 (en) | 2008-11-18 | 2011-12-06 | Amkor Technology, Inc. | Semiconductor device with increased I/O leadframe including passive device |
| US7875963B1 (en) | 2008-11-21 | 2011-01-25 | Amkor Technology, Inc. | Semiconductor device including leadframe having power bars and increased I/O |
| US8188579B1 (en) | 2008-11-21 | 2012-05-29 | Amkor Technology, Inc. | Semiconductor device including leadframe having power bars and increased I/O |
| US7982298B1 (en) | 2008-12-03 | 2011-07-19 | Amkor Technology, Inc. | Package in package semiconductor device |
| US10811341B2 (en) | 2009-01-05 | 2020-10-20 | Amkor Technology Singapore Holding Pte Ltd. | Semiconductor device with through-mold via |
| US8680656B1 (en) | 2009-01-05 | 2014-03-25 | Amkor Technology, Inc. | Leadframe structure for concentrated photovoltaic receiver package |
| US11869829B2 (en) | 2009-01-05 | 2024-01-09 | Amkor Technology Singapore Holding Pte. Ltd. | Semiconductor device with through-mold via |
| US8558365B1 (en) | 2009-01-09 | 2013-10-15 | Amkor Technology, Inc. | Package in package device for RF transceiver module |
| US8058715B1 (en) | 2009-01-09 | 2011-11-15 | Amkor Technology, Inc. | Package in package device for RF transceiver module |
| US8026589B1 (en) | 2009-02-23 | 2011-09-27 | Amkor Technology, Inc. | Reduced profile stackable semiconductor package |
| US8729682B1 (en) | 2009-03-04 | 2014-05-20 | Amkor Technology, Inc. | Conformal shield on punch QFN semiconductor package |
| US7960818B1 (en) | 2009-03-04 | 2011-06-14 | Amkor Technology, Inc. | Conformal shield on punch QFN semiconductor package |
| US8575742B1 (en) | 2009-04-06 | 2013-11-05 | Amkor Technology, Inc. | Semiconductor device with increased I/O leadframe including power bars |
| US8796561B1 (en) | 2009-10-05 | 2014-08-05 | Amkor Technology, Inc. | Fan out build up substrate stackable package and method |
| US8937381B1 (en) | 2009-12-03 | 2015-01-20 | Amkor Technology, Inc. | Thin stackable package and method |
| US10546833B2 (en) | 2009-12-07 | 2020-01-28 | Amkor Technology, Inc. | Method of forming a plurality of electronic component packages |
| US9691734B1 (en) | 2009-12-07 | 2017-06-27 | Amkor Technology, Inc. | Method of forming a plurality of electronic component packages |
| US8324511B1 (en) | 2010-04-06 | 2012-12-04 | Amkor Technology, Inc. | Through via nub reveal method and structure |
| US9324614B1 (en) | 2010-04-06 | 2016-04-26 | Amkor Technology, Inc. | Through via nub reveal method and structure |
| US8294276B1 (en) | 2010-05-27 | 2012-10-23 | Amkor Technology, Inc. | Semiconductor device and fabricating method thereof |
| US8440554B1 (en) | 2010-08-02 | 2013-05-14 | Amkor Technology, Inc. | Through via connected backside embedded circuit features structure and method |
| US9159672B1 (en) | 2010-08-02 | 2015-10-13 | Amkor Technology, Inc. | Through via connected backside embedded circuit features structure and method |
| US8900995B1 (en) | 2010-10-05 | 2014-12-02 | Amkor Technology, Inc. | Semiconductor device and manufacturing method thereof |
| US8487445B1 (en) | 2010-10-05 | 2013-07-16 | Amkor Technology, Inc. | Semiconductor device having through electrodes protruding from dielectric layer |
| US8791501B1 (en) | 2010-12-03 | 2014-07-29 | Amkor Technology, Inc. | Integrated passive device structure and method |
| US8674485B1 (en) | 2010-12-08 | 2014-03-18 | Amkor Technology, Inc. | Semiconductor device including leadframe with downsets |
| US9082833B1 (en) | 2011-01-06 | 2015-07-14 | Amkor Technology, Inc. | Through via recessed reveal structure and method |
| US8390130B1 (en) | 2011-01-06 | 2013-03-05 | Amkor Technology, Inc. | Through via recessed reveal structure and method |
| US9978695B1 (en) | 2011-01-27 | 2018-05-22 | Amkor Technology, Inc. | Semiconductor device including leadframe with a combination of leads and lands and method |
| US9275939B1 (en) | 2011-01-27 | 2016-03-01 | Amkor Technology, Inc. | Semiconductor device including leadframe with a combination of leads and lands and method |
| US9631481B1 (en) | 2011-01-27 | 2017-04-25 | Amkor Technology, Inc. | Semiconductor device including leadframe with a combination of leads and lands and method |
| US9508631B1 (en) | 2011-01-27 | 2016-11-29 | Amkor Technology, Inc. | Semiconductor device including leadframe with a combination of leads and lands and method |
| US8648450B1 (en) | 2011-01-27 | 2014-02-11 | Amkor Technology, Inc. | Semiconductor device including leadframe with a combination of leads and lands |
| US8866278B1 (en) | 2011-10-10 | 2014-10-21 | Amkor Technology, Inc. | Semiconductor device with increased I/O configuration |
| US9947623B1 (en) | 2011-11-29 | 2018-04-17 | Amkor Technology, Inc. | Semiconductor device comprising a conductive pad on a protruding-through electrode |
| US8981572B1 (en) | 2011-11-29 | 2015-03-17 | Amkor Technology, Inc. | Conductive pad on protruding through electrode semiconductor device |
| US8552548B1 (en) | 2011-11-29 | 2013-10-08 | Amkor Technology, Inc. | Conductive pad on protruding through electrode semiconductor device |
| US9431323B1 (en) | 2011-11-29 | 2016-08-30 | Amkor Technology, Inc. | Conductive pad on protruding through electrode |
| US11043458B2 (en) | 2011-11-29 | 2021-06-22 | Amkor Technology Singapore Holding Pte. Ltd. | Method of manufacturing an electronic device comprising a conductive pad on a protruding-through electrode |
| US10410967B1 (en) | 2011-11-29 | 2019-09-10 | Amkor Technology, Inc. | Electronic device comprising a conductive pad on a protruding-through electrode |
| US10090228B1 (en) | 2012-03-06 | 2018-10-02 | Amkor Technology, Inc. | Semiconductor device with leadframe configured to facilitate reduced burr formation |
| US9704725B1 (en) | 2012-03-06 | 2017-07-11 | Amkor Technology, Inc. | Semiconductor device with leadframe configured to facilitate reduced burr formation |
| US10014240B1 (en) | 2012-03-29 | 2018-07-03 | Amkor Technology, Inc. | Embedded component package and fabrication method |
| US9129943B1 (en) | 2012-03-29 | 2015-09-08 | Amkor Technology, Inc. | Embedded component package and fabrication method |
| US9048298B1 (en) | 2012-03-29 | 2015-06-02 | Amkor Technology, Inc. | Backside warpage control structure and fabrication method |
| US9184118B2 (en) | 2013-05-02 | 2015-11-10 | Amkor Technology Inc. | Micro lead frame structure having reinforcing portions and method |
| US9184148B2 (en) | 2013-10-24 | 2015-11-10 | Amkor Technology, Inc. | Semiconductor package and method therefor |
| US9543235B2 (en) | 2013-10-24 | 2017-01-10 | Amkor Technology, Inc. | Semiconductor package and method therefor |
| US9673122B2 (en) | 2014-05-02 | 2017-06-06 | Amkor Technology, Inc. | Micro lead frame structure having reinforcing portions and method |
| Publication | Publication Date | Title |
|---|---|---|
| KR20020049944A (en) | semiconductor package and method for fabricating the same | |
| US6818980B1 (en) | Stacked semiconductor package and method of manufacturing the same | |
| KR100344927B1 (en) | Stack package and method for manufacturing the same | |
| KR100304959B1 (en) | Chip stacked semiconductor package and manufacturing method thereof | |
| WO2002071481A1 (en) | Enhanced leadless chip carrier | |
| US10290593B2 (en) | Method of assembling QFP type semiconductor device | |
| US20130200507A1 (en) | Two-sided die in a four-sided leadframe based package | |
| US6576988B2 (en) | Semiconductor package | |
| US6339253B1 (en) | Semiconductor package | |
| US8349655B2 (en) | Method of fabricating a two-sided die in a four-sided leadframe based package | |
| KR101028573B1 (en) | Chip scale package and its manufacturing method | |
| KR100462373B1 (en) | Chip scale package and method for fabricating the same | |
| KR20020049823A (en) | semiconductor package and method for fabricating the same | |
| KR20020049821A (en) | chip scale semiconductor package in wafer level and method for fabricating the same | |
| KR100437821B1 (en) | semiconductor package and metod for fabricating the same | |
| KR100356808B1 (en) | chip scale semiconductor package | |
| KR20010066268A (en) | stack-type semiconductor package and method for fabricating the same | |
| KR100668817B1 (en) | Manufacturing method of semiconductor package | |
| KR20020065735A (en) | Semiconductor package and method for fabricating the same | |
| KR20020049822A (en) | chip scale semiconductor package in wafer level and method for fabricating the same | |
| KR20020065729A (en) | Semicoductor package | |
| KR20020049940A (en) | chip scale semiconductor package in wafer level and method for fabricating the same | |
| KR20020065733A (en) | Semiconductor package and method for the same | |
| KR100308116B1 (en) | chip scale package and method for fabricating the same | |
| KR20020046775A (en) | chip scale semiconductor package and method for fabricating the same |
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application | Patent event code:PA01091R01D Comment text:Patent Application Patent event date:20001220 | |
| PG1501 | Laying open of application | ||
| PC1203 | Withdrawal of no request for examination | ||
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |