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KR102467406B9 - Plasma processing device and method using the same - Google Patents

Plasma processing device and method using the same

Info

Publication number
KR102467406B9
KR102467406B9KR1020220081313AKR20220081313AKR102467406B9KR 102467406 B9KR102467406 B9KR 102467406B9KR 1020220081313 AKR1020220081313 AKR 1020220081313AKR 20220081313 AKR20220081313 AKR 20220081313AKR 102467406 B9KR102467406 B9KR 102467406B9
Authority
KR
South Korea
Prior art keywords
same
processing device
plasma processing
plasma
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020220081313A
Other languages
Korean (ko)
Other versions
KR102467406B1 (en
Inventor
임유봉
Original Assignee
주식회사 플라즈맵
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020210186633Aexternal-prioritypatent/KR20230041559A/en
Application filed by 주식회사 플라즈맵filedCritical주식회사 플라즈맵
Application grantedgrantedCritical
Publication of KR102467406B1publicationCriticalpatent/KR102467406B1/en
Publication of KR102467406B9publicationCriticalpatent/KR102467406B9/en
Activelegal-statusCriticalCurrent
Anticipated expirationlegal-statusCritical

Links

KR1020220081313A2021-09-172022-07-01Plasma processing apparatus and method using the sameActiveKR102467406B1 (en)

Applications Claiming Priority (5)

Application NumberPriority DateFiling DateTitle
KR10202101249522021-09-17
KR10202101249442021-09-17
KR10202101249522021-09-17
KR10202101249442021-09-17
KR1020210186633AKR20230041559A (en)2021-09-172021-12-23Plasma processing apparatus and method using the same

Related Parent Applications (1)

Application NumberTitlePriority DateFiling Date
KR1020210186633ADivisionKR20230041559A (en)2021-02-192021-12-23Plasma processing apparatus and method using the same

Publications (2)

Publication NumberPublication Date
KR102467406B1 KR102467406B1 (en)2022-11-16
KR102467406B9true KR102467406B9 (en)2025-02-12

Family

ID=83784417

Family Applications (3)

Application NumberTitlePriority DateFiling Date
KR1020220081313AActiveKR102467406B1 (en)2021-09-172022-07-01Plasma processing apparatus and method using the same
KR1020220090217AActiveKR102458845B1 (en)2021-09-172022-07-21Plasma processing apparatus and method using the same
KR1020220103794AActiveKR102476398B1 (en)2021-09-172022-08-19Plasma processing apparatus and method using the same

Family Applications After (2)

Application NumberTitlePriority DateFiling Date
KR1020220090217AActiveKR102458845B1 (en)2021-09-172022-07-21Plasma processing apparatus and method using the same
KR1020220103794AActiveKR102476398B1 (en)2021-09-172022-08-19Plasma processing apparatus and method using the same

Country Status (1)

CountryLink
KR (3)KR102467406B1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
KR20240116224A (en)*2023-01-202024-07-29주식회사 플라즈맵Plasma processing apparatus including jig
WO2024191109A1 (en)*2023-03-102024-09-19주식회사 플라메디Apparatus for treating atmospheric plasma surface, and control method thereof

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JP2000048999A (en)*1998-07-312000-02-18Kem KkInspection for high-frequency power source and pressure guage in plasma processing
JP2002025443A (en)*2000-07-032002-01-25Aitekku:KkManufacturing method and apparatus of plasma display panel
KR100467813B1 (en)*2002-05-022005-01-24동부아남반도체 주식회사Apparatus of warming for unstriping of photoresist and method of manufacturing for semiconductor device using the same
JP4238015B2 (en)*2002-11-192009-03-11大日本印刷株式会社 Manufacturing method for plastic containers
JP2010050188A (en)*2008-08-202010-03-04Panasonic CorpPlasma doping device
JP2011077321A (en)*2009-09-302011-04-14Tokyo Electron LtdSelective plasma nitriding method, and plasma nitriding device
KR101252767B1 (en)*2010-07-082013-04-11(주)에스이피A Method of surface treatment for dental implant
EP4019055A1 (en)*2015-05-112022-06-29Nova Plasma LtdApparatus and method for handling an implant
KR101930617B1 (en)*2016-08-022018-12-18주식회사 피글Implant processing apparatus
KR102762801B1 (en)*2020-03-042025-02-07주식회사 플라즈맵Plasma processing apparatus And Method using the same
KR102267375B1 (en)*2020-05-072021-06-22주식회사 플라즈맵Storage of implant
KR102245290B1 (en)*2020-07-102021-04-27주식회사 플라즈맵Plasma processing apparatus And Method using the same

Also Published As

Publication numberPublication date
KR102458845B1 (en)2022-10-26
KR102458845B9 (en)2024-10-21
KR102467406B1 (en)2022-11-16
KR102476398B1 (en)2022-12-12

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