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JPS6364640A - Actuator - Google Patents

Actuator

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Publication number
JPS6364640A
JPS6364640AJP20885586AJP20885586AJPS6364640AJP S6364640 AJPS6364640 AJP S6364640AJP 20885586 AJP20885586 AJP 20885586AJP 20885586 AJP20885586 AJP 20885586AJP S6364640 AJPS6364640 AJP S6364640A
Authority
JP
Japan
Prior art keywords
bimorph
electrode
head
electrodes
amplitude
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20885586A
Other languages
Japanese (ja)
Inventor
Akihiko Hashimoto
明彦 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co LtdfiledCriticalOlympus Optical Co Ltd
Priority to JP20885586ApriorityCriticalpatent/JPS6364640A/en
Publication of JPS6364640ApublicationCriticalpatent/JPS6364640A/en
Pendinglegal-statusCriticalCurrent

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Abstract

PURPOSE:To obtain the minute amount of displacement together with the large amount of displacement by dividing the outer electrode of a bimorph that changes a head, and displacing a driven member selecting the electrode. CONSTITUTION:Bimorphs 2, 4 are fixed to a fixing member 5 through a joint member 3. In the bimorph 2, piezo-electric elements 2a, 2b are stuck through a central electrode 6, and one outside electrode 8 is divided in a longitudinal direction. In a case where a head 1 is driven in the direction of tracking at large amplitude, current is applied to long and short electrodes 8a, 8b, and in case of small amplitude, the short electrode 8a is selected. At the time of driving in the direction of focusing, long and short electrodes 9a, 9b are selected similarly. Accordingly, the large amplitude and small amplitude can be selected optionally and easily in both tracking direction and focusing direction.

Description

Translated fromJapanese

【発明の詳細な説明】〔産業上の利用分野〕この発明は、例えば光学式記録ディスクや光カード等の
情報記録媒体に対して情報を記録および/または再生す
るためのヘッドを所定の方向に変位させるアクチュエー
タ、特にハ′イモルフを用いてヘッドを変位させるよう
にしたアクチュエータに関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention is directed to a head for recording and/or reproducing information on an information recording medium such as an optical recording disk or an optical card in a predetermined direction. The present invention relates to an actuator for displacing a head, particularly an actuator for displacing a head using a high morph.

〔従来の技術〕[Conventional technology]

バイモルフを用いてヘッドを所定の方向に変位させるよ
うにしたアクチュエータは、例えばオーディオあるいは
ビデオディスクの光ピツクアップに装着したものが従来
提案されている。
An actuator that uses a bimorph to displace a head in a predetermined direction has been proposed, for example, to be attached to an optical pickup for an audio or video disc.

[発明が解決しようとする開題点〕しかしながら、従来提案されているバイモルフを用いた
アクチュエータにあっては、バイモルフの電極を圧電板
の長さ方向の全域に亘って形成しているため、大きな振
幅を得るために長さを長くすると、微小な変位を迅速に
行うことができないという問題がある。
[Problem to be Solved by the Invention] However, in actuators using bimorphs that have been proposed in the past, the bimorph electrodes are formed over the entire length of the piezoelectric plate, so large amplitude If the length is increased in order to obtain , there is a problem that minute displacement cannot be performed quickly.

すなわち、バイモルフの振幅は共振周波数と関係があり
、共振周波数fは長さを!、厚み、密度、ヤング率、共
振次数をそれぞれ一定とすると、となる。したがって、
振幅を大きくとるためにlを長くすると、周波数が低く
なる。
In other words, the amplitude of the bimorph is related to the resonant frequency, and the resonant frequency f is the length! , assuming that the thickness, density, Young's modulus, and resonance order are all constant. therefore,
If l is lengthened to increase the amplitude, the frequency will decrease.

第10図AおよびBはその様子を示すものである。FIGS. 10A and 10B show this situation.

例えば、第10図Aに示すように二500 μmの振幅
が得られるようなlとすると、微小な変位に対してもそ
の応答に9rn SeCかかるが、第10図Bに示すよ
うに±10μmの振幅が得られるようなlとすると、そ
のβは第10図Aの場合の1750程度でよく、応答速
度も数十μsecとなる。
For example, if l is such that an amplitude of 2,500 μm is obtained as shown in Figure 10A, it will take 9rn SeC to respond even to a minute displacement, but as shown in Figure 10B, it will take 9rn SeC to respond to an amplitude of ±10 μm. If l is set such that the amplitude can be obtained, β may be about 1750 as in the case of FIG. 10A, and the response speed will be several tens of μsec.

この発明は、このような従来の問題点に着目してなされ
たもので、大きな変位量が得られると同時に、微小な変
位量を迅速に得ることができるよう適切に構成したアク
チュエータを提供することを目的とする。
The present invention has been made in view of these conventional problems, and it is an object of the present invention to provide an actuator suitably configured so that a large amount of displacement can be obtained and at the same time, a minute amount of displacement can be quickly obtained. With the goal.

〔問題点を解決するための手段および作用〕上記目的を
達成するため、この発明では被駆動部材をバイモルフに
より所定の方向に変位させるようにしたアクチュエータ
において、前記バイモルフの少なくとも一方の外側電極
を分割して設け、これら電極を選択して前記被駆動部材
を変位させるよう構成する。
[Means and operations for solving the problem] In order to achieve the above object, the present invention provides an actuator in which a driven member is displaced in a predetermined direction by a bimorph, in which at least one outer electrode of the bimorph is divided. The driven member is configured to be disposed by selecting one of these electrodes to displace the driven member.

〔実施例〕〔Example〕

第1図はこの発明の第1実施例を示す斜視図である。こ
の実施例は光カードに記録されたデータを読取るヘッド
1を、光カード平面に対して垂直なフォーカス方向と、
このフォーカス方向と直交し、かつ光カードのトランク
方向と直交するトラッキング方向とに駆動するものであ
る。ヘッド1はトラッキング方向に変化可能にバイモル
フ2を介して中継部材3に装着し、この中継部材3をフ
ォーカス方向に変位可能にバイモルフ4を介して固定部
材5に装着して、ヘッド1を固定部材5に対してトラッ
キング方向およびフォーカス方向に変位可能に支持する
FIG. 1 is a perspective view showing a first embodiment of the invention. In this embodiment, a head 1 for reading data recorded on an optical card is set in a focus direction perpendicular to the plane of the optical card.
It is driven in a tracking direction that is perpendicular to this focusing direction and perpendicular to the trunk direction of the optical card. The head 1 is attached to a relay member 3 via a bimorph 2 so as to be movable in the tracking direction, and the relay member 3 is attached to a fixing member 5 via a bimorph 4 so as to be movable in the focusing direction. 5 so as to be movable in the tracking direction and the focus direction.

バイモルフ2は、第2図に拡大した側面口を示すように
、2枚の圧電子2a、 2bを貼り合わせて構成するが
、この実施例では中央電極6および一方の外側電極7を
圧電子の長さ方向のほぼ全域に亘って形成し、他方の外
側電極は長さ方向に分割して長さの短い短電極8aと長
さの長い長電極8bとをもって構成する。このように構
成したバイモルフ2をその短電極8aがヘッド1側とな
るようにその両端部をヘッド1と中継部材3とにそれぞ
れ装着する。
The bimorph 2 is constructed by bonding two piezoelectric plates 2a and 2b together, as shown in the enlarged side opening in FIG. The electrode is formed over almost the entire lengthwise direction, and the other outer electrode is divided in the lengthwise direction to include a short electrode 8a having a short length and a long electrode 8b having a long length. The bimorph 2 thus constructed is attached to the head 1 and the relay member 3 at both ends thereof, with the short electrode 8a facing the head 1 side.

バイモルフ4もへ゛イモルフ2と同様に構成し、一方の
表面の短電極9aが中継部材3側に、長電極9bが固定
部材5側になように装着する。
The bimorph 4 is also constructed in the same manner as the bimorph 2, and is attached so that the short electrode 9a on one surface is on the relay member 3 side and the long electrode 9b is on the fixed member 5 side.

このようにして、ヘッド1をバイモルフ2によってトラ
ッキング方向に大きな振幅で駆動する場合は、短電極8
aと長電極8bとの双方を選択し、微小な振幅で駆動す
る場合は短電極8aを選択する。
In this way, when the head 1 is driven by the bimorph 2 with a large amplitude in the tracking direction, the short electrode 8
When driving with minute amplitude, the short electrode 8a is selected.

同様に、ヘッド1をバイモルフ4によってフォーカス方
向に大きな振幅で駆動する場合は、短電極9aと長電極
9bとの双方を選択し、微小な振幅で駆動する場合は短
電極9aを選択する。
Similarly, when the head 1 is driven by the bimorph 4 in the focus direction with a large amplitude, both the short electrode 9a and the long electrode 9b are selected, and when the head 1 is driven with a small amplitude, the short electrode 9a is selected.

このようにすれば、トラッキング方向およびフォーカス
方向において、ヘッドlを大きな振幅で駆動できると共
に、小さな振幅で迅速に駆動することができる。
In this way, the head l can be driven with a large amplitude in the tracking direction and the focusing direction, and can be driven quickly with a small amplitude.

第3図はヘッド1の光学系の構成を示すものである。こ
のヘッド1は発光ダイオード11、照明レンズ12、対
物レンズ13およびフォトディテクタ14を具え、発光
ダイオード11からの光を照明レンズ12により光カー
ド15上に照射し、その光カード15での反射光を対物
レンズ13を経てフォトディテクタ14に入射させて、
フォーカスエラー信号およびトラッキングエラー信号を
得ると共にデータの読取りを行うようになっている。し
たがって、検出したフォーカスエラー信号およびトラッ
キングエラー信号の大小に応じて対応するバイモルフ4
および2を、それぞれの電極9a、 9b; 8a、 
8bを上述したように選択して駆動することにより、フ
ォーカス制御およびトラッキング制御を高精度かつ迅速
に行うことができる。
FIG. 3 shows the configuration of the optical system of the head 1. This head 1 includes a light emitting diode 11, an illumination lens 12, an objective lens 13, and a photodetector 14. The light from the light emitting diode 11 is irradiated onto an optical card 15 through the illumination lens 12, and the light reflected from the optical card 15 is sent to the objective. The light passes through the lens 13 and enters the photodetector 14,
It is designed to obtain a focus error signal and a tracking error signal and to read data. Therefore, depending on the magnitude of the detected focus error signal and tracking error signal, the corresponding bimorph 4
and 2 to the respective electrodes 9a, 9b; 8a,
By selecting and driving 8b as described above, focus control and tracking control can be performed with high precision and speed.

第4図はこの発明の第2実施例を示すものである。この
実施例は、第1図においてバイモルフ2と同一構成より
成るバイモルフ2′を、バイモルフ2と平行にヘッド1
と中、継部材3との間に装着して、ヘッド1をこれら一
対のバイモルフ2,2′でそれらの短電極及び長電極を
第1実施例と同様に選択しながら駆動してトラッキング
制御を行うと共に、フォーカシング制御についても同様
に、バイモルフ4と同一構成より成るバイモルフ4′を
、バイモルフ4と平行に中継部材3と固定部材5との間
に装着して、ヘッド1をこれら一対のバイモルフ4.4
′でそれらの短電極および長電極を第1実施例と同様に
選択しながら駆動して行うようにしたものである。
FIG. 4 shows a second embodiment of the invention. In this embodiment, a bimorph 2' having the same structure as bimorph 2 in FIG.
The head 1 is driven by the pair of bimorphs 2 and 2' while selecting the short and long electrodes in the same manner as in the first embodiment to perform tracking control. At the same time, for focusing control, a bimorph 4' having the same configuration as the bimorph 4 is mounted between the relay member 3 and the fixed member 5 in parallel with the bimorph 4, and the head 1 is connected to the pair of bimorphs 4. .4
The short electrode and the long electrode are selected and driven in the same manner as in the first embodiment.

第5図はこの発明の第3実施例を示すものである。この
実施例では、ヘッド1をその一方の側において4本の線
状弾性部材18を介してフォーカス方向およびトラッキ
ング方向に変位可能に固定部材5に支持すると共に、ヘ
ッド1の他方の側においてヘッド1と固定部材5′との
間にヘッド1をトラッキング方向に駆動するためのバイ
モルフ2と、フォーカス方向に駆動するためのバイモル
フ4とを装着したものである。バイモルフ2,4はその
長電極8b+、 9b側の端部を固定部材5′に固定し
、短電極8a、 9a側の端部はそれぞれ変位方向と直
交する方向においてスライド可能にヘッド1に保持する
FIG. 5 shows a third embodiment of the invention. In this embodiment, the head 1 is supported on one side by a fixed member 5 through four linear elastic members 18 so as to be movable in the focusing direction and the tracking direction, and the head 1 is supported on the other side of the head 1 by a fixed member 5 so as to be movable in the focusing direction and the tracking direction. A bimorph 2 for driving the head 1 in the tracking direction and a bimorph 4 for driving the head 1 in the focusing direction are mounted between the head 1 and a fixed member 5'. The ends of the bimorphs 2 and 4 on the side of the long electrodes 8b+ and 9b are fixed to the fixing member 5', and the ends on the side of the short electrodes 8a and 9a are each held in the head 1 so as to be slidable in a direction perpendicular to the direction of displacement. .

第6図はこの発明の第4実施例を示すもので、第5図に
示す第3実施例において、トラッキング用およびフォー
カス用としてそれぞれ一対のバイモルフ2.2’:  
4,4’を装着したものである。
FIG. 6 shows a fourth embodiment of the present invention. In the third embodiment shown in FIG. 5, a pair of bimorphs 2.2' are used for tracking and focusing, respectively:
4,4' is attached.

なお、この発明は上述した実施例にのみ限定されるもの
ではな(、幾多の変形または変更が可能である。例えば
、第7図に示すように、バイモルフ21の一方の外側電
極をそれぞれ長さの異なる3個の電極22a、 22b
、 22cに分割して、振幅と移動サイクルとの間にさ
らに自由度をもたせることもできる。また、第8図に示
すように、バイモルフ25の両方の外側電極をそれぞれ
対向するように異なる長さの電極26a、 26b; 
27a、 27bに分割し、これら電極への通電方向で
歪を変えるようにすることもできる。更に、この発明は
光カードの読取りヘッドの駆動に限らず書込みヘッドの
駆動にも有効に適用することができると共に、オーディ
オディスク、ビデオディスク等の記録および/または再
生装置における光ビ・7クアソプにおいても、例えば第
9図に示すように、対物レンズ31を保持するホルダ3
2をフォーカス用のバイモルフ4、中継部材3およびト
ラッキング用のバイモルフ2を介して固定部材に支持す
ることにより、対物レンズ31を同様に駆動することが
できる。また、この発明は上述した2次元方向の駆動の
みでなく、1次方向あるいは3次元方向の駆動にも適用
することができる。更に、上述した実施例では少なくと
も一方の外側電極を長さの異なる電極に分割したが、同
一長さに2分割あるいはそれ以上に複数分割して任意の
個数の電極を選択するよう構成しても同様の効果を得る
ことができる。
Note that the present invention is not limited to the above-described embodiment (and many modifications and changes are possible. For example, as shown in FIG. 7, one outer electrode of the bimorph 21 is Three different electrodes 22a, 22b
, 22c to provide more flexibility between the amplitude and the movement cycle. Further, as shown in FIG. 8, electrodes 26a and 26b of different lengths are provided so that both outer electrodes of the bimorph 25 face each other;
It is also possible to divide the electrode into 27a and 27b and change the strain depending on the direction in which current is applied to these electrodes. Furthermore, the present invention can be effectively applied not only to driving the read head of an optical card but also to driving a write head, and can be effectively applied to an optical video recording and/or reproducing apparatus for recording and/or reproducing audio discs, video discs, etc. Also, as shown in FIG. 9, for example, a holder 3 holding an objective lens 31
2 is supported on a fixed member via the focusing bimorph 4, the relay member 3, and the tracking bimorph 2, the objective lens 31 can be similarly driven. Further, the present invention can be applied not only to driving in the two-dimensional direction described above but also to driving in a primary direction or three-dimensional direction. Furthermore, in the above-described embodiment, at least one of the outer electrodes is divided into electrodes of different lengths, but it may be configured to be divided into two or more electrodes of the same length to select an arbitrary number of electrodes. A similar effect can be obtained.

〔発明の効果〕〔Effect of the invention〕

以上述べたように、この発明によれば被駆動部材を変位
させるためのバイモルフの少なくとも一方の外側電極を
分割し、これら電極を選択して被駆動部材を変位させる
ようにしたので、大きな変位量を得ることができると共
に、微小な変位量を迅速に得ることができる。
As described above, according to the present invention, at least one outer electrode of the bimorph for displacing the driven member is divided, and these electrodes are selected to displace the driven member, so that a large amount of displacement can be achieved. can be obtained, and also a minute amount of displacement can be obtained quickly.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の第1実施例を示す斜視図、第2図は
第1図に示すバイモルフの構成を示す拡大側面図、第3図は第1図に示すヘッドの光学系の一例の構成を示
す図、第4図、第5図および第6図はそれぞれこの発明の第2
.第3および第4実施例を示す斜視図、第7図および第
8図はそれぞれバイモルフの変形例を示す図、第9図はこの発明の変形例を示す斜視図、第10図Aお
よびBはバイモルフの動作を説明するための図である。1・・・ヘッド2.2’、4.4’・・・バイモルフ2a、 2b・・・圧電子    3・・・中継部材5
.5′・・・固定部材  6・・・中央電極7・・・外
側電極     8a、 9a・・・短電極8b、 9
b・・・長電極    11・・・発光ダイオード12
・・・照明レンズ    13・・・対物レンズ14・
・・フォトディテクタ 15・・・光カード18・・・
線状弾性部材   21.25・・・バイモルフ22a
 〜22c、 26a、 26b、 27a、 27b
−電極31・・・対物レンズ    32・・・ホルダ
第1図るz5         →第3図第4図第51第6[1第7図    第8図第9図
1 is a perspective view showing a first embodiment of the present invention, FIG. 2 is an enlarged side view showing the configuration of the bimorph shown in FIG. 1, and FIG. 3 is an example of the optical system of the head shown in FIG. 1. The diagrams showing the configuration, FIG. 4, FIG. 5, and FIG. 6 are the second diagrams of this invention.
.. FIGS. 7 and 8 are perspective views showing a modified example of the bimorph, FIG. 9 is a perspective view showing a modified example of the present invention, and FIGS. 10 A and B are perspective views showing the third and fourth embodiments. FIG. 3 is a diagram for explaining the operation of a bimorph. 1... Head 2.2', 4.4'... Bimorph 2a, 2b... Piezoelectric 3... Relay member 5
.. 5'...Fixing member 6...Central electrode 7...Outer electrode 8a, 9a...Short electrode 8b, 9
b... Long electrode 11... Light emitting diode 12
...Illumination lens 13...Objective lens 14.
...Photodetector 15...Optical card 18...
Linear elastic member 21.25...bimorph 22a
~22c, 26a, 26b, 27a, 27b
- Electrode 31... Objective lens 32... Holder 1st figure z5 → Figure 3 Figure 4 Figure 51 6 [1 Figure 7 Figure 8 Figure 9

Claims (1)

Translated fromJapanese
【特許請求の範囲】[Claims]1、被駆動部材をバイモルフにより所定の方向に変位さ
せるようにしたアクチュエータにおいて、前記バイモル
フの少なくとも一方の外側電極を分割して設け、これら
電極を選択して前記被駆動部材を変位させるよう構成し
たことを特徴とするアクチュエータ。
1. In an actuator configured to displace a driven member in a predetermined direction by a bimorph, at least one outer electrode of the bimorph is provided separately, and these electrodes are selected to displace the driven member. An actuator characterized by:
JP20885586A1986-09-061986-09-06ActuatorPendingJPS6364640A (en)

Priority Applications (1)

Application NumberPriority DateFiling DateTitle
JP20885586AJPS6364640A (en)1986-09-061986-09-06Actuator

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
JP20885586AJPS6364640A (en)1986-09-061986-09-06Actuator

Publications (1)

Publication NumberPublication Date
JPS6364640Atrue JPS6364640A (en)1988-03-23

Family

ID=16563231

Family Applications (1)

Application NumberTitlePriority DateFiling Date
JP20885586APendingJPS6364640A (en)1986-09-061986-09-06Actuator

Country Status (1)

CountryLink
JP (1)JPS6364640A (en)

Cited By (28)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
WO1999013518A1 (en)*1997-09-081999-03-18Ngk Insulators, Ltd.Piezoelectric/electrostriction device
EP1089350A2 (en)1999-10-012001-04-04Ngk Insulators, Ltd.Piezoelectric/electrostrictive device
US6333681B1 (en)1999-10-012001-12-25Ngk Insulators, Ltd.Piezoelectric/electrostrictive device
US6335586B1 (en)1998-12-282002-01-01Ngk Insulators, Ltd.Piezoelectric/electrostrictive device and production method thereof
US6342751B1 (en)1998-12-282002-01-29Ngk Insulators, Ltd.Piezoelectric/electrostrictive device and production method thereof
JP2002033530A (en)*1999-10-012002-01-31Ngk Insulators Ltd Piezoelectric / electrostrictive device and manufacturing method thereof
US6351056B1 (en)1999-10-012002-02-26Ngk Insulators, Ltd.Piezoelectric/electrostrictive device having mutually opposing thin plate portions
US6404109B1 (en)1999-10-012002-06-11Ngk Insulators, Ltd.Piezoelectric/electrostrictive device having increased strength
EP1020937A4 (en)*1997-07-042002-07-17Tokai Rika Co LtdParallel plate structure provided with pzt thin-film bimorph and method of fabrication thereof
US6448693B1 (en)1999-10-012002-09-10Ngk Insulators, Ltd.Piezoelectric/electrostrictive device and method of manufacturing same
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US6715192B2 (en)1998-12-282004-04-06Ngk Insulators, Ltd.Method for manufacturing a piezoelectric/electrostrictive device
US6798119B2 (en)2001-01-182004-09-28Ngk Insulators, Ltd.Piezoelectric/electrostrictive device and method of producing the same
US6844659B2 (en)2001-04-112005-01-18Ngk Insulators, Ltd.Wiring board and method of manufacturing same
US6910250B2 (en)1999-10-012005-06-28Ngk Insulators, Ltd.Piezo-electric/electrostrictive device, and method of manufacturing same
US6915547B2 (en)1999-10-012005-07-12Ngk Insulators, Ltd.Piezoelectric/electrostrictive device and method of manufacturing same
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JP2008153689A (en)*1999-10-012008-07-03Ngk Insulators Ltd Piezoelectric / electrostrictive device

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US6239534B1 (en)1997-09-082001-05-29Ngk Insulators, Ltd.Piezoelectric/electrostrictive device
US6724127B2 (en)1997-09-082004-04-20Ngk Insulators, Ltd.Piezoelectric/electrostrictive device
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US6925693B2 (en)1998-12-282005-08-09Ngk Insulators, Ltd.Method of fabricating a piezoelectric/electrostrictive device
US6335586B1 (en)1998-12-282002-01-01Ngk Insulators, Ltd.Piezoelectric/electrostrictive device and production method thereof
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US6498419B1 (en)1999-10-012002-12-24Ngk Insulators, Ltd.Piezoelectric/electrostrictive device having mutually opposing end surfaces and method of manufacturing the same
US6525448B1 (en)1999-10-012003-02-25Ngk Insulators LtdPiezoelectric/electrostrictive device
JP2008153689A (en)*1999-10-012008-07-03Ngk Insulators Ltd Piezoelectric / electrostrictive device
US6534899B1 (en)1999-10-012003-03-18Ngk Insulators, Ltd.Piezoelectric/electrostrictive device and method of manufacturing same
US6534898B1 (en)1999-10-012003-03-18Ngk Insulators, Ltd.Piezoelectric/electrostrictive device having mutually opposing thin plate section
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US6671939B2 (en)1999-10-012004-01-06Ngk Insulators, Ltd.Method for producing a piezoelectric/electrostrictive device
JP2002033530A (en)*1999-10-012002-01-31Ngk Insulators Ltd Piezoelectric / electrostrictive device and manufacturing method thereof
US6333681B1 (en)1999-10-012001-12-25Ngk Insulators, Ltd.Piezoelectric/electrostrictive device
US7358647B2 (en)1999-10-012008-04-15Ngk Insulators, Ltd.Piezoelectric/electrostrictive device
US6448693B1 (en)1999-10-012002-09-10Ngk Insulators, Ltd.Piezoelectric/electrostrictive device and method of manufacturing same
US6796011B2 (en)1999-10-012004-09-28Ngk Insulators, Ltd.Piezoelectric/electrostrictive device and method of manufacturing same
US7345405B2 (en)1999-10-012008-03-18Ngk Insulators, Ltd.Piezoelectric/electrostrictive device and method of manufacturing same
US6817072B2 (en)1999-10-012004-11-16Ngk Insulators, Ltd.Method of manufacturing a piezoelectric/electrostrictive device
US7336021B2 (en)1999-10-012008-02-26Ngk Insulators, Ltd.Piezoelectric/electrostrictive device and method of manufacturing same
US6883215B2 (en)1999-10-012005-04-26Ngk Insulators, Ltd.Piezoelectric/electrostrictive device and method of manufacturing same
US6910250B2 (en)1999-10-012005-06-28Ngk Insulators, Ltd.Piezo-electric/electrostrictive device, and method of manufacturing same
US6915547B2 (en)1999-10-012005-07-12Ngk Insulators, Ltd.Piezoelectric/electrostrictive device and method of manufacturing same
EP1089350A2 (en)1999-10-012001-04-04Ngk Insulators, Ltd.Piezoelectric/electrostrictive device
US6933658B2 (en)1999-10-012005-08-23Ngk Insulators, Ltd.Method of manufacturing a piezoelectric/electrostrictive device
US6968603B2 (en)1999-10-012005-11-29Ngk Insulators, Ltd.Method of producing a piezoelectric/electrostrictive device
US7321180B2 (en)1999-10-012008-01-22Ngk Insulators, Ltd.Piezoelectric/electrostrictive device
US7245064B2 (en)1999-10-012007-07-17Ngk Insulators, Ltd.Piezoelectric/electrostrictive device
US7138749B2 (en)1999-10-012006-11-21Ngk Insulators, Ltd.Piezo-electric/electrostrictive device and method of manufacturing same
US7164221B1 (en)1999-10-012007-01-16Ngk Insulators, Ltd.Piezoelectric/electrostrictive device and method of manufacturing same
US7089637B2 (en)2000-06-162006-08-15Ngk Insulators, Ltd.Method of producing a piezoelectric/electrostrictive device
US6766568B2 (en)2000-06-162004-07-27Ngk Insulators, Ltd.Method of producing a piezoelectric/electrostrictive device
US6531805B2 (en)2000-06-162003-03-11Ngk Insultaors, Ltd.Piezoelectric/electrostrictive device and method of producing the same
US7024739B2 (en)2001-01-182006-04-11Ngk Insulators, Ltd.Method of producing a piezoelectric/electrostrictive device
US6798119B2 (en)2001-01-182004-09-28Ngk Insulators, Ltd.Piezoelectric/electrostrictive device and method of producing the same
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