【発明の詳細な説明】〔産業上の利用分野〕この発明は、一対の誘電体被覆金属電極を対向させ、そ
の間で放電によりレーザ光を得る無声放電式ガスレーザ
装置、特に各誘電体被覆金属電極の放電部を除く外面を
覆うカバー材の改良に関するものである。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a silent discharge gas laser device in which a pair of dielectric-coated metal electrodes are opposed to each other and a laser beam is generated by discharge between them, and in particular, each dielectric-coated metal electrode This invention relates to an improvement in the cover material that covers the outer surface of the device, excluding the discharge portion.
第２図は、従来の無声放電式ガスレーザ装置を示すもの
で、図中、（Ｉ）は外表面が誘電体（２）で被覆された
中空状の一対の金属電極で、内部に冷却水が通されて冷
却される。（３）は上記両金属電極（１）の間に形成さ
れる放電空間で、例えばＣ０，２を含むレーザ媒質が放
電方向と直交する方向に循環する。（４）は上記各金属
電極（りの放電部を除く外面にモールドされたシリコン
樹脂製のカバー材である。Figure 2 shows a conventional silent discharge type gas laser device. In the figure, (I) is a pair of hollow metal electrodes whose outer surfaces are coated with a dielectric (2), and cooling water is inside. passed through and cooled. (3) is a discharge space formed between the two metal electrodes (1), in which a laser medium containing, for example, C0,2 circulates in a direction perpendicular to the discharge direction. (4) is a cover material made of silicone resin molded on the outer surface of each of the metal electrodes (excluding the discharge portion).
従来の無声放電式ガスレーザ装置は上記のように構成さ
れ、両金属電極（１）間に電圧を印加するとともに、放
電空間（３）にレーザ媒質を循環させ、放電空間（３）
における放電によりレーザ媒質を励起させる。これによ
り、放電方向およびレーザ媒質の流れ方向いずれも直交
する方向にレーザ光が出力される。A conventional silent discharge gas laser device is configured as described above, and a voltage is applied between both metal electrodes (1), and a laser medium is circulated in the discharge space (3).
The laser medium is excited by the discharge at. As a result, laser light is output in a direction perpendicular to both the discharge direction and the flow direction of the laser medium.
上記のような従来の無声放電式ガスレーザ装置では、各
金属電極（１）の放電部を除く外面を覆うカバー材（４
）としてシリコン樹脂を用いているため、充填性はよい
が放電劣化が生じてカバー材（４）から有機成分がガス
として放出され、レーザ媒質がこのガスにより汚染され
てレーザ出力特性が悪くなる等の問題があった。In the conventional silent discharge gas laser device as described above, a cover material (4
), the filling property is good, but due to discharge deterioration, organic components are released from the cover material (4) as a gas, and the laser medium is contaminated by this gas, resulting in poor laser output characteristics, etc. There was a problem.
この発明は、かかる問題点を解決するためになされたも
ので、レーザ媒質の汚染を大幅に抑制してレーザ出力特
性を安定させることができる無声放電式ガスレーザ装置
を得ることを目的とする。The present invention was made to solve these problems, and an object of the present invention is to provide a silent discharge gas laser device that can significantly suppress contamination of the laser medium and stabilize laser output characteristics.
この発明に′係る無声放電式ガスレーザ装置は、カバー
材を、ガラスセラミック製の基台と、この基台と誘電体
被覆金属電極との間に充填されるシリコン系樹脂製のモ
ールド材とで構成するようにしたものである。In the silent discharge gas laser device according to the present invention, the cover material is composed of a base made of glass ceramic and a molded material made of silicone resin filled between the base and the dielectric-coated metal electrode. It was designed to do so.
この発明においては、カバー材を、耐放電性に優れ放電
劣化のない機械加工が可能なガラスセラミック製の基台
と、この基台と誘電体被覆金属電極との間に充填される
シリコン系樹脂性のモールド材とで構成してるので、従
来のものに比較して有機材料の使用量を大幅に少なくす
ることができる。このため、有機成分の放出量が極端に
少なくなってレーザ媒質の汚染がほとんどなくなり、レ
ーザ出力特性を安定させることが可能となる。In this invention, the cover material is made of a glass ceramic base that has excellent discharge resistance and can be machined without discharge deterioration, and a silicon-based resin that is filled between the base and the dielectric-coated metal electrode. Since it is made of organic molding material, the amount of organic material used can be significantly reduced compared to conventional molding materials. Therefore, the amount of organic components released is extremely reduced, and contamination of the laser medium is almost eliminated, making it possible to stabilize the laser output characteristics.
第１図はこの発明の一実施例を示すもので、図中、第２
図と同一符号は同−又は相当部分を示す。（４）は外面
に誘電体（２）が被覆された一対の各金属電極（１）の
放電部を除く外面を覆うカバー材で、賦形性がよく機械
加工が可能なガラスセラミックス等の基台（５）と、こ
の基台（５）と金属電極（１）との間に充填されるシリ
コン系樹脂製のモールド材（６）とで構成されている。FIG. 1 shows an embodiment of the present invention.
The same reference numerals as in the figures indicate the same or corresponding parts. (4) is a cover material that covers the outer surface of each of the pair of metal electrodes (1) except for the discharge part, the outer surface of which is coated with dielectric material (2), and is made of glass ceramics or the like that has good shapeability and can be machined. It is composed of a base (5) and a silicon resin molding material (6) filled between the base (5) and the metal electrode (1).
上記のように構成された無声放電式ガスレーザ装置にお
いては、放電空間（３）にレーザ媒質を循環させるとと
もに、両金属電極（１）間に電圧を印加して放電を発生
させ、放電空間（３）のレーザ媒質を励起させることに
より、放電方向およびレーザ媒質の流れ方向いずれにも
直交する方向にレーザ光が出力される。In the silent discharge gas laser device configured as described above, the laser medium is circulated in the discharge space (3), and a voltage is applied between the two metal electrodes (1) to generate a discharge. ) by exciting the laser medium, laser light is output in a direction perpendicular to both the discharge direction and the flow direction of the laser medium.
ところで、各金属電極（１）は、放電部を除く外面が力
／へ一材（４）により覆われているので、放電領琺が各
金属電極（１）の対向面部分に制限される。そしてカバ
ー材（４）は耐放電性に優れ放電劣化が生じない無機材
質のガラスセラミックス酸の基台（５）と、この基台（
５）と金属電極（１）との間に充填された極少量のシリ
コン系樹脂製のモールド材（８）とで構成されているの
で、カバー材（４）のすべてをシリコン樹脂で形成して
いた従来のものに比較して、放電に伴なう有機成分の放
出量が極端に少なくなり、レーザ媒質の汚染をほとんど
なぐずごとができる。このため、レーザ出力特性を安定
させることができる。また、基台（５）と金属電極（＋
）との間には融合性のよいシリコン系樹脂製のモールド
材（６）が充填されているので、カバー材（４）の一部
にガラスセラミックスを用いることに伴なう不具合は全
くない。By the way, since the outer surface of each metal electrode (1) except for the discharge portion is covered with the material (4), the discharge area is limited to the opposing surface portion of each metal electrode (1). The cover material (4) is made of an inorganic glass ceramic acid base (5) that has excellent discharge resistance and does not suffer from discharge deterioration, and this base (
5) and a very small amount of silicone resin molding material (8) filled between the metal electrode (1) and the cover material (4) is entirely made of silicone resin. Compared to conventional devices, the amount of organic components released during discharge is extremely small, and contamination of the laser medium can be almost eliminated. Therefore, the laser output characteristics can be stabilized. In addition, the base (5) and the metal electrode (+
) is filled with a molding material (6) made of silicone resin with good fusibility, so there are no problems associated with using glass ceramics for a part of the cover material (4).
この発明は以上説明したとおり、カバー材を、ガラスセ
ラミックス酸の基台（５）とシリコン系樹脂製のモール
ド材とで構成しているので、従来のカバー材に比較して
有機材料の使用量が極端に少なくなり、レーザ媒質の有
機成分による汚染を大幅に抑制してレーザ出力特性を安
定させることができる等の効果がある。As explained above, in this invention, since the cover material is composed of the glass-ceramic acid base (5) and the silicone resin mold material, the amount of organic material used is lower than that of conventional cover materials. This has the effect of significantly reducing contamination of the laser medium by organic components and stabilizing the laser output characteristics.
第１図はこの発明の一実施例を示す無声放電式ガスレー
ザ装置の要部断面図、第２図は従来の無声放電式ガスレ
ーザ装置を示す第１図相当図である。（１）・・・金属電極、 （２）は誘電体、（３）・
・・放電空間、 （４）・・・カバー材、（５）・・
・基台、 （６）・・・モールド材。なお、図中、同一符号は同−又は相当部分を示す。FIG. 1 is a sectional view of a main part of a silent discharge type gas laser device showing an embodiment of the present invention, and FIG. 2 is a view corresponding to FIG. 1 showing a conventional silent discharge type gas laser device. (1)...Metal electrode, (2) is dielectric, (3)...
...Discharge space, (4)...Cover material, (5)...
・Base, (6)...mold material. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20538686AJPS6360576A (en) | 1986-09-01 | 1986-09-01 | Silent discharge type gas laser device |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20538686AJPS6360576A (en) | 1986-09-01 | 1986-09-01 | Silent discharge type gas laser device |
| Publication Number | Publication Date |
|---|---|
| JPS6360576Atrue JPS6360576A (en) | 1988-03-16 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20538686APendingJPS6360576A (en) | 1986-09-01 | 1986-09-01 | Silent discharge type gas laser device |
| Country | Link |
|---|---|
| JP (1) | JPS6360576A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10565002B2 (en) | 2011-03-30 | 2020-02-18 | Amazon Technologies, Inc. | Frameworks and interfaces for offload device-based packet processing |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10565002B2 (en) | 2011-03-30 | 2020-02-18 | Amazon Technologies, Inc. | Frameworks and interfaces for offload device-based packet processing |
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