【発明の詳細な説明】〔概要〕グリーンシートの成形乾燥装置に連続して熱風焼鈍炉を
配置し、その炉内に多段の圧延ローラを設け、成形乾燥
装置より出てきたグリーンシートを圧延ローラを通過す
ると同時に熱風を吹きつけて焼鈍し、巻き取りローラに
より巻き取る構成でグリーンシート圧延成形の自動化を
可能にする。[Detailed Description of the Invention] [Summary] A hot air annealing furnace is placed in succession to a green sheet forming/drying device, and a multi-stage rolling roller is provided in the furnace, and the green sheet coming out of the forming/drying device is passed through the rolling roller. The green sheet is annealed by blowing hot air at the same time as it passes through, and is wound up by a take-up roller, making it possible to automate green sheet rolling forming.
本発明は各種電子機器の構成に広く使用される多層セラ
ミック配線基板の製造法に関するものである。The present invention relates to a method for manufacturing a multilayer ceramic wiring board that is widely used in the construction of various electronic devices.
特に、そのグリーンシートの残留溶剤及び、応力の除去
と密度の均一化を連続的に行うグリーンシート圧延成形
装置が要望されている。In particular, there is a need for a green sheet rolling forming apparatus that continuously removes residual solvent and stress from the green sheet and makes the density uniform.
従来、ドクターブレード法にて薄いグリーンシート１を
成形したものを所定の寸法に切断し、第２図に示すよう
に金属板３′例えば、アルミニューム合金板の表裏両面
を平行且つ、平面に加工した平板に付着を防止するため
、前記グリーンシート１の表裏両面に保護フィルム２゛
で保護し、前記金属板３°の間に挾んで状態のものを多
層に積み重ね、埋め込みヒータを内臓し加熱された２枚
の熱板４゛間に入れてプレス機で実線矢印方向に加圧焼
鈍を行い、残留溶剤及び、応力の除去と、密度の均一化
を計っている。Conventionally, a thin green sheet 1 is formed using a doctor blade method and then cut into predetermined dimensions, and as shown in FIG. In order to prevent adhesion to the green sheet 1, both the front and back sides of the green sheet 1 were protected with protective films 2゜, and the green sheets 1 were stacked in multiple layers with the metal plates sandwiched between 3 degrees, and an embedded heater was installed to heat the green sheets. The material was placed between two heated plates 4' and pressure annealed in the direction of the solid arrow in a press machine to remove residual solvent and stress and to make the density uniform.
以上説明の従来のグリーンシート圧延成形法で問題とな
るのは、金属板と保護フィルムに挟まれたグリーンシー
トを多段に積み重ねるため、２枚の熱板間に挟まれた前
記金属板、保護フィルム。The problem with the conventional green sheet rolling forming method explained above is that the green sheets sandwiched between the metal plate and the protective film are stacked in multiple stages, so the metal plate and the protective film are sandwiched between two hot plates. .
グリーンシート全体が均一温度になる迄の時間が長くな
る。It takes a long time for the entire green sheet to reach a uniform temperature.
又、グリーンシートを挟む前記金属板の表裏両面は高精
度の平行度、平面度が要求され、基板サイズが大きくな
ると更にこの金属板の平行度、平面度の確保が困難とな
り製作コストが高くなる。In addition, highly accurate parallelism and flatness are required on both the front and back surfaces of the metal plates that sandwich the green sheet, and as the substrate size increases, it becomes even more difficult to ensure the parallelism and flatness of these metal plates, which increases production costs. .
本発明は以上のような状況から残留溶剤及び、応力の除
去と密度の均一化を計る加圧焼鈍を簡単且つ、安価に行
える新しいグリーンシート圧延成形法の提供を目的とし
たものである。In view of the above-mentioned circumstances, the present invention aims to provide a new green sheet rolling forming method that can easily and inexpensively perform pressure annealing to remove residual solvent and stress and make the density uniform.
上記問題点は、第１図に示すようにドクターブレード６
３を用いて長尺のキャリアフィルム２上にスラリー６４
を均一の厚さで塗布し、温風の乾燥炉６１でグリーンシ
ート１を成形する成形装置６の延長上に連続して、耐熱
性を有する金属の円筒状ローラを２本手行に横架した複
数台の圧延ローラ３と、熱風を吹き付けて前記グリーン
シート１を焼鈍する熱風の焼鈍炉４を付加し、圧延成形
が完了したグリーンシートｌを巻き取る巻き取りローラ
５３を配置する本発明のグリーンシート圧延成形装置に
より解決される。The above problem is solved by the doctor blade 6 as shown in Fig. 1.
3 onto the long carrier film 2 using the slurry 64.
Two heat-resistant metal cylindrical rollers are horizontally mounted continuously on the extension of the forming device 6 that forms the green sheet 1 in a hot air drying oven 61. According to the present invention, a plurality of rolling rollers 3 and a hot air annealing furnace 4 for annealing the green sheet 1 by blowing hot air are added, and a winding roller 53 for winding up the green sheet 1 that has been rolled and formed is arranged. Solved by green sheet rolling forming equipment.
即ち本発明においては、従来のキャリアフィルム２を貼
り付けたグリーンシート１を金属板３゛間に挾み２枚の
熱板４゛での加圧焼鈍に代わって、焼鈍炉４内に設けた
複数台の加熱した圧延ローラ３の間を、キャリアフィル
ム２上にスラリー６４を塗布し乾燥したグリーンシート
１が通過することによりグリーンシート１の密度の均一
化が計れ、つづいて焼鈍炉４内の熱風により加熱される
ことにより、残留溶剤及び、残留応力の除去が簡単にで
き、高品質なグリーンシートの連続圧延成形が可能とな
る。That is, in the present invention, instead of the conventional green sheet 1 having a carrier film 2 attached thereto sandwiched between metal plates 3 and pressure annealing with two hot plates 4, the green sheet 1 is placed in an annealing furnace 4. The green sheet 1, which has been coated with slurry 64 on the carrier film 2 and dried, passes between a plurality of heated rolling rollers 3 to make the density of the green sheet 1 uniform, and then passes through the annealing furnace 4. By heating with hot air, residual solvent and residual stress can be easily removed, making it possible to continuously roll and form high-quality green sheets.
以下図面に示した実施例に基づいて本発明の詳細な説明
する。The present invention will be described in detail below based on embodiments shown in the drawings.
第１図は本実施例によるグリーンシート圧延成装置法の
正面図である。FIG. 1 is a front view of the green sheet rolling forming apparatus method according to this embodiment.
図に示すようにドクターブレード６３を用いて長尺のキ
ャリアフィルム２上にスラリー６４を均一の厚さで塗布
し、温風の乾燥炉６１でグリーンシート１を成形するグ
リーンシート成形装置６ （以下成形装置と云う）に対
し、その延長上に近接して電気的熱源により雰囲気温度
１００〜１５０ ’Ｃの性能を有し炉内温度の制御可能
な熱風の焼鈍炉４を配置し、更にこの焼鈍炉４の実線矢
印方向に圧延成形が完了したグリーンシート１を巻き取
るため反転ローラ５２と巻き取りローラ５３を設ける。As shown in the figure, a green sheet forming device 6 (hereinafter referred to as "green sheet forming apparatus 6") applies slurry 64 to a uniform thickness onto a long carrier film 2 using a doctor blade 63 and forms a green sheet 1 in a hot air drying oven 61. A hot air annealing furnace 4, which has the ability to maintain an ambient temperature of 100 to 150'C using an electric heat source and is capable of controlling the temperature inside the furnace, is disposed close to the extension of the molding device. A reversing roller 52 and a winding roller 53 are provided to wind up the green sheet 1 that has been rolled in the direction of the solid arrow in the furnace 4.
前記焼鈍炉４には実線矢印に対して反対方向即ち、前記
成形装置６に近い前半の部分にグリーンシート１の排出
速度と同速度で回転し、耐熱性を有する金属例えば、耐
熱鋼棒を機械加工により高精度の円筒度、同心度１表面
粗さのロールに仕上げ、そのロール表面に数ミクロンの
均一なりロームメッキを施し研磨加工にて円筒表面を鏡
面状に仕上げた２本のローラを、前記グリーンシートｌ
の仕上がり厚みに対しその厚みのものと数十ミクロン単
位で隙間を大きくした３台の圧延ローラ３を、隙間の大
きい圧延ローラ３から順次実線矢印方向に連設する。The annealing furnace 4 rotates at the same speed as the discharge speed of the green sheet 1 in the opposite direction to the solid line arrow, that is, in the first half near the forming device 6, and is machined with a heat-resistant metal such as a heat-resistant steel bar. The two rollers are processed into rolls with high precision cylindricity, concentricity and surface roughness of 1, and the roll surface is plated with a uniform loam of several microns, and the cylindrical surface is polished to a mirror finish. Said green sheet l
Three rolling rollers 3, each having a clearance of several tens of microns larger than the finished thickness, are successively arranged in the direction of the solid line arrow starting from the rolling roller 3 with the largest clearance.
以下作動について説明する。前記成形装置６のキャリア
フィルム２を有した繰り出しローラ５１より、反転ロー
ラ５２介して実線矢印方向に引き出された所定幅のキャ
リアフィルム２は、スラリーダム６２を通過する時その
スラリーダム６２に供給したスラリー６４がドクターブ
レード６３によりキャリアフィルム２上に均一な所定厚
みで塗布され、その後実線矢印方向に配置した温風の乾
燥炉６１にて塗布したスラリー６４を乾燥する。The operation will be explained below. The carrier film 2 of a predetermined width is drawn out in the direction of the solid line arrow from the feed-out roller 51 having the carrier film 2 of the forming device 6 via the reversing roller 52, and is supplied to the slurry dam 62 when passing through the slurry dam 62. The slurry 64 is coated onto the carrier film 2 to a uniform predetermined thickness using a doctor blade 63, and then the coated slurry 64 is dried in a hot air drying oven 61 arranged in the direction of the solid line arrow.
つづいてその乾燥炉６１より排出されたグリーンシート
１は熱風の焼鈍炉４に移動し、その焼鈍炉４内の炉内雰
囲気温度に上昇した複数対の圧延ローラ３の間を通過す
ると密度の均一化が計られ、炉内後半においてグリーン
シート１の焼鈍温度の熱風を吹きつけることにより残留
溶剤と残留応力の除去ができる。Next, the green sheet 1 discharged from the drying furnace 61 is moved to the hot air annealing furnace 4, and when it passes between the plurality of pairs of rolling rollers 3 whose temperature has been raised to the furnace atmosphere inside the annealing furnace 4, the density becomes uniform. By blowing hot air at the annealing temperature of the green sheet 1 in the latter half of the furnace, residual solvent and residual stress can be removed.
以上の処理が完了したグリーンシート１は、巻き取りロ
ーラ５３による矢印方向の回転により反転ローラ５２を
介して巻き取る。これにより自動的にグリーンシート１
の圧延、成形が完了する。The green sheet 1 that has undergone the above processing is rotated in the direction of the arrow by the take-up roller 53 and wound up via the reversing roller 52 . This automatically causes green sheet 1
The rolling and forming process is completed.
以上説明したように本発明によれば極めて間車な構成で
、自動的に残留溶剤及び、残留応力の除去と密度の均一
化が計れる等、著しい経済的の効果が期待でき実用的に
は極めて有用である。As explained above, according to the present invention, it is possible to automatically remove residual solvent and residual stress and to equalize the density with an extremely simple configuration, and a remarkable economic effect can be expected, and it is extremely practical. Useful.
第１図は本発明の一実施例によるグリーンシート圧延成
形装置を示す正面図、第２図は従来のグリーンシート圧延成形法を示を示す図
である。図において、１はグリーンシート、２はキャリアフィルム、２゛は保護フィルム、３は圧延ローラ、３°は金属板、４は焼鈍炉、４′は熱板、５１は繰り出しローラ、５２は反転ローラ、５３は巻き取りローラ、６はグリーンシート成形装置、６１は乾燥炉、６２はスラリーダム、６３はドクターブレード、６４はスラリー、を示ず。手光斧呉←例１・Ｆ５デｑ−ツ斗斤蘇°か苓ｊ−ｆＬ面
図第１図吃ａヒ１テめ７″′ソー〉シートＩＥ力ｆ万＼“形迭第
２図FIG. 1 is a front view showing a green sheet rolling forming apparatus according to an embodiment of the present invention, and FIG. 2 is a diagram showing a conventional green sheet rolling forming method. In the figure, 1 is a green sheet, 2 is a carrier film, 2゛ is a protective film, 3 is a rolling roller, 3° is a metal plate, 4 is an annealing furnace, 4' is a hot plate, 51 is a feeding roller, 52 is a reversing roller , 53 is a take-up roller, 6 is a green sheet forming device, 61 is a drying oven, 62 is a slurry dam, 63 is a doctor blade, 64 is a slurry, and 64 is not shown. Hand light axe ←Example 1 F5 deq-tsu doo su °ka 蓓 j-fL side view Fig. 1 吃 ahi 1 teme 7''' saw〉 Sheet IE force f million \" shape Fig. 2
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26647385AJPS62124904A (en) | 1985-11-26 | 1985-11-26 | Green sheet rolling forming equipment |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26647385AJPS62124904A (en) | 1985-11-26 | 1985-11-26 | Green sheet rolling forming equipment |
| Publication Number | Publication Date |
|---|---|
| JPS62124904Atrue JPS62124904A (en) | 1987-06-06 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26647385APendingJPS62124904A (en) | 1985-11-26 | 1985-11-26 | Green sheet rolling forming equipment |
| Country | Link |
|---|---|
| JP (1) | JPS62124904A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03261628A (en)* | 1990-03-12 | 1991-11-21 | Fujitsu Ltd | Green sheet forming method |
| JP2024122985A (en)* | 2015-07-21 | 2024-09-10 | クアンタムスケイプ バテリー， インク． | Processes and materials for casting and sintering green garnet thin films |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03261628A (en)* | 1990-03-12 | 1991-11-21 | Fujitsu Ltd | Green sheet forming method |
| JP2024122985A (en)* | 2015-07-21 | 2024-09-10 | クアンタムスケイプ バテリー， インク． | Processes and materials for casting and sintering green garnet thin films |
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