第1図は、この考案に係わる海水面検知センサ
の正面図、第2図は、同部分断面図である。 2……固定部材、3……移動パイプ、4A,4
B……電極、9……コレツトチヤツク部、10…
…弗素樹脂被覆。 FIG. 1 is a front view of a sea level detection sensor according to this invention, and FIG. 2 is a partial sectional view thereof. 2... Fixed member, 3... Moving pipe, 4A, 4
B...Electrode, 9...Collection chuck part, 10...
...Fluororesin coating.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8449685UJPS61199631U (en) | 1985-06-04 | 1985-06-04 |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8449685UJPS61199631U (en) | 1985-06-04 | 1985-06-04 |
| Publication Number | Publication Date |
|---|---|
| JPS61199631Utrue JPS61199631U (en) | 1986-12-13 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8449685UPendingJPS61199631U (en) | 1985-06-04 | 1985-06-04 |
| Country | Link |
|---|---|
| JP (1) | JPS61199631U (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7038174B2 (en) | 1999-01-06 | 2006-05-02 | Mattson Technology, Inc. | Heating device for heating semiconductor wafers in thermal processing chambers |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5163652A (en)* | 1974-11-30 | 1976-06-02 | Omron Tateisi Electronics Co | EKITAIREBERUKENS HUTSUSOCHI |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5163652A (en)* | 1974-11-30 | 1976-06-02 | Omron Tateisi Electronics Co | EKITAIREBERUKENS HUTSUSOCHI |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7038174B2 (en) | 1999-01-06 | 2006-05-02 | Mattson Technology, Inc. | Heating device for heating semiconductor wafers in thermal processing chambers |
| US7608802B2 (en) | 1999-01-06 | 2009-10-27 | Mattson Technology, Inc. | Heating device for heating semiconductor wafers in thermal processing chambers |