【発明の詳細な説明】本発明は、高速軸流形ガスレーザ発振器に関する。[Detailed description of the invention]The present invention relates to a high-speed axial flow gas laser oscillator.
高速軸流形ガスレーザとは、レーザ光光軸、放電管管軸
およびレーザガスフロ一方向の軸が同一であるガスレー
ザで、レーザ出力高出力化のため、放電管内でレーザガ
ス全高速で流すガスレーザである。A high-speed axial flow gas laser is a gas laser in which the optical axis of the laser beam, the axis of the discharge tube tube, and the axis of the laser gas flow in one direction are the same.In order to increase the laser output, the laser gas is flowed at full speed within the discharge tube. .
高速軸流形ガスレーザにおいては、より大きなレーザ出
力金得るため、レーザ利得長を長クシ１、また低次のレ
ーザ発振モードを得るため、レーザ管径（放電管径Ｄ）
を細くしている。この場合、放電管径りはレーザビーム
径ωに対し、。In high-speed axial flow gas lasers, the laser gain length is increased by 1 to obtain a larger laser output, and the laser tube diameter (discharge tube diameter D) is increased to obtain a lower-order laser oscillation mode.
is made thinner. In this case, the discharge tube diameter is relative to the laser beam diameter ω.
ｎ；（ｔ、ｚ〜１．５）ω ・・・・・・■全光たすよ
うに選ばれる。n; (t, z ~ 1.5) ω...■Selected so as to add total light.
一般に低次モードの場合、レーザビーム径ωは、ｌＯ数
園φであるため、放電管径りは０式よシ高々２０数鰭φ
程度となる。一方、高出力金得るには、放電管内のガス
流速ｖ （ｍ ／ ９［Ｋ３ ）の値として音速程度が
要求されるため、放電管内のコンダクタンスは出来る限
シ大きくすることが望ましい。In general, in the case of a low-order mode, the laser beam diameter ω is lO several gardens φ, so the discharge tube diameter is at most 20 fins φ compared to the 0 type.
It will be about. On the other hand, in order to obtain high output power, the gas flow velocity v (m/9[K3) in the discharge tube is required to be about the speed of sound, so it is desirable to increase the conductance in the discharge tube as much as possible.
ところが市販のポンプで音速程度のガス流速Ｖ（Ｉｎ
／ ｌＩ［Ｋ１ ）會得るには、放電管径ｔ−５０数順
φ程度にしなければ実現不可能である。このことは、低
次のモードを得るための条件と矛盾する。However, with commercially available pumps, the gas flow velocity V (In
/lI[K1], it is impossible to achieve this unless the discharge tube diameter is in the order of t-50. This contradicts the conditions for obtaining lower-order modes.
本発明の目的は、上記矛盾金なくシ、低次モードで高出
力が得られる高出力ガスレーザ発振器全提供することに
ある。An object of the present invention is to provide a high-output gas laser oscillator capable of obtaining high output in a low-order mode without the above-mentioned contradictions.
本発明によれば複数の管状部材にレーザガスを高速で流
動させながら放電する高速軸流形ガスレーザ発振器にお
いて、前記管状部材の放電領域外に前記管状部材と同軸
の中管を有する管状部部材を接続し、前記中管の内径全
前記複数の管状部材の内径よシ細くしたことを特徴とす
る高速軸流形ガスレーザ発振器。According to the present invention, in a high-speed axial flow gas laser oscillator that discharges laser gas while flowing it through a plurality of tubular members at high speed, a tubular portion member having a middle tube coaxial with the tubular member is connected outside the discharge area of the tubular member. The high-speed axial flow gas laser oscillator is characterized in that the inner diameter of the middle tube is smaller than the inner diameter of the plurality of tubular members.
次に本発明の実施例を図面？用いて説明する。Next is the drawing of an embodiment of the present invention? I will explain using
第１図は、従来の高速軸流形ガスレーザ発振器の概略側
面図、第２図は本発明の一実施例？示す概略側面図であ
る。Fig. 1 is a schematic side view of a conventional high-speed axial flow type gas laser oscillator, and Fig. 2 is an embodiment of the present invention. FIG.
第１図において、一体化した２つの放電管５のレーザガ
ス給入部７（８）から供給されるレーザガスは、全反射
ミラー（あるいは出刃ミラー）ｌと出刃ミラー（あるい
は全反射ミラー）２とで構成される共振器内の放電管５
の放電領域６に入シ、ピン状電極３と円筒状電極４との
間で放電し、レーザガス排出部８（７）から共振器外へ
排出される。この様な構成で低次モード？得るには、高
次モードの抑制は放電管５の放電領域の内径に左右され
るため、放電管５の内径及びガス給入部７（８）、 ガ
ス排出部８（７）の内径全綱くしなければならない。そ
のため、放電領域６０体積が小さくなるばか）でなく、
レーザガスに対するコンダクタンスも小さくなシ必要な
ガス流速ｖ（ｍ／（８））が得られず、レーザの高出力
が期待出来ない。In FIG. 1, the laser gas supplied from the laser gas inlet 7 (8) of the two integrated discharge tubes 5 is composed of a total reflection mirror (or blade mirror) 1 and a blade mirror (or total reflection mirror) 2. discharge tube 5 inside the resonator
The laser gas enters the discharge region 6, is discharged between the pin-shaped electrode 3 and the cylindrical electrode 4, and is discharged from the laser gas discharge section 8 (7) to the outside of the resonator. Low-order mode with this kind of configuration? In order to achieve this, since suppression of higher-order modes depends on the inner diameter of the discharge region of the discharge tube 5, the inner diameter of the discharge tube 5 and the inner diameters of the gas inlet part 7 (8) and the gas outlet part 8 (7) are completely fixed. There must be. Therefore, instead of the volume of the discharge region 60 becoming smaller,
Since the conductance to the laser gas is also small, the necessary gas flow velocity v (m/(8)) cannot be obtained, and high output of the laser cannot be expected.
本発明の実施例は、上記欠点全克服するため、第２図に
示すように、管軸方向に均一な内径全有する放電管５０
と、同じ均一な内径全有する放電管５１と、１字形管９
とが互いに管軸方向に配列され、放電管５０，５１Ｖｒ
−はそれぞれピン状電極３と円筒状電極４が形成され、
これら電極間（放電領域６）で放電が行われる。１字形
管９は放電管５０と５１との間に配置され、一部でレー
ザガス排出部８０を形成し、内部に中管１ｏｔ−有する
。In order to overcome all of the above-mentioned drawbacks, the embodiment of the present invention provides a discharge tube 50 having a uniform inner diameter in the tube axis direction, as shown in FIG.
, a discharge tube 51 having the same uniform inner diameter, and a single-shaped tube 9
are arranged in the tube axis direction, and the discharge tubes 50, 51Vr
− is formed with a pin-shaped electrode 3 and a cylindrical electrode 4, respectively;
Discharge occurs between these electrodes (discharge region 6). The single-shaped tube 9 is disposed between the discharge tubes 50 and 51, forms a laser gas discharge part 80 in part, and has a middle tube inside.
この中管に、１字形管中の放電領域外（円筒状電極間）
に配置され、その管軸は、放電管５０および放電管５１
の管軸と一致する。放電管５０および５１の端部には、
レーザガス給入部７０が形成されレーザガスは給入部７
０から排出部８０へ流れる。排出部７０は給入部として
また給入部８０は排出部として使用してもよい。In this middle tube, outside the discharge area in the 1-shaped tube (between the cylindrical electrodes)
The tube axis is located between the discharge tube 50 and the discharge tube 51.
coincides with the tube axis. At the ends of the discharge tubes 50 and 51,
A laser gas inlet 70 is formed and the laser gas is supplied to the inlet 7.
0 to the discharge section 80. The discharge section 70 may be used as an input section, and the input section 80 may be used as an output section.
本実施例は、高次モード抑制効果を１字形管９内の中管
１０に持たせている。すなわち中管ｌＯは、放電により
発生したレーザビームのうち状態の比較的安定な光軸付
近のビーム全敗シ出し、低次モードのレーザビーム會得
ている。このため放電管５０及びガス給入部７０ （８
０）、ガス排出部８０（７０）の内径を太く出来るだけ
でなく、放電体積も増大できる。その結果、放電領域６
内のレーザガスに対するコンダクタンスが界キ＜なシ所
望のガス流速ｖ’（ｍ／（８））が得られると共に、放
電体積の増大により高出力が得られるだけでなく、低次
モードのレーザビームを得ることが出来る。またＴ字状
レーザ管−９？放電管５０から自由に取りはずせるよう
にすれば、中管の選択、交換を容易に行なうことができ
る。In this embodiment, the middle tube 10 within the single-shaped tube 9 has a higher-order mode suppressing effect. In other words, the middle tube 1O removes all of the laser beam generated by the discharge near the optical axis, where the state is relatively stable, and obtains a low-order mode laser beam. Therefore, the discharge tube 50 and the gas supply section 70 (8
0), not only can the inner diameter of the gas discharge part 80 (70) be increased, but also the discharge volume can be increased. As a result, the discharge area 6
Since the conductance to the laser gas in the chamber is less than the limit, the desired gas flow velocity v' (m/(8)) can be obtained, and not only can high output be obtained by increasing the discharge volume, but also a low-order mode laser beam can be obtained. You can get it. Also, T-shaped laser tube-9? If the inner tube can be freely removed from the discharge tube 50, selection and replacement of the inner tube can be easily performed.
なお、全反射ミラー（あるいは出力ミラー）ｌまたは出
力ミラー（あるいは全反射ミラー）２の近傍の放電領域
外にそれぞれ中管ｌｏａ、１０ｂ全配置しても同じ効果
が得られる。Note that the same effect can be obtained even if the middle tubes loa and 10b are entirely disposed outside the discharge area near the total reflection mirror (or output mirror) l or the output mirror (or total reflection mirror) 2, respectively.
以上説明したように本発明では、レーザ管の非放電領域
にレーザ管よ）小さい内径の中管が配置嘔れるため、レ
ーザ管の内径金小さくする必要がなくなり、低次モード
でかつ高出力のレーザ光が得られる。As explained above, in the present invention, since the medium tube with a small inner diameter (as compared to the laser tube) is placed in the non-discharge area of the laser tube, there is no need to reduce the inner diameter of the laser tube. Laser light is obtained.
第１図は従来の高速軸流形ガスレーザ発振器の概略側面
図、第２図は本発明の実施例の概略側面図である。１・・・・・・全反射ミラー（出力ミラー）、２・・・
・・・出力ミラー（全反射ミラー）、３・・・・・・ピ
ン状電極、４・・・・・・円筒状電極、５．５’・・・
・・・放電管、６．６’・・・・・・放電領域、７．７
’・・・・・・レーザガス給入部（レーザガス排出部）
、８．８’・・・−・・レーザガス排出部（レーザガス
給入部）％ ９・・・・・・Ｔ字状レーザ管、１０．１
０’・・・・・・中管。FIG. 1 is a schematic side view of a conventional high-speed axial flow type gas laser oscillator, and FIG. 2 is a schematic side view of an embodiment of the present invention. 1... Total reflection mirror (output mirror), 2...
...Output mirror (total reflection mirror), 3...Pin-shaped electrode, 4...Cylindrical electrode, 5.5'...
...Discharge tube, 6.6'...Discharge area, 7.7
'...Laser gas supply section (laser gas discharge section)
, 8.8'...- Laser gas discharge part (laser gas inlet part)% 9...T-shaped laser tube, 10.1
0'・・・Medium tube.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18475183AJPS6076181A (en) | 1983-10-03 | 1983-10-03 | High-speed axial flow type gas laser oscillator |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18475183AJPS6076181A (en) | 1983-10-03 | 1983-10-03 | High-speed axial flow type gas laser oscillator |
| Publication Number | Publication Date |
|---|---|
| JPS6076181Atrue JPS6076181A (en) | 1985-04-30 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18475183APendingJPS6076181A (en) | 1983-10-03 | 1983-10-03 | High-speed axial flow type gas laser oscillator |
| Country | Link |
|---|---|
| JP (1) | JPS6076181A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0518049U (en)* | 1991-08-09 | 1993-03-05 | 澁谷工業株式会社 | Laser oscillator |
| US7291262B2 (en) | 2000-05-25 | 2007-11-06 | Hokukon Co., Ltd. | Road surface waste water treatment device and tubular water treatment unit |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57188892A (en)* | 1981-05-18 | 1982-11-19 | Matsushita Electric Ind Co Ltd | Coaxial carbon dioxide laser oscillator |
| JPS5840351A (en)* | 1981-09-03 | 1983-03-09 | Dainippon Ink & Chem Inc | Curable resin composition |
| JPS5840353A (en)* | 1981-08-21 | 1983-03-09 | カセラ・アクチエンゲゼルシヤフト | Dye, dye blend and method of dyeing and printing high molecular hydrophobic material |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57188892A (en)* | 1981-05-18 | 1982-11-19 | Matsushita Electric Ind Co Ltd | Coaxial carbon dioxide laser oscillator |
| JPS5840353A (en)* | 1981-08-21 | 1983-03-09 | カセラ・アクチエンゲゼルシヤフト | Dye, dye blend and method of dyeing and printing high molecular hydrophobic material |
| JPS5840351A (en)* | 1981-09-03 | 1983-03-09 | Dainippon Ink & Chem Inc | Curable resin composition |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0518049U (en)* | 1991-08-09 | 1993-03-05 | 澁谷工業株式会社 | Laser oscillator |
| US7291262B2 (en) | 2000-05-25 | 2007-11-06 | Hokukon Co., Ltd. | Road surface waste water treatment device and tubular water treatment unit |
| Publication | Publication Date | Title |
|---|---|---|
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