第1図は本考案の一実施例によるキーボードスイッチの
概念的な要部断面構成図、第2図はスイッチオン状態を
概念的に示す説明図である。1・・・・・・キーボードスイッチ本体、2,3・・・
・・・絶縁シート、4・・・・・・スペーサ、5・・・
・・・透L 6,7・・・・・・接点パターン、8・・
・・・・操作板、9,10・・・・・・極性の異なる永
久磁石、12・・・・・・永久磁石、13.14・・・
・・田ツク用磁石、15・・・・・・ケース。FIG. 1 is a conceptual sectional view of the main parts of a keyboard switch according to an embodiment of the present invention, and FIG. 2 is an explanatory diagram conceptually showing the switch-on state. 1... Keyboard switch body, 2, 3...
...Insulating sheet, 4...Spacer, 5...
...Transparent L 6,7...Contact pattern, 8...
...Operation board, 9,10...Permanent magnet with different polarity, 12...Permanent magnet, 13.14...
...Tatsuku magnet, 15...Case.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8073884UJPS60192333U (en) | 1984-05-31 | 1984-05-31 | keyboard switch |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8073884UJPS60192333U (en) | 1984-05-31 | 1984-05-31 | keyboard switch |
| Publication Number | Publication Date |
|---|---|
| JPS60192333Utrue JPS60192333U (en) | 1985-12-20 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8073884UPendingJPS60192333U (en) | 1984-05-31 | 1984-05-31 | keyboard switch |
| Country | Link |
|---|---|
| JP (1) | JPS60192333U (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6871656B2 (en) | 1997-05-27 | 2005-03-29 | Tokyo Electron Limited | Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process |
| US6924086B1 (en) | 2002-02-15 | 2005-08-02 | Tokyo Electron Limited | Developing photoresist with supercritical fluid and developer |
| US6926012B2 (en) | 1999-11-02 | 2005-08-09 | Tokyo Electron Limited | Method for supercritical processing of multiple workpieces |
| US6928746B2 (en) | 2002-02-15 | 2005-08-16 | Tokyo Electron Limited | Drying resist with a solvent bath and supercritical CO2 |
| US7060422B2 (en) | 1999-11-02 | 2006-06-13 | Tokyo Electron Limited | Method of supercritical processing of a workpiece |
| US7140393B2 (en) | 2004-12-22 | 2006-11-28 | Tokyo Electron Limited | Non-contact shuttle valve for flow diversion in high pressure systems |
| US7163380B2 (en) | 2003-07-29 | 2007-01-16 | Tokyo Electron Limited | Control of fluid flow in the processing of an object with a fluid |
| US7208411B2 (en) | 2000-04-25 | 2007-04-24 | Tokyo Electron Limited | Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module |
| US7250374B2 (en) | 2004-06-30 | 2007-07-31 | Tokyo Electron Limited | System and method for processing a substrate using supercritical carbon dioxide processing |
| US7255772B2 (en) | 2000-07-26 | 2007-08-14 | Tokyo Electron Limited | High pressure processing chamber for semiconductor substrate |
| US7291565B2 (en) | 2005-02-15 | 2007-11-06 | Tokyo Electron Limited | Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid |
| US7307019B2 (en) | 2004-09-29 | 2007-12-11 | Tokyo Electron Limited | Method for supercritical carbon dioxide processing of fluoro-carbon films |
| US7387868B2 (en) | 2002-03-04 | 2008-06-17 | Tokyo Electron Limited | Treatment of a dielectric layer using supercritical CO2 |
| US7434590B2 (en) | 2004-12-22 | 2008-10-14 | Tokyo Electron Limited | Method and apparatus for clamping a substrate in a high pressure processing system |
| US7435447B2 (en) | 2005-02-15 | 2008-10-14 | Tokyo Electron Limited | Method and system for determining flow conditions in a high pressure processing system |
| US7442636B2 (en) | 2005-03-30 | 2008-10-28 | Tokyo Electron Limited | Method of inhibiting copper corrosion during supercritical CO2 cleaning |
| US7491036B2 (en) | 2004-11-12 | 2009-02-17 | Tokyo Electron Limited | Method and system for cooling a pump |
| US7524383B2 (en) | 2005-05-25 | 2009-04-28 | Tokyo Electron Limited | Method and system for passivating a processing chamber |
| US7550075B2 (en) | 2005-03-23 | 2009-06-23 | Tokyo Electron Ltd. | Removal of contaminants from a fluid |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6871656B2 (en) | 1997-05-27 | 2005-03-29 | Tokyo Electron Limited | Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process |
| US7060422B2 (en) | 1999-11-02 | 2006-06-13 | Tokyo Electron Limited | Method of supercritical processing of a workpiece |
| US6926012B2 (en) | 1999-11-02 | 2005-08-09 | Tokyo Electron Limited | Method for supercritical processing of multiple workpieces |
| US7208411B2 (en) | 2000-04-25 | 2007-04-24 | Tokyo Electron Limited | Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module |
| US7255772B2 (en) | 2000-07-26 | 2007-08-14 | Tokyo Electron Limited | High pressure processing chamber for semiconductor substrate |
| US6928746B2 (en) | 2002-02-15 | 2005-08-16 | Tokyo Electron Limited | Drying resist with a solvent bath and supercritical CO2 |
| US6924086B1 (en) | 2002-02-15 | 2005-08-02 | Tokyo Electron Limited | Developing photoresist with supercritical fluid and developer |
| US7044662B2 (en) | 2002-02-15 | 2006-05-16 | Tokyo Electron Limited | Developing photoresist with supercritical fluid and developer |
| US7387868B2 (en) | 2002-03-04 | 2008-06-17 | Tokyo Electron Limited | Treatment of a dielectric layer using supercritical CO2 |
| US7163380B2 (en) | 2003-07-29 | 2007-01-16 | Tokyo Electron Limited | Control of fluid flow in the processing of an object with a fluid |
| US7250374B2 (en) | 2004-06-30 | 2007-07-31 | Tokyo Electron Limited | System and method for processing a substrate using supercritical carbon dioxide processing |
| US7307019B2 (en) | 2004-09-29 | 2007-12-11 | Tokyo Electron Limited | Method for supercritical carbon dioxide processing of fluoro-carbon films |
| US7491036B2 (en) | 2004-11-12 | 2009-02-17 | Tokyo Electron Limited | Method and system for cooling a pump |
| US7434590B2 (en) | 2004-12-22 | 2008-10-14 | Tokyo Electron Limited | Method and apparatus for clamping a substrate in a high pressure processing system |
| US7140393B2 (en) | 2004-12-22 | 2006-11-28 | Tokyo Electron Limited | Non-contact shuttle valve for flow diversion in high pressure systems |
| US7291565B2 (en) | 2005-02-15 | 2007-11-06 | Tokyo Electron Limited | Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid |
| US7435447B2 (en) | 2005-02-15 | 2008-10-14 | Tokyo Electron Limited | Method and system for determining flow conditions in a high pressure processing system |
| US7550075B2 (en) | 2005-03-23 | 2009-06-23 | Tokyo Electron Ltd. | Removal of contaminants from a fluid |
| US7442636B2 (en) | 2005-03-30 | 2008-10-28 | Tokyo Electron Limited | Method of inhibiting copper corrosion during supercritical CO2 cleaning |
| US7524383B2 (en) | 2005-05-25 | 2009-04-28 | Tokyo Electron Limited | Method and system for passivating a processing chamber |
| Publication | Publication Date | Title |
|---|---|---|
| JPS60192333U (en) | keyboard switch | |
| JPS60192332U (en) | keyboard switch | |
| JPS60192331U (en) | keyboard switch | |
| JPS59159852U (en) | electromagnetic switch | |
| JPS59105728U (en) | keyboard switch | |
| JPS59175231U (en) | membrane keyboard switch | |
| JPS59105727U (en) | keyboard switch | |
| JPS5912235U (en) | panel switch | |
| JPS60124828U (en) | panel keyboard | |
| JPS61177317U (en) | ||
| JPS59158233U (en) | illuminated keyboard switch | |
| JPS588809U (en) | Thin switch | |
| JPS6144724U (en) | key input device | |
| JPS5967821U (en) | panel keyboard | |
| JPS60193633U (en) | Keyboard switch operation structure | |
| JPS5874732U (en) | Keyboard switch contact structure | |
| JPS614323U (en) | membrane switch | |
| JPS61188218U (en) | ||
| JPS5991635U (en) | keyboard device | |
| JPS5852729U (en) | side switch | |
| JPS5931739U (en) | keyboard switch | |
| JPS6139842U (en) | Seesaw switch mechanism | |
| JPS5838197U (en) | Key switch on player piano | |
| JPS5870635U (en) | slide switch | |
| JPS59231U (en) | operating device |