第1図は本考案の1実施態様の装置の立話面図である。第2図A、 Bは第1図に示す装置の撓み部材部の平面
図と立面断面図である。第3図は第、1図に示す装置の
作動状態を示す図である。これらの図において:10:ポンプシリンダー、21:
パケット、20:筒状ピストン、30:弾性手段、40
:逆止弁、50:棒状ピストン、52:パケット、90
:撓み部材。FIG. 1 is an elevational view of an apparatus according to one embodiment of the present invention. 2A and 2B are a plan view and an elevational sectional view of the flexure member portion of the apparatus shown in FIG. 1; FIG. 3 is a diagram showing the operating state of the apparatus shown in FIGS. In these figures: 10: pump cylinder, 21:
 Packet, 20: Cylindrical piston, 30: Elastic means, 40
 : Check valve, 50: Rod-shaped piston, 52: Packet, 90
 : Flexible member.
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP6668882UJPS58171264U (en) | 1982-05-10 | 1982-05-10 | manual fluid dispensing device | 
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP6668882UJPS58171264U (en) | 1982-05-10 | 1982-05-10 | manual fluid dispensing device | 
| Publication Number | Publication Date | 
|---|---|
| JPS58171264Utrue JPS58171264U (en) | 1983-11-15 | 
| JPS6246457Y2 JPS6246457Y2 (en) | 1987-12-15 | 
| Application Number | Title | Priority Date | Filing Date | 
|---|---|---|---|
| JP6668882UGrantedJPS58171264U (en) | 1982-05-10 | 1982-05-10 | manual fluid dispensing device | 
| Country | Link | 
|---|---|
| JP (1) | JPS58171264U (en) | 
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| US7014538B2 (en) | 1999-05-03 | 2006-03-21 | Applied Materials, Inc. | Article for polishing semiconductor substrates | 
| US7278911B2 (en) | 2000-02-17 | 2007-10-09 | Applied Materials, Inc. | Conductive polishing article for electrochemical mechanical polishing | 
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| US7125477B2 (en) | 2000-02-17 | 2006-10-24 | Applied Materials, Inc. | Contacts for electrochemical processing | 
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| US7059948B2 (en) | 2000-12-22 | 2006-06-13 | Applied Materials | Articles for polishing semiconductor substrates | 
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| Publication number | Publication date | 
|---|---|
| JPS6246457Y2 (en) | 1987-12-15 | 
| Publication | Publication Date | Title | 
|---|---|---|
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