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JPS5584515A - Sodium fluoride trap - Google Patents

Sodium fluoride trap

Info

Publication number
JPS5584515A
JPS5584515AJP14541078AJP14541078AJPS5584515AJP S5584515 AJPS5584515 AJP S5584515AJP 14541078 AJP14541078 AJP 14541078AJP 14541078 AJP14541078 AJP 14541078AJP S5584515 AJPS5584515 AJP S5584515A
Authority
JP
Japan
Prior art keywords
filled layer
gas
layer
naf
saturation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14541078A
Other languages
Japanese (ja)
Inventor
Fumio Kawamura
Chikara Sato
Itaru Komori
Tomihiro Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP14541078ApriorityCriticalpatent/JPS5584515A/en
Publication of JPS5584515ApublicationCriticalpatent/JPS5584515A/en
Pendinglegal-statusCriticalCurrent

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Abstract

PURPOSE: To detect an adequate time to change NaF pellets by a method wherein the presence of corrosive gas in a mixed gas is detected by two constant-voltage brigdes installed on top of NaF filled layer and in the space immediately above this filled layer.
CONSTITUTION: Conductive fine metal wires such as nickel fine wires 5, 5 are installed on top of NaF filled layer 2 and in the space immediately above this layer. The metal wire 5, 5, compensation resistors 6, 6 a constant voltage circuit 7, a bridge current detection circuit 8, and a detector 9 are used to form a bridge type detection circuit. When gas to be treated which contains corrosive gas is supplied from the inlet 2 into the filled layer 2, the filled layer 2 adsorbes gas until saturation. The saturation starts with bottom layer toward the top, and when adsorption saturation reaches the fine metal wires 5, differential thermal conductivity causes bridge current to deviate, thus allowing detection of time for changing filled layer.
COPYRIGHT: (C)1980,JPO&Japio
JP14541078A1978-11-271978-11-27Sodium fluoride trapPendingJPS5584515A (en)

Priority Applications (1)

Application NumberPriority DateFiling DateTitle
JP14541078AJPS5584515A (en)1978-11-271978-11-27Sodium fluoride trap

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
JP14541078AJPS5584515A (en)1978-11-271978-11-27Sodium fluoride trap

Publications (1)

Publication NumberPublication Date
JPS5584515Atrue JPS5584515A (en)1980-06-25

Family

ID=15384606

Family Applications (1)

Application NumberTitlePriority DateFiling Date
JP14541078APendingJPS5584515A (en)1978-11-271978-11-27Sodium fluoride trap

Country Status (1)

CountryLink
JP (1)JPS5584515A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US5685895A (en)*1994-08-101997-11-11Nikon CorporationAir cleaning apparatus used for an exposure apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US5685895A (en)*1994-08-101997-11-11Nikon CorporationAir cleaning apparatus used for an exposure apparatus

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