JPS55129740A - Detector for external atmosphere - Google Patents

Abstract

PURPOSE: To enable to use the gas sensing material even with high resistance without hindrance and to enable small size and low power consumption, with the constitution that the film of which dielectric factor or conductivity is changed with the gas or vapor concentration in the atmosphere is inserted between the transfer electrode of CTD and insulation layer.

CONSTITUTION: The charge injection electrode 1 and the charge pickup electrode 4 are provided on one semiconductor substrate 2 via the diffusion layers 3 and 5, two or more transfer electrodes 6, 7 are provided between the both electrodes 1 and 4 via the insulation layer 9, and the charge injected from the injection electrode 1 is transferred to the pickup electrode 4. Under the injection electrode side of the both transfer electrodes 6 and 7, the atmosphere sensing material 8 in which the dielectric factor or conductivity is changed with the effect of external atmosphere and the amount of charge transferred with the transfer electrode is changed is provided between the insulation layers 9 so that the charge transfer path of semiconductor is substantially crossed.

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