Movatterモバイル変換

[0]ホーム
URL:

JPS5416280B2 - - Google Patents

Info

Publication number
JPS5416280B2
JPS5416280B2JP721900AJP190072AJPS5416280B2JP S5416280 B2JPS5416280 B2JP S5416280B2JP 721900 AJP721900 AJP 721900AJP 190072 AJP190072 AJP 190072AJP S5416280 B2JPS5416280 B2JP S5416280B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP721900A
Other languages
Japanese (ja)
Other versions
JPS4874393A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filedfiledCritical
Priority to JP721900ApriorityCriticalpatent/JPS5416280B2/ja
Publication of JPS4874393ApublicationCriticalpatent/JPS4874393A/ja
Publication of JPS5416280B2publicationCriticalpatent/JPS5416280B2/ja
Expiredlegal-statusCriticalCurrent

Links

Landscapes

JP721900A1971-12-301971-12-30ExpiredJPS5416280B2 (en)

Priority Applications (1)

Application NumberPriority DateFiling DateTitle
JP721900AJPS5416280B2 (en)1971-12-301971-12-30

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
JP721900AJPS5416280B2 (en)1971-12-301971-12-30

Publications (2)

Publication NumberPublication Date
JPS4874393A JPS4874393A (en)1973-10-06
JPS5416280B2true JPS5416280B2 (en)1979-06-21

Family

ID=11514441

Family Applications (1)

Application NumberTitlePriority DateFiling Date
JP721900AExpiredJPS5416280B2 (en)1971-12-301971-12-30

Country Status (1)

CountryLink
JP (1)JPS5416280B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US9972504B2 (en)2015-08-072018-05-15Lam Research CorporationAtomic layer etching of tungsten for enhanced tungsten deposition fill
US9991128B2 (en)2016-02-052018-06-05Lam Research CorporationAtomic layer etching in continuous plasma
US10096487B2 (en)2015-08-192018-10-09Lam Research CorporationAtomic layer etching of tungsten and other metals
US10998187B2 (en)2017-04-192021-05-04Lam Research CorporationSelective deposition with atomic layer etch reset

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JPS50154379U (en)*1974-06-061975-12-22

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US3017302A (en)*1958-01-311962-01-16Milprint IncArt of packaging commodities
BE754507A (en)*1969-08-081971-02-08Dow Chemical Co PERFECTED ARTICLE PACKAGING PROCESS

Cited By (4)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US9972504B2 (en)2015-08-072018-05-15Lam Research CorporationAtomic layer etching of tungsten for enhanced tungsten deposition fill
US10096487B2 (en)2015-08-192018-10-09Lam Research CorporationAtomic layer etching of tungsten and other metals
US9991128B2 (en)2016-02-052018-06-05Lam Research CorporationAtomic layer etching in continuous plasma
US10998187B2 (en)2017-04-192021-05-04Lam Research CorporationSelective deposition with atomic layer etch reset

Also Published As

Publication numberPublication date
JPS4874393A (en)1973-10-06

Similar Documents

PublicationPublication DateTitle
ATA136472A (en)
AR196074A1 (en)
JPS5416280B2 (en)
AU2658571A (en)
AU2691671A (en)
AU2941471A (en)
AU2952271A (en)
AU3005371A (en)
AU2894671A (en)
AU2930871A (en)
AR199640Q (en)
AU2854371A (en)
AU2399971A (en)
AU1109576A (en)
AU2875571A (en)
AR202997Q (en)
AU2880771A (en)
AU2885171A (en)
AU2577671A (en)
AU2486471A (en)
AU2940971A (en)
AU2415871A (en)
AU2456871A (en)
AU2907471A (en)
AR192311Q (en)
[8]ページ先頭
©2009-2025 Movatter.jp