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JPS5378066A - Method of producing conductive thin film line - Google Patents

Method of producing conductive thin film line

Info

Publication number
JPS5378066A
JPS5378066AJP15334776AJP15334776AJPS5378066AJP S5378066 AJPS5378066 AJP S5378066AJP 15334776 AJP15334776 AJP 15334776AJP 15334776 AJP15334776 AJP 15334776AJP S5378066 AJPS5378066 AJP S5378066A
Authority
JP
Japan
Prior art keywords
thin film
conductive thin
film line
producing conductive
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15334776A
Other languages
Japanese (ja)
Other versions
JPS5730319B2 (en
Inventor
Shiyouzou Takeno
Masakazu Iwagami
Shiyuuzou Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Marcon Electronics Co Ltd
Toshiba Corp
Original Assignee
Marcon Electronics Co Ltd
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marcon Electronics Co Ltd, Tokyo Shibaura Electric Co LtdfiledCriticalMarcon Electronics Co Ltd
Priority to JP15334776ApriorityCriticalpatent/JPS5378066A/en
Publication of JPS5378066ApublicationCriticalpatent/JPS5378066A/en
Publication of JPS5730319B2publicationCriticalpatent/JPS5730319B2/ja
Grantedlegal-statusCriticalCurrent

Links

Landscapes

JP15334776A1976-12-221976-12-22Method of producing conductive thin film lineGrantedJPS5378066A (en)

Priority Applications (1)

Application NumberPriority DateFiling DateTitle
JP15334776AJPS5378066A (en)1976-12-221976-12-22Method of producing conductive thin film line

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
JP15334776AJPS5378066A (en)1976-12-221976-12-22Method of producing conductive thin film line

Publications (2)

Publication NumberPublication Date
JPS5378066Atrue JPS5378066A (en)1978-07-11
JPS5730319B2 JPS5730319B2 (en)1982-06-28

Family

ID=15560476

Family Applications (1)

Application NumberTitlePriority DateFiling Date
JP15334776AGrantedJPS5378066A (en)1976-12-221976-12-22Method of producing conductive thin film line

Country Status (1)

CountryLink
JP (1)JPS5378066A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JPS57198696A (en)*1981-06-011982-12-06Shimada Rika Kogyo KkMethod of producing thin film circuit
JPS61212044A (en)*1985-03-181986-09-20Tdk CorpFormation of copper electrode on oxide ceramic
CN108183069A (en)*2017-12-282018-06-19苏州工业园区纳米产业技术研究院有限公司Cu wet etching methods

Cited By (3)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JPS57198696A (en)*1981-06-011982-12-06Shimada Rika Kogyo KkMethod of producing thin film circuit
JPS61212044A (en)*1985-03-181986-09-20Tdk CorpFormation of copper electrode on oxide ceramic
CN108183069A (en)*2017-12-282018-06-19苏州工业园区纳米产业技术研究院有限公司Cu wet etching methods

Also Published As

Publication numberPublication date
JPS5730319B2 (en)1982-06-28

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