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JPS5349959A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5349959A
JPS5349959AJP12471576AJP12471576AJPS5349959AJP S5349959 AJPS5349959 AJP S5349959AJP 12471576 AJP12471576 AJP 12471576AJP 12471576 AJP12471576 AJP 12471576AJP S5349959 AJPS5349959 AJP S5349959A
Authority
JP
Japan
Prior art keywords
conductor
diffusion
window
manufacture
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12471576A
Other languages
Japanese (ja)
Inventor
Satoru Fukano
Hikosuke Shibayama
Hajime Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu LtdfiledCriticalFujitsu Ltd
Priority to JP12471576ApriorityCriticalpatent/JPS5349959A/en
Publication of JPS5349959ApublicationCriticalpatent/JPS5349959A/en
Pendinglegal-statusCriticalCurrent

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Abstract

PURPOSE: A diffusion mask containing two diffusion windows is formed on a single conductor-type semiconductor substrate, and the glass layer containing the adverse conductor-type impurity is provided on the first window and the glass layer containing the single conductor-type impurity along with Si3N4 film are provided on the second window. Then a heat treatment is conducted under N2 atmosphere containing O2: Thus, the different conductor-type regions can be formed through diffusion at one time.
COPYRIGHT: (C)1978,JPO&Japio
JP12471576A1976-10-181976-10-18Manufacture of semiconductor devicePendingJPS5349959A (en)

Priority Applications (1)

Application NumberPriority DateFiling DateTitle
JP12471576AJPS5349959A (en)1976-10-181976-10-18Manufacture of semiconductor device

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
JP12471576AJPS5349959A (en)1976-10-181976-10-18Manufacture of semiconductor device

Publications (1)

Publication NumberPublication Date
JPS5349959Atrue JPS5349959A (en)1978-05-06

Family

ID=14892304

Family Applications (1)

Application NumberTitlePriority DateFiling Date
JP12471576APendingJPS5349959A (en)1976-10-181976-10-18Manufacture of semiconductor device

Country Status (1)

CountryLink
JP (1)JPS5349959A (en)

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