JPS5324783Y2 - - Google Patents

Info

Publication number: JPS5324783Y2
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Other versions

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1975-08-22

Filing date

1975-08-22

Publication date

1978-06-24

1975-08-22Application filedfiledCritical

1975-08-22Priority to JP11614075UpriorityCriticalpatent/JPS5324783Y2/ja

1977-03-02Publication of JPS5230079UpublicationCriticalpatent/JPS5230079U/ja

1978-06-24Application grantedgrantedCritical

1978-06-24Publication of JPS5324783Y2publicationCriticalpatent/JPS5324783Y2/ja

StatusExpiredlegal-statusCriticalCurrent

Landscapes

De-Stacking Of Articles (AREA)

JP11614075U1975-08-221975-08-22ExpiredJPS5324783Y2 (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP11614075UJPS5324783Y2 (en)	1975-08-22	1975-08-22

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP11614075UJPS5324783Y2 (en)	1975-08-22	1975-08-22

Publications (2)

Publication Number	Publication Date
JPS5230079U JPS5230079U (en)	1977-03-02
JPS5324783Y2true JPS5324783Y2 (en)	1978-06-24

Family

ID=28597070

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP11614075UExpiredJPS5324783Y2 (en)	1975-08-22	1975-08-22

Country Status (1)

Country	Link
JP (1)	JPS5324783Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US9337071B2 (en)	1998-07-15	2016-05-10	Rudolph Technologies, Inc.	Automated wafer defect inspection system and a process of performing such inspection

1975
- 1975-08-22JPJP11614075Upatent/JPS5324783Y2/janot_activeExpired

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US9337071B2 (en)	1998-07-15	2016-05-10	Rudolph Technologies, Inc.	Automated wafer defect inspection system and a process of performing such inspection
US9464992B2 (en)	1998-07-15	2016-10-11	Rudolph Technologies, Inc.	Automated wafer defect inspection system and a process of performing such inspection

Also Published As

Publication number	Publication date
JPS5230079U (en)	1977-03-02

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