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JPS53102792A - Simultaneous inspecting apparatus of inside and outside of body to be inspected - Google Patents

Simultaneous inspecting apparatus of inside and outside of body to be inspected

Info

Publication number
JPS53102792A
JPS53102792AJP1711777AJP1711777AJPS53102792AJP S53102792 AJPS53102792 AJP S53102792AJP 1711777 AJP1711777 AJP 1711777AJP 1711777 AJP1711777 AJP 1711777AJP S53102792 AJPS53102792 AJP S53102792A
Authority
JP
Japan
Prior art keywords
inspected
outside
simultaneous
inspecting apparatus
visual field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1711777A
Other languages
Japanese (ja)
Inventor
Kazuo Koga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP1711777ApriorityCriticalpatent/JPS53102792A/en
Publication of JPS53102792ApublicationCriticalpatent/JPS53102792A/en
Pendinglegal-statusCriticalCurrent

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Abstract

PURPOSE:To observe the defect as synthesized image in the same visual field, providing the light irradiating mechanism, made dark visual field by irradiating different color light on the inside and outside of the body to be inspected.
JP1711777A1977-02-211977-02-21Simultaneous inspecting apparatus of inside and outside of body to be inspectedPendingJPS53102792A (en)

Priority Applications (1)

Application NumberPriority DateFiling DateTitle
JP1711777AJPS53102792A (en)1977-02-211977-02-21Simultaneous inspecting apparatus of inside and outside of body to be inspected

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
JP1711777AJPS53102792A (en)1977-02-211977-02-21Simultaneous inspecting apparatus of inside and outside of body to be inspected

Publications (1)

Publication NumberPublication Date
JPS53102792Atrue JPS53102792A (en)1978-09-07

Family

ID=11935085

Family Applications (1)

Application NumberTitlePriority DateFiling Date
JP1711777APendingJPS53102792A (en)1977-02-211977-02-21Simultaneous inspecting apparatus of inside and outside of body to be inspected

Country Status (1)

CountryLink
JP (1)JPS53102792A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JPS56121150U (en)*1980-02-181981-09-16
JPS5767844A (en)*1980-10-151982-04-24Nippon Kogaku Kk <Nikon>Surface inspecting device
JP2006194898A (en)*2005-01-132006-07-27Komag IncMethod and device for reducing or removing stray light of optical test head
JP2006220656A (en)*2005-01-132006-08-24Komag IncTest head for optically inspecting workpiece
JP2014157085A (en)*2013-02-152014-08-28Dainippon Screen Mfg Co LtdPattern inspection device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JPS56121150U (en)*1980-02-181981-09-16
JPS5767844A (en)*1980-10-151982-04-24Nippon Kogaku Kk <Nikon>Surface inspecting device
JP2006194898A (en)*2005-01-132006-07-27Komag IncMethod and device for reducing or removing stray light of optical test head
JP2006220656A (en)*2005-01-132006-08-24Komag IncTest head for optically inspecting workpiece
JP2014157085A (en)*2013-02-152014-08-28Dainippon Screen Mfg Co LtdPattern inspection device

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