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JPS5266884A - Process for forming film on base material - Google Patents

Process for forming film on base material

Info

Publication number
JPS5266884A
JPS5266884AJP14371375AJP14371375AJPS5266884AJP S5266884 AJPS5266884 AJP S5266884AJP 14371375 AJP14371375 AJP 14371375AJP 14371375 AJP14371375 AJP 14371375AJP S5266884 AJPS5266884 AJP S5266884A
Authority
JP
Japan
Prior art keywords
base material
forming film
film
efficientlyby
materaial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14371375A
Other languages
Japanese (ja)
Other versions
JPS5428313B2 (en
Inventor
Yoshihiro Imamura
Kazushige Minegishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone CorpfiledCriticalNippon Telegraph and Telephone Corp
Priority to JP14371375ApriorityCriticalpatent/JPS5266884A/en
Publication of JPS5266884ApublicationCriticalpatent/JPS5266884A/en
Publication of JPS5428313B2publicationCriticalpatent/JPS5428313B2/ja
Grantedlegal-statusCriticalCurrent

Links

Classifications

Landscapes

Abstract

PURPOSE:To form a film efficientlyby use of a small size apparatus by heating base materaial locally on which a film is formed and directing raw materail gas only to the heated area.
JP14371375A1975-12-011975-12-01Process for forming film on base materialGrantedJPS5266884A (en)

Priority Applications (1)

Application NumberPriority DateFiling DateTitle
JP14371375AJPS5266884A (en)1975-12-011975-12-01Process for forming film on base material

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
JP14371375AJPS5266884A (en)1975-12-011975-12-01Process for forming film on base material

Publications (2)

Publication NumberPublication Date
JPS5266884Atrue JPS5266884A (en)1977-06-02
JPS5428313B2 JPS5428313B2 (en)1979-09-14

Family

ID=15345237

Family Applications (1)

Application NumberTitlePriority DateFiling Date
JP14371375AGrantedJPS5266884A (en)1975-12-011975-12-01Process for forming film on base material

Country Status (1)

CountryLink
JP (1)JPS5266884A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JPS5645759A (en)*1979-09-201981-04-25Matsushita Electric Ind Co LtdPreparation of vapor growth film
JPS5973045A (en)*1982-10-191984-04-25Inoue Japax Res IncSurface coating method
JPS61136680A (en)*1984-12-081986-06-24Inoue Japax Res IncFormation of thin silicon carbide film
JPS62136017A (en)*1985-12-101987-06-19Stanley Electric Co Ltd Method for manufacturing amorphous silicon by laser-excited CVD method
US5316970A (en)*1990-08-231994-05-31International Business Machines CorporationGeneration of ionized air for semiconductor chips

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US20200049866A1 (en)*2018-08-132020-02-13Chien-Chin MAIOptical film and backlight module using same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JPS5645759A (en)*1979-09-201981-04-25Matsushita Electric Ind Co LtdPreparation of vapor growth film
JPS5973045A (en)*1982-10-191984-04-25Inoue Japax Res IncSurface coating method
JPS61136680A (en)*1984-12-081986-06-24Inoue Japax Res IncFormation of thin silicon carbide film
JPS62136017A (en)*1985-12-101987-06-19Stanley Electric Co Ltd Method for manufacturing amorphous silicon by laser-excited CVD method
US5316970A (en)*1990-08-231994-05-31International Business Machines CorporationGeneration of ionized air for semiconductor chips
US5432670A (en)*1990-08-231995-07-11International Business Machines CorporationGeneration of ionized air for semiconductor chips

Also Published As

Publication numberPublication date
JPS5428313B2 (en)1979-09-14

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