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JPS5258373A - Inspection for defects of pattern forming film - Google Patents

Inspection for defects of pattern forming film

Info

Publication number
JPS5258373A
JPS5258373AJP13384575AJP13384575AJPS5258373AJP S5258373 AJPS5258373 AJP S5258373AJP 13384575 AJP13384575 AJP 13384575AJP 13384575 AJP13384575 AJP 13384575AJP S5258373 AJPS5258373 AJP S5258373A
Authority
JP
Japan
Prior art keywords
defects
inspection
pattern forming
forming film
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13384575A
Other languages
Japanese (ja)
Inventor
Yoshiaki Goto
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu LtdfiledCriticalFujitsu Ltd
Priority to JP13384575ApriorityCriticalpatent/JPS5258373A/en
Publication of JPS5258373ApublicationCriticalpatent/JPS5258373A/en
Pendinglegal-statusCriticalCurrent

Links

Classifications

Landscapes

Abstract

PURPOSE:To detect the defects of a pattern film by scanning the film with electron beams and detecting the secondary electrons emitted from the film.
JP13384575A1975-11-071975-11-07Inspection for defects of pattern forming filmPendingJPS5258373A (en)

Priority Applications (1)

Application NumberPriority DateFiling DateTitle
JP13384575AJPS5258373A (en)1975-11-071975-11-07Inspection for defects of pattern forming film

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
JP13384575AJPS5258373A (en)1975-11-071975-11-07Inspection for defects of pattern forming film

Publications (1)

Publication NumberPublication Date
JPS5258373Atrue JPS5258373A (en)1977-05-13

Family

ID=15114369

Family Applications (1)

Application NumberTitlePriority DateFiling Date
JP13384575APendingJPS5258373A (en)1975-11-071975-11-07Inspection for defects of pattern forming film

Country Status (1)

CountryLink
JP (1)JPS5258373A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JPS55140230A (en)*1979-04-201980-11-01Hitachi LtdPattern-correcting device
JPS5637626A (en)*1979-09-051981-04-11Chiyou Lsi Gijutsu Kenkyu KumiaiInspection device for pattern
JPS56100416A (en)*1980-01-161981-08-12Fujitsu LtdMethod and device for correcting mask
JPS5961136A (en)*1982-09-301984-04-07Toshiba CorpMask defect inspecting device
JPS59155941A (en)*1983-02-251984-09-05Hitachi LtdElectron-beam inspection device
JPS62158450U (en)*1986-03-311987-10-08
JPH09213255A (en)*1997-01-201997-08-15Hitachi Ltd Defect inspection equipment

Cited By (7)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JPS55140230A (en)*1979-04-201980-11-01Hitachi LtdPattern-correcting device
JPS5637626A (en)*1979-09-051981-04-11Chiyou Lsi Gijutsu Kenkyu KumiaiInspection device for pattern
JPS56100416A (en)*1980-01-161981-08-12Fujitsu LtdMethod and device for correcting mask
JPS5961136A (en)*1982-09-301984-04-07Toshiba CorpMask defect inspecting device
JPS59155941A (en)*1983-02-251984-09-05Hitachi LtdElectron-beam inspection device
JPS62158450U (en)*1986-03-311987-10-08
JPH09213255A (en)*1997-01-201997-08-15Hitachi Ltd Defect inspection equipment

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