Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Electronic Materials Corp
Original Assignee
Japan Electronic Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Electronic Materials CorpfiledCriticalJapan Electronic Materials Corp
Priority to JP8216575ApriorityCriticalpatent/JPS525580A/en
Publication of JPS525580ApublicationCriticalpatent/JPS525580A/en