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JPS5145337B2 - - Google Patents

Info

Publication number
JPS5145337B2
JPS5145337B2JP3397771AJP3397771AJPS5145337B2JP S5145337 B2JPS5145337 B2JP S5145337B2JP 3397771 AJP3397771 AJP 3397771AJP 3397771 AJP3397771 AJP 3397771AJP S5145337 B2JPS5145337 B2JP S5145337B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3397771A
Other languages
Japanese (ja)
Other versions
JPS4844833A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filedfiledCritical
Priority to JP3397771ApriorityCriticalpatent/JPS5145337B2/ja
Publication of JPS4844833ApublicationCriticalpatent/JPS4844833A/ja
Publication of JPS5145337B2publicationCriticalpatent/JPS5145337B2/ja
Expiredlegal-statusCriticalCurrent

Links

Landscapes

JP3397771A1971-05-211971-05-21ExpiredJPS5145337B2 (en)

Priority Applications (1)

Application NumberPriority DateFiling DateTitle
JP3397771AJPS5145337B2 (en)1971-05-211971-05-21

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
JP3397771AJPS5145337B2 (en)1971-05-211971-05-21

Publications (2)

Publication NumberPublication Date
JPS4844833A JPS4844833A (en)1973-06-27
JPS5145337B2true JPS5145337B2 (en)1976-12-03

Family

ID=12401533

Family Applications (1)

Application NumberTitlePriority DateFiling Date
JP3397771AExpiredJPS5145337B2 (en)1971-05-211971-05-21

Country Status (1)

CountryLink
JP (1)JPS5145337B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JPH0639358B2 (en)*1984-11-271994-05-25ソニー株式会社 Metalorganic vapor phase growth equipment
JPH02149769U (en)*1989-05-181990-12-21

Also Published As

Publication numberPublication date
JPS4844833A (en)1973-06-27

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