| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4892275UJPS55941Y2 (en) | 1975-04-11 | 1975-04-11 |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4892275UJPS55941Y2 (en) | 1975-04-11 | 1975-04-11 |
| Publication Number | Publication Date |
|---|---|
| JPS51137379Utrue JPS51137379U (en) | 1976-11-05 |
| JPS55941Y2 JPS55941Y2 (en) | 1980-01-11 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4892275UExpiredJPS55941Y2 (en) | 1975-04-11 | 1975-04-11 |
| Country | Link |
|---|---|
| JP (1) | JPS55941Y2 (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9337071B2 (en) | 1998-07-15 | 2016-05-10 | Rudolph Technologies, Inc. | Automated wafer defect inspection system and a process of performing such inspection |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9337071B2 (en) | 1998-07-15 | 2016-05-10 | Rudolph Technologies, Inc. | Automated wafer defect inspection system and a process of performing such inspection |
| US9464992B2 (en) | 1998-07-15 | 2016-10-11 | Rudolph Technologies, Inc. | Automated wafer defect inspection system and a process of performing such inspection |
| Publication number | Publication date |
|---|---|
| JPS55941Y2 (en) | 1980-01-11 |