【０００１】[0001]
【発明の属する技術分野】本発明は、広くはマイクロマ
シンの技術分野に属し、狭くは顕微鏡等に使用されるレ
ンズのパワー（度または度数）が連続的に可変である可
変焦点レンズの技術分野に属する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention generally belongs to the technical field of micromachines, and more specifically to the technical field of variable focus lenses in which the power (degree or degree) of a lens used for a microscope or the like is continuously variable. Belong.
【０００２】[0002]
【従来の技術】従来技術としては、特開昭６０−５７３
０８号公報に開示されているように、透明弾性膜をもつ
容器に透明液体を封入し、その透明液体の圧力を圧電素
子等のアクチュエータを用いて変化させることにより、
レンズの形状を変えて焦点を可変とする可変焦点レンズ
が公知である。また、特開平６−３０８３０３号公報に
は、前述の従来技術の可変焦点レンズに適正な膜厚分布
をもって形成されている透明弾性板を用い、より大きな
有効口径が得られる可変焦点レンズが開示されている。2. Description of the Related Art The prior art is disclosed in Japanese Patent Application Laid-Open No. 60-573.
As disclosed in Japanese Patent Application Laid-Open No. 08-0838, by enclosing a transparent liquid in a container having a transparent elastic film, and changing the pressure of the transparent liquid using an actuator such as a piezoelectric element,
2. Description of the Related Art Variable focus lenses that change the focus by changing the shape of the lens are known. Japanese Patent Application Laid-Open No. Hei 6-308303 discloses a variable focus lens in which a larger effective aperture is obtained by using a transparent elastic plate formed with an appropriate film thickness distribution in the above-described conventional variable focus lens. ing.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、上記従
来技術の可変焦点レンズでは、透明液体の圧力を変えて
可変焦点レンズを駆動するためのアクチュエータが可変
焦点レンズの本体に付設されている。それゆえ、可変焦
点レンズの本体の体格が大きくなるとともに、アクチュ
エータおよびアクチュエータからの油路などを要するの
で、可変焦点レンズの価格も高くなりがちである。However, in the above variable focus lens of the prior art, an actuator for driving the variable focus lens by changing the pressure of the transparent liquid is attached to the main body of the variable focus lens. Therefore, the size of the main body of the varifocal lens becomes large, and an actuator and an oil path from the actuator are required, so that the price of the varifocal lens tends to be high.
【０００４】そればかりではなく、上記アクチュエータ
がピエゾ圧電素子を利用するピエゾアクチュエータであ
る可変焦点レンズにあっては、同圧電素子がもつヒステ
リシスやクリーピングなどの現象により、印加電圧と発
生圧力との関係が必ずしも一意ではなくなるという問題
を生じた。また、ピエゾアクチュエータの超小型化が困
難であり、かつ超小型化されたピエゾアクチュエータに
は十分に透明液体の圧力を変えるだけの能力が望めない
という二律背反の不都合をも、上記従来技術は抱えてい
た。In addition, in a variable focus lens in which the above-mentioned actuator is a piezo actuator using a piezo element, the applied voltage and the generated pressure are affected by phenomena such as hysteresis and creeping of the piezoelectric element. There has been a problem that relationships are not always unique. In addition, the above prior art has the disadvantage that it is difficult to miniaturize the piezo actuator and that the miniaturized piezo actuator cannot have the ability to sufficiently change the pressure of the transparent liquid. Was.
【０００５】そこで本発明は、本体の体格が小型化され
ているとともに価格が低廉化されている可変焦点レンズ
を提供することを、解決すべき課題とする。Accordingly, an object of the present invention is to provide a variable focus lens in which the body size is reduced and the price is reduced.
【０００６】[0006]
【課題を解決するための手段およびその作用・効果】上
記課題を解決するために、発明者は以下の手段を発明し
た。 （第１手段）本発明の第１手段は、請求項１記載の可変
焦点レンズである。本手段では、第１電極と導電性弾性
板との間に電位差を与えることにより、クーロン力によ
る吸引力を発生させて両者の間隔を狭めることができ
る。その結果、両者の間隔から排斥された透明液体の体
積をもって、透明弾性板の中央部分を透明液体に背向し
て凸に突出して変形させることが可能である。すると、
凸状に変形した透明弾性板と透明板と両者の間を満たし
ている透明液体とで凸レンズが形成される。この凸レン
ズのパワーは、上記電位差を調整することにより、所定
の範囲で調節が可能である。Means for Solving the Problems and Their Functions / Effects To solve the above problems, the inventor has invented the following means. (First Means) A first means of the present invention is a varifocal lens according to the first aspect. In this means, by applying a potential difference between the first electrode and the conductive elastic plate, a suction force due to Coulomb force can be generated, and the distance between the two can be reduced. As a result, it is possible to deform the central portion of the transparent elastic plate so as to protrude rearwardly to the transparent liquid with the volume of the transparent liquid rejected from the space between the two. Then
A convex lens is formed by the transparent elastic plate deformed into a convex shape, the transparent plate, and the transparent liquid filling the space therebetween. The power of the convex lens can be adjusted within a predetermined range by adjusting the potential difference.
【０００７】本手段では逆に、第１電極と導電性弾性板
とに同電位で高電圧を印加することにより、クーロン力
による排斥力を発生させて、両者の間隔を拡げることが
できる。その結果、両者の間隔に吸い込まれた透明液体
の陰圧作用により、透明弾性板の中央部分を透明液体に
背向して凹状にへこませて変形させることが可能であ
る。すると、凹状に変形した透明弾性板と透明板と両者
の間を満たしている透明液体とで凹レンズが形成され
る。この凹レンズのパワーは、上記電圧を調整すること
により、所定の範囲で調節が可能である。Conversely, in this means, by applying a high voltage to the first electrode and the conductive elastic plate at the same potential, a repulsive force due to Coulomb force is generated, and the distance between the two can be increased. As a result, due to the negative pressure effect of the transparent liquid sucked into the space between the two, it is possible to deform the central portion of the transparent elastic plate into a concave shape facing the transparent liquid. Then, a concave lens is formed by the transparent elastic plate deformed into a concave shape, the transparent plate, and the transparent liquid filling between the transparent elastic plate and the transparent plate. The power of the concave lens can be adjusted within a predetermined range by adjusting the voltage.
【０００８】ここで、第１電極および導電性弾性板は静
電アクチュエータを構成しており、前述の凸レンズおよ
び凹レンズのパワーは、同静電アクチュエータに印加す
る電圧の大小によって決まる。すなわち、本手段の可変
焦点レンズでは、本体に静電アクチュエータが組み込ま
れている構成を取っており、本体に別途付設されたピエ
ゾアクチュエータ等のアクチュエータを必要としない。
それゆえ、可変焦点レンズの小型化が可能であるばかり
ではなく、構成の簡素化による可変焦点レンズの価格の
低廉化が可能である。Here, the first electrode and the conductive elastic plate constitute an electrostatic actuator, and the power of the above-mentioned convex lens and concave lens is determined by the magnitude of the voltage applied to the electrostatic actuator. That is, the variable focus lens of the present means has a configuration in which the electrostatic actuator is incorporated in the main body, and does not require an actuator such as a piezo actuator separately attached to the main body.
Therefore, not only can the variable focus lens be miniaturized, but also the price of the variable focus lens can be reduced by simplifying the configuration.
【０００９】したがって本手段によれば、本体の体格が
小型化されているとともに価格が低廉化されている可変
焦点レンズを提供することができるという効果がある。
また、本手段の可変焦点レンズに組み込まれている静電
アクチュエータは、ピエゾアクチュエータと異なり、ヒ
ステリシスやクリーピング等の不都合な現象が生じない
ので、印加電圧とレンズのパワーとは一意に対応すると
いう効果もある。同様に、ピエゾアクチュエータを使用
せず、本体と一体型の静電アクチュエータを使用してい
るので、小型化に伴う制約が少なく、小型化が従来技術
よりもずっと容易であるという効果がある。Therefore, according to this means, it is possible to provide a variable focus lens in which the size of the main body is reduced and the price is reduced.
Also, unlike the piezo actuator, the electrostatic actuator incorporated in the variable focus lens of the present means does not cause any inconvenient phenomena such as hysteresis and creeping, so that the applied voltage and lens power uniquely correspond. There is also an effect. Similarly, since the piezoelectric actuator is not used and the electrostatic actuator integrated with the main body is used, there are few restrictions associated with miniaturization, and the miniaturization is much easier than in the related art.
【００１０】（第２手段）本発明の第２手段は、請求項
２記載の可変焦点レンズである。本手段では、第１電極
と第２電極との間に、両者とそれぞれ所定の間隔を空け
て導電性弾性板が介在している。それゆえ、導電性弾性
板と第２電極との間にも、前述の導電性弾性板と第１電
極との間に形成されている静電アクチュエータと同様の
静電アクチュエータが構成される。したがって、本手段
の可変焦点レンズにおいては、二重に静電アクチュエー
タが形成されているので、導電性弾性板を駆動して透明
弾性板を変形させる駆動力が、前述の第１手段に比べて
倍加している。(Second Means) A second means of the present invention is a varifocal lens according to the second aspect. In this means, a conductive elastic plate is interposed between the first electrode and the second electrode with a predetermined space therebetween. Therefore, an electrostatic actuator similar to the above-described electrostatic actuator formed between the conductive elastic plate and the first electrode is formed between the conductive elastic plate and the second electrode. Therefore, in the variable focus lens of this means, since the double electrostatic actuator is formed, the driving force for driving the conductive elastic plate to deform the transparent elastic plate is smaller than that of the first means. Is doubling.
【００１１】したがって本手段によれば、前述の第１手
段の効果に加えて、透明弾性板の変形が大きくなるので
前述の凸レンズおよび凹レンズのパワーの調整可能な範
囲が拡大するという効果がある。 （第３手段）本発明の第３手段は、請求項３記載の可変
焦点レンズである。Therefore, according to this means, in addition to the effect of the above-mentioned first means, since the deformation of the transparent elastic plate becomes large, there is an effect that the adjustable range of the power of the above-mentioned convex lens and concave lens is expanded. (Third Means) A third means of the present invention is a varifocal lens according to the third aspect.
【００１２】本手段では、導電性弾性板は、中間貫通孔
を有する絶縁性の変形可能な薄板である絶縁性弾性板
と、この絶縁性弾性板の表面に形成された導電性の膜で
あって周方向に少なくとも二つに分割されている分割導
電膜とから形成されている。それゆえ、各分割導電膜に
それぞれ異なる電圧を印加することにより、導電性弾性
板の中間貫通孔の周囲に接合している円盤状の透明板
は、同透明板と透明弾性板と両者の間の透明液体とから
なるレンズの中心軸に対して傾く。In the present invention, the conductive elastic plate is an insulating elastic plate which is an insulating and deformable thin plate having an intermediate through hole, and a conductive film formed on the surface of the insulating elastic plate. And at least two divided conductive films in the circumferential direction. Therefore, by applying different voltages to each of the divided conductive films, the disc-shaped transparent plate joined around the intermediate through-hole of the conductive elastic plate is formed between the transparent plate and the transparent elastic plate. Inclined with respect to the central axis of the lens made of the transparent liquid.
【００１３】その結果、レンズの中心軸に（普通は）平
行な光軸に対して透明板の法線が傾き、レンズの中央部
を通る光線も屈折して偏向する（向きが変わる）。透明
板の傾く方向と傾く角度の大きさとは、各導電性弾性板
と第１電極およびまたは第２電極とに印加される各電圧
を加減することにより、調整が可能である。したがって
本手段によれば、前述の各手段の効果に加えて、所定の
範囲で所望の角度だけ光線を偏向させる機能をも発揮で
きるという効果がある。As a result, the normal of the transparent plate is tilted with respect to the optical axis (usually) parallel to the central axis of the lens, and the light passing through the center of the lens is also refracted and deflected (changes in direction). The direction in which the transparent plate tilts and the magnitude of the tilt angle can be adjusted by adjusting the voltage applied to each conductive elastic plate and the first electrode and / or the second electrode. Therefore, according to this means, in addition to the effects of each means described above, there is an effect that a function of deflecting a light beam by a desired angle within a predetermined range can be exhibited.
【００１４】ここで、分割導電膜が周方向に等角度で三
つに分割されていれば、透明板を傾ける方向は全方位か
ら任意に選ぶことができるようになる。また、第１電極
や第２電極も、分割導電膜と対応する位置で周方向に分
割されており、それぞれに独立して電圧を印加すること
ができるようになっていれば、透明板を傾けることがで
きる角度はより深くなる。Here, if the divided conductive film is divided into three at equal angles in the circumferential direction, the direction of tilting the transparent plate can be arbitrarily selected from all directions. Further, the first electrode and the second electrode are also divided in the circumferential direction at positions corresponding to the divided conductive films, and if a voltage can be applied independently to each, the transparent plate is inclined. The angles that can be made deeper.
【００１５】（第４手段）本発明の第４手段は、請求項
４記載の可変焦点レンズである。本手段では、透明液体
を挟持している一方が透明弾性板であるばかりではな
く、他方も光学的に透明であり弾性をもって変形可能な
第２の透明弾性板である。それゆえ、双方の透明弾性板
が互いに背向して凸に変形すればよりパワーの高い凸レ
ンズが形成されるし、双方の透明弾性板が互いに背向し
て凹に変形すればよりパワーの高い凹レンズが形成され
る。(Fourth Means) A fourth means of the present invention is a varifocal lens according to the fourth aspect. In this means, one of the transparent elastic plates sandwiching the transparent liquid is not only a transparent elastic plate, but the other is also a second transparent elastic plate that is optically transparent and elastically deformable. Therefore, if both transparent elastic plates are deformed convexly facing away from each other, a higher power convex lens is formed, and if both transparent elastic plates are concavely deformed facing away from each other, higher power is obtained. A concave lens is formed.
【００１６】したがって本手段によれば、前述の各手段
の効果に加えて、可変焦点レンズのパワーを偏向できる
範囲が拡大するという効果がある。なお、前述の第３手
段のように分割導電膜を有する場合には、分割導電膜の
内周縁に沿ってリング状の補強部材が導電性弾性板に接
合されていれば、レンズのゆがみが抑制されて光学特性
の劣化が防止される。Therefore, according to this means, in addition to the effects of the above-described means, there is an effect that the range in which the power of the varifocal lens can be deflected is expanded. When the divided conductive film is provided as in the third means described above, distortion of the lens is suppressed if a ring-shaped reinforcing member is joined to the conductive elastic plate along the inner peripheral edge of the divided conductive film. Thus, deterioration of the optical characteristics is prevented.
【００１７】（第５手段）本発明の第５手段は、請求項
５記載の可変焦点レンズである。本手段では、互いに接
合されている導電性弾性板および第２の透明弾性板は、
第２スペーサの第１スペーサに背向する面に接合されて
いる絶縁性の透明弾性板と、この透明弾性板の表面にリ
ング状に形成された導電性の電極膜とから、一体に形成
されている。それゆえ、導電性弾性板と第２の透明弾性
板との接合は、上記透明弾性板の表面にＰＶＤ法などで
リング状に導電性の電極膜を形成する過程で自然になさ
れ、導電性弾性板と第２の透明弾性板とを別途製作して
接合する工数がかからない。(Fifth Means) A fifth means of the present invention is a varifocal lens according to the fifth aspect. In this means, the conductive elastic plate and the second transparent elastic plate joined to each other are:
An insulating transparent elastic plate joined to a surface of the second spacer opposite to the first spacer and a conductive electrode film formed in a ring shape on the surface of the transparent elastic plate are integrally formed. ing. Therefore, the joining between the conductive elastic plate and the second transparent elastic plate is naturally performed in the process of forming a conductive electrode film in a ring shape on the surface of the transparent elastic plate by a PVD method or the like, and the conductive elastic plate is formed. There is no need to separately manufacture and join the plate and the second transparent elastic plate.
【００１８】したがって本手段によれば、前述の第４手
段の効果に加えて、製造コストが安価になるうえに、導
電性弾性板と第２の透明弾性板との接合が剥がれにくい
という効果がある。 （第６手段）本発明の第６手段は、請求項６記載の可変
焦点レンズである。Therefore, according to this means, in addition to the effect of the above-described fourth means, the manufacturing cost is reduced, and the effect that the joint between the conductive elastic plate and the second transparent elastic plate is hard to peel off is obtained. is there. (Sixth Means) A sixth means of the present invention is a varifocal lens according to claim 6.
【００１９】本手段では、第１スペーサは導電性であ
り、第１電極はこの第１スペーサにより兼用されている
ので、別途製作した第１電極を第１スペーサに接合した
り、第１スペーサの表面に第１電極を形成したりする必
要がない。それゆえ、コストダウンが可能になる。した
がって本手段によれば、前述の各手段の効果に加えて、
さらなるコストダウンが可能であるという効果がある。In this means, since the first spacer is conductive and the first electrode is also used by the first spacer, a separately manufactured first electrode can be joined to the first spacer or the first spacer can be used. There is no need to form a first electrode on the surface. Therefore, cost reduction becomes possible. Therefore, according to this means, in addition to the effects of each means described above,
There is an effect that further cost reduction is possible.
【００２０】（第７手段）本発明の第７手段は、請求項
７記載の可変焦点レンズである。本手段では、第１スペ
ーサの第１貫通孔の周縁部は、前記透明弾性板と所定の
間隔を空けて形成されている。そして本手段の可変焦点
レンズは、この周縁部の透明弾性板と対向する表面に形
成されている第１容量検出電極と、この第１容量検出電
極と対向または背向してこの透明弾性板に形成されてい
る第２容量検出電極とを有する。(Seventh Means) A seventh means of the present invention is a varifocal lens according to claim 7. In this means, the peripheral portion of the first through hole of the first spacer is formed at a predetermined interval from the transparent elastic plate. The varifocal lens of this means includes a first capacitance detection electrode formed on a surface of the peripheral portion opposed to the transparent elastic plate, and a transparent capacitance plate facing or facing the first capacitance detection electrode. And a second capacitance detection electrode formed.
【００２１】第１容量検出電極と第２容量検出電極との
間隔は、透明弾性板の変形の度合いすなわちレンズのパ
ワーによって変動し、両電極の間の静電容量は、両電極
の間隔に反比例して変化する。それゆえ本手段では、第
１容量検出電極と第２容量検出電極との間の静電容量を
検出することにより、可変焦点レンズのパワーを計測す
ることが可能になる。The distance between the first capacitance detection electrode and the second capacitance detection electrode varies depending on the degree of deformation of the transparent elastic plate, that is, the power of the lens, and the capacitance between the two electrodes is inversely proportional to the distance between the two electrodes. And change. Therefore, in this means, it is possible to measure the power of the varifocal lens by detecting the capacitance between the first capacitance detection electrode and the second capacitance detection electrode.
【００２２】したがって本手段によれば、前述の各手段
の効果に加えて、可変焦点レンズのパワーを計測するこ
とが可能になるという効果がある。なお、本手段におい
てさらに、このようにして計測されたレンズのパワーを
フィードバックして印加電圧を制御する手段を有すれ
ば、可変焦点レンズを所望のパワーに精密に調整するこ
とが可能になる。Therefore, according to this means, in addition to the effects of the above-described respective means, there is an effect that the power of the varifocal lens can be measured. If the present means further includes means for controlling the applied voltage by feeding back the power of the lens measured in this manner, it becomes possible to precisely adjust the varifocal lens to a desired power.
【００２３】（第８手段）本発明の第８手段は、請求項
８記載の可変焦点レンズである。本手段では、第１電極
と導電性弾性板との間、導電性弾性板と第２電極との
間、および第１容量検出電極と第２容量検出電極との間
のうちいずれかの静電容量を検出する静電容量検出手段
が備わっている。それゆえ、上記いずれかの静電容量を
検出することにより、可変焦点レンズの凸レンズないし
凹レンズのパワーを検出することが可能である。(Eighth Means) An eighth means of the present invention is a varifocal lens according to the eighth aspect. In this means, any one of the electrostatic capacitance between the first electrode and the conductive elastic plate, between the conductive elastic plate and the second electrode, and between the first capacitance detection electrode and the second capacitance detection electrode. There is provided capacitance detection means for detecting capacitance. Therefore, it is possible to detect the power of the convex lens or the concave lens of the varifocal lens by detecting any one of the above-mentioned capacitances.
【００２４】本手段にはさらに、この静電容量検出手段
により計測されたこの静電容量に基づいて、可変焦点レ
ンズを駆動する印加電圧を調整する制御手段も備わって
いる。それゆえ、前述のようにして計測されたレンズの
パワーをフィードバックして印加電圧を制御することが
できるので、可変焦点レンズを所望のパワーに精密に調
整することが可能になる。The present means further comprises control means for adjusting an applied voltage for driving the varifocal lens based on the capacitance measured by the capacitance detection means. Therefore, since the applied voltage can be controlled by feeding back the power of the lens measured as described above, the varifocal lens can be precisely adjusted to a desired power.
【００２５】したがって本手段によれば、前述の各手段
の効果に加えて、可変焦点レンズを所望のパワーに精密
に調整することが可能になるという効果がある。わけて
も、静電容量検出手段が、第１電極と導電性弾性板との
間、または導電性弾性板と第２電極との間の静電容量を
検出する場合には、コスト面で有利である。なぜなら
ば、前述の第７手段のように第１容量検出電極および第
２容量検出電極を別途設けることは、必要なくなるから
である。Therefore, according to this means, in addition to the effects of the above-described means, there is an effect that the varifocal lens can be precisely adjusted to a desired power. In particular, when the capacitance detecting means detects the capacitance between the first electrode and the conductive elastic plate or between the conductive elastic plate and the second electrode, the cost is advantageous. . This is because it is not necessary to separately provide the first capacitance detection electrode and the second capacitance detection electrode as in the above-described seventh means.
【００２６】[0026]
【発明の実施の形態および実施例】本発明の可変焦点レ
ンズの実施の形態については、当業者に実施可能な理解
が得られるよう、以下の実施例で明確かつ十分に説明す
る。 ［実施例１］ （実施例１の構成）本発明の実施例１としての可変焦点
レンズは、図１および図２に示すように、図中下方から
順に、透明弾性板１と、第１スペーサ４１および第１電
極５１と、第２スペーサ４２と、導電性弾性板３および
透明板２と、第３スペーサ４３と、第２電極５２とを有
する。透明弾性板１、第１スペーサ４１、第１電極５
１、第２スペーサ４２、導電性弾性板３および透明板２
により液密に封止されている内部空間には、光学的に透
明なシリコーン油である透明液体６が充填されて封入さ
れている。以上の構成の可変焦点レンズの本体は、回転
対称形状をしており、各部品も、円盤状であったりリン
グ状であったりして回転対称形状をもっており、互いに
同軸に配設されている。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the varifocal lens according to the present invention will be clearly and sufficiently described in the following embodiments so that those skilled in the art can understand the embodiments. Embodiment 1 (Configuration of Embodiment 1) As shown in FIGS. 1 and 2, a varifocal lens according to Embodiment 1 of the present invention includes a transparent elastic plate 1 and a first spacer in order from the bottom in the figure. 41, a first electrode 51, a second spacer 42, a conductive elastic plate 3 and a transparent plate 2, a third spacer 43, and a second electrode 52. Transparent elastic plate 1, first spacer 41, first electrode 5
1, second spacer 42, conductive elastic plate 3, and transparent plate 2
The interior space sealed in a liquid-tight manner is filled and sealed with a transparent liquid 6 which is an optically transparent silicone oil. The main body of the varifocal lens having the above-described configuration has a rotationally symmetric shape. Each component has a rotationally symmetric shape such as a disk shape or a ring shape, and is arranged coaxially with each other.
【００２７】また、導電性弾性板３、第１電極５１およ
び第２電極５２には、二つの可変直流電圧源７１，７２
およびスイッチを含む電圧制御装置７が、電気的に接続
されている。透明弾性板１は、光学的に透明であり弾性
をもって変形可能なホウケイ酸ガラス製の薄板からなる
円盤であり、その厚みは一様であってμｍオーダーであ
る。The conductive elastic plate 3, the first electrode 51 and the second electrode 52 are connected to two variable DC voltage sources 71 and 72, respectively.
And a voltage control device 7 including a switch are electrically connected. The transparent elastic plate 1 is a disk made of a thin plate made of borosilicate glass which is optically transparent and elastically deformable, and has a uniform thickness on the order of μm.
【００２８】第１スペーサ４１は、透明弾性板１の図中
上側の表面に図中下方の面で接合され、光路として円形
の第１貫通孔を有し、所定の一様な厚さをもった絶縁性
の合成樹脂（ガラス等でも良い）からなるリング状部材
である。透明弾性板１と第１スペーサ４１とは、紫外線
硬化樹脂によってリング状の接触面全体で液密に接合さ
れている。The first spacer 41 is joined to the upper surface of the transparent elastic plate 1 in the figure at the lower surface in the figure, has a circular first through hole as an optical path, and has a predetermined uniform thickness. It is a ring-shaped member made of insulating synthetic resin (or glass or the like). The transparent elastic plate 1 and the first spacer 41 are joined in a liquid-tight manner over the entire ring-shaped contact surface by an ultraviolet curable resin.
【００２９】第１電極５１は、第１スペーサ４１の図中
上側の面に、真空蒸着などのＰＶＤ法（物理的蒸気凝縮
法）によって形成されているアルミニウム製（金やニッ
ケル等でも良い）の膜状電極である。第２スペーサ４２
は、第１スペーサ４１の図中上側の面に接合され、第１
スペーサ４１の第１貫通孔と同軸でより直径が大きい第
２貫通孔を有しており、所定の一様な厚さをもった絶縁
性の合成樹脂（ガラスでも良い）製のリング状スペーサ
である。第１電極５１が形成されている第１スペーサ４
１の図中上面と、第２スペーサ４２の図中下面とは、エ
ポキシ系接着剤によってリング状の接触面全体で液密に
接合されている。The first electrode 51 is made of aluminum (or gold or nickel) formed on the upper surface of the first spacer 41 by a PVD method (physical vapor condensation method) such as vacuum evaporation. It is a film-like electrode. Second spacer 42
Is bonded to the upper surface of the first spacer 41 in the drawing,
A ring-shaped spacer made of an insulating synthetic resin (or glass) having a predetermined uniform thickness and having a second through-hole coaxial with the first through-hole of the spacer 41 and having a larger diameter. is there. First spacer 4 on which first electrode 51 is formed
The upper surface in the drawing of FIG. 1 and the lower surface of the second spacer 42 in the drawing are liquid-tightly joined on the entire ring-shaped contact surface by an epoxy-based adhesive.
【００３０】導電性弾性板３は、第２スペーサ４２の図
中上面に接合され、光路として円形の中間貫通孔を有す
る導電性の変形可能なステンレス鋼（ベリリウム銅でも
良い）製の薄板である。導電性弾性板３と第２スペーサ
４２とは、エポキシ系接着剤によってリング状の接触面
全体で液密に接合されている。透明板２は、光学的に透
明な円盤状のホウケイ酸ガラス板であって、導電性弾性
板３の中央に開口している中間貫通孔の周囲の内周縁付
近に外周部で接合されている。透明板２の外周部と導電
性弾性板３の内周部とは、エポキシ系接着剤によってリ
ング状の接触面全体で液密に接合されている。The conductive elastic plate 3 is bonded to the upper surface of the second spacer 42 in the drawing and is a thin plate made of conductive deformable stainless steel (or beryllium copper) having a circular intermediate through hole as an optical path. . The conductive elastic plate 3 and the second spacer 42 are liquid-tightly joined on the entire ring-shaped contact surface by an epoxy-based adhesive. The transparent plate 2 is an optically transparent disk-shaped borosilicate glass plate, and is joined at the outer peripheral portion near the inner peripheral edge around an intermediate through hole opened at the center of the conductive elastic plate 3. . The outer peripheral portion of the transparent plate 2 and the inner peripheral portion of the conductive elastic plate 3 are liquid-tightly joined on the entire ring-shaped contact surface by an epoxy-based adhesive.
【００３１】第３スペーサ４３は、第１スペーサ４１の
第１貫通孔より直径が大きい第３貫通孔を有し、所定の
一様な厚さをもった絶縁性の樹脂からなるリング状の部
材である。第３スペーサ４３の図中下面と導電性弾性板
３の図中上面とは、エポキシ系接着剤によってリング状
の接触面全体で接合されている。第２電極５２は、光路
として透明板２よりも直径が少し大きい第３貫通孔を有
するステンレス鋼製のリング状部材である。第２電極５
２の図中下面と第３スペーサ４３の図中上面とは、エポ
キシ系接着剤によってリング状の接触面全体で接合され
ている。The third spacer 43 has a third through hole having a diameter larger than the first through hole of the first spacer 41, and is a ring-shaped member made of an insulating resin having a predetermined uniform thickness. It is. The lower surface of the third spacer 43 in the figure and the upper surface of the conductive elastic plate 3 in the figure are joined by an epoxy-based adhesive over the entire ring-shaped contact surface. The second electrode 52 is a stainless steel ring-shaped member having a third through hole having a slightly larger diameter than the transparent plate 2 as an optical path. Second electrode 5
The lower surface of FIG. 2 and the upper surface of the third spacer 43 in the figure are joined together by an epoxy adhesive over the entire ring-shaped contact surface.
【００３２】（実施例１の作用効果）本実施例の可変焦
点レンズは、以上のように構成されているので、以下の
ような作用効果を発揮する。先ず、印加電圧が全く与え
られていない状態では、再び図２に示すように、透明板
２は上下方向に変位しないので透明液体６に圧力の変化
は生ぜず、透明弾性板１は変形せずその表面（図中下
面）は、平面状に保たれている。この状態では、透明弾
性板１の表面と透明板２の表面（図中上面）とが平行に
保たれているので、透明弾性板１と透明板２と両者の間
に介在する透明液体６とから形成されるレンズはパワー
をもたない。その結果、図中上方から回転対称軸に平行
に入射した平行光線は、上記レンズを透過した後も平行
なままに保たれる。(Effects of Embodiment 1) The variable focus lens of the present embodiment is constructed as described above, and exhibits the following effects. First, in a state where no applied voltage is applied, as shown in FIG. 2 again, the transparent plate 2 does not displace in the vertical direction, so that no pressure change occurs in the transparent liquid 6 and the transparent elastic plate 1 does not deform. The surface (the lower surface in the figure) is kept flat. In this state, since the surface of the transparent elastic plate 1 and the surface of the transparent plate 2 (the upper surface in the figure) are kept parallel, the transparent liquid 6 interposed between the transparent elastic plate 1 and the transparent plate 2 and the transparent liquid 6 interposed therebetween. The lens formed from has no power. As a result, a parallel light beam incident parallel to the rotational symmetry axis from above in the figure is kept parallel after passing through the lens.
【００３３】次に、図３に示すように、第１電極５１と
導電性弾性板３とに所定の電位差が印加されている状態
では、第１電極５１と導電性弾性板３との間にクーロン
力（静電気力）が生じ、第１電極５１と導電性弾性板３
との間には吸引力が作用する。この際、透明弾性板１の
剛性は、第１スペーサ４１に裏打ちされている第１電極
５１の剛性に比べて極めて低いから、透明弾性板１は変
形して透明板２と一緒に図中下方へ吸引され、透明液体
６に圧縮力を及ぼす。その結果、透明液体６の圧力が上
昇して、導電性弾性板３は図中下方へ凸に突出し、透明
弾性板１と透明板２と両者の間に介在する透明液体６と
から形成されるレンズは凸レンズとなる。この凸レンズ
のパワーは、透明弾性板１の変形の度合いで異なるの
で、可変直流電圧源７１の印加電圧を調整することによ
り、調整可能である。Next, as shown in FIG. 3, when a predetermined potential difference is applied between the first electrode 51 and the conductive elastic plate 3, the first electrode 51 and the conductive elastic plate 3 A Coulomb force (electrostatic force) is generated, and the first electrode 51 and the conductive elastic plate 3
A suction force acts between and. At this time, the rigidity of the transparent elastic plate 1 is extremely lower than the rigidity of the first electrode 51 lined with the first spacer 41. To apply a compressive force to the transparent liquid 6. As a result, the pressure of the transparent liquid 6 rises, and the conductive elastic plate 3 protrudes downward in the figure, and is formed from the transparent elastic plate 1 and the transparent plate 2 and the transparent liquid 6 interposed therebetween. The lens is a convex lens. Since the power of the convex lens differs depending on the degree of deformation of the transparent elastic plate 1, the power can be adjusted by adjusting the applied voltage of the variable DC voltage source 71.
【００３４】逆に、図４に示すように、第２電極５２と
導電性弾性板３とに所定の電位差が印加されている状態
では、第２電極５２と導電性弾性板３との間にクーロン
力が生じ、第１電極５１と導電性弾性板３との間には静
電的な吸引力が作用する。この際、導電性弾性板３の剛
性は、所定の厚さの部材である第２電極５２の剛性に比
べて極めて低いから、導電性弾性板３は変形して透明板
２と一緒に図中上方へ吸引され、透明液体６に負圧力を
及ぼす。その結果、透明液体６の圧力が低下して、透明
弾性板１は大気圧に押されて図中下方から凹状にへこ
み、透明弾性板１と透明板２と両者の間に介在する透明
液体６とから形成されるレンズは凹レンズとなる。この
凹レンズのパワーは、透明弾性板１の変形の度合いで異
なるので、可変直流電圧源７２の印加電圧を調整するこ
とにより、調整可能である。On the other hand, as shown in FIG. 4, when a predetermined potential difference is applied between the second electrode 52 and the conductive elastic plate 3, there is a gap between the second electrode 52 and the conductive elastic plate 3. A Coulomb force is generated, and an electrostatic attraction acts between the first electrode 51 and the conductive elastic plate 3. At this time, the rigidity of the conductive elastic plate 3 is extremely lower than the rigidity of the second electrode 52, which is a member having a predetermined thickness, so that the conductive elastic plate 3 is deformed together with the transparent plate 2 in the figure. It is sucked upward and exerts a negative pressure on the transparent liquid 6. As a result, the pressure of the transparent liquid 6 is reduced, and the transparent elastic plate 1 is pressed by the atmospheric pressure and dents from below in the figure, and the transparent elastic plate 1 and the transparent plate 2 and the transparent liquid 6 interposed between the two. Is a concave lens. Since the power of the concave lens differs depending on the degree of deformation of the transparent elastic plate 1, it can be adjusted by adjusting the applied voltage of the variable DC voltage source 72.
【００３５】ここで、導電性弾性板３と第１電極５１お
よび第２電極５２とは静電アクチュエータを構成してお
り、前述の凸レンズおよび凹レンズのパワーは、同静電
アクチュエータに印加する電圧の大小によって決まる。
すなわち、本実施例の可変焦点レンズでは、可変焦点レ
ンズ本体に静電アクチュエータが組み込まれている構成
を取っており、ピエゾアクチュエータ等の別途付設され
たアクチュエータを必要としない。それゆえ、可変焦点
レンズの小型化が可能であるばかりではなく、構成の簡
素化による可変焦点レンズの価格の低廉化が可能であ
る。Here, the conductive elastic plate 3, the first electrode 51 and the second electrode 52 constitute an electrostatic actuator, and the power of the convex lens and the concave lens is the power of the voltage applied to the electrostatic actuator. It depends on the size.
That is, the variable focus lens of the present embodiment has a configuration in which the electrostatic actuator is incorporated in the variable focus lens body, and does not require a separately attached actuator such as a piezo actuator. Therefore, not only can the variable focus lens be miniaturized, but also the price of the variable focus lens can be reduced by simplifying the configuration.
【００３６】したがって、本実施例の可変焦点レンズに
よれば、可変焦点レンズ本体の体格が小型化されている
とともに、価格が低廉化されているという効果がある。
また、本実施例の可変焦点レンズに組み込まれている静
電アクチュエータは、ピエゾアクチュエータと異なり、
ヒステリシスやクリーピング等の不都合な現象が生じな
いので、印加電圧とレンズのパワーとは一意に対応する
という効果もある。同様に、ピエゾアクチュエータを使
用せず、本体と一体型の静電アクチュエータを使用して
いるので、小型化に伴う制約が少なく、小型化が従来技
術よりもずっと容易であるという効果がある。Therefore, according to the varifocal lens of the present embodiment, the physique of the varifocal lens body is reduced in size and the price is reduced.
Further, the electrostatic actuator incorporated in the varifocal lens of this embodiment is different from the piezo actuator,
Since an inconvenient phenomenon such as hysteresis and creeping does not occur, there is also an effect that the applied voltage and the power of the lens uniquely correspond. Similarly, since the piezoelectric actuator is not used and the electrostatic actuator integrated with the main body is used, there are few restrictions associated with miniaturization, and the miniaturization is much easier than in the related art.
【００３７】なお、第１電極５１と導電性弾性板３とが
接触して短絡する恐れがある場合には、第１電極５１の
表面に絶縁塗料を塗っておくなどの対策が有効である。
同様に、第２電極５２と導電性弾性板３とが接触ないし
近接して短絡する恐れがある場合には、第２電極５２の
表面に絶縁塗料を塗っておくなどの対策が有効である。
また、透明板２および導電性弾性板３と第２電極５２と
の間の空間にシリコーン油等の絶縁性が高い透明液体を
充填しておくと、第２電極５２と導電性弾性板３とが近
接しても、アーク等が飛んで短絡する恐れがなくなるの
で、好都合である。When there is a possibility that the first electrode 51 and the conductive elastic plate 3 may be short-circuited due to contact with each other, it is effective to take measures such as applying an insulating paint on the surface of the first electrode 51.
Similarly, when there is a possibility that the second electrode 52 and the conductive elastic plate 3 come into contact with or close to each other and cause a short circuit, a measure such as applying an insulating paint to the surface of the second electrode 52 is effective.
Further, if a space between the transparent plate 2 and the conductive elastic plate 3 and the second electrode 52 is filled with a transparent liquid having high insulation properties such as silicone oil, the second electrode 52 and the conductive elastic plate 3 However, even if they are close to each other, there is no danger that an arc or the like may fly and short-circuit.
【００３８】（実施例１の変形態様１）本実施例の変形
態様１として、図５（ａ）に示すように、第１電極５１
が表面に形成されている第１スペーサ４１の上面と、第
２電極５２の導電性弾性板３に対向する下面とが、半頂
角の大きい円錐面で形成されている可変焦点レンズの実
施が可能である。ただし、第１スペーサ４１および第２
電極５２の導電性弾性板３に対向する面のうち、第２ス
ペーサ４２や第３スペーサ４３と接合する外縁部は、平
面を保って第２スペーサ４２や第３スペーサ４３と接合
されている。(Modification 1 of Embodiment 1) As a modification 1 of the present embodiment, as shown in FIG.
The variable focus lens in which the upper surface of the first spacer 41 formed on the surface thereof and the lower surface of the second electrode 52 facing the conductive elastic plate 3 are formed by conical surfaces having a large half-apex angle can be used. It is possible. However, the first spacer 41 and the second spacer 41
An outer edge portion of the surface of the electrode 52 facing the conductive elastic plate 3 that is bonded to the second spacer 42 or the third spacer 43 is bonded to the second spacer 42 or the third spacer 43 while keeping a flat surface.
【００３９】本変形態様では、第２スペーサ４２および
第３スペーサ４３には、実施例１のものよりも薄いもの
が使用されているので、第１電極５１および第２電極５
２と導電性弾性板３とは、特に外周部の方で、実施例１
よりも接近している。それでいながら、実施例１と同程
度に導電性弾性板３が変形して透明板２が変位するま
で、第１電極５１および第２電極５２と導電性弾性板３
とは、互いに所定間隔以下に近接することがない。In this modification, since the second spacers 42 and the third spacers 43 are thinner than those in the first embodiment, the first electrodes 51 and the second electrodes 5 are used.
2 and the conductive elastic plate 3, especially in the outer peripheral portion,
Is closer than it is. However, the first electrode 51 and the second electrode 52 and the conductive elastic plate 3 remain until the conductive elastic plate 3 is deformed to the same extent as in the first embodiment and the transparent plate 2 is displaced.
Does not approach each other within a predetermined interval.
【００４０】したがって、本変形態様の可変焦点レンズ
によれば、図５（ｂ）に示すように、可変直流電圧源７
１，７２の印加電圧が実施例１よりも小さくても、実施
例１と同様のレンズパワーの調整作用が得られるという
効果がある。なお、本変形態様によっても、実施例１と
同様の小型軽量化および低廉化の効果が得られることは
言うまでもない。Therefore, according to the varifocal lens of this modification, as shown in FIG.
Even if the applied voltages 1, 72 are lower than in the first embodiment, the same effect of adjusting the lens power as in the first embodiment can be obtained. It is needless to say that the effects of reducing the size, weight, and cost as in the first embodiment can also be obtained by this modification.
【００４１】（実施例１の変形態様２）本実施例の変形
態様２として、前述の本実施例またはその変形態様１に
おいて、第３スペーサ４３と第２電極５２と第２可変直
流電圧源７２とが省略されている可変焦点レンズ（図
略）の実施が可能である。本変形態様では、第１電極５
１と導電性弾性板３との間に実施例１と同様の電位差で
電圧が印加されれば、実施例１と同程度のパワーの凸レ
ンズを形成する作用がある。逆に、第１電極５１および
導電性弾性板３に同符号の高電圧が電位差なしに印加さ
れれば、第１電極５１と導電性弾性板３との間には静電
的な反発力が生じ、導電性弾性板３は透明板２と一緒に
第１電極５１から遠ざかる。その結果、透明弾性板１と
透明板２と透明液体６とにより、凹レンズが形成され
る。(Modification 2 of Embodiment 1) As a modification 2 of the present embodiment, the third spacer 43, the second electrode 52, the second variable DC voltage source 72 In this case, a varifocal lens (not shown) is omitted. In this modification, the first electrode 5
If a voltage is applied between the first elastic member 3 and the conductive elastic plate 3 with the same potential difference as in the first embodiment, a function of forming a convex lens having approximately the same power as in the first embodiment can be obtained. Conversely, if a high voltage having the same sign is applied to the first electrode 51 and the conductive elastic plate 3 without a potential difference, an electrostatic repulsive force is generated between the first electrode 51 and the conductive elastic plate 3. Then, the conductive elastic plate 3 moves away from the first electrode 51 together with the transparent plate 2. As a result, a concave lens is formed by the transparent elastic plate 1, the transparent plate 2, and the transparent liquid 6.
【００４２】したがって、本変形態様の可変焦点レンズ
によっても、実施例１と同様の小型軽量化および低廉化
の効果が得られるうえ、実施例１に準ずるレンズパワー
の調整作用が得られる。 （実施例１の変形態様２）本実施例の変形態様２とし
て、前述の本実施例、その変形態様１または２におい
て、第１電極５１がない替わりに、第１スペーサ４１が
導電性であって第１電極の役割を兼ねる可変焦点レンズ
（図略）の実施が可能である。Therefore, according to the varifocal lens of the present modified embodiment, the same effect of reducing the size and weight and the cost can be obtained as in the first embodiment, and the effect of adjusting the lens power according to the first embodiment can be obtained. (Modification 2 of Embodiment 1) As Modification 2 of the present embodiment, in the above-described Embodiment 1 and Modification 1 or 2, instead of the absence of the first electrode 51, the first spacer 41 is electrically conductive. Accordingly, it is possible to implement a variable focus lens (not shown) which also serves as a first electrode.
【００４３】本変形態様の可変焦点レンズでは、実施例
１のように第１スペーサの表面に第１電極を形成する必
要性がないので、コストダウンが可能になる。すなわ
ち、本変形態様の可変焦点レンズによれば、前述の本実
施例、その変形態様１または２と同様の効果が得られる
ばかりではなく、さらなるコストダウンが可能であると
いう効果がある。In the varifocal lens according to this modification, there is no need to form the first electrode on the surface of the first spacer as in the first embodiment, so that the cost can be reduced. That is, according to the varifocal lens of the present modification, not only the same effects as those of the above-described embodiment and the modifications 1 and 2 described above are obtained, but also the cost can be further reduced.
【００４４】［実施例２］ （実施例２の構成）本発明の実施例２としての可変焦点
レンズは、図６に要部の構成を示すように、導電性弾性
板３’、第１電極５１’および第２電極５２’が、互い
に対応する位置で周方向に等間隔に三分割されている。
すなわち、第１電極５１’は、三分割された第１電極５
１ａ〜５１ｃから構成されており、同様に第２電極５
２’も、三分割された第２電極５２ａ〜５２ｃから構成
されている。さらに特徴的であるのは、三分割されてい
る導電性弾性板３’の構成である。Embodiment 2 (Structure of Embodiment 2) As shown in FIG. 6, a varifocal lens according to Embodiment 2 of the present invention has a conductive elastic plate 3 'and a first electrode. The 51 'and the second electrode 52' are divided into three at equal positions in the circumferential direction at positions corresponding to each other.
That is, the first electrode 51 ′ is divided into three divided first electrodes 5.
1a to 51c, and the second electrode 5
2 ′ is also composed of the second electrodes 52a to 52c divided into three. What is more characteristic is the configuration of the conductive elastic plate 3 ′ divided into three parts.
【００４５】すなわち、導電性弾性板３’は、中間貫通
孔を有する絶縁性の変形可能な薄板である絶縁性弾性板
３０と、絶縁性弾性板３０の一方の表面に形成された導
電性の膜であって周方向に三分割されている分割導電膜
３ａ〜３ｃとから構成されている。それゆえ、導電性弾
性板３の三分割されている分割導電膜３ａ〜３ｃは、そ
れぞれ第１電極５１ａ〜５１ｃと第２電極５２ａ〜５２
ｃとに対し、静電気力により吸引力を受けることができ
る。各吸引力は、図６に示すように接続されている可変
直流電圧源７１ａ〜７１ｃ，７２ａ〜７２ｃにより、所
定の範囲で任意に調整ができるようになっている。That is, the conductive elastic plate 3 ′ comprises an insulating elastic plate 30, which is an insulating and deformable thin plate having an intermediate through hole, and a conductive elastic plate 30 formed on one surface of the insulating elastic plate 30. It is composed of divided conductive films 3a to 3c which are divided into three in the circumferential direction. Therefore, the divided conductive films 3a to 3c of the conductive elastic plate 3 divided into three parts are the first electrodes 51a to 51c and the second electrodes 52a to 52c, respectively.
and c, can be attracted by electrostatic force. Each suction force can be arbitrarily adjusted within a predetermined range by variable DC voltage sources 71a to 71c and 72a to 72c connected as shown in FIG.
【００４６】（実施例２の作用効果）本実施例の可変焦
点レンズでは、可変直流電圧源７１ａ〜７１ｃ，７２ａ
〜７２ｃとの印加電圧が周方向に等しくかけられれば、
前述の実施例１と同様にパワーの調整が可能な凸レンズ
作用と凹レンズ作用とを発揮しうる。そればかりではな
く、本実施例の可変焦点レンズでは、分割導電膜３ａ〜
３ｃと第１電極５１ａ〜５１ｃと第２電極５２ａ〜５２
ｃとが周方向に三分割されているので、次に説明する偏
向作用を発揮して光軸を屈折させることができる。(Effects of Embodiment 2) In the varifocal lens of this embodiment, the variable DC voltage sources 71a to 71c, 72a
If the applied voltages of ~ 72c are equally applied in the circumferential direction,
As in the first embodiment, a convex lens function and a concave lens function capable of adjusting the power can be exhibited. In addition, in the varifocal lens of the present embodiment, the divided conductive films 3a to 3a
3c, first electrodes 51a to 51c, and second electrodes 52a to 52
Since c is divided into three in the circumferential direction, the optical axis can be refracted by exerting a deflecting action described below.
【００４７】先ず、図７に示すように、導電性弾性板
３’の分割導電膜３ａと第２電極５２ａとに所定の電位
差を与え、分割導電膜３ｂと第１電極５１ｂとに同程度
の電位差を与える場合を想定する。この場合には、図中
左方の分割導電膜３ａは第２電極５２ａに吸引されて持
ち上がり、逆に図中右方の分割導電膜３ｂは第１電極５
１に吸引されて引き下げられる。その結果、各分割導電
膜３ａ〜３ｃをもつ導電性弾性板３’の内縁部に接合さ
れている透明板２は図中時計方向に傾き、透明板２と透
明弾性板１と透明液体６とから形成されているレンズ
は、パワーをもたず単に入射光を屈折させるだけの作用
をもつ。First, as shown in FIG. 7, a predetermined potential difference is applied between the divided conductive film 3a of the conductive elastic plate 3 'and the second electrode 52a, and the divided conductive film 3b and the first electrode 51b are set to the same degree. It is assumed that a potential difference is applied. In this case, the left divided conductive film 3a in the figure is attracted and lifted by the second electrode 52a, and conversely, the right divided conductive film 3b is
It is sucked by 1 and pulled down. As a result, the transparent plate 2 joined to the inner edge of the conductive elastic plate 3 ′ having the divided conductive films 3a to 3c is tilted clockwise in the drawing, and the transparent plate 2, the transparent elastic plate 1, the transparent liquid 6 The lens formed from has the function of simply refracting incident light without power.
【００４８】次に、図８に示すように、導電性弾性板
３’の分割導電膜３ｂと第１電極５１ｂとにだけ所定の
電位差を与える場合には、図中右方の分割導電膜３ｂは
第１電極５１ｂに吸引されて引き下げられる。その結
果、各分割導電膜３ａ〜３ｃをもつ導電性弾性板３’の
内縁部に接合されている透明板２は、図中時計方向に傾
くとともに図中下方へ吸引され、透明液体６の圧力を高
める。その結果、透明板２と透明弾性板１と透明液体６
とから形成されているレンズは、凸レンズとしてパワー
をもつとともに、入射光を屈折させる作用をももつ。Next, as shown in FIG. 8, when a predetermined potential difference is applied only to the divided conductive film 3b of the conductive elastic plate 3 'and the first electrode 51b, the divided conductive film 3b on the right side in FIG. Is sucked by the first electrode 51b and pulled down. As a result, the transparent plate 2 joined to the inner edge of the conductive elastic plate 3 ′ having the divided conductive films 3a to 3c is inclined clockwise in the drawing and is sucked downward in the drawing, and the pressure of the transparent liquid 6 is reduced. Enhance. As a result, the transparent plate 2, the transparent elastic plate 1, and the transparent liquid 6
The lens formed from the above has power as a convex lens and also has an action of refracting incident light.
【００４９】次に、図９に示すように、導電性弾性板
３’の分割導電膜３ａと第２電極５２ａとにだけ所定の
電位差を与える場合には、図中左方の分割導電膜３ａは
第２電極５２ａに吸引されて引き下げられる。その結
果、各分割導電膜３ａ〜３ｃをもつ導電性弾性板３’の
内縁部に接合されている透明板２は、図中時計方向に傾
くとともに図中上方へ吸引され、透明液体６の圧力を低
める。その結果、透明板２と透明弾性板１と透明液体６
とから形成されているレンズは、凹レンズとしてパワー
をもつとともに、入射光を屈折させる作用をももつ。Next, as shown in FIG. 9, when a predetermined potential difference is applied only to the divided conductive film 3a of the conductive elastic plate 3 'and the second electrode 52a, the divided conductive film 3a on the left side in FIG. Is sucked by the second electrode 52a and pulled down. As a result, the transparent plate 2 joined to the inner edge of the conductive elastic plate 3 'having the divided conductive films 3a to 3c is inclined clockwise in the drawing and is sucked upward in the drawing, and the pressure of the transparent liquid 6 is increased. Lower. As a result, the transparent plate 2, the transparent elastic plate 1, and the transparent liquid 6
The lens formed from the above has power as a concave lens and also has an action of refracting incident light.
【００５０】以上のように、本実施例の可変焦点レンズ
は、実施例１と同様の作用効果をもつばかりではなく、
任意の方向へ所定の範囲で光軸を偏向させる作用を発揮
することができるという効果がある。 ［実施例３］ （実施例３の構成）本発明の実施例３としての可変焦点
レンズにおいては、図１０に一部の構成を示すように、
透明弾性板１’の中央部に、回転対称形に適正な厚さの
分布が形成されている。すなわち透明弾性板１’は、光
学レンズとしての特性に優れた直径６ｍｍの有効部を中
央部に有している。As described above, the varifocal lens according to the present embodiment not only has the same operation and effect as the first embodiment, but also has
There is an effect that an effect of deflecting the optical axis in a predetermined range in an arbitrary direction can be exerted. Embodiment 3 (Structure of Embodiment 3) In a variable focus lens as Embodiment 3 of the present invention, as shown in FIG.
In the central part of the transparent elastic plate 1 ', a distribution of thickness suitable for rotational symmetry is formed. That is, the transparent elastic plate 1 'has an effective portion having a diameter of 6 mm at the center, which is excellent in characteristics as an optical lens.
【００５１】また、本実施例の導電性弾性板は、図１
（ａ）に示すように、実施例１の導電性弾性板３に替わ
って、第２透明弾性板２’と、第２透明弾性板２’の一
方の表面に形成された導電性の膜である導電膜３”とか
ら構成されている。第２透明弾性板２’も、光学的に透
明であり弾性をもって変形可能な透明弾性板であって、
前述の透明弾性板１’と同様に、光学レンズとしての特
性に優れた直径６ｍｍの有効部を有している。すなわ
ち、第２透明弾性板２’は、第２スペーサ４２上面に接
合されている絶縁性の透明弾性板であり、透明弾性板
２’の表面にリング状に形成された導電性の電極膜３”
と一体に形成されている。Further, the conductive elastic plate of this embodiment is different from the one shown in FIG.
As shown in (a), instead of the conductive elastic plate 3 of the first embodiment, a second transparent elastic plate 2 'and a conductive film formed on one surface of the second transparent elastic plate 2' are used. The second transparent elastic plate 2 ′ is also a transparent elastic plate that is optically transparent and elastically deformable.
Like the transparent elastic plate 1 'described above, it has an effective portion having a diameter of 6 mm and excellent in characteristics as an optical lens. That is, the second transparent elastic plate 2 ′ is an insulating transparent elastic plate joined to the upper surface of the second spacer 42, and the conductive electrode film 3 formed in a ring shape on the surface of the transparent elastic plate 2 ′. "
And are formed integrally.
【００５２】本実施例のその他の部分（第１スペーサ４
１、第１電極５１、第２スペーサ４２、第３スペーサ４
３および第２電極５２）は、実施例１と同様であるので
説明を省略する。また、電極膜３”、第１電極５１およ
び第２電極５２が実施例２と異なって周方向に分割され
ていないので、可変直流電圧源７１，７２を含む電圧制
御装置７とその接続も、実施例１と同様である。Other parts of the present embodiment (first spacer 4
1, first electrode 51, second spacer 42, third spacer 4
The third and second electrodes 52) are the same as those in the first embodiment, and a description thereof will be omitted. Also, since the electrode film 3 ″, the first electrode 51 and the second electrode 52 are not divided in the circumferential direction unlike the second embodiment, the connection between the voltage control device 7 including the variable DC voltage sources 71 and 72 and the connection thereof is also reduced. This is similar to the first embodiment.
【００５３】（実施例３の作用効果）本実施例の可変焦
点レンズでは、図１１（ｂ）に示すように、第１電極５
１と電極膜３”とに所定の電位差が印加されている状態
では、第１電極５１と電極膜３”との間に静電気による
吸引力が生じる。すなわち、第２透明板２’の電極膜
３”が形成されている部分は、図中下方へ吸引され、透
明液体６に圧縮力を及ぼす。その結果、透明液体６の圧
力が上昇して、透明弾性板１’は図中下方へ凸に突出す
るとともに、第２透明弾性板２’の中央部も図中上方へ
凸に突出する。すると、透明弾性板１’と第２透明弾性
板２’と両者の間に介在する透明液体６とから形成され
るレンズは、パワーの強い凸レンズとなる。この凸レン
ズのパワーは、透明弾性板１’および第２透明弾性板
２’の変形の度合いで異なるので、可変直流電圧源７１
の印加電圧を調整することにより、調整可能である。(Effects of Embodiment 3) In the varifocal lens of this embodiment, as shown in FIG.
In a state where a predetermined potential difference is applied between the first electrode 51 and the electrode film 3 ″, a suction force due to static electricity is generated between the first electrode 51 and the electrode film 3 ″. That is, the portion of the second transparent plate 2 'on which the electrode film 3 "is formed is sucked downward in the drawing to exert a compressive force on the transparent liquid 6. As a result, the pressure of the transparent liquid 6 increases, The transparent elastic plate 1 'protrudes downward in the drawing, and the central portion of the second transparent elastic plate 2' also protrudes upward in the drawing, whereby the transparent elastic plate 1 'and the second transparent elastic plate 2 And a transparent liquid 6 interposed between them, becomes a convex lens having a strong power. The power of this convex lens depends on the degree of deformation of the transparent elastic plate 1 'and the second transparent elastic plate 2'. Since it is different, the variable DC voltage source 71
Can be adjusted by adjusting the applied voltage.
【００５４】逆に、第２電極５２と電極膜３”とに所定
の電位差が印加されている状態（図略）では、第２電極
５２と電極膜３”との間に静電的な吸引力が作用する。
すると、第２透明弾性板２’の電極膜３”が形成されて
いる部分は、図中上方へ吸引され、透明液体６に負圧力
を及ぼす。その結果、透明液体６の圧力が低下して、透
明弾性板１’は大気圧に押されて図中下方から凹状にへ
こみ、同様に第２透明弾性板２’も大気圧に押されて図
中上方から凹状にへこむ。すなわち、透明弾性板１’と
第２透明弾性板２’と両者の間に介在する透明液体６と
から形成されるレンズは、パワーの強い凹レンズとな
る。この凹レンズのパワーは、透明弾性板１’および第
２透明弾性板２’の変形の度合いで異なるので、可変直
流電圧源７２の印加電圧を調整することにより、調整可
能である。Conversely, when a predetermined potential difference is applied between the second electrode 52 and the electrode film 3 ″ (not shown), electrostatic attraction between the second electrode 52 and the electrode film 3 ″ Force acts.
Then, the portion of the second transparent elastic plate 2 'on which the electrode film 3 "is formed is sucked upward in the drawing, and exerts a negative pressure on the transparent liquid 6. As a result, the pressure of the transparent liquid 6 decreases. The transparent elastic plate 1 'is pressed by the atmospheric pressure and dents from below in the figure, and similarly, the second transparent elastic plate 2' is also pressed by the atmospheric pressure and dents from the upper side in the figure. The lens formed of 1 ′, the second transparent elastic plate 2 ′, and the transparent liquid 6 interposed therebetween serves as a concave lens having a strong power, and the power of the concave lens is the transparent elastic plate 1 ′ and the second transparent lens. Since it varies depending on the degree of deformation of the elastic plate 2 ′, it can be adjusted by adjusting the applied voltage of the variable DC voltage source 72.
【００５５】以上の凸レンズ作用および凹レンズ作用に
おいては、透明弾性板１’ばかりではなく第２透明弾性
板２’も曲面を形成して光線の屈折に寄与するので、実
施例１のそれよりもレンズのパワーが強くなる。したが
って、本実施例の可変焦点レンズによれば、実施例１と
同様の効果が得られるばかりではなく、実施例１よりも
いっそうレンズパワーの調整範囲が広いという効果があ
る。さらに、透明弾性板１’および第２透明弾性板２’
の中央部に光学的に優れた形状が形成されているので、
本実施例によればより大きな口径の光学的に優れた可変
焦点レンズを提供することができるという効果もある。In the above convex lens action and concave lens action, not only the transparent elastic plate 1 'but also the second transparent elastic plate 2' forms a curved surface and contributes to refraction of light rays. Power becomes stronger. Therefore, according to the varifocal lens of the present embodiment, not only the same effect as in the first embodiment is obtained, but also the effect that the adjustment range of the lens power is wider than in the first embodiment is obtained. Further, a transparent elastic plate 1 'and a second transparent elastic plate 2'
The optically superior shape is formed in the center of the
According to this embodiment, there is also an effect that an optically superior variable focal length lens having a larger aperture can be provided.
【００５６】［実施例４］ （実施例４の第１構成および作用効果）本発明の実施例
４の第１構成としての可変焦点レンズにおいては、図１
２に示すように、第１スペーサ４１’の第１貫通孔の周
縁部の下面は、透明弾性板１と所定の間隔を空けて形成
されている。そして、この周縁部の下面に形成されてい
る第１容量検出電極８１と、第１容量検出電極８１と背
向して透明弾性板１に形成されている第２容量検出電極
８２とを、本実施例の可変焦点レンズは有する。その他
の部分は、実施例１の可変焦点レンズの構成と同様であ
る。Fourth Embodiment (First Configuration and Operation and Effect of Fourth Embodiment) In the varifocal lens as the first configuration of the fourth embodiment of the present invention, FIG.
As shown in FIG. 2, the lower surface of the peripheral portion of the first through hole of the first spacer 41 ′ is formed at a predetermined interval from the transparent elastic plate 1. Then, the first capacitance detection electrode 81 formed on the lower surface of the peripheral portion and the second capacitance detection electrode 82 formed on the transparent elastic plate 1 facing the first capacitance detection electrode 81 The varifocal lens of the embodiment has the lens. Other parts are the same as the configuration of the varifocal lens of the first embodiment.
【００５７】ここで、第２容量検出電極８２には、外付
けの低電圧電源９により、一定の電圧が印加されてい
る。さらに本実施例の可変焦点レンズは、第１容量検出
電極８１と第２容量検出電極８２との間の静電容量を検
出する静電容量検出手段としての容量検出回路１０を、
外付けで備えている。容量検出回路１０（図１２参照）
は、オペアンプＡと抵抗器Ｒとを回路要素として構成さ
れており、オペアンプＡの出力端において出力電圧が得
られる。図１２に示すように、可変焦点レンズがパワー
をもたない場合の出力電圧をＥ１とすると、図１３に示
すように、可変焦点レンズが凸レンズとしてパワーをも
つ場合の出力電圧はＥ２である。Here, a constant voltage is applied to the second capacitance detection electrode 82 by the external low-voltage power supply 9. Further, the varifocal lens of the present embodiment includes a capacitance detection circuit 10 as capacitance detection means for detecting capacitance between the first capacitance detection electrode 81 and the second capacitance detection electrode 82.
Provided externally. Capacitance detection circuit 10 (see FIG. 12)
Is composed of an operational amplifier A and a resistor R as circuit elements, and an output voltage is obtained at an output terminal of the operational amplifier A. As shown in FIG. 12, assuming that the output voltage when the varifocal lens has no power is E1, as shown in FIG. 13, the output voltage when the varifocal lens has power as a convex lens is E2.
【００５８】第１容量検出電極８１と第２容量検出電極
８２との間の静電容量が図１２の場合と図１３の場合と
で変わっているので、出力電圧Ｅ１とＥ２とは異なる電
位にある。すなわち、同出力電圧を検出することによ
り、可変焦点レンズのパワーを計測することが可能であ
る。したがって、本実施例の可変焦点レンズでは、レン
ズのパワーを計測することができるという効果がある。Since the capacitance between the first capacitance detection electrode 81 and the second capacitance detection electrode 82 is different between the case of FIG. 12 and the case of FIG. 13, the output voltages E1 and E2 are different potentials. is there. That is, the power of the varifocal lens can be measured by detecting the output voltage. Therefore, the varifocal lens of this embodiment has an effect that the power of the lens can be measured.
【００５９】（実施例４の第２構成および作用効果）本
実施例の第２構成としての可変焦点レンズは、図１４に
示すように、前述の容量検出回路１０と、制御回路１１
と、可変焦点レンズの本体に駆動電圧を与える電圧制御
装置７とからなる制御装置１２を、外付けでさらに装備
している。すなわち、本構成の可変焦点レンズは、静電
容量検出手段としての容量検出回路１０により計測され
た静電容量に基づいて、可変焦点レンズを駆動する印加
電圧を調整する制御手段としての制御回路１１および電
圧制御装置７を外付けで備えている。(Second Configuration and Operation and Effect of Fourth Embodiment) As shown in FIG. 14, the variable focus lens as the second configuration of the fourth embodiment has the above-described capacitance detection circuit 10 and control circuit 11.
And a voltage controller 7 for applying a drive voltage to the main body of the varifocal lens. That is, the varifocal lens of this configuration includes a control circuit 11 as a control unit that adjusts an applied voltage for driving the varifocal lens based on the capacitance measured by the capacitance detection circuit 10 as the capacitance detection unit. And a voltage controller 7 provided externally.
【００６０】本構成では、容量検出回路１０で計測され
たレンズパワーを制御回路１１によりフィードバックし
て、電圧制御装置７により適正に調整された駆動電圧が
可変焦点レンズに印加される。それゆえ、本構成の可変
焦点レンズによれば、レンズのパワーを精密に制御する
ことが可能になるという効果がある。 （実施例４の各種変形態様）前述の制御装置１２を有す
れば、特別に両容量検出電極８１，８２を設けることな
く、たとえば実施例１のままの可変焦点レンズ本体の構
成で、フィードバック制御回路を構成することが可能で
ある。すなわち、本実施例の各種変形態様として、たと
えば導電性弾性板３と第１電極５１との間の静電容量を
検出するようにしても良いし、同様に導電性弾性板３と
第２電極５２との間の静電容量を検出するようにしても
良い。このような制御装置１２を有する構成は、実施例
１の変形態様や、前述の実施例２および実施例３に対し
ても適用可能である。In the present configuration, the lens power measured by the capacitance detection circuit 10 is fed back by the control circuit 11, and the drive voltage appropriately adjusted by the voltage control device 7 is applied to the varifocal lens. Therefore, according to the varifocal lens of this configuration, there is an effect that the power of the lens can be precisely controlled. (Various Modifications of the Fourth Embodiment) With the above-described control device 12, feedback control is performed without providing both the capacitance detecting electrodes 81 and 82, for example, using the configuration of the varifocal lens body as in the first embodiment. It is possible to configure a circuit. That is, as various modifications of the present embodiment, for example, the capacitance between the conductive elastic plate 3 and the first electrode 51 may be detected, and similarly, the conductive elastic plate 3 and the second electrode Alternatively, the capacitance between the first and second capacitances may be detected. The configuration having such a control device 12 is applicable to the modified embodiment of the first embodiment and the above-described second and third embodiments.
【００６１】これらの変形態様によっても、前述の実施
例４と同様の作用効果が得られる。According to these modifications, the same operation and effect as those of the fourth embodiment can be obtained.
【図１】 実施例１としての可変焦点レンズの構成を示
す斜視断面図FIG. 1 is a perspective sectional view showing a configuration of a variable focus lens as a first embodiment.
【図２】 実施例１としての可変焦点レンズの構成を示
す断面図FIG. 2 is a cross-sectional view illustrating a configuration of a variable focus lens as a first embodiment.
【図３】 実施例１としての可変焦点レンズの凸レンズ
作用を示す断面図FIG. 3 is a cross-sectional view illustrating a convex lens operation of the variable focus lens as the first embodiment.
【図４】 実施例１としての可変焦点レンズの凹レンズ
作用を示す断面図FIG. 4 is a cross-sectional view showing a concave lens function of the variable focus lens as the first embodiment.
【図５】 実施例１の変形態様１としての可変焦点レン
ズを示す組図 （ａ）変形態様１の可変焦点レンズの構成を示す断面図 （ｂ）変形態様１の可変焦点レンズの凸レンズ作用を示
す断面図FIG. 5 is a set diagram showing a variable focus lens as a first modification of the first embodiment; (a) a cross-sectional view showing the configuration of the variable focus lens of the first modification; Cross section shown
【図６】 実施例２としての可変焦点レンズの要部構成
を示す分解斜視図FIG. 6 is an exploded perspective view showing a main configuration of a varifocal lens according to a second embodiment.
【図７】 実施例２の可変焦点レンズの光軸偏向作用を
示す断面図FIG. 7 is a cross-sectional view illustrating an optical axis deflecting operation of the varifocal lens according to the second embodiment.
【図８】 実施例２の可変焦点レンズの偏向凸レンズ作
用を示す断面図FIG. 8 is a cross-sectional view showing the function of the deflecting convex lens of the variable focus lens according to the second embodiment.
【図９】 実施例２の可変焦点レンズの偏向凹レンズ作
用を示す断面図FIG. 9 is a cross-sectional view illustrating the function of a variable concave lens according to a second embodiment of the present invention.
【図１０】実施例３の可変焦点レンズの透明弾性板の形
状を示す断面図FIG. 10 is a cross-sectional view illustrating the shape of a transparent elastic plate of the variable focal-length lens according to the third embodiment.
【図１１】実施例３の可変焦点レンズの構成および作用
を示す組図 （ａ）電圧を印加していない状態での作用を示す断面図 （ｂ）凸レンズ作用を示す断面図FIG. 11 is a set diagram illustrating the configuration and operation of the variable focus lens according to the third embodiment. (A) A cross-sectional diagram illustrating an operation when no voltage is applied. (B) A cross-sectional diagram illustrating a convex lens operation.
【図１２】実施例４としての可変焦点レンズの構成を示
す断面図FIG. 12 is a sectional view showing a configuration of a variable focus lens as a fourth embodiment;
【図１３】実施例４としての可変焦点レンズの作用を示
す断面図FIG. 13 is a cross-sectional view showing the operation of the variable focus lens as the fourth embodiment.
【図１４】実施例４の可変焦点レンズの制御装置の構成
を示す模式図FIG. 14 is a schematic diagram illustrating a configuration of a control device for a variable focus lens according to a fourth embodiment.
１，１’：透明弾性板（ホウケイ酸ガラス等の光学ガラ
スからなる薄板） ２：透明板（円盤状の光学ガラス板） ２’：第２透明弾性板（ホウケイ酸ガラス等の光学ガラ
スからなる薄板） ３：導電性弾性板（ステンレス鋼からなる薄板） ３’：導電性弾性板 ３０：絶縁性弾性板 ３ａ〜３ｃ：分割導電膜 ３”：導電膜 ４１，４１’：第１スペーサ ４２：第２スペーサ
４３：第３スペーサ ５１，５１’，５１ａ〜５１ｃ：第１電極（アルミニウ
ムの蒸着膜） ５２，５２’，５２ａ〜５２ｃ：第２電極（ステンレス
鋼板） ６：透明液体（シリコーン油） ７：電圧制御装置 ７１，７２，７１ａ〜７１ｃ，７２ａ〜７２ｃ：可変直
流電圧源 ８１：第１容量検出電極 ８２：第２容量検出電極 ９：定電圧電源 １０：容量検出回路 １１：制御
回路 １２：制御装置1, 1 ': transparent elastic plate (thin plate made of optical glass such as borosilicate glass) 2: transparent plate (disk-shaped optical glass plate) 2': second transparent elastic plate (made of optical glass such as borosilicate glass) 3): conductive elastic plate 30: insulating elastic plate 3a to 3c: divided conductive film 3 ″: conductive film 41, 41 ′: first spacer 42: Second spacer
43: third spacer 51, 51 ′, 51a to 51c: first electrode (aluminum deposited film) 52, 52 ′, 52a to 52c: second electrode (stainless steel plate) 6: transparent liquid (silicone oil) 7: voltage Control devices 71, 72, 71a to 71c, 72a to 72c: variable DC voltage source 81: first capacitance detection electrode 82: second capacitance detection electrode 9: constant voltage power supply 10: capacitance detection circuit 11: control circuit 12: control device
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29898297AJPH11133210A (en) | 1997-10-30 | 1997-10-30 | Variable focus lens |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29898297AJPH11133210A (en) | 1997-10-30 | 1997-10-30 | Variable focus lens |
| Publication Number | Publication Date |
|---|---|
| JPH11133210Atrue JPH11133210A (en) | 1999-05-21 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29898297APendingJPH11133210A (en) | 1997-10-30 | 1997-10-30 | Variable focus lens |
| Country | Link |
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| JP (1) | JPH11133210A (en) |
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