【０００１】[0001]
【産業上の利用分野】本発明は、オーバートーン用共振
回路を必要とせずに所望のオーバートーン周波数での発
振を可能にするオーバートーン矩形状水晶振動子に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an overtone rectangular crystal oscillator capable of oscillating at a desired overtone frequency without requiring an overtone resonance circuit.
【０００２】[0002]
【従来の技術】従来の技術を図９とともに説明する。図
９は従来の水晶片の斜視図である。水晶片１は、Ｚ’軸
を長手方向、Ｘ軸を幅方向、Ｙ’軸を厚み方向とした厚
みすべり振動を行うＡＴカットの矩形状の水晶板からな
り、例えば三次オーバートーン発振で２６ＭＨｚを所望
する場合、Ｌ＝８ｍｍ，Ｗ＝１．７３ｍｍ，Ｔ＝０．１
６７ｍｍに寸法が設定される。そして、各面の表面粗さ
は０．７μｍ程度に仕上げられる。そして、ＣＩ値（ク
リスタルインピーダンス）向上させるため、前記水晶片
１の表裏主面に形成された励振電極２（表面のみ図示）
の幅寸法Ｗ’を水晶片１の幅寸法Ｗの８５％以上として
いた。例えば従来の実施例として、前記水晶片１の表裏
主面に形成された励振電極２の幅寸法Ｗ’を水晶片１の
幅寸法Ｗの約９５％の１．６４ｍｍとした。これらの電
極は真空蒸着法やスパッタリング蒸着法等により形成さ
れる。2. Description of the Related Art A conventional technique will be described with reference to FIG. FIG. 9 is a perspective view of a conventional crystal piece. The crystal piece 1 is made of an AT-cut rectangular crystal plate that performs thickness-shear vibration in which the Z ′ axis is the longitudinal direction, the X axis is the width direction, and the Y ′ axis is the thickness direction. If desired, L = 8 mm, W = 1.73 mm, T = 0.1
The dimension is set to 67 mm. Then, the surface roughness of each surface is finished to about 0.7 μm. Then, in order to improve the CI value (crystal impedance), the excitation electrodes 2 formed on the front and back main surfaces of the crystal piece 1 (only the surface is shown).
The width W'of the crystal was set to 85% or more of the width W of the crystal blank 1. For example, as a conventional example, the width dimension W'of the excitation electrode 2 formed on the front and back main surfaces of the crystal piece 1 is set to 1.64 mm, which is about 95% of the width dimension W of the crystal piece 1. These electrodes are formed by a vacuum vapor deposition method, a sputtering vapor deposition method, or the like.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、上記構
成の水晶片を、２６ＭＨｚの三次オーバートーン発振さ
せると、図３、図４のグラフに示すように、主振動以外
に、その近傍に、その外形形状で決まる輪郭振動あるい
は屈曲振動、厚みすべり振動等による副次的振動（スプ
リアス）が発生し、連続的な温度変化をさせても非連続
的なＣＩ、発振周波数の変動を起こしていた。このよう
な各種変動が生じると、ＡＴカット本来の三次曲線を示
さなくなり、実用に供し得ない問題点を有していた。However, when the crystal element having the above-mentioned structure is caused to oscillate with a third-order overtone of 26 MHz, as shown in the graphs of FIGS. The secondary vibration (spurious) due to the contour vibration determined by the shape, the bending vibration, the thickness shear vibration, etc. is generated, and the CI and the oscillation frequency fluctuate discontinuously even if the temperature is continuously changed. When such various variations occur, the original cubic curve of AT cut is not exhibited and there is a problem that it cannot be put to practical use.
【０００４】本発明の目的は、スプリアスが生じず、Ｃ
Ｉ値、発振周波数の変動を生じないきわめて安定したオ
ーバートーン発振が行える信頼性の高いオーバートーン
矩形水晶振動子を提供する。An object of the present invention is to prevent spurious generation and
(EN) Provided is a highly reliable overtone rectangular crystal oscillator capable of performing extremely stable overtone oscillation without fluctuations in I value and oscillation frequency.
【０００５】[0005]
【課題を解決するための手段】そこで、本発明は、長手
方向をＺ’軸方向、幅方向をＸ軸方向、厚み方向をＹ’
軸方向に設定し、表裏面に励振用の主面電極が形成され
たＡＴカットで厚みすべり振動を行う矩形水晶振動子に
おいて、主面電極の幅寸法Ｗ’を水晶片の幅寸法Ｗの
０．７〜０．８倍とし、かつ、水晶片のＸ面の表面粗さ
を、少なくとも他のＺ’面の表面粗さや、Ｙ’面の表面
粗さより粗くした。Therefore, according to the present invention, the longitudinal direction is the Z'-axis direction, the width direction is the X-axis direction, and the thickness direction is Y '.
In a rectangular crystal oscillator that is set in the axial direction and has thickness-shear vibration with AT cut in which main surface electrodes for excitation are formed on the front and back surfaces, the width dimension W'of the main surface electrode is set to 0 of the width dimension W of the crystal piece. 7 to 0.8 times, and the surface roughness of the X surface of the crystal piece was made rougher than at least the surface roughness of the Z ′ surface and the surface roughness of the Y ′ surface.
【０００６】[0006]
【作用】図２は主面電極の幅寸法Ｗ’を水晶片の幅寸法
Ｗで割った場合の寸法比の変化に対するＣＩ値の変化を
表したグラフである。このグラフが示すように、Ｗ’／
Ｗが０．７〜０．８のあたりでＣＩ値が最小となってい
るのがわかる。FIG. 2 is a graph showing changes in the CI value with respect to changes in the dimensional ratio when the width dimension W'of the principal surface electrode is divided by the width dimension W of the crystal piece. As this graph shows, W '/
It can be seen that the CI value is minimum around W of 0.7 to 0.8.
【０００７】また、図３〜図８までは、長手方向の長さ
を８ｍｍ、幅方向の長さを１．７３ｍｍ、厚み０．１６
７ｍｍの水晶片で、三次オーバートーン発振させて周波
数が２６ＭＨｚの矩形状水晶振動子において、図３は
Ｗ’／Ｗが０．９５でかつ各面の表面粗さを同一（表面
粗さ０．７μｍ）とした場合の周波数あたりのＣＩ値特
性を示すグラフであり、図４は図３の場合における温度
あたりの周波数特性を示すグラフである。図５はＷ’／
Ｗが０．８でかつ各面の表面粗さを同一（表面粗さ０．
７μｍ）とした場合の周波数あたりのＣＩ値特性を示す
グラフであり、図６は図５の場合における温度あたりの
周波数特性を示すグラフである。図７はＷ’／Ｗが０．
８でかつＸ面の表面粗さ（表面粗さ２μｍ）を、少なく
とも他のＺ’面の表面粗さや、Ｙ’面の表面粗さ（表面
粗さ０．７μｍ）より粗くした場合の周波数あたりのＣ
Ｉ値特性を示すグラフであり、図８は図７の場合におけ
る温度あたりの周波数特性を示すグラフである。これら
のグラフからわかるように、Ｗ’／Ｗの寸法比が０．７
〜０．８の範疇であるほうが特性がよく、さらに、各面
の表面粗さを同一とした場合よりＸ面の表面粗さを、少
なくとも他のＺ’面の表面粗さや、Ｙ’面の表面粗さよ
り粗くした場合のほうが特性がさらによくなっている。3 to 8, the length in the longitudinal direction is 8 mm, the length in the width direction is 1.73 mm, and the thickness is 0.16.
In a rectangular crystal resonator having a frequency of 26 MHz with a 7 mm crystal piece and a third overtone oscillation, FIG. 3 shows W ′ / W of 0.95 and the same surface roughness (surface roughness 0. 7 μm) is a graph showing the CI value characteristic per frequency, and FIG. 4 is a graph showing the frequency characteristic per temperature in the case of FIG. 3. Figure 5 shows W '/
W is 0.8 and the surface roughness of each surface is the same (surface roughness 0.
7 μm) is a graph showing the CI value characteristic per frequency, and FIG. 6 is a graph showing the frequency characteristic per temperature in the case of FIG. In FIG. 7, W '/ W is 0.
8 and frequency per frequency when the surface roughness of the X surface (surface roughness 2 μm) is made rougher than at least the surface roughness of the other Z ′ surface and the surface roughness of the Y ′ surface (surface roughness 0.7 μm). C
9 is a graph showing I value characteristics, and FIG. 8 is a graph showing frequency characteristics per temperature in the case of FIG. 7. As can be seen from these graphs, the W ′ / W dimensional ratio is 0.7.
The characteristics are better in the range of 0.8 to 0.8, and the surface roughness of the X plane is at least that of other Z ′ planes and Y ′ planes as compared with the case where the surface roughness of each surface is the same. The characteristics are better when the surface is roughened than the surface roughness.
【０００８】[0008]
【実施例】次に、本発明の実施例について、図１を参照
にして説明する。図１は本発明のの実施例を示す水晶片
の斜視図である。尚、従来の実施例と同様の部分につい
ては同番号を付した。水晶片１は、Ｚ’軸を長手方向
（Ｌ）、Ｘ軸を幅方向（Ｗ）、Ｙ’軸を厚み方向（Ｔ）
とした厚みすべり振動を行うＡＴカットの矩形状の水晶
板からなる。この外形寸法はスプリアスとなる輪郭系の
振動等を抑制する寸法に選ばれ、例えば三次オーバート
ーン発振で２６ＭＨｚを所望する場合、Ｌ＝８ｍｍ，Ｗ
＝１．７３ｍｍ，Ｔ＝０．１６７ｍｍに寸法が設定され
る。そして、Ｚ’面（Ｙ’Ｚ面）、及びＹ’面（Ｚ’Ｘ
面）は、表面粗さ０．７μｍ程度に仕上げられるが、Ｘ
面（Ｙ’Ｚ’面）は、表面粗さ２μｍに粗面加工され
る。これら粗面の粗さの選択は水晶片の研磨時におい
て、研磨材のメッシュを適当に選択することにより容易
に行える。そして、前記水晶片１の表裏主面には、励振
電極２１（表面のみ図示）が形成されており、前記水晶
片１の表裏主面に形成された励振電極２１の幅寸法Ｗ’
を水晶片１の幅寸法Ｗの約８０％の１．３８ｍｍとし
た。これらの電極は真空蒸着法やスパッタリング蒸着法
等により形成される。以上のように構成された水晶片に
必要な支持構体を取り付け、パッケージ構体により気密
封止することにより水晶振動子の完成となる。尚、本発
明の実施例では、Ｘ面（Ｙ’Ｚ’面）の表面粗さ２μｍ
としたが、表面粗さ１μｍ〜１０μｍ程度の粗面加工を
施しても同様の効果が得られる。また、励振電極２１の
幅寸法Ｗ’は、水晶片１の幅寸法Ｗに対し７０％〜８０
％の範疇で同様のＣＩ値特性が得られる。EXAMPLE An example of the present invention will be described below with reference to FIG. FIG. 1 is a perspective view of a crystal piece showing an embodiment of the present invention. The same parts as those in the conventional example are designated by the same reference numerals. The crystal piece 1 has a Z ′ axis in the longitudinal direction (L), an X axis in the width direction (W), and a Y ′ axis in the thickness direction (T).
It consists of an AT-cut rectangular crystal plate that vibrates the thickness slip. This external dimension is selected as a dimension that suppresses the vibration of the contour system that becomes a spurious. For example, when 26 MHz is desired for the third overtone oscillation, L = 8 mm, W
The dimensions are set to 1.73 mm and T = 0.167 mm. Then, the Z'plane (Y'Z plane) and the Y'plane (Z'X
Surface) is finished to a surface roughness of about 0.7 μm, but X
The surface (Y'Z 'surface) is roughened to have a surface roughness of 2 μm. The roughness of these rough surfaces can be easily selected by appropriately selecting the mesh of the polishing material when polishing the crystal piece. Excitation electrodes 21 (only the surfaces are shown) are formed on the front and back main surfaces of the crystal piece 1, and the width dimension W ′ of the excitation electrodes 21 formed on the front and back main surfaces of the crystal piece 1 is formed.
Was set to 1.38 mm, which is about 80% of the width W of the crystal piece 1. These electrodes are formed by a vacuum vapor deposition method, a sputtering vapor deposition method, or the like. A necessary supporting structure is attached to the crystal piece configured as described above, and the crystal structure is completed by hermetically sealing with the package structure. In the examples of the present invention, the surface roughness of the X surface (Y'Z 'surface) is 2 μm.
However, the same effect can be obtained even if the surface is roughened to have a surface roughness of about 1 μm to 10 μm. The width W ′ of the excitation electrode 21 is 70% to 80% of the width W of the crystal blank 1.
Similar CI value characteristics are obtained in the category of%.
【０００９】[0009]
【発明の効果】特許請求項１により、温度に対する周波
数変動、ＣＩ値の変動、スプリアス等を極力抑えること
ができ、きわめて安定したオーバートーン発振が行える
信頼性の高いオーバートーン矩形水晶振動子を得ること
ができる。According to the first aspect of the present invention, it is possible to obtain a highly reliable overtone rectangular crystal oscillator capable of suppressing frequency variation with respect to temperature, variation of CI value, spurious and the like as much as possible and performing extremely stable overtone oscillation. be able to.
【図１】本発明の実施例を示す水晶片の斜視図である。FIG. 1 is a perspective view of a crystal piece showing an embodiment of the present invention.
【図２】主面電極の幅寸法Ｗ’を水晶片の幅寸法Ｗで割
った場合の寸法比の変化に対するＣＩ値の変化を表した
グラフである。FIG. 2 is a graph showing a change in CI value with respect to a change in dimensional ratio when a width dimension W ′ of a principal surface electrode is divided by a width dimension W of a crystal piece.
【図３】Ｗ’／Ｗが０．９５でかつ各面の表面粗さを同
一（表面粗さ０．７μｍ）とした場合の周波数あたりの
ＣＩ値特性を示すグラフである。FIG. 3 is a graph showing CI value characteristics per frequency when W ′ / W is 0.95 and the surface roughness of each surface is the same (surface roughness 0.7 μm).
【図４】図３の場合における温度あたりの周波数特性を
示すグラフである。FIG. 4 is a graph showing frequency characteristics per temperature in the case of FIG.
【図５】Ｗ’／Ｗが０．８でかつ各面の表面粗さを同一
（表面粗さ０．７μｍ）とした場合の周波数あたりのＣ
Ｉ値特性を示すグラフである。FIG. 5: C per frequency when W ′ / W is 0.8 and the surface roughness of each surface is the same (surface roughness 0.7 μm)
It is a graph which shows an I value characteristic.
【図６】図５の場合における温度あたりの周波数特性を
示すグラフである。FIG. 6 is a graph showing frequency characteristics per temperature in the case of FIG.
【図７】Ｗ’／Ｗが０．８でかつＸ面の表面粗さ（表面
粗さ２μｍ）を、少なくとも他のＺ’面の表面粗さや、
Ｙ’面の表面粗さ（表面粗さ０．７μｍ）より粗くした
場合の周波数あたりのＣＩ値特性を示すグラフである。FIG. 7 shows that W ′ / W is 0.8 and the surface roughness of the X surface (surface roughness 2 μm) is at least the surface roughness of the other Z ′ surface,
It is a graph which shows the CI value characteristic per frequency when it is made rougher than the surface roughness (surface roughness 0.7 μm) of the Y ′ surface.
【図８】図７の場合における温度あたりの周波数特性を
示すグラフである。FIG. 8 is a graph showing frequency characteristics per temperature in the case of FIG.
【図９】従来の実施例を示す水晶片の斜視図である。FIG. 9 is a perspective view of a crystal piece showing a conventional example.
１・・・水晶片 ２，２１・・・励振電極 1 ... Quartz piece 2, 21 ... Excitation electrode
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6251496AJPH0888536A (en) | 1994-09-19 | 1994-09-19 | Overtone rectangular crystal unit |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6251496AJPH0888536A (en) | 1994-09-19 | 1994-09-19 | Overtone rectangular crystal unit |
| Publication Number | Publication Date |
|---|---|
| JPH0888536Atrue JPH0888536A (en) | 1996-04-02 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6251496APendingJPH0888536A (en) | 1994-09-19 | 1994-09-19 | Overtone rectangular crystal unit |
| Country | Link |
|---|---|
| JP (1) | JPH0888536A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100367855B1 (en)* | 1999-03-18 | 2003-01-10 | 가부시키가이샤 무라타 세이사쿠쇼 | Piezoelectric Vibration Device and Piezoelectric Resonance Component |
| JP2007189431A (en)* | 2006-01-12 | 2007-07-26 | Epson Toyocom Corp | Piezoelectric vibrating piece and piezoelectric device |
| JP2007189414A (en)* | 2006-01-12 | 2007-07-26 | Epson Toyocom Corp | Piezoelectric vibrating piece and piezoelectric device |
| JP2010178109A (en)* | 2009-01-30 | 2010-08-12 | Daishinku Corp | Piezoelectric oscillation device |
| JP2013146002A (en)* | 2012-01-16 | 2013-07-25 | Seiko Epson Corp | Piezoelectric vibration piece, manufacturing method therefor, piezoelectric device and electronic apparatus |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100367855B1 (en)* | 1999-03-18 | 2003-01-10 | 가부시키가이샤 무라타 세이사쿠쇼 | Piezoelectric Vibration Device and Piezoelectric Resonance Component |
| JP2007189431A (en)* | 2006-01-12 | 2007-07-26 | Epson Toyocom Corp | Piezoelectric vibrating piece and piezoelectric device |
| JP2007189414A (en)* | 2006-01-12 | 2007-07-26 | Epson Toyocom Corp | Piezoelectric vibrating piece and piezoelectric device |
| JP2010178109A (en)* | 2009-01-30 | 2010-08-12 | Daishinku Corp | Piezoelectric oscillation device |
| JP2013146002A (en)* | 2012-01-16 | 2013-07-25 | Seiko Epson Corp | Piezoelectric vibration piece, manufacturing method therefor, piezoelectric device and electronic apparatus |
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