【０００１】[0001]
【産業上の利用分野】本発明は、紙などの記録媒体に向
かって、微小インク液滴を噴射させ、文字や画像を記録
するインクジェット記録装置の記録ヘッドの構造で、特
に、インクが噴射するノズルのあるノズルプレートを有
し、ノズルプレートの振動により、インク液滴を噴射さ
せる構造の記録ヘッドに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of a recording head of an ink jet recording apparatus for recording characters and images by ejecting minute ink droplets onto a recording medium such as paper, and in particular, ink is ejected. The present invention relates to a recording head having a nozzle plate having nozzles and ejecting ink droplets by vibrating the nozzle plate.
【０００２】[0002]
【従来の技術】従来より、微小インク液滴を噴射させて
記録を行うインクジェット記録装置が知られている。こ
の装置は、他の記録装置に比べ、 高速記録が可能 カラー化が容易 普通紙に記録が可能 騒音が小さい 記録品位が良い といった多くの利点を持っている。2. Description of the Related Art Conventionally, an ink jet recording apparatus has been known which records by ejecting minute ink droplets. Compared to other recording devices, this device has many advantages such as high-speed recording, easy colorization, recording on plain paper, low noise, and good recording quality.
【０００３】このようなインクジェット記録装置は、少
なくとも、インクを噴射するノズルと、そのノズルに連
通しインク噴射のエネルギーを発する圧力室を備えてい
る。記録ヘッドは入力された記録情報に応じて選択的に
噴射口からインク液滴を噴射させ、被記録媒体に文字や
画像を形成する。Such an ink jet recording apparatus is provided with at least a nozzle for ejecting ink and a pressure chamber communicating with the nozzle for emitting energy for ejecting ink. The recording head selectively ejects ink droplets from the ejection port according to the inputted recording information, and forms characters and images on the recording medium.
【０００４】図６は、従来例１のインクジェット記録ヘ
ッドの構造を示す模式的断面図である。記録ヘッド：２
１は、ノズル：２と、圧力室：１やインク供給路：３を
形成する母材：９と、振動板：５と、圧電素子：４とを
接合して構成される。圧電素子：４に電気信号を印加す
ると、振動板：５が振動して、圧力室：１内の圧力が高
まり、記録ヘッド：２１はインク液滴：６を噴射する。
また、圧電素子：４が無く、代わりに圧電室近傍に発熱
体があり、この発熱体を発熱した場合に圧力室に発生す
る気泡によりインク液滴：６を噴射させる構成の記録ヘ
ッドも知られている。FIG. 6 is a schematic sectional view showing the structure of an ink jet recording head of Conventional Example 1. Recording head: 2
Reference numeral 1 is configured by joining a nozzle: 2, a pressure chamber: 1, a base material forming an ink supply path: 3, a vibrating plate: 5, and a piezoelectric element: 4. When an electric signal is applied to the piezoelectric element: 4, the vibrating plate: 5 vibrates, the pressure in the pressure chamber: 1 increases, and the recording head: 21 ejects an ink droplet: 6.
There is also known a recording head having no piezoelectric element: 4; instead, there is a heating element near the piezoelectric chamber, and ink droplets: 6 are ejected by bubbles generated in the pressure chamber when the heating element generates heat. ing.
【０００５】図７は、従来例２のインクジェット記録ヘ
ッドの構造を示す模式的断面図である。記録ヘッド：３
１は、ノズル：２を有するノズルプレート：７と、振動
板：５と圧電素子：４と、インク流路：３や圧電室：１
を形成する母材：９により構成される。インク噴射の原
理は、従来例１と同じであり、発熱体を使用したものも
知られている。FIG. 7 is a schematic sectional view showing the structure of an ink jet recording head of Conventional Example 2. Recording head: 3
No. 1 is a nozzle plate having nozzles: 2, vibrating plate: 5, piezoelectric element: 4, ink flow path: 3 and piezoelectric chamber: 1.
The base material forming 9: 9. The principle of ink ejection is the same as that of the first conventional example, and one using a heating element is also known.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、従来例
１のインクジェット記録ヘッドは、記録ヘッドが立体的
構造になっておりノズル：２の加工に対し、立体的な加
工の困難さのため、高度な加工精度が厳しく要求され、
製造歩留まりが悪く、記録ヘッドが複雑なために高価に
なってしまう欠点があった。また、従来例２のインクジ
ェット記録ヘッドは、ノズルプレート：７とインクを噴
射させるエネルギー発生部の部材とが直結していない複
雑な構造のため、製造コストが上がり、記録ヘッドが高
価になってしまう欠点があった。However, in the ink jet recording head of Conventional Example 1, since the recording head has a three-dimensional structure and it is difficult to perform three-dimensional processing with respect to the processing of the nozzle: 2, it is highly advanced. Strict processing precision is required,
The manufacturing yield is low, and the recording head is complicated and therefore expensive. Further, the ink jet recording head of Conventional Example 2 has a complicated structure in which the nozzle plate 7 and the member of the energy generating portion for ejecting ink are not directly connected, so that the manufacturing cost increases and the recording head becomes expensive. There was a flaw.
【０００７】本発明は、上記従来例に鑑みてなされたも
ので、構造が簡単で、しかも容易に加工精度が高くな
り、高品位な記録が可能である安価なインクジェット記
録装置を提供することを目的とする。The present invention has been made in view of the above-mentioned conventional example, and it is an object of the present invention to provide an inexpensive ink jet recording apparatus having a simple structure, easily improving the processing accuracy, and capable of high-quality recording. To aim.
【０００８】[0008]
【課題を解決するための手段及び作用】本発明者は上記
目的を達成するために鋭意検討を行い本発明に到達し
た。即ち本発明はインク液滴が噴射するノズルを有した
ノズルプレートを備えたインクジェット記録ヘッドにお
いて、該ノズルプレート自身の振動により該インク液滴
を噴射させる手段を有するノズルプレートを備えること
を特徴とするインクジェット記録ヘッドである。 また
本発明は上記ノズルプレートを振動させる手段として圧
電素子を用いること、この圧電素子がノズルプレートと
一体化されている部材であることを特徴とするインクジ
ェット記録ヘッドである。Means and Actions for Solving the Problems The present inventor has arrived at the present invention through extensive studies in order to achieve the above object. That is, the present invention is characterized in that an inkjet recording head having a nozzle plate having nozzles for ejecting ink droplets is provided with a nozzle plate having means for ejecting the ink droplets by vibration of the nozzle plate itself. It is an inkjet recording head. Further, the present invention is an ink jet recording head characterized in that a piezoelectric element is used as a means for vibrating the nozzle plate, and the piezoelectric element is a member integrated with the nozzle plate.
【０００９】また、本発明は該圧電素子とノズルプレー
トが同一部材であること、また該圧電素子がフイルムで
あることを特徴とするインクジェット記録ヘッドであ
る。Further, the present invention is an ink jet recording head characterized in that the piezoelectric element and the nozzle plate are the same member, and the piezoelectric element is a film.
【００１０】本発明ではノズルプレート自身の振動によ
り該インク液滴を噴射させる手段を有するノズルプレー
トを備えるいれば良く、上記の圧電素子を用いる他にも
ノズルプレートを振動させる方法は本発明で利用するこ
ことができる。The present invention only needs to include a nozzle plate having means for ejecting the ink droplets by vibrating the nozzle plate itself. Besides using the above-mentioned piezoelectric element, a method of vibrating the nozzle plate is used in the present invention. You can
【００１１】例えば、該記録ヘッドの圧力室をはさんで
ノズルを有したノズルプレートとその反対側である記録
ヘッドの母材との間に電圧を印加し、静電気力でノズル
プレートを振動させ、インクを噴射させる機能を備えた
インクジェット記録ヘッド。該記録ヘッドのノズルプレ
ートと記録ヘッド後部に配された後部電極との間に電圧
を印加し、静電気力でノズルプレートを振動させ、イン
クを噴射させるインクジェット記録ヘッドなども本発明
に含まれる。For example, a voltage is applied between a nozzle plate having a nozzle and a base material of the recording head on the opposite side of the pressure chamber of the recording head, and the nozzle plate is vibrated by electrostatic force. An inkjet recording head that has the function of ejecting ink. The present invention also includes an inkjet recording head in which a voltage is applied between the nozzle plate of the recording head and a rear electrode arranged at the rear of the recording head to vibrate the nozzle plate by electrostatic force to eject ink.
【００１２】本発明の記録ヘッドはインク供給路、圧力
室、ノズルを有したノズルプレートよりなりノズルプレ
ートは振動可能な構造であり、振動させる手段は前記の
ように圧電素子を用いる方法や静電気で振動させる方法
等公知の振動手段が使用される。振動の方法は特に制限
はないが、例えばバイモルフ構造の圧電素子にパルス状
の電圧を与えて圧電素子の収縮動作によりノズルプレー
トを振動させて行う。その際の条件も特に制限はなく、
例えば電圧２０Ｖでパルス幅１０μｓｅｃ程度の条件で
実施できる。振動は好ましくはノズルプレートをプレー
ト面に対して凹凸になる方向で行われ、振動数と振幅は
装置によって当業者が適宜選択できるが、例えば振動数
は数十から数百ｋＨＺ、振幅は０．１〜１０μｍ程度で
ある。The recording head of the present invention comprises an ink supply path, a pressure chamber, and a nozzle plate having nozzles, and the nozzle plate has a vibrating structure. The vibrating means is a method using a piezoelectric element or static electricity as described above. A known vibrating means such as a vibrating method is used. The vibrating method is not particularly limited. For example, a pulsed voltage is applied to the piezoelectric element having a bimorph structure to cause the contraction operation of the piezoelectric element to vibrate the nozzle plate. There are no particular restrictions on the conditions,
For example, it can be performed under the conditions of a voltage of 20 V and a pulse width of about 10 μsec. The vibration is preferably performed in a direction in which the nozzle plate becomes uneven with respect to the plate surface, and the vibration frequency and the amplitude can be appropriately selected by those skilled in the art depending on the device. It is about 1 to 10 μm.
【００１３】ノズルプレートの材質は金属またはプラス
チックが用いられ、これに圧電素子を接合させて使用さ
れる。ノズルプレートを圧電性のあるフィルムとする場
合は通称ＰＶＤＦと呼ばれる圧電性のあるフィルムが使
用でき、これによって構造をさらに簡単にすることがで
きる。The nozzle plate is made of metal or plastic, and the piezoelectric element is bonded to the metal or plastic. When the nozzle plate is a piezoelectric film, a piezoelectric film commonly called PVDF can be used, which can further simplify the structure.
【００１４】さらには実施例４、５において使用したよ
うな振動システムも使用でき、例えばＩＢＭ Ｔｅｃｈ
ｎｉｃａｌ Ｄｉｓｃｌｏｓｕｒｅ Ｂｕｌｌｅｔｉ
ｎ，Ｖｏｌ．１６，Ｎｏ．４，１９７３，Ｓｅｐ．，Ｐ
１１６８ーに記載されている方法があげられる。Further, a vibration system as used in Examples 4 and 5 can be used, for example, IBM Tech.
natural Disclosure Bulleti
n, Vol. 16, No. 4, 1973, Sep. , P
The method described in 1168-can be mentioned.
【００１５】本発明の方法では構造が簡単なので極めて
容易に精度だ良好なノズルを製造することが可能であ
る。Since the method of the present invention has a simple structure, it is possible to very easily manufacture a good nozzle with high accuracy.
【００１６】圧力室の構造については特に制限はなく公
知のものが使用できるが、特に形状が、概略ノズル口を
焦点としたパラボラ曲線であるものが好ましい。これ
は、ノズルプレートが振動して圧力室内に圧力を発生さ
せた時、母材側で反射した圧力波が、ノズルに向かって
集中し進行するようにさせるためである。これによって
ノズルプレートの振動力が小さくても液滴を容易に吐出
することが可能になり装置の小型化が可能となる。本発
明のノズルプレートと上記パラボナ構造の圧力室との組
み合わせが特に好ましい。There are no particular restrictions on the structure of the pressure chamber, and known pressure chambers can be used, but it is preferable that the shape is a parabolic curve with the approximate nozzle opening as the focal point. This is because when the nozzle plate vibrates to generate pressure in the pressure chamber, the pressure wave reflected on the base material side is concentrated and travels toward the nozzle. As a result, even if the vibration force of the nozzle plate is small, it is possible to easily eject the liquid droplets, and the device can be downsized. A combination of the nozzle plate of the present invention and the pressure chamber having the parabona structure is particularly preferable.
【００１７】以上のように本発明ではノズルを形成する
部材を振動させてインクを噴射する構成としたので、簡
単な構造で安価なインクジェット記録ヘッドが得られ
た。As described above, in the present invention, since the member forming the nozzle is vibrated to eject the ink, an inexpensive ink jet recording head having a simple structure can be obtained.
【００１８】簡単な構造であることは、記録ヘッドの信
頼性を向上することでもあり、またこの構造の記録ヘッ
ドは、構造が簡単であり、また、生産コストが安いた
め、特に、ノズル数の多い記録ヘッドに対して効果的で
ある。The simple structure also improves the reliability of the recording head, and the recording head having this structure has a simple structure and a low production cost. It is effective for many recording heads.
【００１９】本発明の記録ヘッドは通常のインクタンク
と接続してインク吐出装置として使用することができ、
この吐出装置を具備させてインクジェット記録装置とし
て使用することができる。このインクタンクと記録ヘッ
ドは一体構造のものでもよいしインクタンクをカートリ
ッジとして交換する方法で使用することもできる。The recording head of the present invention can be used as an ink ejection device by connecting it to an ordinary ink tank.
It can be used as an inkjet recording device by including this discharge device. The ink tank and the recording head may have an integral structure, or may be used by replacing the ink tank as a cartridge.
【００２０】[0020]
実施例１ 図１は、実施例１の記録ヘッドの断面図である。記録ヘ
ッド：１１は、プレスや成型加工や電鋳等によりつくら
れた母材：４２と、ノズル：２のあるノズルプレート：
７と、ノズルプレート：７を振動させる圧電素子：４、
とにより構成される。ここで、ノズルプレート：７と、
圧電素子：４、とは、接着等の結合手段により、一体化
される。実施例１では、導電性の接着剤で結合されてい
る。圧電素子：４の形状は図１で左側となる正面側から
見ればドーナツ状をしており、一方の電極はノズルプレ
ートに導電性接着剤で接着され取り出され、もう一方の
電極はリード線により外部に取り出される。ノズルプレ
ート：７は、プレスや成型加工や電鋳等により、高精度
に加工されたノズル：２を有している。ノズルの口径
は、５０μｍであり、加工の公差は、２μｍ以下に収め
られている。Example 1 FIG. 1 is a cross-sectional view of a recording head of Example 1. The recording head 11 includes a base material 42 formed by pressing, molding, electroforming, etc., and a nozzle plate having nozzles 2:
7, and a piezoelectric element for vibrating the nozzle plate 7: 4,
Composed of and. Here, the nozzle plate: 7,
The piezoelectric element: 4 and the piezoelectric element 4 are integrated by a coupling means such as adhesion. In Example 1, they are bonded with a conductive adhesive. The shape of the piezoelectric element: 4 is a donut shape when viewed from the front side, which is the left side in FIG. 1, one electrode is attached to the nozzle plate with a conductive adhesive and is taken out, and the other electrode is connected by a lead wire. It is taken out. The nozzle plate 7 has a nozzle 2 which is processed with high precision by pressing, molding, electroforming, or the like. The diameter of the nozzle is 50 μm, and the processing tolerance is 2 μm or less.
【００２１】図１では、１個のノズルと１個の圧電素子
の記録ヘッドを示しているが、これらは、それぞれ複数
個あってもよい。ここで、圧電素子：４にパルス状の電
気信号を与えると、圧電室：１内の圧力が高まり、イン
ク液滴：６がノズル：２から噴射する。母材：４２は、
インク供給路：３も形成し、噴射した量のインクはイン
ク供給路：３の後部から圧電室：１へと供給される。従
来の記録ヘッドとの構成の違いは、高精度に加工された
ノズルプレートが振動する構造となっている点である。
図１で、記録ヘッドの圧電室：１を形成する母材：４２
の形状は、概略、ノズル：２のノズル口を焦点としたパ
ラボラ曲線とするのが良い。これは、ノズルプレート：
７が振動して圧力室：１内に圧力を発生させた時、母
材：４２側で反射した圧力波が、ノズルに向かって集中
し進行するようにさせるためである。この構造の記録ヘ
ッドは、構造が簡単であり、また、生産コストが安いた
め、特に、ノズル数の多い記録ヘッドに対して効果的で
ある。Although FIG. 1 shows a recording head having one nozzle and one piezoelectric element, there may be a plurality of these recording heads. Here, when a pulsed electric signal is applied to the piezoelectric element: 4, the pressure in the piezoelectric chamber: 1 increases, and the ink droplet: 6 is ejected from the nozzle: 2. Base material: 42
The ink supply path: 3 is also formed, and the ejected amount of ink is supplied from the rear part of the ink supply path: 3 to the piezoelectric chamber: 1. The difference from the configuration of the conventional recording head is that the nozzle plate processed with high precision vibrates.
In FIG. 1, the base material forming the piezoelectric chamber 1 of the recording head: 42
The shape of is preferably a parabola curve with the nozzle port of the nozzle: 2 as a focal point. This is the nozzle plate:
This is because the pressure wave reflected on the base material: 42 side is concentrated and advances toward the nozzle when 7 vibrates to generate a pressure in the pressure chamber 1. The recording head having this structure has a simple structure and a low production cost, and is particularly effective for a recording head having a large number of nozzles.
【００２２】実施例２ 実施例１では、ノズルプレートと圧電素子とが別部材で
ある例を示したが、図２に示すように、ノズルプレート
が圧電素子と同一部材であっても良い。この場合、構造
がより簡単になるメリットがある。図２は、２層構造の
圧電素子：８がノズルプレートと同一部材である例を示
す。２層の圧電素子は中間層の埋め込み電極に対し、両
側が同一方向に分極処理されている。このため、両端の
電極に電圧を印加させると、バイモルフの動きをして圧
電素子が振動する。圧電素子の形や電極の構造はこの限
りではなく、圧電素子とノズルを形成する部材とが同一
部材である点がポイントである。Second Embodiment In the first embodiment, the nozzle plate and the piezoelectric element are separate members. However, as shown in FIG. 2, the nozzle plate and the piezoelectric element may be the same member. In this case, there is an advantage that the structure becomes simpler. FIG. 2 shows an example in which the piezoelectric element 8 having a two-layer structure is the same member as the nozzle plate. Both sides of the two-layer piezoelectric element are polarized in the same direction with respect to the embedded electrode of the intermediate layer. Therefore, when a voltage is applied to the electrodes at both ends, the bimorph moves and the piezoelectric element vibrates. The shape of the piezoelectric element and the structure of the electrode are not limited to this, and the point is that the piezoelectric element and the member forming the nozzle are the same member.
【００２３】実施例３ さらに、ノズルプレートがフィルム状の圧電素子であっ
ても良い。図３は通称ＰＶＤＦと呼ばれる圧電性のある
フィルムを使用した例を示す。以前から、例えば、特公
昭６０−３４４６９のように、フィルムの収縮力が圧力
室に間接的に作用するものは知られているが、直接的
に、しかも、ノズルを形成する部材と圧電体であるフィ
ルムとが同一である構造の記録ヘッドはなかった。図３
において、圧電フィルムの圧力室側には、薄く、インク
に侵食されにくく、圧電フィルムに電圧を印加しても収
縮しにくい部材がコートされている。このため、圧電フ
ィルムに電圧を印加すると、圧電フィルムの収縮力でノ
ズルを形成しているフィルムが振動する。Third Embodiment Further, the nozzle plate may be a film-shaped piezoelectric element. FIG. 3 shows an example using a film having a piezoelectric property, which is commonly called PVDF. For some time, it has been known that, for example, Japanese Patent Publication No. 60-34469, the contraction force of the film indirectly acts on the pressure chamber, but the member forming the nozzle and the piezoelectric body are used directly. No recording head has the same structure as a film. Figure 3
In the above, the pressure chamber side of the piezoelectric film is coated with a thin member that is not easily corroded by ink and that does not easily contract even when a voltage is applied to the piezoelectric film. Therefore, when a voltage is applied to the piezoelectric film, the film forming the nozzle vibrates due to the contracting force of the piezoelectric film.
【００２４】フィルムの振動は、圧力室内の圧力を高め
るとともに、圧力室内に圧力波を発生させる。圧力波
は、圧力室後部の曲面で反射してノズル方向に向い、ノ
ズル付近で圧力波が集中して、インク液滴が噴射する。
ノズルの穴の加工精度は、厚さが約５０μｍのフィルム
をプレス加工や、レーザー光線の照射で加工して、直径
５０μｍ±２μｍの円形となり、十分な加工精度となっ
ている。The vibration of the film raises the pressure in the pressure chamber and also generates a pressure wave in the pressure chamber. The pressure wave is reflected by the curved surface at the rear part of the pressure chamber and directed toward the nozzle, and the pressure wave is concentrated near the nozzle to eject ink droplets.
Regarding the processing accuracy of the nozzle hole, a film having a thickness of about 50 μm is processed by pressing or laser beam irradiation to form a circular shape having a diameter of 50 μm ± 2 μm, which is sufficient processing accuracy.
【００２５】実施例４ 図４は、実施例４のインクジェット記録ヘッドの断面を
示す。記録ヘッドの母材は、電気的に、母材１と母材２
に分離されている。母材１は圧力室：１後部に、また、
母材２は、ノズルプレート：７に電気的に接続されてい
る。記録されるべき入力データ信号は、電圧パルス発生
回路：４６に転送され、母材１と母材２の間に電圧信号
が印加されて、静電気力で、板状のノズルプレートが振
動し、圧力室：１の圧力が変化して、インク液滴が噴射
する。Example 4 FIG. 4 shows a cross section of an ink jet recording head of Example 4. The base materials of the recording head are the base material 1 and the base material 2 electrically.
Is separated into. Base material 1 is pressure chamber: 1 at the rear,
The base material 2 is electrically connected to the nozzle plate: 7. The input data signal to be recorded is transferred to the voltage pulse generating circuit: 46, the voltage signal is applied between the base material 1 and the base material 2, and the plate-shaped nozzle plate vibrates due to electrostatic force, resulting in pressure. The pressure in the chamber: 1 changes and ink droplets are ejected.
【００２６】実施例５ 図５は、実施例５のインクジェット記録ヘッドの断面を
示す。記録ヘッドの母材３：４３は、電気的に、ノズル
プレート：７に電気的に接続されている。また、記録ヘ
ッド：１に対して、被記録体：４７である紙の反対側に
は、後部電極：４８が配されている。記録されるべき入
力データ信号は、電圧パルス発生回路：４６に転送さ
れ、記録ヘッドの母材３と、後部電極：４８との間に電
圧信号が印加されて、静電気力で、板状のノズルプレー
トが振動し、圧力室：１の圧力が変化して、インク液滴
が噴射する。Example 5 FIG. 5 shows a cross section of an ink jet recording head of Example 5. The base material 3:43 of the recording head is electrically connected to the nozzle plate: 7. Further, a rear electrode: 48 is arranged on the opposite side of the recording medium: 47, which is the recording medium: to the recording head: 1. The input data signal to be recorded is transferred to the voltage pulse generating circuit: 46, and the voltage signal is applied between the base material 3 of the recording head and the rear electrode: 48. The plate vibrates, the pressure in the pressure chamber 1 changes, and ink droplets are ejected.
【００２７】[0027]
【発明の効果】インクジェット記録ヘッドの構造におい
て、ノズルを形成する部材を振動させてインクを噴射す
る構成としたので、高精度のノズルをもち、簡単な構造
で安価なインクジェット記録ヘッドが得られた。簡単な
構造であることは、記録ヘッドの信頼性を向上すること
でもある。また、この構造の記録ヘッドは、構造が簡単
であり、また、生産コストが安いため、特に、ノズル数
の多い記録ヘッドに対して効果的である。In the structure of the ink jet recording head, since the member forming the nozzle is vibrated to eject the ink, an inexpensive ink jet recording head having a highly precise nozzle and a simple structure can be obtained. . The simple structure also improves the reliability of the recording head. In addition, the recording head having this structure is simple in structure and low in production cost, and is particularly effective for a recording head having a large number of nozzles.
【図１】実施例１の記録ヘッドの断面図。FIG. 1 is a sectional view of a recording head according to a first embodiment.
【図２】従来例２のインクジェット記録ヘッドの断面
図。FIG. 2 is a cross-sectional view of an inkjet recording head of Conventional Example 2.
【図３】従来例３のインクジェット記録ヘッドの断面
図。FIG. 3 is a cross-sectional view of an inkjet recording head of Conventional Example 3.
【図４】実施例４の記録ヘッドの断面図。FIG. 4 is a sectional view of a recording head according to a fourth embodiment.
【図５】実施例５の記録ヘッドの断面図。FIG. 5 is a sectional view of a recording head according to a fifth embodiment.
【図６】従来例１の記録ヘッドの断面図。FIG. 6 is a sectional view of a recording head of Conventional Example 1.
【図７】従来例２の記録ヘッドの断面図。FIG. 7 is a cross-sectional view of a recording head of Conventional Example 2.
１ 圧力室 ２ ノズル ３ インク供給路 ４ 圧電素子 ５ 振動板 ６ インク液滴 ７ ノズルプレート ９ 母材 １１ 記録ヘッド ２１ 記録ヘッド ３１ 記録ヘッド ４１ 記録ヘッド ４２ 母材 ４３ 母材３ ４４ 母材１ ４５ 母材２ ４６ 電圧パルス発生回路 ４７ 被記録体 ４８ 後部電極 1 Pressure Chamber 2 Nozzle 3 Ink Supply Channel 4 Piezoelectric Element 5 Vibration Plate 6 Ink Droplet 7 Nozzle Plate 9 Base Material 11 Recording Head 21 Recording Head 31 Recording Head 41 Recording Head 42 Base Material 43 Base Material 3 44 Base Material 1 45 Mother Material 2 46 Voltage pulse generation circuit 47 Recorded body 48 Rear electrode
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11512994AJPH07314665A (en) | 1994-05-27 | 1994-05-27 | Inkjet recording head, recording apparatus and recording method using the same |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11512994AJPH07314665A (en) | 1994-05-27 | 1994-05-27 | Inkjet recording head, recording apparatus and recording method using the same |
| Publication Number | Publication Date |
|---|---|
| JPH07314665Atrue JPH07314665A (en) | 1995-12-05 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11512994APendingJPH07314665A (en) | 1994-05-27 | 1994-05-27 | Inkjet recording head, recording apparatus and recording method using the same |
| Country | Link |
|---|---|
| JP (1) | JPH07314665A (en) |
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