【０００１】[0001]
【産業上の利用分野】この発明は、シンクロトロン等の
粒子加速器に関し、粒子加速器を構成する真空チャンバ
ー自身にビーム収束作用を持たせたものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a particle accelerator such as a synchrotron, in which the vacuum chamber itself constituting the particle accelerator has a beam converging action.
【０００２】[0002]
【従来の技術】近年、小型シンクロトロンは、シンクロ
トロン放射光（ＳＯＲ）装置として、超々ＬＳＩ回路の
作成、医療分野における診断、分子解析、構造解析等様
々な分野への適用が期待されている。2. Description of the Related Art In recent years, small synchrotrons are expected to be applied as synchrotron radiation (SOR) devices to various fields such as creation of ultra-ultra LSI circuits, diagnosis in the medical field, molecular analysis, and structural analysis. .
【０００３】ＳＯＲ放射光装置の概要を図２に示す。ラ
イナック等で加速された電子ビーム１０はビーム輸送部
１４を介して、インフレクタ１８から蓄積リング２２内
に入射される。蓄積リング２２に入射された電子ビーム
１０は高周波加速空洞２１でエネルギを与えられながら
垂直方向収束電磁石２３（垂直方向用）、水平方向収束
電磁石２５（水平方向用）で収束され、軌道調整電磁石
３０（水平方向用）、３２（垂直方向用）でビーム軌道
が調整され、偏向電磁石２４で偏向されて蓄積リング２
２中を回り続ける。偏向電磁石２４で偏向される時に発
生するＳＯＲ光１１はビームチャンネル２６を通して例
えば露光装置に送られて超々ＬＳＩ回路作成用の光源等
として利用される。An outline of the SOR synchrotron radiation device is shown in FIG. The electron beam 10 accelerated by a linac or the like enters the storage ring 22 from the inflector 18 via the beam transport unit 14. The electron beam 10 incident on the storage ring 22 is focused by the vertical focusing electromagnet 23 (for vertical direction) and the horizontal focusing electromagnet 25 (for horizontal direction) while being given energy in the high-frequency acceleration cavity 21, and the orbit adjusting electromagnet 30. The beam orbit is adjusted by (horizontal direction) and 32 (vertical direction) and is deflected by the deflection electromagnet 24 to be stored in the storage ring 2.
2 Continue to go around. The SOR light 11 generated when being deflected by the deflecting electromagnet 24 is sent to, for example, an exposure device through a beam channel 26 and is used as a light source or the like for creating an ultra-ultra LSI circuit.
【０００４】[0004]
【発明が解決しようとする課題】前記図２のＳＯＲ装置
によれば、真空チャンバ−２２の断面構造（形状や直径
など）によってビーム径が決まってしまい、これによっ
て発生するＳＯＲ光の性能にも限界があった。また、真
空チャンバ−２２に多数の電磁石を配設するので、真空
チャンバー２２の周囲の構成が複雑となる欠点があっ
た。According to the SOR device of FIG. 2, the beam diameter is determined by the sectional structure (shape, diameter, etc.) of the vacuum chamber-22, and the performance of the SOR light generated by this is also determined. There was a limit. Further, since a large number of electromagnets are arranged in the vacuum chamber 22, there is a drawback that the structure around the vacuum chamber 22 becomes complicated.
【０００５】この発明は、前記従来の技術における問題
点を解決して、真空チャンバーの断面構造によらずビー
ム径をより小さく収束できるとともに真空チャンバーの
周囲の構成を簡略化することを可能にした粒子加速器を
提供しようとするものである。The present invention solves the above-mentioned problems in the prior art, and makes it possible to converge the beam diameter to a smaller size regardless of the sectional structure of the vacuum chamber and to simplify the structure around the vacuum chamber. It aims to provide a particle accelerator.
【０００６】[0006]
【課題を解決するための手段】この発明は、粒子ビーム
が通過する真空チャンバーの周囲の壁面にその軸方向に
沿って配設された複数本の導体と、これら導体に前記粒
子ビームに対して収束磁場を発生させる同一方向の電流
を流す電源装置とを具備してなるものである。SUMMARY OF THE INVENTION The present invention is directed to a plurality of conductors arranged along the axial direction of a wall surface of a vacuum chamber through which a particle beam passes, and these conductors with respect to the particle beam. And a power supply device for supplying a current in the same direction to generate a converging magnetic field.
【０００７】[0007]
【作用】この発明によれば、粒子ビームが通過する真空
チャンバーの周囲の壁面にその軸方向に沿って複数本の
導体を配設し、これら導体に前記粒子ビームに対して収
束磁場を発生させる同一方向の電流を流すようにしたの
で、各導線から発生する磁場により粒子ビームに収束力
を与えることができる。したがって、真空チャンバーの
断面構造に拘束されることなくビーム径を良好に収束さ
せることができる。また、軌道調整電磁石等を省いて真
空チャンバー周囲の構成を簡略化することも可能とな
る。According to the present invention, a plurality of conductors are arranged along the axial direction on the wall surface around the vacuum chamber through which the particle beam passes, and these conductors generate a converging magnetic field for the particle beam. Since the electric currents are made to flow in the same direction, it is possible to give a focusing force to the particle beam by the magnetic field generated from each conducting wire. Therefore, the beam diameter can be satisfactorily converged without being restricted by the sectional structure of the vacuum chamber. It is also possible to simplify the structure around the vacuum chamber by omitting the trajectory adjusting electromagnet and the like.
【０００８】[0008]
【実施例】この発明をＳＯＲ装置に適用した一実施例を
図１に示す。図１において（ａ）はＳＯＲ装置の全体構
成図および真空チャンバーの拡大図、（ｂ）は導体の結
線図である。図１（ａ）において、ライナック等で加速
された電子ビーム１０はビーム輸送部１４を介して、イ
ンフレクタ１８から蓄積リング２２内に入射される。蓄
積リング２２に入射された電子ビーム１０は高周波加速
空洞２１でエネルギを与えられながら垂直方向収束電磁
石２３（垂直方向用）、水平方向収束電磁石２５（水平
方向用）で収束され、偏向電磁石２４で偏向されて蓄積
リング２２中を回り続ける。偏向電磁石２４で偏向され
る時に発生するＳＯＲ光１１はビームチャンネル２６を
通して例えば露光装置に送られて超々ＬＳＩ回路作成用
の光源等として利用される。FIG. 1 shows an embodiment in which the present invention is applied to an SOR device. In FIG. 1, (a) is an overall configuration diagram of the SOR device and an enlarged view of the vacuum chamber, and (b) is a wiring diagram of conductors. In FIG. 1A, the electron beam 10 accelerated by a linac or the like enters the storage ring 22 from the inflector 18 via the beam transport unit 14. The electron beam 10 incident on the storage ring 22 is focused by the vertical focusing electromagnet 23 (for vertical direction) and the horizontal focusing electromagnet 25 (for horizontal direction) while being given energy in the high frequency acceleration cavity 21, and is deflected by the deflection electromagnet 24. It is deflected and continues to rotate in the storage ring 22. The SOR light 11 generated when being deflected by the deflecting electromagnet 24 is sent to, for example, an exposure device through a beam channel 26 and is used as a light source or the like for creating an ultra-ultra LSI circuit.
【０００９】真空チャンバー２２（蓄積リング）の壁面
内２２ａの上下左右各位置には図１（ａ）中に拡大して
示すように、直線導体４１〜４４が、真空チャンバー２
２の軸方向に沿って適宜の範囲にあるいは全周にわたっ
て直線状に配設されている。これら直線導体４１〜４４
は常電導線あるいは超電導線で構成され、その表面には
絶縁体が被覆されて、真空チャンバー２２に対し絶縁さ
れている。As shown in an enlarged view in FIG. 1 (a), linear conductors 41 to 44 are provided in each of the upper, lower, left and right positions inside the wall surface 22a of the vacuum chamber 22 (accumulation ring).
They are linearly arranged in an appropriate range or along the entire circumference along the axial direction of 2. These straight conductors 41 to 44
Is composed of a normal conducting wire or a superconducting wire, the surface of which is covered with an insulator so as to be insulated from the vacuum chamber 22.
【００１０】直線導体４１〜４４は図１（ｂ）のように
結線され、直流電源４６によって同一方向の電流が流さ
れる。電流調整機構４８，５０は上下の直線導体４２，
４４への供給電流と、左右の直線導体４３，４１への供
給電流を個々に調整するものである。The linear conductors 41 to 44 are connected as shown in FIG. 1 (b), and a direct current power supply 46 causes a current to flow in the same direction. The current adjusting mechanisms 48, 50 are the upper and lower linear conductors 42,
The supply current to 44 and the supply current to the left and right linear conductors 43, 41 are individually adjusted.
【００１１】直線導体４１〜４４に直流電源４６から電
流を流した時の真空チャンバー２２内における磁場の発
生状況を図３に示す。直線導体４１〜４４に同一方向の
電流を流したので、電子ビーム１０に対し水平および垂
直方向に収束力が作用する。電流調整機構４８，５０を
調整して、水平方向の収束磁場５５と垂直方向の収束磁
場５６の強さを等しくして（中心軌道からの距離が遠い
分左右の直線導体４１，４３に供給する電流を多くす
る）、真空チャンバー２２の中心軌道上で磁場が０にな
るようにすれば最適な収束状態が得られ、電子ビーム１
０は真空チャンバー２２の中心軌道上に小径に収束さ
れ、ＳＯＲ光１１の性能を向上させることができる。ま
た、これにより、前記図２の軌道調整電磁石３０，３２
等を省くこともできる。FIG. 3 shows how magnetic fields are generated in the vacuum chamber 22 when a current is applied to the linear conductors 41 to 44 from the DC power supply 46. Since the electric currents in the same direction are applied to the linear conductors 41 to 44, the focusing force acts on the electron beam 10 in the horizontal and vertical directions. The current adjusting mechanisms 48 and 50 are adjusted to equalize the strengths of the horizontal focusing magnetic field 55 and the vertical focusing magnetic field 56 (the distances from the central orbit are supplied to the left and right linear conductors 41 and 43). If the magnetic field is set to 0 on the central orbit of the vacuum chamber 22 by increasing the electric current), an optimum converged state can be obtained and the electron beam 1
0 is converged into a small diameter on the central orbit of the vacuum chamber 22, and the performance of the SOR light 11 can be improved. Further, as a result, the orbit adjusting electromagnets 30, 32 of FIG.
Etc. can be omitted.
【００１２】なお、図１において、直流電源５２は真空
チャンバー２２の初期立上げ時に直線導体４１〜４４を
利用して真空チャンバー２２のベーキングを行なうもの
である。すなわち、ベーキング時はスイッチ５４を接点
ｂ側に接続して、直流電源４６から大電流を直線導体４
１〜４４に供給して加熱し、真空チャンバー２２をベー
キングする。In FIG. 1, the DC power source 52 is for baking the vacuum chamber 22 using the linear conductors 41 to 44 when the vacuum chamber 22 is initially started up. That is, at the time of baking, the switch 54 is connected to the contact b side, and a large current is supplied from the DC power supply 46 to the linear conductor 4.
1 to 44 are heated and the vacuum chamber 22 is baked.
【００１３】[0013]
【他の実施例】前記実施例では、直線導体４１を真空チ
ャンバー２２の上下左右に配設したが、図４（ａ）に示
す直線導体６１〜６４のように斜めの位置に配設するこ
ともできる。また、図４（ｂ）に示す直線導体７１〜７
８のようにより多くの本数を配設することもできる。[Other Embodiments] In the above embodiment, the linear conductors 41 are arranged on the upper, lower, left and right sides of the vacuum chamber 22. You can also In addition, the linear conductors 71 to 7 shown in FIG.
It is also possible to arrange a larger number such as eight.
【００１４】また、この発明は、ＳＯＲ装置以外の粒子
加速器にも適用することができる。陽子ビームの場合
は、直線導体に流す電流方向を逆にすれば収束磁場が得
られる。The present invention can also be applied to particle accelerators other than SOR devices. In the case of a proton beam, a converging magnetic field can be obtained by reversing the direction of the current flowing through the straight conductor.
【００１５】[0015]
【発明の効果】以上説明したように、この発明によれ
ば、粒子ビームが通過する真空チャンバーの周囲の壁面
にその軸方向に沿って複数本の導体を配設し、これら導
体に前記粒子ビームに対して収束磁場を発生させる同一
方向の電流を流すようにしたので、各導線から発生する
磁場により粒子ビームに収束力を与えることができる。
したがって、真空チャンバーの断面構造に拘束されるこ
となくビーム径を良好に収束させることができる。ま
た、軌道調整電磁石等を省いて真空チャンバー周囲の構
成を簡略化することも可能となる。As described above, according to the present invention, a plurality of conductors are arranged along the axial direction on the wall surface around the vacuum chamber through which the particle beam passes, and the particle beam is provided on these conductors. Since the electric currents in the same direction that generate the converging magnetic field are caused to flow, it is possible to apply the converging force to the particle beam by the magnetic field generated from each conductor.
Therefore, the beam diameter can be satisfactorily converged without being restricted by the sectional structure of the vacuum chamber. It is also possible to simplify the structure around the vacuum chamber by omitting the trajectory adjusting electromagnet and the like.
【図１】この発明の一実施例を示す全体構成図および真
空チャンバーの拡大図および直線導体の結線図である。FIG. 1 is an overall configuration diagram showing an embodiment of the present invention, an enlarged view of a vacuum chamber, and a wiring diagram of a straight conductor.
【図２】従来のＳＯＲ装置の概要を示す平面図である。FIG. 2 is a plan view showing an outline of a conventional SOR device.
【図３】図１の真空チャンバー内における磁場の発生状
況を示す断面図である。FIG. 3 is a cross-sectional view showing how magnetic fields are generated in the vacuum chamber of FIG.
【図４】この発明の他の実施例を示す断面図である。FIG. 4 is a sectional view showing another embodiment of the present invention.
１０ 電子ビーム（粒子ビーム） ２２ 真空チャンバー ２２ａ 真空チャンバー壁面 ４１〜４４ 直線導体（導体） ４６ 直流電源（電源） ５５，５６ 収束磁場 10 Electron Beam (Particle Beam) 22 Vacuum Chamber 22a Vacuum Chamber Wall Surface 41 to 44 Linear Conductor (Director) 46 DC Power Source (Power Source) 55, 56 Converging Magnetic Field
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17731992AJPH0636893A (en) | 1992-06-11 | 1992-06-11 | Particle accelerator |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17731992AJPH0636893A (en) | 1992-06-11 | 1992-06-11 | Particle accelerator |
| Publication Number | Publication Date |
|---|---|
| JPH0636893Atrue JPH0636893A (en) | 1994-02-10 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17731992APendingJPH0636893A (en) | 1992-06-11 | 1992-06-11 | Particle accelerator |
| Country | Link |
|---|---|
| JP (1) | JPH0636893A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9622335B2 (en) | 2012-09-28 | 2017-04-11 | Mevion Medical Systems, Inc. | Magnetic field regenerator |
| US9661736B2 (en) | 2014-02-20 | 2017-05-23 | Mevion Medical Systems, Inc. | Scanning system for a particle therapy system |
| US9681531B2 (en) | 2012-09-28 | 2017-06-13 | Mevion Medical Systems, Inc. | Control system for a particle accelerator |
| US9706636B2 (en) | 2012-09-28 | 2017-07-11 | Mevion Medical Systems, Inc. | Adjusting energy of a particle beam |
| US9730308B2 (en) | 2013-06-12 | 2017-08-08 | Mevion Medical Systems, Inc. | Particle accelerator that produces charged particles having variable energies |
| US9925395B2 (en) | 2005-11-18 | 2018-03-27 | Mevion Medical Systems, Inc. | Inner gantry |
| US9950194B2 (en) | 2014-09-09 | 2018-04-24 | Mevion Medical Systems, Inc. | Patient positioning system |
| US9962560B2 (en) | 2013-12-20 | 2018-05-08 | Mevion Medical Systems, Inc. | Collimator and energy degrader |
| US10254739B2 (en) | 2012-09-28 | 2019-04-09 | Mevion Medical Systems, Inc. | Coil positioning system |
| US10258810B2 (en) | 2013-09-27 | 2019-04-16 | Mevion Medical Systems, Inc. | Particle beam scanning |
| US10646728B2 (en) | 2015-11-10 | 2020-05-12 | Mevion Medical Systems, Inc. | Adaptive aperture |
| US10653892B2 (en) | 2017-06-30 | 2020-05-19 | Mevion Medical Systems, Inc. | Configurable collimator controlled using linear motors |
| US10675487B2 (en) | 2013-12-20 | 2020-06-09 | Mevion Medical Systems, Inc. | Energy degrader enabling high-speed energy switching |
| USRE48047E1 (en) | 2004-07-21 | 2020-06-09 | Mevion Medical Systems, Inc. | Programmable radio frequency waveform generator for a synchrocyclotron |
| USRE48317E1 (en) | 2007-11-30 | 2020-11-17 | Mevion Medical Systems, Inc. | Interrupted particle source |
| US10925147B2 (en) | 2016-07-08 | 2021-02-16 | Mevion Medical Systems, Inc. | Treatment planning |
| CN112822832A (en)* | 2021-02-02 | 2021-05-18 | 中国原子能科学研究院 | Wide-section variable-track vacuum cavity structure capable of realizing continuous acceleration |
| US11103730B2 (en) | 2017-02-23 | 2021-08-31 | Mevion Medical Systems, Inc. | Automated treatment in particle therapy |
| US11291861B2 (en) | 2019-03-08 | 2022-04-05 | Mevion Medical Systems, Inc. | Delivery of radiation by column and generating a treatment plan therefor |
| CN116828689A (en)* | 2023-06-26 | 2023-09-29 | 中国科学院上海高等研究院 | Ceramic vacuum chamber of nonlinear impact magnet and manufacturing method thereof |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE48047E1 (en) | 2004-07-21 | 2020-06-09 | Mevion Medical Systems, Inc. | Programmable radio frequency waveform generator for a synchrocyclotron |
| US9925395B2 (en) | 2005-11-18 | 2018-03-27 | Mevion Medical Systems, Inc. | Inner gantry |
| US10722735B2 (en) | 2005-11-18 | 2020-07-28 | Mevion Medical Systems, Inc. | Inner gantry |
| US10279199B2 (en) | 2005-11-18 | 2019-05-07 | Mevion Medical Systems, Inc. | Inner gantry |
| USRE48317E1 (en) | 2007-11-30 | 2020-11-17 | Mevion Medical Systems, Inc. | Interrupted particle source |
| US10254739B2 (en) | 2012-09-28 | 2019-04-09 | Mevion Medical Systems, Inc. | Coil positioning system |
| US9622335B2 (en) | 2012-09-28 | 2017-04-11 | Mevion Medical Systems, Inc. | Magnetic field regenerator |
| US10368429B2 (en) | 2012-09-28 | 2019-07-30 | Mevion Medical Systems, Inc. | Magnetic field regenerator |
| US9706636B2 (en) | 2012-09-28 | 2017-07-11 | Mevion Medical Systems, Inc. | Adjusting energy of a particle beam |
| US9681531B2 (en) | 2012-09-28 | 2017-06-13 | Mevion Medical Systems, Inc. | Control system for a particle accelerator |
| US9730308B2 (en) | 2013-06-12 | 2017-08-08 | Mevion Medical Systems, Inc. | Particle accelerator that produces charged particles having variable energies |
| US10258810B2 (en) | 2013-09-27 | 2019-04-16 | Mevion Medical Systems, Inc. | Particle beam scanning |
| US9962560B2 (en) | 2013-12-20 | 2018-05-08 | Mevion Medical Systems, Inc. | Collimator and energy degrader |
| US10675487B2 (en) | 2013-12-20 | 2020-06-09 | Mevion Medical Systems, Inc. | Energy degrader enabling high-speed energy switching |
| US10434331B2 (en) | 2014-02-20 | 2019-10-08 | Mevion Medical Systems, Inc. | Scanning system |
| US11717700B2 (en) | 2014-02-20 | 2023-08-08 | Mevion Medical Systems, Inc. | Scanning system |
| US9661736B2 (en) | 2014-02-20 | 2017-05-23 | Mevion Medical Systems, Inc. | Scanning system for a particle therapy system |
| US9950194B2 (en) | 2014-09-09 | 2018-04-24 | Mevion Medical Systems, Inc. | Patient positioning system |
| US10786689B2 (en) | 2015-11-10 | 2020-09-29 | Mevion Medical Systems, Inc. | Adaptive aperture |
| US10646728B2 (en) | 2015-11-10 | 2020-05-12 | Mevion Medical Systems, Inc. | Adaptive aperture |
| US11213697B2 (en) | 2015-11-10 | 2022-01-04 | Mevion Medical Systems, Inc. | Adaptive aperture |
| US11786754B2 (en) | 2015-11-10 | 2023-10-17 | Mevion Medical Systems, Inc. | Adaptive aperture |
| US10925147B2 (en) | 2016-07-08 | 2021-02-16 | Mevion Medical Systems, Inc. | Treatment planning |
| US12150235B2 (en) | 2016-07-08 | 2024-11-19 | Mevion Medical Systems, Inc. | Treatment planning |
| US11103730B2 (en) | 2017-02-23 | 2021-08-31 | Mevion Medical Systems, Inc. | Automated treatment in particle therapy |
| US10653892B2 (en) | 2017-06-30 | 2020-05-19 | Mevion Medical Systems, Inc. | Configurable collimator controlled using linear motors |
| US11311746B2 (en) | 2019-03-08 | 2022-04-26 | Mevion Medical Systems, Inc. | Collimator and energy degrader for a particle therapy system |
| US11717703B2 (en) | 2019-03-08 | 2023-08-08 | Mevion Medical Systems, Inc. | Delivery of radiation by column and generating a treatment plan therefor |
| US11291861B2 (en) | 2019-03-08 | 2022-04-05 | Mevion Medical Systems, Inc. | Delivery of radiation by column and generating a treatment plan therefor |
| US12161885B2 (en) | 2019-03-08 | 2024-12-10 | Mevion Medical Systems, Inc. | Delivery of radiation by column and generating a treatment plan therefor |
| US12168147B2 (en) | 2019-03-08 | 2024-12-17 | Mevion Medical Systems, Inc. | Collimator and energy degrader for a particle therapy system |
| CN112822832A (en)* | 2021-02-02 | 2021-05-18 | 中国原子能科学研究院 | Wide-section variable-track vacuum cavity structure capable of realizing continuous acceleration |
| CN116828689A (en)* | 2023-06-26 | 2023-09-29 | 中国科学院上海高等研究院 | Ceramic vacuum chamber of nonlinear impact magnet and manufacturing method thereof |
| Publication | Publication Date | Title |
|---|---|---|
| JPH0636893A (en) | Particle accelerator | |
| US8508158B2 (en) | High-current dc proton accelerator | |
| US4293772A (en) | Wobbling device for a charged particle accelerator | |
| JPH06181100A (en) | Microtron electron accelerator | |
| US6327339B1 (en) | Industrial x-ray/electron beam source using an electron accelerator | |
| JPS63218200A (en) | Superconducting SOR generator | |
| WO2021260988A1 (en) | Particle accelerator and particle beam therapy device | |
| CN112657072A (en) | Ultrahigh-dose-rate proton treatment device based on linear accelerator and scanning method | |
| CN114025836A (en) | Compact rotating gantry for proton radiation systems | |
| US20210060358A1 (en) | 3d high speed rf beam scanner for hadron therapy | |
| JP3857096B2 (en) | Charged particle beam extraction apparatus, circular accelerator, and circular accelerator system | |
| JPS5848336A (en) | cold cathode magnetron injection electron gun | |
| JP4177149B2 (en) | Charged particle generator | |
| JPH0556000B2 (en) | ||
| JP7458309B2 (en) | Laser ion sources, circular accelerators and particle therapy systems | |
| US3260877A (en) | Multiple-beam injector for magnetic induction accelerators | |
| JP2876280B2 (en) | Beam generating method and apparatus | |
| US3912930A (en) | Electron beam focusing system | |
| JP3059525B2 (en) | Microtron electron accelerator | |
| JPH0514400B2 (en) | ||
| JPS593812B2 (en) | ion generator | |
| JPS6074336A (en) | Rectangular electron beam generator | |
| JPH05181000A (en) | Focusing electromagnet device in particle accelerator | |
| JP2600075B2 (en) | X-ray generator | |
| JP2001015299A (en) | Multi-pass type accelerator, accelerating cavity, and electron beam / X-ray irradiation processing device using them |