【０００１】[0001]
【産業上の利用分野】この発明は、ＳＯＲ（シンクロト
ロン放射光）装置の真空排気装置に関し、主電源（商用
電源）が停電等により喪失した時の蓄積リングの真空度
の低下を防止したものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum exhaust device for an SOR (synchrotron radiation) device, which prevents a reduction in vacuum level of a storage ring when a main power supply (commercial power supply) is lost due to a power failure or the like. Is.
【０００２】[0002]
【従来の技術】近年、シンクロトロンは、シンクロトロ
ン放射光（ＳＯＲ）装置として、超々ＬＳＩ回路の作
成、医療分野における診断、分子解析、構造解析等様々
な分野への適用が期待されている。ＳＯＲ装置の概要を
図２に示す。電子発生装置（電子銃等）１０で発生した
電子ビームは線型加速装置（ライナック）１２で光速近
くに加速され、ビーム輸送部１４の偏向電磁石１６で偏
向されて、インフレクタ１８を介して蓄積リング２２内
に入射される。蓄積リング２２に入射された電子ビーム
は高周波加速空洞２１でエネルギを与えられながら収束
電磁石２３（垂直方向用）、２５（水平方向用）で収束
され、偏向電磁石２４で偏向されて蓄積リング２２中を
回り続ける。偏向電磁石２４で偏向される時に発生する
ＳＯＲ光はビームチャンネル２６を通して例えば露光装
置２８に送られて超々ＬＳＩ回路作成用の光源等として
利用される。2. Description of the Related Art In recent years, a synchrotron is expected to be applied as a synchrotron radiation (SOR) device to various fields such as creation of ultra-ultra LSI circuits, diagnosis in the medical field, molecular analysis, and structural analysis. The outline of the SOR device is shown in FIG. An electron beam generated by an electron generator (electron gun, etc.) 10 is accelerated to near the speed of light by a linear accelerator (linac) 12, is deflected by a deflection electromagnet 16 of a beam transport unit 14, and is accumulated through an inflator 18 to a storage ring. It is injected into the inside 22. The electron beam incident on the storage ring 22 is converged by the converging electromagnets 23 (for vertical direction) and 25 (for horizontal direction) while being given energy in the high-frequency acceleration cavity 21, and is deflected by the deflection electromagnet 24 to be stored in the storage ring 22. Keep going around. The SOR light generated when being deflected by the deflection electromagnet 24 is sent to, for example, the exposure device 28 through the beam channel 26, and is used as a light source or the like for creating an ultra-super LSI circuit.
【０００３】[0003]
【発明が解決しようとする課題】ＳＯＲ装置の各部の真
空チャンバーはそれぞれ独自の真空ポンプにより真空排
気されており、これにより各部の真空度は、例えば蓄積
リング２２が１０-10Torr、ビーム輸送部１４やビーム
チャンネル２６が１０-8Torrに保たれている。The vacuum chamber of each part of the SOR device is evacuated by its own vacuum pump, whereby the degree of vacuum of each part is, for example, 10-10 Torr for the storage ring 22 and the beam transport part. 14 and beam channel 26 are kept at 10-8 Torr.
【０００４】このような状態で停電等により電源喪失状
態になると、各部の真空ポンプが停止するため、ビーム
輸送部１４やビームチャンネル２６から超高真空の蓄積
リング２２に気体が流れ込み、蓄積リング２２の真空度
が低下してしまう。このため、電源が復旧した時に蓄積
リング２２内を超高真空に戻すのに時間を要する問題が
ある。そこで、電源喪失に備えて非常用電源を設けて電
源喪失時に各部の真空ポンプをこれで駆動することも考
えられるが、各部の真空ポンプを駆動するには非常に容
量の大きな非常用電源が必要となる。この発明は、上述
の点に鑑みてなされたもので、電源喪失時に比較的小容
量の非常用電源を用いて蓄積リングの超高真空状態を保
持することができるＳＯＲ装置の真空排気装置を提供し
ようとするものである。In such a state, when the power is lost due to a power failure or the like, the vacuum pumps of the respective parts are stopped, so that gas flows from the beam transport section 14 or the beam channel 26 into the ultra-high vacuum storage ring 22, and the storage ring 22. The degree of vacuum of the will decrease. Therefore, there is a problem that it takes time to return the inside of the storage ring 22 to the ultra-high vacuum when the power is restored. Therefore, it is possible to provide an emergency power supply in case of power loss and drive the vacuum pump of each part with this when the power is lost, but to drive the vacuum pump of each part, an emergency power supply with a very large capacity is required. Becomes The present invention has been made in view of the above points, and provides an evacuation device for a SOR device that can maintain an ultrahigh vacuum state of a storage ring by using an emergency power supply having a relatively small capacity when the power supply is lost. Is what you are trying to do.
【０００５】[0005]
【課題を解決するための手段】この発明は、入射器から
出射された電子ビームをビーム輸送部を介して蓄積リン
グに入射して蓄積し、蓄積リングの偏向部で電子ビーム
から出射されるＳＯＲ光をビームチャンネルを介して出
射するＳＯＲ装置において、前記ビーム輸送部の蓄積リ
ング近傍位置に配設された第１のゲート弁と、前記ビー
ムチャンネルの蓄積リング近傍位置に配設された第２の
ゲート弁と、前記ビーム輸送部内を真空排気するビーム
輸送部真空排気手段と、前記蓄積リング内を真空排気す
る蓄積リング真空排気手段と、前記ビームチャンネルを
真空排気するビームチャンネル真空排気手段と、前記ビ
ーム輸送部真空排気手段、前記蓄積リング真空排気手段
および前記ビームチャンネル真空排気手段にそれぞれ駆
動用電力を供給する商用電源と、前記蓄積リング真空排
気手段に非常用の駆動用電力を供給する非常用電源と、
前記蓄積リング真空排気手段の駆動用電力の供給源を前
記商用電源または非常用電源に切換える電源切換手段
と、前記商用電源の喪失状態を検出する電源喪失検出手
段と、この電源喪失検出手段で商用電源の喪失が検出さ
れていない時は前記第１、第２のゲート弁を開くととも
に前記蓄積リング真空排気手段の駆動用電力の供給源を
前記商用電源側に切換え、前記電源喪失検出手段で商用
電源の喪失が検出された時は前記第１、第２のゲート弁
を閉じるとともに前記蓄積リング真空排気手段の駆動用
電力の供給源を前記非常用電源側に切換える制御手段と
を具備してなるものである。SUMMARY OF THE INVENTION According to the present invention, an electron beam emitted from an injector is incident on a storage ring via a beam transport portion to be stored therein, and the SOR emitted from the electron beam at a deflection portion of the storage ring. In a SOR device that emits light through a beam channel, a first gate valve disposed near the storage ring of the beam transport unit and a second gate valve disposed near the storage ring of the beam channel. A gate valve, a beam transportation unit vacuum evacuation means for evacuating the inside of the beam transportation part, a storage ring vacuum evacuation means for evacuating the inside of the storage ring, a beam channel vacuum evacuation means for evacuating the beam channel, Driving power is supplied to the beam transporting unit vacuum exhausting means, the storage ring vacuum exhausting means, and the beam channel vacuum exhausting means, respectively. And commercial power supply, and an emergency power supply for supplying drive power of the emergency to the storage ring vacuum exhaust means,
Power source switching means for switching the power source for driving the storage ring vacuum exhaust means to the commercial power source or the emergency power source, power source loss detecting means for detecting a loss state of the commercial power source, and commercial power source loss detecting means. When the loss of power is not detected, the first and second gate valves are opened, and the power source for driving the storage ring vacuum exhaust means is switched to the commercial power source side, and the commercial power is detected by the power loss detecting means. And a control means for closing the first and second gate valves and switching the power supply source for driving the storage ring vacuum exhaust means to the emergency power supply side when the loss of the power supply is detected. It is a thing.
【０００６】[0006]
【作用】この発明によれば、停電等による電源喪失時に
ビーム輸送部とビームチャンネルのゲート弁を閉じるよ
うにしたので、ビーム輸送部およびビームチャンネルか
ら蓄積リングへの気体の流入はなくなり、非常用電源は
蓄積リング真空排気手段だけ駆動すればよいので、容量
が小さなものですむようになる。これにより、電源喪失
時に蓄積リング内を超高真空に保持できる。電源が復旧
したら各部の真空排気手段を商用電源で駆動して各ゲー
ト弁を開くことにより元の状態に復帰することができ
る。According to the present invention, since the gate valves of the beam transport section and the beam channel are closed when the power is lost due to a power failure or the like, gas does not flow from the beam transport section and the beam channel into the storage ring, which is an emergency measure. Since the power supply only needs to drive the storage ring vacuum pumping means, a small capacity can be used. This allows the storage ring to be maintained in an ultra-high vacuum when the power supply is lost. When the power source is restored, the vacuum exhaust means of each unit is driven by a commercial power source and each gate valve is opened to restore the original state.
【０００７】[0007]
【実施例】この発明の一実施例を図１に示す。図１のＳ
ＯＲ装置１において、電子発生装置（電子銃等）１０で
発生した電子ビーム１１は入射器である線型加速装置
（ライナック）１２で光速近くに加速され、ビーム輸送
部１４の偏向電磁石１６で偏向されて、インフレクタ１
８を介して蓄積リング２２内に入射される。蓄積リング
２２に入射された電子ビーム１１は高周波加速空洞２１
でエネルギを与えられながら収束電磁石２３（垂直方向
用）、２５（水平方向用）で収束され、偏向電磁石２４
で偏向されて蓄積リング２２中を回り続ける。偏向電磁
石２４で偏向される時に発生するＳＯＲ光１３はビーム
チャンネル２６を通して例えば露光装置２８に送られて
超々ＬＳＩ回路作成用の光源等として利用される。FIG. 1 shows an embodiment of the present invention. S in FIG.
In the OR device 1, an electron beam 11 generated by an electron generator (electron gun or the like) 10 is accelerated to near the speed of light by a linear accelerator (linac) 12 which is an injector, and is deflected by a deflection electromagnet 16 of a beam transport unit 14. Inflector 1
It is injected into the storage ring 22 via 8. The electron beam 11 incident on the storage ring 22 receives the high frequency acceleration cavity 21.
While being given energy by the focusing electromagnets 23 (for vertical direction) and 25 (for horizontal direction),
It is deflected by and continues to rotate in the storage ring 22. The SOR light 13 generated when being deflected by the deflecting electromagnet 24 is sent to, for example, an exposure device 28 through a beam channel 26, and is used as a light source or the like for creating an ultra-super LSI circuit.
【０００８】ビーム輸送部１４における蓄積リング２２
の近傍位置には、ゲート弁３１（第１のゲート弁）が配
設されている。ビームチャンネル２６における蓄積リン
グ２２の近傍位置にはゲート弁３３（第２のゲート弁）
が配設されている。ビーム輸送部１４、蓄積リング２２
およびビームチャンネル２６はそれぞれ独自の真空ポン
プ５１〜５３で排気される。Storage ring 22 in beam transport section 14
A gate valve 31 (first gate valve) is provided near the position. A gate valve 33 (second gate valve) is provided at a position near the storage ring 22 in the beam channel 26.
Are arranged. Beam transport unit 14, storage ring 22
The beam channel 26 and the beam channel 26 are exhausted by their own vacuum pumps 51 to 53, respectively.
【０００９】商用電源３６はＳＯＲ装置１の各部に駆動
用電源を供給する。非常用電源３８は電源喪失時に蓄積
リング２２の真空ポンプ５２に非常用電力を供給するも
ので、例えば蓄電池、発電機、燃料電池等で構成され
る。スイッチ４０（電源切換手段）は蓄積リング２２の
真空ポンプ５２への電力供給源を商用電源３６または非
常用電源３８に切り換えるものである。The commercial power supply 36 supplies drive power to each part of the SOR device 1. The emergency power supply 38 supplies emergency power to the vacuum pump 52 of the storage ring 22 when the power is lost, and is composed of, for example, a storage battery, a generator, a fuel cell, or the like. The switch 40 (power supply switching means) switches the power supply source to the vacuum pump 52 of the storage ring 22 to the commercial power supply 36 or the emergency power supply 38.
【００１０】電源喪失検出手段４２は商用電源３６が停
電等により喪失したことを検出するものである。制御手
段４４は、電源喪失の有無に応じて非常用電源３８、各
ゲート弁３１，３３およびスイッチ４０を制御するもの
である。The power loss detecting means 42 detects that the commercial power source 36 has been lost due to a power failure or the like. The control means 44 controls the emergency power supply 38, the gate valves 31, 33, and the switch 40 depending on the presence or absence of power loss.
【００１１】制御手段４４による制御動作を図３を参照
して説明する。電源喪失が検出されていない時は、ゲー
ト弁３１、３３を開き、スイッチ４０を商用電源３６に
接続する。これにより、各部の真空ポンプ５１〜５３は
商用電源３６により駆動されて、例えば蓄積リング２２
内を１０-10Torr、ビーム輸送部１４内およびビームチ
ャンネル２６内をそれぞれ１０-8に保ち、電子ビーム１
１の周回によるＳＯＲ光１３の出射が行なわれる。The control operation of the control means 44 will be described with reference to FIG. When no power loss is detected, the gate valves 31, 33 are opened and the switch 40 is connected to the commercial power source 36. As a result, the vacuum pumps 51 to 53 of the respective parts are driven by the commercial power source 36 and, for example, the storage ring 22.
The inside of the electron beam is kept at 10-10 Torr and the inside of the beam transport section 14 and the beam channel 26 are kept at 10-8 , respectively.
The SOR light 13 is emitted by the circulation of 1.
【００１２】停電等により電源喪失すると、ゲート弁３
１，３３が閉じて蓄積リング２２がビーム輸送路１４お
よびビームチャンネル２６と遮断される。そして、スイ
ッチ４０が非常用電源３８側に接続されて、非常用電源
３８が起動する。これにより蓄積リング２２の真空ポン
プ５２だけが駆動され続け、蓄積リング内２２の超高真
空が保たれる。When power is lost due to a power failure or the like, the gate valve 3
1, 33 are closed and the storage ring 22 is disconnected from the beam transport path 14 and the beam channel 26. Then, the switch 40 is connected to the emergency power supply 38 side, and the emergency power supply 38 is activated. As a result, only the vacuum pump 52 of the storage ring 22 is continuously driven, and the ultrahigh vacuum in the storage ring 22 is maintained.
【００１３】電源が復旧すると、スイッチ４０が商用電
源３６側に接続され各部への電源供給が再開される。各
部の真空ポンプ５１〜５３も商用電源３６により駆動さ
れる。蓄積リング２２の真空ポンプ５２は電源喪失して
いる間も非常用電源３８で駆動され続けていたため、蓄
積リング２２は１０-10Torr等の超高真空に保持されて
いる。ビーム輸送部１４やビームチャンネル２６は電源
喪失中真空引きされていなかったため、多少真空度が低
下するが、もともと蓄積リング２２より真空度は低くて
よい（例えば１０-8Torr）ので、電源復旧後短時間で真
空引きは終了する。各部が所定の真空度に達したらゲー
ト弁３１，３２を開いてＳＯＲ装置１の運転を再開す
る。When the power supply is restored, the switch 40 is connected to the commercial power supply 36 side, and the power supply to the respective parts is restarted. The vacuum pumps 51 to 53 of each part are also driven by the commercial power supply 36. Since the vacuum pump 52 of the storage ring 22 was continuously driven by the emergency power supply 38 while the power supply was lost, the storage ring 22 is maintained at an ultrahigh vacuum of 10−10 Torr or the like. Since the beam transport unit 14 and the beam channel 26 were not evacuated during the power loss, the degree of vacuum is slightly lowered, but the degree of vacuum is originally lower than that of the storage ring 22 (for example, 10-8 Torr), so after the power is restored. Vacuuming is completed in a short time. When the respective parts reach a predetermined degree of vacuum, the gate valves 31 and 32 are opened to restart the operation of the SOR device 1.
【００１４】なお、ゲート弁３１，３３は例えば商用電
源３６で駆動するようにして、商用電源３６が喪失状態
となって通電されなくなるとばね等の作用により自動的
に閉となるものを用いることができる。またスイッチ４
０も例えば商用電源３６で駆動するようにして、商用電
源３６が喪失状態となって通電されなくなるとばね等の
作用により自動的に非常用電源３８側に接続されるもの
を用いることができる。The gate valves 31 and 33 should be driven by, for example, a commercial power source 36, and should be automatically closed by the action of a spring or the like when the commercial power source 36 is in a lost state and is de-energized. You can Also switch 4
For example, 0 may be driven by the commercial power supply 36, and when the commercial power supply 36 is in a lost state and no longer energized, it may be automatically connected to the emergency power supply 38 by the action of a spring or the like.
【００１５】[0015]
【発明の効果】以上説明したように、この発明によれ
ば、停電等による電源喪失時にビーム輸送部とビームチ
ャンネルのゲート弁を閉じるようにしたので、ビーム輸
送部およびビームチャンネルから蓄積リングへの気体の
流入はなくなり、非常用電源は蓄積リング真空排気手段
だけ駆動すればよいので、容量が小さなものですむよう
になる。これにより、電源喪失時に蓄積リング内を超高
真空に保持できる。電源が復旧したら各部の真空排気手
段を商用電源で駆動して各ゲート弁を開くことにより元
の状態に復帰することができる。As described above, according to the present invention, the gate valves of the beam transport section and the beam channel are closed when the power is lost due to a power failure or the like, so that the beam transport section and the beam channel are connected to the storage ring. Since the gas does not flow in and the emergency power supply only needs to drive the storage ring vacuum pumping means, a small capacity is required. This allows the storage ring to be maintained in an ultra-high vacuum when the power supply is lost. When the power source is restored, the vacuum exhaust means of each unit is driven by a commercial power source and each gate valve is opened to restore the original state.
【図１】この発明の一実施例を示すＳＯＲ装置の平面図
および電源供給系統図である。FIG. 1 is a plan view and a power supply system diagram of an SOR device showing an embodiment of the present invention.
【図２】ＳＯＲ装置の概要を示す平面図である。FIG. 2 is a plan view showing an outline of an SOR device.
【図３】図１の制御手段４４による制御動作を示すタイ
ムチャートである。FIG. 3 is a time chart showing a control operation by control means 44 in FIG.
１ ＳＯＲ装置 １１ 電子ビーム １２ 線型加速装置（入射器） １３ ＳＯＲ光 １４ ビーム輸送部 ２２ 蓄積リング ２４ 偏向電磁石（偏向部） ２６ ビームチャンネル ３１ ゲート弁（第１のゲート弁） ３３ ゲート弁（第２のゲート弁） ３６ 商用電源 ３８ 非常用電源 ４０ スイッチ（電源切換手段） ４２ 電源喪失検出手段 ４４ 制御手段 ５１ 真空ポンプ（ビーム輸送部真空排気手段） ５２ 真空ポンプ（蓄積リング真空排気手段） ５３ 真空ポンプ（ビームチャンネル真空排気手段） 1 SOR Device 11 Electron Beam 12 Linear Accelerator (Injector) 13 SOR Light 14 Beam Transport Section 22 Storage Ring 24 Deflection Electromagnet (Deflection Section) 26 Beam Channel 31 Gate Valve (First Gate Valve) 33 Gate Valve (Second) Gate valve) 36 commercial power supply 38 emergency power supply 40 switch (power supply switching means) 42 power loss detection means 44 control means 51 vacuum pump (vacuum exhaust means for beam transportation section) 52 vacuum pump (vacuum exhaust means for storage ring) 53 vacuum pump (Beam channel evacuation means)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21481591AJPH0541297A (en) | 1991-07-31 | 1991-07-31 | Vacuum exhaust device for SOR device |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21481591AJPH0541297A (en) | 1991-07-31 | 1991-07-31 | Vacuum exhaust device for SOR device |
| Publication Number | Publication Date |
|---|---|
| JPH0541297Atrue JPH0541297A (en) | 1993-02-19 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21481591APendingJPH0541297A (en) | 1991-07-31 | 1991-07-31 | Vacuum exhaust device for SOR device |
| Country | Link |
|---|---|
| JP (1) | JPH0541297A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8644527B2 (en) | 2007-12-19 | 2014-02-04 | Panasonic Corporation | Piezoelectric acoustic transducer |
| US9980024B2 (en) | 2011-02-25 | 2018-05-22 | Rohm Co., Ltd. | Hearing system and finger ring for the hearing system |
| US10013862B2 (en) | 2014-08-20 | 2018-07-03 | Rohm Co., Ltd. | Watching system, watching detection device, and watching notification device |
| US10075574B2 (en) | 2013-08-23 | 2018-09-11 | Rohm Co., Ltd. | Mobile telephone |
| US10079925B2 (en) | 2012-01-20 | 2018-09-18 | Rohm Co., Ltd. | Mobile telephone |
| US10103766B2 (en) | 2013-10-24 | 2018-10-16 | Rohm Co., Ltd. | Wristband-type handset and wristband-type alerting device |
| US10356231B2 (en) | 2014-12-18 | 2019-07-16 | Finewell Co., Ltd. | Cartilage conduction hearing device using an electromagnetic vibration unit, and electromagnetic vibration unit |
| US10506343B2 (en) | 2012-06-29 | 2019-12-10 | Finewell Co., Ltd. | Earphone having vibration conductor which conducts vibration, and stereo earphone including the same |
| US10778824B2 (en) | 2016-01-19 | 2020-09-15 | Finewell Co., Ltd. | Pen-type handset |
| US10779075B2 (en) | 2010-12-27 | 2020-09-15 | Finewell Co., Ltd. | Incoming/outgoing-talk unit and incoming-talk unit |
| US10795321B2 (en) | 2015-09-16 | 2020-10-06 | Finewell Co., Ltd. | Wrist watch with hearing function |
| US10967521B2 (en) | 2015-07-15 | 2021-04-06 | Finewell Co., Ltd. | Robot and robot system |
| US11526033B2 (en) | 2018-09-28 | 2022-12-13 | Finewell Co., Ltd. | Hearing device |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8644527B2 (en) | 2007-12-19 | 2014-02-04 | Panasonic Corporation | Piezoelectric acoustic transducer |
| US10779075B2 (en) | 2010-12-27 | 2020-09-15 | Finewell Co., Ltd. | Incoming/outgoing-talk unit and incoming-talk unit |
| US9980024B2 (en) | 2011-02-25 | 2018-05-22 | Rohm Co., Ltd. | Hearing system and finger ring for the hearing system |
| US10778823B2 (en) | 2012-01-20 | 2020-09-15 | Finewell Co., Ltd. | Mobile telephone and cartilage-conduction vibration source device |
| US10079925B2 (en) | 2012-01-20 | 2018-09-18 | Rohm Co., Ltd. | Mobile telephone |
| US10506343B2 (en) | 2012-06-29 | 2019-12-10 | Finewell Co., Ltd. | Earphone having vibration conductor which conducts vibration, and stereo earphone including the same |
| US10834506B2 (en) | 2012-06-29 | 2020-11-10 | Finewell Co., Ltd. | Stereo earphone |
| US10237382B2 (en) | 2013-08-23 | 2019-03-19 | Finewell Co., Ltd. | Mobile telephone |
| US10075574B2 (en) | 2013-08-23 | 2018-09-11 | Rohm Co., Ltd. | Mobile telephone |
| US10103766B2 (en) | 2013-10-24 | 2018-10-16 | Rohm Co., Ltd. | Wristband-type handset and wristband-type alerting device |
| US10380864B2 (en) | 2014-08-20 | 2019-08-13 | Finewell Co., Ltd. | Watching system, watching detection device, and watching notification device |
| US10013862B2 (en) | 2014-08-20 | 2018-07-03 | Rohm Co., Ltd. | Watching system, watching detection device, and watching notification device |
| US10356231B2 (en) | 2014-12-18 | 2019-07-16 | Finewell Co., Ltd. | Cartilage conduction hearing device using an electromagnetic vibration unit, and electromagnetic vibration unit |
| US11601538B2 (en) | 2014-12-18 | 2023-03-07 | Finewell Co., Ltd. | Headset having right- and left-ear sound output units with through-holes formed therein |
| US10848607B2 (en) | 2014-12-18 | 2020-11-24 | Finewell Co., Ltd. | Cycling hearing device and bicycle system |
| US10967521B2 (en) | 2015-07-15 | 2021-04-06 | Finewell Co., Ltd. | Robot and robot system |
| US10795321B2 (en) | 2015-09-16 | 2020-10-06 | Finewell Co., Ltd. | Wrist watch with hearing function |
| US10778824B2 (en) | 2016-01-19 | 2020-09-15 | Finewell Co., Ltd. | Pen-type handset |
| US11526033B2 (en) | 2018-09-28 | 2022-12-13 | Finewell Co., Ltd. | Hearing device |
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