【０００１】[0001]
【産業上の利用分野】本発明は、電子回路各部の物理的
特性を測定するプロービング装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probing device for measuring physical characteristics of various parts of an electronic circuit.
【０００２】[0002]
【従来の技術】プローブの移動が可能なプロービング装
置としては、例えば特開平1−270670号に示されている
ように前後方向への移動が可能なものである。2. Description of the Related Art A probing device capable of moving a probe is, for example, a device capable of moving in the front-back direction as disclosed in Japanese Patent Laid-Open No. 1-270670.
【０００３】[0003]
【発明が解決しようとする課題】しかし、この構造では
プローブが移動できない部分があり、被測定体のパッド
の位置が異なるものにおいてはプローブが移動できない
部分ができてしまい、その結果プローブカードの作成・
交換が必要になる場合があった。However, in this structure, there is a portion where the probe cannot move, and there is a portion where the probe cannot move in the case where the position of the pad of the object to be measured is different, and as a result, the probe card is produced.・
In some cases, replacement was necessary.
【０００４】本発明の目的は、プローブの位置を単純な
回転、及び前後移動により被測定体のパッドの位置に合
わせることを可能とすることである。An object of the present invention is to enable the position of the probe to be aligned with the position of the pad of the object to be measured by simple rotation and back and forth movement.
【０００５】[0005]
【課題を解決するための手段】本発明の目的は、絶縁盤
上面に一端を回動自在とし他端を固定できるようにした
プローブ保持部材と固定用治具とを具備することにより
達成できる。The object of the present invention can be achieved by providing a probe holding member and a fixing jig whose one end is rotatable and the other end can be fixed on the upper surface of the insulating board.
【０００６】[0006]
【作用】このような構成によれば、固定用治具の開閉に
よりプローブの固定・回転・前後方向への移動が可能と
なる。With this structure, the probe can be fixed / rotated / moved in the front / rear direction by opening / closing the fixing jig.
【０００７】[0007]
【実施例】以下、本発明の実施例を図面を用いて説明す
る。Embodiments of the present invention will be described below with reference to the drawings.
【０００８】図１は本発明の上面図、図２は図１のＡ−
Ａ断面拡大図、図３は図１のＢ−Ｂ拡大断面図である。FIG. 1 is a top view of the present invention, and FIG. 2 is A- of FIG.
FIG. 3 is an enlarged sectional view taken along the line A-A, and FIG. 3 is an enlarged sectional view taken along the line BB in FIG.
【０００９】図に示すように、プロービング装置はプロ
ーブ１，プローブに合わせた溝を有するプローブ保持部
材２，プローブ保持部材２を回転しないように固定する
固定用治具３，プローブ保持部材２を取り付けるための
固定用治具４，絶縁盤５より構成される。As shown in the drawing, the probing device is equipped with a probe 1, a probe holding member 2 having a groove aligned with the probe 2, a fixing jig 3 for fixing the probe holding member 2 so as not to rotate, and a probe holding member 2. It is composed of a fixing jig 4 and an insulating board 5.
【００１０】固定用治具３，固定用治具４を緩めるとプ
ローブ保持部材２は固定用治具４を中心に回転が可能と
なり、また図３においてプローブ１は左右方向への移動
が可能となる。プローブ１を被測定体のパツドの位置に
合わせてから、固定用治具４を締め付けることによりプ
ローブ１を絶縁盤５上に固定でき、固定用治具３を締め
付けることによりプローブ保持部材２を回転しないよう
に固定することが可能となる。When the fixing jig 3 and the fixing jig 4 are loosened, the probe holding member 2 can be rotated around the fixing jig 4, and the probe 1 can be moved in the left-right direction in FIG. Become. The probe 1 can be fixed on the insulating board 5 by tightening the fixing jig 4 after aligning the probe 1 with the position of the pad of the measured object, and by rotating the probe holding member 2 by tightening the fixing jig 3. It is possible to fix it so as not to.
【００１１】[0011]
【発明の効果】本発明によれば、プローブの位置を単純
な回転、及び前後移動によりパッドの位置に移動させる
ことが可能となる。According to the present invention, the position of the probe can be moved to the position of the pad by simple rotation and back-and-forth movement.
【図１】本発明実施例の上面図である。FIG. 1 is a top view of an embodiment of the present invention.
【図２】図１のＡ−Ａ断面拡大図である。FIG. 2 is an enlarged cross-sectional view taken along the line AA of FIG.
【図３】図１のＢ−Ｂ断面拡大図である。FIG. 3 is an enlarged cross-sectional view taken along line BB of FIG.
１…プローブ、２…プローブ保持部材、３…固定用治具
（Ｉ）、４…固定用治具（II）、５…絶縁盤。1 ... Probe, 2 ... Probe holding member, 3 ... Fixing jig (I), 4 ... Fixing jig (II), 5 ... Insulating board.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5776492AJPH05256874A (en) | 1992-03-16 | 1992-03-16 | Probing device with position adjusting mechanism |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5776492AJPH05256874A (en) | 1992-03-16 | 1992-03-16 | Probing device with position adjusting mechanism |
| Publication Number | Publication Date |
|---|---|
| JPH05256874Atrue JPH05256874A (en) | 1993-10-08 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5776492APendingJPH05256874A (en) | 1992-03-16 | 1992-03-16 | Probing device with position adjusting mechanism |
| Country | Link |
|---|---|
| JP (1) | JPH05256874A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7140883B2 (en) | 1993-11-16 | 2006-11-28 | Formfactor, Inc. | Contact carriers (tiles) for populating larger substrates with spring contacts |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7140883B2 (en) | 1993-11-16 | 2006-11-28 | Formfactor, Inc. | Contact carriers (tiles) for populating larger substrates with spring contacts |
| US7347702B2 (en) | 1993-11-16 | 2008-03-25 | Formfactor, Inc. | Contact carriers (tiles) for populating larger substrates with spring contacts |
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