【発明の詳細な説明】〔産業上の利用分野〕この発明は衛星等からの微弱な信号を受信するために低
雑音増幅器、ミキサなどの半導体装置を極低温まで冷却
して雑音指数の改善を図る低雑音受信装置に関するもの
である。[Detailed Description of the Invention] [Industrial Application Field] This invention improves the noise figure by cooling semiconductor devices such as low-noise amplifiers and mixers to extremely low temperatures in order to receive weak signals from satellites, etc. The present invention relates to a low-noise receiving device.
ダイオードやＨＥＭＴ等の半導体素子は冷却するほど雑
音特性の改善が図れることから、衛星等からの極微弱な
信号を受信する低雑音受信装置においては低雑音増幅器
、ミキサなどの半導体装置を液体ヘリウム温度まで冷却
して使用する場合がある。The noise characteristics of semiconductor elements such as diodes and HEMTs can be improved as they are cooled, so in low-noise receivers that receive extremely weak signals from satellites, etc., semiconductor devices such as low-noise amplifiers and mixers are heated to liquid helium temperatures. It may be used after being cooled to a certain temperature.
第５図は例えばテレビジョン学会技術報告ＲＥ８６−３
２．ｐ３０に示された従来の低雑音受信装置の構成図で
あり、半導体装置としてＨＥＭＴ増幅器を用いている０
図において、１はＨＥＭＴ増幅器、２はＨＥＭＴ増幅器
１の入力ＶＳＷＲを改善するためのサーキュレータ、３
は同軸線路、４は同軸・導波管変換器、５は同軸・導波
管変換器４の一端に設けられたフランジ、６は断熱導波
管、７は断熱導波管６の両端に設けられたフランジ〜８
は導波管、９は導波管８内に設けられた気密窓、１０は
同軸ケーブル、１１はＨＥＭＴＩ及びサーキュレータ２
を冷却するための冷却板、１２は外壁、１３は冷却板１
１．外壁１２等からなる冷凍機、１４は入力端子、１５
は出力端子である。実際の冷凍機１３は外壁１２．冷却
板１１の他にさらに圧縮機、コールドヘッド等を備えて
いるが、図中ではこれらを省略している。Figure 5 shows, for example, the Television Society Technical Report RE86-3.
2. This is a configuration diagram of a conventional low-noise receiving device shown on p. 30, which uses a HEMT amplifier as a semiconductor device.
In the figure, 1 is a HEMT amplifier, 2 is a circulator for improving the input VSWR of HEMT amplifier 1, and 3 is a circulator for improving the input VSWR of HEMT amplifier 1.
is a coaxial line, 4 is a coaxial/waveguide converter, 5 is a flange provided at one end of the coaxial/waveguide converter 4, 6 is an adiabatic waveguide, and 7 is provided at both ends of the adiabatic waveguide 6. flange ~8
is a waveguide, 9 is an airtight window provided in the waveguide 8, 10 is a coaxial cable, 11 is a HEMTI and a circulator 2
12 is the outer wall, 13 is the cooling plate 1 for cooling the
1. A refrigerator consisting of an outer wall 12, etc., 14 is an input terminal, 15
is the output terminal. The actual refrigerator 13 has an outer wall 12. In addition to the cooling plate 11, it is further provided with a compressor, a cold head, etc., but these are omitted in the figure.
この低雑音受信装置ではＨＥＭＴ増幅器ｌの入力端子に
はサーキュレータ２．同軸ケーブル３゜同軸・導波管変
換器４．断熱導波管６及び導波管８が、またＨＥＭＴ増
幅器ｌの出力端子には同軸ケーブル１０がそれぞれ接続
されており、これらは冷凍機１３内に収納された構成と
なっている。In this low-noise receiver, a circulator 2. Coaxial cable 3° coaxial/waveguide converter 4. A coaxial cable 10 is connected to the adiabatic waveguide 6 and the waveguide 8, and to the output terminal of the HEMT amplifier l, and these are housed in a refrigerator 13.
導波管８と断熱導波管６との接続はフランジ７を外壁１
２にネジ等で固定することにより行われ、断熱導波管６
と同軸・導波管変換器４との接続はフランジ５と７とを
ネジ等で密着することにより行われている。The connection between the waveguide 8 and the adiabatic waveguide 6 is to connect the flange 7 to the outer wall 1.
This is done by fixing the insulated waveguide 6 with screws etc.
The connection between the coaxial waveguide converter 4 and the coaxial waveguide converter 4 is made by closely fitting the flanges 5 and 7 with screws or the like.
外壁１２及び気密窓９は冷凍機１３の内部を真空に保つ
ことにより、空気を介しての熱流入を防ぐためのもので
ある。また、断熱導波管６はＨＥＭＴ増幅器１の入力側
の回路損失を低減し、かつ熱伝導による外部からの熱流
入を小さくするために用いている。この断熱導波管６は
一般に熱伝導率の小さなステンレスやキュプロニッケル
等で形成され、断熱導波管６の金属の厚さ及び長さは使
用する冷凍機１３の能力に応じて選ばれている。The outer wall 12 and the airtight window 9 are for keeping the inside of the refrigerator 13 in a vacuum to prevent heat from flowing in through the air. Further, the adiabatic waveguide 6 is used to reduce circuit loss on the input side of the HEMT amplifier 1 and to reduce heat inflow from the outside due to thermal conduction. This adiabatic waveguide 6 is generally made of stainless steel, cupronickel, etc., which have low thermal conductivity, and the thickness and length of the metal of the adiabatic waveguide 6 are selected according to the capacity of the refrigerator 13 used. .
例えば、冷凍能力の小さな冷凍機１３を用いた場合、長
い断熱導波管６が用いられる。For example, when a refrigerator 13 with a small refrigerating capacity is used, a long adiabatic waveguide 6 is used.
このように空気を介しての熱流入及び伝導による熱流入
をできる限り小さくすることにより、ＨＥＭＴ増幅器１
を極低温まで冷却することができる。In this way, by minimizing the heat inflow through the air and the heat inflow by conduction, the HEMT amplifier 1
can be cooled to extremely low temperatures.
−ｉにある物体から発生する熱雑音は温度に比例するた
め、この低雑音受信装置のようにＨＥＭＴ増幅器１を極
低温まで冷却することにより、ＨＥＭＴ増幅器１から発
生する熱雑音を非常に少なくすることができる。従って
、アンテナで受信した微弱な信号は入力端子１４．導波
管８．断熱導波管６．同軸・導波管変換器４．同軸ケー
ブル３及びサーキュレータ２を通ってＨＥＭＴ増幅器１
へ供給される。そこで、増幅された信号は同軸ケーブル
１０を通って出力端子１５へ供給され、さらに出力端子
１５に接続された信号処理回路（図示せず）へと供給さ
れる。Thermal noise generated from an object located at -i is proportional to temperature, so by cooling the HEMT amplifier 1 to an extremely low temperature as in this low-noise receiver, the thermal noise generated from the HEMT amplifier 1 can be greatly reduced. be able to. Therefore, the weak signal received by the antenna is transmitted to the input terminal 14. Waveguide8. Adiabatic waveguide 6. Coaxial/waveguide converter 4. HEMT amplifier 1 through coaxial cable 3 and circulator 2
supplied to The amplified signal is then supplied to the output terminal 15 through the coaxial cable 10, and further supplied to a signal processing circuit (not shown) connected to the output terminal 15.
以上のように、ＨＥＭＴ増幅器ｌを極低温まで冷却する
ことにより、ＨＥＭＴ増幅器ｌで発生する熱雑音を低減
でき、非常に微弱な信号を受信することができる。As described above, by cooling the HEMT amplifier l to an extremely low temperature, the thermal noise generated in the HEMT amplifier l can be reduced, and a very weak signal can be received.
従来の低雑音受信装置では使用する冷凍機１３の能力に
応じて断熱導波管６の長さを選ぶ必要があり、冷凍能力
の小さな冷凍機１３を使用するには断熱導波管６の長さ
を長くする必要がある。この場合、断熱導波管６の損失
が増えるため、低雑音受信装置の雑音指数が増大すると
いう問題点があった。In conventional low-noise receiving devices, it is necessary to select the length of the adiabatic waveguide 6 according to the capacity of the refrigerator 13 used. It is necessary to lengthen the length. In this case, since the loss of the adiabatic waveguide 6 increases, there is a problem that the noise figure of the low-noise receiver increases.
一方、冷凍能力の大きな冷凍機１３を使用すれば、断熱
導波管６の長さを短くできるため、低雑音受信装置の雑
音指数が増大することはない、しかし、この場合、非常
に高価な冷凍機１３が必要になってしまうという問題点
があった。On the other hand, if a refrigerator 13 with a large cooling capacity is used, the length of the adiabatic waveguide 6 can be shortened, so the noise figure of the low-noise receiver will not increase. There was a problem in that the refrigerator 13 was required.
この発明は上記のような問題点を解消するためになされ
たもので、冷凍能力の小さな冷凍機を用いて構成した雑
音指数の良好な低雑音受信装置を得ることを目的とする
。The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to obtain a low-noise receiving device with a good noise figure, which is constructed using a refrigerator with a small cooling capacity.
この発明に係る低雑音受信装置は、半導体装置の所定の
端子と冷凍機の外壁に設けた入力端子あるいは出力端子
とを電気的に接続する導波管の一部に電界に平行にすき
間を設け、かつすき間を設けた側の導波管端面にチョー
クフランジを設けたものである。The low noise receiving device according to the present invention includes a gap parallel to the electric field in a part of the waveguide that electrically connects a predetermined terminal of the semiconductor device and an input terminal or an output terminal provided on the outer wall of the refrigerator. , and a choke flange is provided on the end face of the waveguide on the side where the gap is provided.
この発明における低雑音受信装置は、導波管の一部に設
けたすき間により導波管からの伝導による熱流入を遮断
するとともに、チョークフランジによりすき間の電気的
な影響を小さくしている。In the low-noise receiving device according to the present invention, a gap provided in a part of the waveguide blocks heat inflow due to conduction from the waveguide, and a choke flange reduces the electrical influence of the gap.
以下、この発明の一実施例を図について説明する。An embodiment of the present invention will be described below with reference to the drawings.
第１図は本発明の第１の実施例による低雑音受信装置の
構成を示しており、図において、第５図と同一符号は同
一部分を示し、１６は入力端子１４側の断熱導波管６端
面に設けたチョークフランジ、１７は導波管８と断熱導
波管６との間に電界に対して平行に設けたすき間である
。FIG. 1 shows the configuration of a low-noise receiver according to a first embodiment of the present invention. In the figure, the same reference numerals as in FIG. A choke flange 17 provided on the end face of FIG. 6 is a gap provided between the waveguide 8 and the heat-insulating waveguide 6 in parallel to the electric field.
また、第２図（ａ）はチョークフランジ１６近傍の詳細
な構造図、第２図（ｂ）はその等価回路図である。Further, FIG. 2(a) is a detailed structural diagram of the vicinity of the choke flange 16, and FIG. 2(b) is its equivalent circuit diagram.
第２図（ａ）において、すき間１７のＡＢ間及びＢＤ間
はラジアル線路であり、チョークフランジ１６に設けら
れた溝は導波管と見なすことができる。In FIG. 2(a), the space between AB and BD of the gap 17 is a radial line, and the groove provided in the choke flange 16 can be regarded as a waveguide.
従って、第２図（ａ）は第２図い）のようにラジアル線
路ＡＢ間にリアクタンスｊｘと先端短絡の導波管ＢＣ間
が接続された回路が導波管８と断熱導波管６との間に直
列に接続された等価回路で表わすことができる。ここで
、リアクタンスｊｘはラジアル線路ＢＤ間によるもので
ある。ラジアル線路ＡＢ間及び導波管ＢＣ間を１／４波
長に選び、リアクタンスｊｘが小さくなるようにすき間
１７の間隔、ＢＤ間の長さを適当に選ぶことにより、点
ＡＡから点ＢＢ側を見たインピーダンスはほぼ零となる
。このため、導波管８からきたマイクロ波帯の受信信号
はすき間１７に影響されることなく断熱導波管６へ伝搬
する。Therefore, as shown in FIG. 2(a), a circuit in which reactance jx is connected between the radial line AB and the waveguide BC with a short-circuited tip is connected between the waveguide 8 and the adiabatic waveguide 6. It can be represented by an equivalent circuit connected in series between Here, the reactance jx is due to the distance between the radial lines BD. By selecting 1/4 wavelength between the radial lines AB and between the waveguides BC, and appropriately selecting the interval of the gap 17 and the length between BD so that the reactance jx is small, it is possible to The impedance becomes almost zero. Therefore, the microwave band reception signal coming from the waveguide 8 propagates to the adiabatic waveguide 6 without being affected by the gap 17.
従って、第１図に示すように導波管８と断熱導波管６と
間にすき間１７を設け、断熱導波管６のすき間１７側の
端面にチョークフランジ１６を設けることにより、導波
管８側から断熱導波管６への伝導による熱流入を遮断で
きるとともに、電気的にはすき間１７の影響を小さくす
ることができる。このようにすき間１７により熱流入を
遮断できるため、冷凍能力の小さな冷凍機１３を用いて
も極低温までＨＥＭＴ増幅器１を冷却することができる
。また、断熱導波管６の長さも十分短くできるため、回
路の低損失化が図れ、雑音指数の優れた低雑音受信装置
を得ることができる。Therefore, as shown in FIG. 1, a gap 17 is provided between the waveguide 8 and the adiabatic waveguide 6, and a choke flange 16 is provided on the end face of the adiabatic waveguide 6 on the gap 17 side. It is possible to block heat inflow from the heat insulating waveguide 6 from the heat insulating waveguide 6 by conduction, and electrically, the influence of the gap 17 can be reduced. Since heat inflow can be blocked by the gap 17 in this way, the HEMT amplifier 1 can be cooled to an extremely low temperature even if the refrigerator 13 with a small cooling capacity is used. Furthermore, since the length of the adiabatic waveguide 6 can be sufficiently shortened, the loss of the circuit can be reduced, and a low-noise receiving device with an excellent noise figure can be obtained.
さらには、断熱導波管６の代わりに熱伝導率はやや大き
いが、電気抵抗の非常に小さな金属材料で形成した導波
管を用いることもでき、より雑音指数の改善を図ること
もできる。Furthermore, instead of the adiabatic waveguide 6, a waveguide made of a metal material having a somewhat high thermal conductivity but a very low electrical resistance can be used, and the noise figure can be further improved.
以上のように、この発明の低雑音受信装置では冷凍機１
３の外壁１２に設けられた導波管８と断熱導波管６との
間にすき間１７を設け、かつすき間１７側の断熱導波管
６端面にチョークフランジ１６を設けることにより、電
気的にはすき間１７の影響を小さ（できるとともに伝導
による熱流入を遮断できる。従って、冷凍能力の小さな
冷凍機１３の使用が可能になり、低雑音受信装置の低価
格化が図れるとともに非常に短い断熱導波管６を用いる
ことができるために、雑音指数の優れた低雑音受信装置
を得ることもできる。As described above, in the low noise receiving device of the present invention, the refrigerator 1
By providing a gap 17 between the waveguide 8 provided on the outer wall 12 of 3 and the adiabatic waveguide 6, and by providing a choke flange 16 on the end face of the adiabatic waveguide 6 on the side of the gap 17, electrical This makes it possible to reduce the influence of the gap 17 (as well as to block heat inflow due to conduction. Therefore, it is possible to use a refrigerator 13 with a small refrigerating capacity, and it is possible to reduce the cost of the low-noise receiver and to use a very short adiabatic conductor. Since the wave tube 6 can be used, a low-noise receiving device with an excellent noise figure can also be obtained.
なお、上記実施例ではすき間１７を導波管８と断熱導波
管６との間に設けた場合について述べたが、これは本発
明の第２の実施例である第３図に示すようにすき間１７
を断熱導波管６と同軸・導波管変換器４との間に設け、
そのすき間１７の一部に熱伝導の非常に小さな誘電体ス
ペーサ１８を設けたものであっても良い、この場合、誘
電体スペーサ１８の厚さを適当に選ぶことにより、電界
に対して平行に設けたすき間１７の間隔を容易に設定で
きる。In the above embodiment, the case where the gap 17 was provided between the waveguide 8 and the adiabatic waveguide 6 was described, but this is the second embodiment of the present invention, as shown in FIG. Gap 17
is provided between the adiabatic waveguide 6 and the coaxial/waveguide converter 4,
A dielectric spacer 18 with very low thermal conductivity may be provided in a part of the gap 17. In this case, by appropriately selecting the thickness of the dielectric spacer 18, The interval of the provided gap 17 can be easily set.
また、さらには本発明の第３の実施例として第４図に示
すように、断熱導波管６を用いずに同軸・導波管変換器
４と導波管８とを直接接続し、両者間にすき間１７を設
けるとともに、そのすき間１７全体に誘電体スペーサ１
８を設けても良い、このような構成では、上記第２の実
施例と同様にすき間１７０間隔が容易に設定可能となる
とともに、誘電体スペーサ１８に気密窓９の機能を持た
せることができるため、気密窓９が不要となり、装置の
簡略化を図ることができる。Further, as a third embodiment of the present invention, as shown in FIG. 4, the coaxial/waveguide converter 4 and the waveguide 8 are directly connected without using the adiabatic waveguide 6, A gap 17 is provided between them, and a dielectric spacer 1 is provided throughout the gap 17.
In such a configuration, the gap 170 can be easily set as in the second embodiment, and the dielectric spacer 18 can have the function of the airtight window 9. Therefore, the airtight window 9 is not required, and the device can be simplified.
さらに、上記実施例ではＨＥＭＴ増幅器ｌの入力端子側
に導波管８．断熱導波管６を用いた場合について述べた
が、これはＨＥＭＴ増幅器１の出力端子側に設けても良
く、また、半導体装置としてＨＥＭＴ増幅器１の代わり
にミキサ、ＦＥＴ増幅器等を用いても良い。Furthermore, in the above embodiment, a waveguide 8. is provided on the input terminal side of the HEMT amplifier l. Although the case where the adiabatic waveguide 6 is used has been described, it may be provided on the output terminal side of the HEMT amplifier 1, or a mixer, FET amplifier, etc. may be used instead of the HEMT amplifier 1 as a semiconductor device. .
以上のように、この発明によれば、導波管の一部に電界
に平行にすき間を設けて、導波管を物理的に分割し、そ
の分割された導波管のすき間左設けた側の端面にチョー
クフランジを設けることにより、電気的にはすき間の影
響を小さくすることができ、しかも熱的には導波管を介
しての伝導による熱流入を遮断できる効果がある。従っ
て、冷凍能力の小さな冷凍機を用いても極低温まで半導
体装置を冷却することができ、低雑音受信装置を安価に
できるとともに非常に短い導波管の使用が可能となるた
め、雑音指数の良好な低雑音受信装置を得ることができ
る効果がある。As described above, according to the present invention, a gap is provided in a part of the waveguide in parallel to the electric field, the waveguide is physically divided, and the gap on the left side of the divided waveguide is By providing a choke flange on the end face of the waveguide, the influence of the gap can be electrically reduced, and thermally, the inflow of heat due to conduction through the waveguide can be blocked. Therefore, even if a refrigerator with a small cooling capacity is used, semiconductor devices can be cooled down to extremely low temperatures, making low-noise receivers inexpensive and allowing the use of very short waveguides, which reduces the noise figure. This has the effect of making it possible to obtain a good low-noise receiving device.
第１図はこの発明の第１の実施例による低雑音受信装置
の構成図、第２図（ａ）、 （ｂ）はそれぞれ第１図の
すき間近傍の詳細な構造及び等価回路を示す図、第３図
及び第４図はこの発明の第２及び第３の実施例を示す低
雑音受信装置の構成図、第５図は従来の低雑音受信装置
の構成図である。図中、１はＨＥＭＴ増幅器、２はサーキュレータ、３は
同軸ケーブル、４は同軸・導波管交換器、５はフランジ
、６は断熱導波管、７はフランジ、８は導波管、９は気
密窓、１０は同軸ケーブル、１１は冷却板、１２は外壁
、１３は冷凍機、１４は入力端子、１５は出力端子、１
６はチョークフランジ、１７はすき間、１８は誘電体ス
ペーサである。なお図中同一符号は同−又は相当部分を示す。FIG. 1 is a block diagram of a low-noise receiver according to a first embodiment of the present invention, and FIGS. 2(a) and 2(b) are diagrams showing the detailed structure and equivalent circuit near the gap in FIG. 1, respectively. FIGS. 3 and 4 are block diagrams of low-noise receivers showing second and third embodiments of the present invention, and FIG. 5 is a block diagram of a conventional low-noise receiver. In the figure, 1 is a HEMT amplifier, 2 is a circulator, 3 is a coaxial cable, 4 is a coaxial/waveguide exchanger, 5 is a flange, 6 is an insulated waveguide, 7 is a flange, 8 is a waveguide, and 9 is a Airtight window, 10 is a coaxial cable, 11 is a cooling plate, 12 is an outer wall, 13 is a refrigerator, 14 is an input terminal, 15 is an output terminal, 1
6 is a choke flange, 17 is a gap, and 18 is a dielectric spacer. Note that the same reference numerals in the figures indicate the same or equivalent parts.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22642289AJPH0389632A (en) | 1989-08-31 | 1989-08-31 | Low noise receiver |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22642289AJPH0389632A (en) | 1989-08-31 | 1989-08-31 | Low noise receiver |
| Publication Number | Publication Date |
|---|---|
| JPH0389632Atrue JPH0389632A (en) | 1991-04-15 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22642289APendingJPH0389632A (en) | 1989-08-31 | 1989-08-31 | Low noise receiver |
| Country | Link |
|---|---|
| JP (1) | JPH0389632A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010268122A (en)* | 2009-05-13 | 2010-11-25 | Mitsubishi Electric Corp | Waveguide connection structure |
| WO2012060154A1 (en)* | 2010-11-02 | 2012-05-10 | 日立マクセル株式会社 | Radio frequency device module and method for sealing radio frequency device from outside air |
| JP2013239768A (en)* | 2012-05-11 | 2013-11-28 | Toshiba Corp | Array antenna device |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010268122A (en)* | 2009-05-13 | 2010-11-25 | Mitsubishi Electric Corp | Waveguide connection structure |
| WO2012060154A1 (en)* | 2010-11-02 | 2012-05-10 | 日立マクセル株式会社 | Radio frequency device module and method for sealing radio frequency device from outside air |
| JP2013239768A (en)* | 2012-05-11 | 2013-11-28 | Toshiba Corp | Array antenna device |
| US9088325B2 (en) | 2012-05-11 | 2015-07-21 | Kabushiki Kaisha Toshiba | Array antenna apparatus |
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