【発明の詳細な説明】（産業上の利用分野）本発明は、熱処理装置に係り、特に半導体集積回路の製
造などに用いられる高温で、しかも比較的気密性を要す
る熱処理工程に適用できる熱処理装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a heat treatment apparatus, and in particular to a heat treatment apparatus that can be applied to heat treatment processes that require high temperature and relatively airtightness, such as those used in the manufacture of semiconductor integrated circuits. Regarding.
（従来の技術）従来より、半導体集積回路は、パターンの微細化と共に
、製造工程における種々のダスト発生如何に、その歩留
りが大きく依存している。(Prior Art) Conventionally, the yield of semiconductor integrated circuits has largely depended on the miniaturization of patterns and the generation of various types of dust during the manufacturing process.
そこで、熱処理工程におけるダスト発生の最大の原因で
あった、熱処理炉の炉芯管と半導体集積回路を製造する
ための半導体基板を乗せるボードとの摩擦部をなくする
ために、カンチレバ一方式やソフトランディング方式が
開発された。Therefore, in order to eliminate the friction between the core tube of the heat treatment furnace and the board on which the semiconductor substrate for manufacturing semiconductor integrated circuits is mounted, which was the biggest cause of dust generation during the heat treatment process, we developed a single-type cantilever type and a soft A landing method was developed.
前記ソフトランディング方式の場合、前記炉芯管とボー
ドとを石英にし、高温処理時にもこれらの純度さえよく
しておけば、汚染を最小限に止めることか可能である。In the case of the soft landing method, if the furnace core tube and board are made of quartz and their purity is maintained even during high-temperature treatment, contamination can be minimized.
しかしながら、半導体基板径の大型化に伴い、炉芯管の
径も大きくなり、炉芯管への大気の逆流という問題が生
してきた。However, as the diameter of the semiconductor substrate increases, the diameter of the furnace core tube also increases, resulting in the problem of backflow of air into the furnace core tube.
そこで、前記逆流の影響を最小にするために、炉芯管の
端部を石英などでできたシャッタにより閉じて処理を施
している。Therefore, in order to minimize the influence of the backflow, the end of the furnace core tube is closed with a shutter made of quartz or the like.
第６図は従来の自動開閉式シャッタ部分を示す平面図で
あって、１１は炉芯管、 １２ａ 、 １２ｂは石英よ
りなる一対のシャッタ板、１３ａ、１３ｂは各シャッタ
板１２ａ、１２ｂに設けられたシャッタ駆動軸である。FIG. 6 is a plan view showing a conventional automatic opening/closing shutter section, in which 11 is a furnace core tube, 12a and 12b are a pair of shutter plates made of quartz, and 13a and 13b are provided on each shutter plate 12a and 12b. This is the shutter drive shaft.
同図において、炉芯管１１の端部は炉芯管１１の軸線に
対して垂直に切られ、シャッタ駆動４’ｔｌｌ１３ａ。In the figure, the end of the furnace core tube 11 is cut perpendicular to the axis of the furnace core tube 11, and the shutter drive 4'tll13a.
１３ｂによってシャッタ１２ａ、１２ｂが前記炉芯管１
１の端部に対して開閉駆動されるようになっている。13b, the shutters 12a and 12b are connected to the furnace core tube 1.
It is designed to be driven to open and close with respect to the end of 1.
（発明が解決しようとする課題）上記従来技術では、第１に、炉芯管１１の端部を閉じた
時点でシャッタ駆動力をなくすると、シャッタ板１２ａ
、１２ｂは、シャッタ駆動軸１３ａ、１３ｂの回りで回
杉Ｊ自在であるので、駆動系のバックラッシュなどによ
り閉鎖位置からゆるみが生じ、炉芯管１１の端部とシャ
ッタ板１２ａ、１２ｂとの間に間隙ができてしまうこと
がある。(Problems to be Solved by the Invention) In the above-mentioned conventional technology, firstly, if the shutter driving force is eliminated at the time when the end of the furnace core tube 11 is closed, the shutter plate 12a
, 12b are freely rotatable around the shutter drive shafts 13a, 13b, so they may loosen from the closed position due to backlash in the drive system, and the end of the furnace core tube 11 and the shutter plates 12a, 12b may become loose. There may be gaps in between.
第２に、２枚のシャッタ板１２ａ、ｆ２ｂを重ね合せる
時にシャッタ板１２ａ、１２ｂの間の間隙を小さくする
と、非常１こ高いシャッタ板取り付は精度を要すること
になる。一方、シャッタ板１２ａ、１２ｂの間の間隙を
大きくすると、間隙からの大気の逆流が問題になる。Secondly, if the gap between the shutter plates 12a, 12b is made smaller when the two shutter plates 12a, f2b are overlapped, the mounting of the shutter plates will require very high precision. On the other hand, if the gap between the shutter plates 12a and 12b is increased, backflow of the atmosphere from the gap becomes a problem.
第３に、石英で形成される炉芯管１１とシャッタ板１２
ａ、１２ｂとの位置合せ精度が悪いと、上述のような間
隙発生の原因となるが、炉芯管１１自体の重量が大きい
ため、高精度の位置合せそのものに熟練を要する。Thirdly, the furnace core tube 11 and shutter plate 12 are made of quartz.
If the alignment accuracy with a and 12b is poor, it will cause the above-mentioned gap to occur, but since the weight of the furnace core tube 11 itself is large, high precision alignment itself requires skill.
これらが原因して、閉鎖状態が不完全となり、大気の逆
流をまねくが、前記閉鎖状態の不完全さは、熱処理時に
炉芯管１１の他方の端部から導入するガスの流量を大き
くすることによって、ある程度回避できる。Due to these reasons, the closed state becomes incomplete, leading to a backflow of the atmosphere, but the incomplete closed state does not increase the flow rate of gas introduced from the other end of the furnace core tube 11 during heat treatment. This can be avoided to some extent.
しかし、通常、半導体集積回路に用いられるガスは極端
に高純度のものであるので、多量にガスを供給すること
はコスト問題から好ましいものではない。However, since the gas used in semiconductor integrated circuits usually has extremely high purity, it is not preferable to supply a large amount of gas from the viewpoint of cost.
またスプリングなどを使用して密閉状態を確保しようと
する装置があるが、この装置では高温下で金属疲労など
による耐久性などに問題がある。There are also devices that use springs or the like to ensure a sealed state, but these devices have problems with durability due to metal fatigue under high temperatures.
本発明の目的は、高い信頼性と耐久性を有して大気の逆
流を防止することができる熱処理装置を提供することに
ある。An object of the present invention is to provide a heat treatment apparatus that has high reliability and durability and can prevent atmospheric backflow.
（課題を解決するための手段）上記目的を達成するため、本発明は、炉芯管と、との炉
芯管の開口部を開示するシャッタ板と、前記炉芯管の開
口部付近に設けられ、かつ前記シャッタ板を支持する支
持部と、前記シャッタ板に設けられ、かつ前記支持部と
係合する被支持部とをイｆし、前記シャッタ板の全自重
が前記炉芯管の開口部および支持部により支えられるよ
うに構成したことを特徴とする。(Means for Solving the Problems) In order to achieve the above object, the present invention provides a furnace core tube, a shutter plate that discloses an opening of the furnace core tube, and a shutter plate provided near the opening of the furnace core tube. and a supporting part that supports the shutter plate, and a supported part that is provided on the shutter plate and engages with the supporting part, so that the entire dead weight of the shutter plate is applied to the opening of the furnace core tube. It is characterized in that it is configured to be supported by the section and the support section.
（作 用）上記手段を採用したことにより、シャッタ板が炉芯管の
開口部を被覆する時には、シャッタ板は自重により炉芯
管の開口部に密着するように支えられることになり、炉
芯管内への大気の逆流が防止される。(Function) By adopting the above means, when the shutter plate covers the opening of the furnace core tube, the shutter plate is supported by its own weight so as to be in close contact with the opening of the furnace core tube, and the shutter plate covers the opening of the furnace core tube. Backflow of atmosphere into the pipe is prevented.
（実施例）以下、本発明の実施例を図面に基づいて説明する。(Example)Embodiments of the present invention will be described below based on the drawings.
第１図は本発明による熱処理装置の一実施例の一部の側
面図、第２図は第１図の実施例の正面図であって、１は
石英製の炉芯管、１ａは炉芯管１の開口部、２は石英製
の工枚のシャッタ板、３は炉芯管ｌの開口部ｌａ付近に
設けられた支持部。1 is a side view of a part of an embodiment of a heat treatment apparatus according to the present invention, and FIG. 2 is a front view of the embodiment of FIG. 1, in which 1 is a quartz furnace core tube, 1a is a furnace core The opening of the tube 1, 2 is a shutter plate made of quartz, and 3 is a support provided near the opening la of the furnace core tube l.
４はシャッタ板２に設けられた側面視三角形状の被支持
部、５はつり糸接続部である。4 is a supported portion provided on the shutter plate 2 and has a triangular shape in side view, and 5 is a hanging line connecting portion.
第を図、第２図において、炉芯管ｌの開口部ｌａ端而面
垂直でなく、炉芯管１の軸線に対し側面視約７５°に傾
斜して形成されており、また１枚のシャッタ板２の面積
が炉芯管ｌの開口部１ａの面積よりも大きく、シャッタ
板２が炉芯管上の開口部１ａをすべて覆うようになって
いる。シャッタ板２により開口部１ａを閉じた時、シャ
ッタ板２は支持部３上部と被支持部４下部とが係合する
ことによって支えられ、かつ前記開口部１ａ端面に自重
により密着する構成である。In Figures 1 and 2, the opening la of the furnace core tube l is not perpendicular to the surface, but is formed at an angle of approximately 75° in side view with respect to the axis of the furnace core tube 1, and is formed of a single piece. The area of the shutter plate 2 is larger than the area of the opening 1a of the furnace core tube l, and the shutter plate 2 covers all the opening 1a on the furnace core tube. When the opening 1a is closed by the shutter plate 2, the shutter plate 2 is supported by the engagement between the upper part of the support part 3 and the lower part of the supported part 4, and is configured to tightly contact the end surface of the opening 1a by its own weight. .
第３図はシャッタ板の開閉機構の第１の実施例を示す側
面図であって、王は炉芯管、２はシャッタ板、５はつり
糸接続部、６ａ、６ｂはつり糸接続部５でシャッタ板２
に連結されるつり糸である。FIG. 3 is a side view showing the first embodiment of the opening/closing mechanism for the shutter plate, in which reference numeral 1 is a furnace core tube, 2 is a shutter plate, 5 is a hanging line connection part, and 6a and 6b are used as a hanging line connection part 5 to close the shutter. Board 2
It is a hanging line that is connected to the
同図において、開閉機構７はつり糸６ａ、６ｂで構成さ
れ、つり糸６ａ、６ｂの４本（図では２本である）をシ
ャッタ板２の周囲に前記つり糸接続部５を介して連結し
ており、つり糸６ａ、６ｂは、例えば、タングステンな
どの高融点金属の糸、あるいはくさりで形成されている
。In the figure, the opening/closing mechanism 7 is composed of hanging strings 6a and 6b, and four hanging strings 6a and 6b (two in the figure) are connected around the shutter plate 2 via the hanging string connecting portion 5. The hanging strings 6a and 6b are made of, for example, threads of high melting point metal such as tungsten, or chains.
前記シャッタ板２を開ける場合、上部からつり糸６ａ、
６ｂを引っ張り、つり糸６ａ、６ｂによりシャッタ板２
をつり上げる。When opening the shutter plate 2, a hanging string 6a from the top,
6b and the shutter plate 2 with the hanging strings 6a and 6b.
lift up.
この場合、シャッタ板２上部に連結されたつり糸６ａと
、シャッタ板２下部に連結されたつり糸６ｂとの引き上
げ速度を、つり糸６ｂの方を大きくすれば、シャッタ板
２を引き上げるために必要な炉芯管１の上部の空間を小
さくすることができる。In this case, if the pulling speed of the hanging string 6a connected to the upper part of the shutter plate 2 and the lifting speed of the hanging string 6b connected to the lower part of the shutter plate 2 is increased, the shutter plate 2 can be pulled up by increasing the pulling speed of the hanging string 6b. The required space above the furnace core tube 1 can be reduced.
これは、前記つり糸６ａを少し上げた状態で保持し、つ
り糸６ｂだけを引き上げても同様の効果を得ることがで
きる。The same effect can be obtained by holding the hanging line 6a in a slightly raised state and pulling up only the hanging line 6b.
またシャッタ板２を閉じた場合、つり糸６ａおよびつり
糸６ｂの張力を事実上零とすると、シャッタ板２は自重
だけで炉芯管１の開口部１ａ端面に密着することになる
。Furthermore, when the shutter plate 2 is closed, if the tension of the fishing line 6a and the fishing line 6b is virtually zero, the shutter plate 2 will come into close contact with the end face of the opening 1a of the furnace core tube 1 only by its own weight.
第４図はシャッタ板の開閉機構の第２の実施例を示す側
面図であって、１は炉芯管、２はシャッタ板、６ｂはシ
ャッタ板２の下部に連結したつり糸、８は支持ローラで
ある。FIG. 4 is a side view showing a second embodiment of the shutter plate opening/closing mechanism, in which 1 is a furnace core tube, 2 is a shutter plate, 6b is a hanging string connected to the lower part of the shutter plate 2, and 8 is a support. It's Laura.
同図において、開閉機構７はつり糸６ｂと支持ローラ８
にて構成されており、シャッタ板２を開ける場合、上部
よりつり糸６ｂを引っ張ると、シャッタ板２の上端部が
支持ローラ８に当接し、かつ支承されることになり、シ
ャッタ板２はつり糸６ｂを引き上げることによってつり
上げることができ、つり糸６ｂのみによりシャッタ板２
の開閉が可能である。In the figure, the opening/closing mechanism 7 includes a hanging line 6b and a support roller 8.
When the shutter plate 2 is opened, when the hanging string 6b is pulled from the upper part, the upper end of the shutter plate 2 comes into contact with and is supported by the support roller 8, and the shutter plate 2 is connected to the hanging string. It can be lifted by pulling up the shutter plate 2 by pulling up the shutter plate 2 using only the lifting string 6b.
can be opened and closed.
またシャッタ板２の閉鎖時の支持機構に関しても本実施
例の構成に限定されない。例えば、第５図はシャッタ板
の支持機構の実施例を示す側面図であって、上は炉芯管
、ｌａは炉芯管１の軸線に対して垂直に形成された開口
部、２はシャッタ板、３は開口部ｌａ付近に設けられた
支持部、４はシャッタ板２の側部に設けられ、かつ下側
部４ａの先端が下がるように傾斜した被支持部である。Further, the support mechanism for closing the shutter plate 2 is not limited to the structure of this embodiment. For example, FIG. 5 is a side view showing an embodiment of the support mechanism for the shutter plate, in which the upper part is the furnace core tube, la is an opening formed perpendicular to the axis of the furnace core tube 1, and 2 is the shutter plate. The plate 3 is a supporting part provided near the opening la, and 4 is a supported part provided on the side of the shutter plate 2 and inclined so that the tip of the lower part 4a is downward.
同図において、炉芯管１の６８０部１ａに傾斜を設けず
に、被支持部４の傾斜を有する下側部４ａと、支持部３
と、シャッタ板２の自重とによってシャッタ板２を支え
る構成である。このようなシャッタ板２の支持は被支持
部４に加わる加重により、被支持部４の下側部４ａと支
持部３との接触部分の角度を考慮することによって可能
となる。In the same figure, 680 portions 1a of the furnace core tube 1 are not sloped, but the sloped lower portion 4a of the supported portion 4 and the supporting portion 3 are
The structure is such that the shutter plate 2 is supported by the weight of the shutter plate 2 and its own weight. Such support of the shutter plate 2 is made possible by the load applied to the supported part 4 and by considering the angle of the contact portion between the lower side 4a of the supported part 4 and the support part 3.
なお支持部３の設置位置は炉芯管１の内部であってもよ
い。また炉芯管１の開口部１ａの傾斜は仕様によって決
定し、傾斜を付ける場合には炉芯管１の軸線に対して約
５°以上のＷｉ＃にするとよい。Note that the support portion 3 may be installed inside the furnace core tube 1. Further, the inclination of the opening 1a of the furnace core tube 1 is determined according to the specifications, and when it is inclined, it is preferably Wi# of about 5° or more with respect to the axis of the furnace core tube 1.
またシャッタ板２に取手を付加することにより、上述の
ような自動開閉のみならず、手動開閉にも容易に対応す
ることができる。Furthermore, by adding a handle to the shutter plate 2, it is possible to easily handle not only automatic opening and closing as described above but also manual opening and closing.
このように、上記実施例によれば、シャッタ板２は自重
により炉芯管１の開口部１ａに密着するので１機構のバ
ックラッシュや、スプリングの劣化などによる密閉度の
変動や不安定性がなくなる。In this manner, according to the above embodiment, the shutter plate 2 is brought into close contact with the opening 1a of the furnace core tube 1 due to its own weight, thereby eliminating backlash of one mechanism and fluctuations and instability in the degree of sealing due to deterioration of the spring, etc. .
またシャッタ板の開閉機構７も非常に簡単な機構を用い
ることが可能であり、高温下での耐久性にも優れ、保守
も極めて容易である。Furthermore, the shutter plate opening/closing mechanism 7 can be a very simple mechanism, has excellent durability under high temperatures, and is extremely easy to maintain.
さらにシャッタ板２の閉鎖時、シャッタ板２は炉芯管１
の支持部３以外に支点を有しないので。Furthermore, when the shutter plate 2 is closed, the shutter plate 2 closes the furnace core tube 1.
Because it has no fulcrum other than the support part 3.
シャッタ板２と炉芯管１との位置合せにも高精度を必要
とすることもない。There is also no need for high precision in positioning the shutter plate 2 and the furnace core tube 1.
（発明の効果）本発明によれば、シャッタ板が炉芯管の開口部に自重に
より密着し、高い信頼性と耐久性を有して炉芯管内への
大気の逆流を防止できる熱処理装置を提供できる。(Effects of the Invention) According to the present invention, a heat treatment apparatus is provided in which the shutter plate is tightly attached to the opening of the furnace core tube by its own weight, and the backflow of atmosphere into the furnace core tube can be prevented with high reliability and durability. Can be provided.
第１図は本発明による熱処理装置の一実施例の一部を示
す側面図、第２図は第１図の実施例の正面図、第３図は
シャッタ板の開閉機構の第１の実施例を示す側面図、第
４図はシャッタ板の開閉機構の第２の実施例を示す側面
図、第５図はシャッタ板の支持機構の実施例を示す側面
図、第６図は従来例の平面図である。１ ・・・炉芯管、 ｌａ・・・開口部、 ２・・・
シャッタ板、 ３ ・・・支持部、 ４ ・・・被支持
部、 ５ ・・・つり糸接続部、 ６ａ。６ｂ・・・つり糸、 ７・・・開閉機構。FIG. 1 is a side view showing a part of an embodiment of a heat treatment apparatus according to the present invention, FIG. 2 is a front view of the embodiment of FIG. 1, and FIG. 3 is a first embodiment of a shutter plate opening/closing mechanism. FIG. 4 is a side view showing a second embodiment of the shutter plate opening/closing mechanism, FIG. 5 is a side view showing an embodiment of the shutter plate support mechanism, and FIG. 6 is a plan view of the conventional example. It is a diagram. 1... Furnace core tube, la... Opening, 2...
Shutter plate, 3... Support part, 4... Supported part, 5... Hanging line connection part, 6a. 6b... Hanging line, 7... Opening/closing mechanism.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1203834AJPH0369116A (en) | 1989-08-08 | 1989-08-08 | heat treatment equipment |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1203834AJPH0369116A (en) | 1989-08-08 | 1989-08-08 | heat treatment equipment |
| Publication Number | Publication Date |
|---|---|
| JPH0369116Atrue JPH0369116A (en) | 1991-03-25 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1203834APendingJPH0369116A (en) | 1989-08-08 | 1989-08-08 | heat treatment equipment |
| Country | Link |
|---|---|
| JP (1) | JPH0369116A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5711756A (en)* | 1995-05-31 | 1998-01-27 | Machida Endoscope Co., Ltd. | Endoscope having exchangeable objective unit |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5711756A (en)* | 1995-05-31 | 1998-01-27 | Machida Endoscope Co., Ltd. | Endoscope having exchangeable objective unit |
| US5961445A (en)* | 1995-05-31 | 1999-10-05 | Machida Endoscope Co., Ltd. | Endoscope having replaceable objective unit |
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