【発明の詳細な説明】〔概 要〕垂直磁気記録方式の磁気ディスク装置に用いて好適な垂
直磁気記録媒体に関し、高透磁率な軟磁性層を厚膜化して記録再生特性の向上を
図ると共に、その軟磁性層上の垂直磁性薄膜、保護膜及
び潤滑膜の表面をヘッド吸着のない低摩擦、低摩耗の摺
動性能を発揮する粗面に形成することを目的とし、基板と垂直磁性薄膜との間に、表面を粗面加工（テクス
チャリング法、化学エツチング法、イオンエツチング法
など）により微小凹凸の粗面にした軟磁性層を設けた構
成とする。[Detailed Description of the Invention] [Summary] Regarding a perpendicular magnetic recording medium suitable for use in a perpendicular magnetic recording type magnetic disk device, the present invention relates to a perpendicular magnetic recording medium suitable for use in a magnetic disk device using a perpendicular magnetic recording method, and improves recording and reproducing characteristics by thickening a soft magnetic layer with high magnetic permeability. The purpose is to form the perpendicular magnetic thin film, protective film, and lubricant film on the soft magnetic layer into a rough surface that exhibits low friction and low wear sliding performance without head adsorption. A soft magnetic layer whose surface is roughened with minute irregularities by roughening (texturing method, chemical etching method, ion etching method, etc.) is provided between the two.
本発明は垂直磁気記録方式の磁気ディスク装置に用いて
好適な垂直磁気記録媒体に係り、特にＣ３Ｓ （Ｃｏｎ
ｔａｃｔ ５ｔａｒｔ ５ｔｏｐ）特性と耐久性等に優
れた二層膜構造の垂直磁気記録媒体に関するものである
。The present invention relates to a perpendicular magnetic recording medium suitable for use in a perpendicular magnetic recording type magnetic disk device, and in particular to a C3S (Con
The present invention relates to a perpendicular magnetic recording medium having a double-layer structure with excellent characteristics and durability.
磁気ディスク装置では、磁気ディスクの回転が停止時に
は磁気ヘッドがディスク面に接触しており、磁気ディス
クの回転速度の上昇と共に磁気ヘッドが浮上して一定間
隔を保った状態で情報の記録再生を行うＣ３Ｓ方式が広
く用いられている。In magnetic disk drives, when the magnetic disk stops rotating, the magnetic head is in contact with the disk surface, and as the rotational speed of the magnetic disk increases, the magnetic head floats up and records and plays information at a constant interval. The C3S method is widely used.
このようなＣ３Ｓ方式では、磁気ヘッドは磁気ディスク
面上に浮上するまでに比較的高速でディスク面と接触摺
動することから、磁気ヘッド及び磁気ディスク表面の摩
擦損傷を避けるために、該磁気ディスク表面には潤滑膜
が施されている。In such a C3S method, the magnetic head slides in contact with the disk surface at a relatively high speed before floating above the magnetic disk surface. Therefore, in order to avoid frictional damage to the magnetic head and the magnetic disk surface, the magnetic disk A lubricating film is applied to the surface.
しかし、この潤滑膜が施された磁気ディスクの表面が平
滑過ぎるとＣ５Ｓ動作時等に磁気ヘッドがそのディスク
面に潤滑剤により吸着されてヘッドクラッシュを発生す
る傾向がある。このため、Ｃ８Ｓ動作時等においてヘッ
ド吸着のない、かつ表面潤滑性（耐久性）に優れた垂直
磁気記録媒体が必要とされている。However, if the surface of the magnetic disk coated with this lubricant film is too smooth, the magnetic head tends to be attracted to the disk surface by the lubricant during C5S operation, causing a head crash. Therefore, there is a need for a perpendicular magnetic recording medium that is free from head attraction during C8S operation and has excellent surface lubricity (durability).
（従来の技術〕従来、Ｃ３Ｓ動作時等におけるヘッド吸着を防止し、か
つ耐クラツシユ性を向上した垂直磁気記録媒体として第
３図に示すものが知られている。(Prior Art) Conventionally, the perpendicular magnetic recording medium shown in FIG. 3 is known as a perpendicular magnetic recording medium that prevents head adsorption during C3S operation and has improved crash resistance.
この記録媒体はディスク基板１１の表面をラッピングテ
ープ等を用いた機械的な粗面加工（テクスチャリング法
とも呼ばれる）によって、微小な凹凸（０，１μｍ以下
）を有する粗面１２にし、かかる基板１１表面上に、例
えば０．５μｍの膜厚のＮｉ−Ｆｅ等からなる高透磁率
な軟磁性層（裏打ち層とも呼ぶ）１３と、０．２μ割の
膜厚のＣｏ−Ｃｒからなる垂直記録層、即ち垂直磁性薄
膜１４とをめっき法及びスパッタリング法等により順に
積層形成し、更にその上面に、磁気ヘッドの接触摺動に
よる摩擦、摩耗、或いはヘッドクラッシュから媒体面を
保護するための、保護膜１５と潤滑膜１６が施されてい
る。In this recording medium, the surface of a disk substrate 11 is made into a rough surface 12 having minute irregularities (0.1 μm or less) by mechanical roughening using a wrapping tape or the like (also called texturing method). On the surface, there is a high permeability soft magnetic layer (also called underlayer) 13 made of Ni-Fe or the like with a thickness of 0.5 μm, for example, and a perpendicular recording layer made of Co-Cr with a thickness of 0.2 μm. That is, a perpendicular magnetic thin film 14 is sequentially laminated by a plating method, a sputtering method, etc., and a protective film is further formed on the upper surface of the perpendicular magnetic thin film 14 to protect the medium surface from friction, wear, or head crash caused by contact sliding of the magnetic head. 15 and a lubricating film 16 are applied.
このようにディスク基板１１の表面を粗面１２に構成す
ると、その上に積層される軟磁性層１３、垂直磁性薄膜
１４、保護膜１５及び潤滑膜１６の各表面は、ディスク
基板１１の粗面を継承した微小な凹凸状の面となり、こ
の面により磁気ヘッドとの接触面積が減少する結果、ヘ
ッドの吸着が防がれると共に、潤滑膜１６の存在により
磁気ヘッドに対する低摩擦、低摩耗が維持され、耐クラ
ツシユ性を良好にする。When the surface of the disk substrate 11 is formed into the rough surface 12 in this way, the surfaces of the soft magnetic layer 13, the perpendicular magnetic thin film 14, the protective film 15, and the lubricant film 16 laminated thereon are formed on the rough surface of the disk substrate 11. This surface has a finely uneven surface that inherits this, and as a result of this surface reducing the contact area with the magnetic head, the head is prevented from adhering, and the presence of the lubricating film 16 maintains low friction and wear against the magnetic head. and improves crush resistance.
ところで上記したような二層膜構造の垂直磁気記録媒体
において、高透磁率な軟磁性層１３は記録再生時に垂直
磁性薄膜１４の裏面に発生する分極磁荷を抑制し、かつ
垂直減磁界を減らすことにより磁化の減少を防ぎ、さら
に磁気ヘッドに対する磁束のリターンパスを形成する等
、磁気ヘッドの一部の機能を担っている。そのため良好
な記録再生特性を得るには、軟磁性層１３の膜厚は厚い
ほど望ましい。By the way, in the above-mentioned perpendicular magnetic recording medium with a two-layer film structure, the high permeability soft magnetic layer 13 suppresses the polarization magnetic charge generated on the back surface of the perpendicular magnetic thin film 14 during recording and reproduction, and reduces the perpendicular demagnetization field. This prevents magnetization from decreasing and also serves as a part of the functions of the magnetic head, such as forming a return path for magnetic flux to the magnetic head. Therefore, in order to obtain good recording and reproducing characteristics, it is desirable that the soft magnetic layer 13 be thicker.
しかしながら、該軟磁性層１３の膜厚を厚くすると、そ
の表面がディスク基板１１の粗面１２を継承した微小な
凹凸状の面となり難くなる。特に膜形成速度の大きいめ
っき法によって厚い軟磁性層を形成した場合はこの現象
が顕著である。However, when the thickness of the soft magnetic layer 13 is increased, its surface becomes less likely to have minute irregularities that inherit the rough surface 12 of the disk substrate 11. This phenomenon is particularly noticeable when a thick soft magnetic layer is formed by a plating method that has a high film formation rate.
従って、このような軟磁性層上に形成した垂直磁性薄膜
１４は基より保護膜１５及び潤滑膜１６の表面は前記デ
ィスク基板１１の粗面１２の影響を受けない平坦な面と
なり、その結果、前記磁気ヘッドの吸着防止の効果が失
われるといった問題があった。Therefore, in the perpendicular magnetic thin film 14 formed on such a soft magnetic layer, the surfaces of the protective film 15 and the lubricating film 16 are flat surfaces that are not affected by the rough surface 12 of the disk substrate 11, and as a result, There is a problem in that the effect of preventing the magnetic head from being attracted is lost.
本発明は上記した従来の問題点に鑑み、高透磁率な軟磁
性層を厚く形成しても、その軟磁性層上に設けた垂直磁
性薄膜、保ｌ！膜及び潤滑膜の表面が自然に粗面化され
、ヘッド吸着を防止すると共に、耐クラツシユ性に優れ
た新規な垂直磁気記録媒体を提供することを目的とする
ものである。In view of the above-mentioned problems of the conventional art, the present invention has been developed so that even if a thick soft magnetic layer with high magnetic permeability is formed, the perpendicular magnetic thin film provided on the soft magnetic layer can still be maintained. The object of the present invention is to provide a novel perpendicular magnetic recording medium in which the surfaces of the film and lubricant film are naturally roughened to prevent head adsorption and have excellent crush resistance.
本発明は上記した目的を達成するため、基板上に表面が
粗面加工により微小凹凸の粗面にされた高透磁率な軟磁
性層を設け、その上に該軟磁性層表面の微小凹凸に対応
した凹凸の表面をそれぞれ有する垂直磁性薄膜、保護膜
及び潤滑膜を設けた構成とする。In order to achieve the above-mentioned object, the present invention provides a high permeability soft magnetic layer whose surface is made into a rough surface with minute irregularities by roughening processing on a substrate, and a soft magnetic layer with a high magnetic permeability that has a rough surface with minute irregularities on the surface of the soft magnetic layer. The structure includes a perpendicular magnetic thin film, a protective film, and a lubricating film each having a corresponding uneven surface.
Ｌ記したように基板上に形成された高透磁率な軟磁性層
の表面を、粗面加工（テクスチャリング法、化学エツチ
ング法、イオンエツチング法等）により微小な凹凸面状
にすると、該軟磁性層を記録再生特性の向上のために厚
膜化しても、その上に設けた垂直磁性薄膜、即ち垂直記
録層の表面は膜厚が薄いために軟磁性層の微小な凹凸面
を十分に継承した粗面となる。As shown in L, when the surface of a high-permeability soft magnetic layer formed on a substrate is made into a finely uneven surface by roughening (texturing method, chemical etching method, ion etching method, etc.), the soft Even if the magnetic layer is made thicker to improve recording and reproducing characteristics, the perpendicular magnetic thin film provided on top of it, that is, the surface of the perpendicular recording layer, is thin, so it is difficult to sufficiently cover the minute irregularities of the soft magnetic layer. It becomes an inherited rough surface.
その結果、その垂直記録層上に設けた保護膜及び潤滑膜
の表面も同様に微小な凹凸状の粗面となり、磁気ヘッド
との接触面積が低減されると共に、潤滑膜の膜厚が適度
となるので、磁気ヘッドの吸着防止と低摩擦、低摩耗に
よる耐久性が大幅に向上する。As a result, the surfaces of the protective film and lubricant film provided on the perpendicular recording layer also become rough with minute irregularities, reducing the contact area with the magnetic head and making sure that the lubricant film has an appropriate thickness. As a result, durability is greatly improved due to prevention of magnetic head adsorption, low friction, and low wear.
以下図面を用いて本発明の実施例について詳細に説明す
る。Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図は本発明に係る垂直磁気記録媒体の一実施例を示
す要部断面図で、第２図（ａ）〜（Ｃ）はその製造例を
工程順に説明する図であるが、前記第３図の従来例と同
等部分には同一符号を付している。FIG. 1 is a cross-sectional view of a main part showing an embodiment of a perpendicular magnetic recording medium according to the present invention, and FIGS. Components equivalent to those of the conventional example shown in FIG. 3 are given the same reference numerals.
第１図、第２図（ａ）〜（Ｃ）において、１１は表面が
平滑に研磨仕上げされたアルミニウム（ＡＮ）、或いは
ガラス等からなるディスク基板１１てあり、この上には
第２図（萄で示されるようにＮｉ−Ｆｅ等からなる高透
磁率な軟磁性層２１がめつき法、或いはスパッタリング
法等により膜厚２〜３μ−に厚く形成されている。ここ
で本実施例が従来例と異なるのは、ディスク基板１１の
表面が平滑面である点と、軟磁性Ｎ２１の表面が第２図
（ロ）に示すように微小凹凸状の粗面２２に形成されて
いる点である。軟磁性層２１の表面を粗面２２にする加
工法としては、前述したテクスチャリング法、化学エツ
チング法、或いはイオンエツチング法等が採用でき、こ
れによって当該軟磁性層２１の表面に、例えば０．１μ
ｍ以下の微小凹凸を有する粗面２２を形成する。In FIGS. 1 and 2 (a) to (C), reference numeral 11 denotes a disk substrate 11 made of aluminum (AN), glass, etc. whose surface has been polished to a smooth finish, and on top of this is a disk substrate 11 shown in FIG. As shown in the figure, a high-permeability soft magnetic layer 21 made of Ni--Fe or the like is formed to a thickness of 2 to 3 μm by plating, sputtering, or the like.Here, this embodiment is different from the conventional example. The difference is that the surface of the disk substrate 11 is a smooth surface, and the surface of the soft magnetic N21 is formed into a rough surface 22 with minute irregularities as shown in FIG. 2(b). The above-mentioned texturing method, chemical etching method, ion etching method, etc. can be used as a processing method for making the surface of the soft magnetic layer 21 rough. 1μ
A rough surface 22 having minute unevenness of m or less is formed.
そして、このように表面を粗面２２とした軟磁性１ｉ２
１．Ｊ：に、第２図（Ｃ） ニ示すようニＣｏ−Ｃｒか
らなる膜厚約０．２μｍの垂直磁性薄膜２３と、カーボ
ン等よりなる膜厚０．０１〜０．０３μｍの保護膜２５
がスパッタリング法等により順次形成される。この垂直
磁性薄膜２３及び保護膜２４は製法的には従来例と何ら
変わりはないが、構造的にはその表面が前記軟磁性層２
１表面の粗面２２に対応した明確な微小な凹凸面となる
。Soft magnetic 1i2 with a rough surface 22 in this way
1. J: As shown in FIG. 2(C) D, there is a perpendicular magnetic thin film 23 made of Co-Cr with a thickness of about 0.2 μm, and a protective film 25 made of carbon or the like with a thickness of 0.01 to 0.03 μm.
are sequentially formed by a sputtering method or the like. The manufacturing method of the perpendicular magnetic thin film 23 and the protective film 24 is no different from that of the conventional example, but structurally the surface thereof is similar to that of the soft magnetic layer 24.
This results in a clearly minute uneven surface corresponding to the rough surface 22 of the first surface.
更にその保護膜２４の表面に潤滑膜２５として、例えば
パーフロロポリエーテルを塗布し、これにより垂直磁気
記録媒体が完成する。Furthermore, perfluoropolyether, for example, is applied as a lubricating film 25 to the surface of the protective film 24, thereby completing the perpendicular magnetic recording medium.
かくすれば、先の〔作用〕項で述べたように高透磁率な
軟磁性層２１の膜厚に関係無く、該軟磁性層２１上に形
成した垂直磁性薄膜２３、保護膜２４及び潤滑膜２５の
表面は自然に微小な凹凸を有する粗面となり、磁気ヘッ
ドに対する接触面積の低減が可能となる。In this way, the perpendicular magnetic thin film 23, the protective film 24, and the lubricating film formed on the soft magnetic layer 21, regardless of the film thickness of the high magnetic permeability soft magnetic layer 21, as described in the previous [Operation] section. The surface of the magnetic head 25 naturally becomes a rough surface with minute irregularities, making it possible to reduce the contact area with the magnetic head.
なお、軟磁性層２１を厚く形成するとその表面に、成膜
中における異常成長、或いは異物の巻き込み等による突
起等が発生し易くなるけれども当該軟磁性層表面を粗面
加工することにより、この異常突起も同時に除去できる
といった副次的な作用効果も期待できる。Note that when the soft magnetic layer 21 is formed thickly, protrusions are likely to occur on its surface due to abnormal growth during film formation or entrainment of foreign matter. A secondary effect can also be expected, such as the ability to remove protrusions at the same time.
以上の説明から明らかなように、本発明に係る垂直磁気
記録媒体によれば、高透磁率な軟磁性層の膜厚を厚くし
て記録再生特性を向上し、かつその上に設けた垂直磁性
薄膜、保護膜及び潤滑膜の表面を所望の荒さの粗面にし
て磁気ヘッドの吸着防止と低摩擦、低摩耗性の良好な摺
動特性を有する信頼性の高い垂直磁気記録媒体を得るこ
とが可能となる優れた利点がある。As is clear from the above description, according to the perpendicular magnetic recording medium according to the present invention, the recording and reproducing characteristics are improved by increasing the thickness of the soft magnetic layer with high magnetic permeability, and the perpendicular magnetic recording medium provided thereon is It is possible to obtain a highly reliable perpendicular magnetic recording medium that prevents magnetic head adsorption and has good sliding characteristics with low friction and wear by making the surfaces of the thin film, protective film, and lubricating film rough to a desired roughness. There are great advantages that can be achieved.
第１図は本発明に係る垂直磁気記録媒体の一実施例構成
を示す要部断面図、第２図（ａ）〜（Ｃ）は上記実施例の垂直磁気記録媒体
の製造例を工程順に示す要部断面図、第３図は従来の垂直磁気記録媒体を説明するための要部
断面図である。第１図及び第２図（ａ）〜（Ｃ）において、！■はディ
スク基板、２１は軟磁性層、２２は粗面、２３は垂直磁
性薄膜、２４は保護膜、２５は潤滑膜をそれぞれ示す。第図第図第図FIG. 1 is a sectional view of essential parts showing the configuration of an embodiment of the perpendicular magnetic recording medium according to the present invention, and FIGS. 2(a) to (C) show an example of manufacturing the perpendicular magnetic recording medium of the above embodiment in order of steps. Cross-sectional view of main parts FIG. 3 is a cross-sectional view of main parts for explaining a conventional perpendicular magnetic recording medium. In Figures 1 and 2 (a) to (C),! 2 indicates a disk substrate, 21 a soft magnetic layer, 22 a rough surface, 23 a perpendicular magnetic thin film, 24 a protective film, and 25 a lubricating film. Figure Figure Figure Figure
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17404588AJPH0223517A (en) | 1988-07-12 | 1988-07-12 | perpendicular magnetic recording medium |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17404588AJPH0223517A (en) | 1988-07-12 | 1988-07-12 | perpendicular magnetic recording medium |
| Publication Number | Publication Date |
|---|---|
| JPH0223517Atrue JPH0223517A (en) | 1990-01-25 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17404588APendingJPH0223517A (en) | 1988-07-12 | 1988-07-12 | perpendicular magnetic recording medium |
| Country | Link |
|---|---|
| JP (1) | JPH0223517A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5914168A (en)* | 1994-09-30 | 1999-06-22 | Fujitsu Limited | Magnetic recording medium and magnetic disc device |
| US7471484B2 (en) | 2001-02-16 | 2008-12-30 | Wd Media, Inc. | Patterned medium and recording head |
| US7549209B2 (en) | 2002-11-27 | 2009-06-23 | Wd Media, Inc. | Method of fabricating a magnetic discrete track recording disk |
| US7608193B2 (en) | 2002-11-27 | 2009-10-27 | Wd Media, Inc. | Perpendicular magnetic discrete track recording disk |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5914168A (en)* | 1994-09-30 | 1999-06-22 | Fujitsu Limited | Magnetic recording medium and magnetic disc device |
| US7471484B2 (en) | 2001-02-16 | 2008-12-30 | Wd Media, Inc. | Patterned medium and recording head |
| US7549209B2 (en) | 2002-11-27 | 2009-06-23 | Wd Media, Inc. | Method of fabricating a magnetic discrete track recording disk |
| US7608193B2 (en) | 2002-11-27 | 2009-10-27 | Wd Media, Inc. | Perpendicular magnetic discrete track recording disk |
| US7656615B2 (en) | 2002-11-27 | 2010-02-02 | Wd Media, Inc. | Perpendicular magnetic recording disk with a soft magnetic layer having a discrete track recording pattern |
| Publication | Publication Date | Title |
|---|---|---|
| JPS60229220A (en) | Magnetic recording medium | |
| JPH0223517A (en) | perpendicular magnetic recording medium | |
| JPH0489616A (en) | Magnetic disk device and magnetic disk | |
| JPS626425A (en) | magnetic recording medium | |
| JP2613947B2 (en) | Magnetic recording media | |
| JPS62109220A (en) | magnetic recording medium | |
| JPH0568771B2 (en) | ||
| JPH0244521A (en) | Manufacturing method of perpendicular magnetic disk | |
| JP2621358B2 (en) | Magnetic recording media | |
| JPH01134720A (en) | magnetic disk | |
| JP2718061B2 (en) | Manufacturing method of magnetic recording medium | |
| JPH03288321A (en) | Magnetic recording medium and its manufacturing method | |
| JPH03176814A (en) | magnetic recording medium | |
| JPH06325342A (en) | Magnetic recording medium | |
| JPH0440626A (en) | magnetic recording medium | |
| JPS61131224A (en) | Magnetic recording medium | |
| JPS62287415A (en) | Magnetic recording medium | |
| JPS62109221A (en) | magnetic recording medium | |
| JPS62109219A (en) | magnetic recording medium | |
| JPS61160834A (en) | magnetic disk | |
| JPH02198028A (en) | Magnetic disk | |
| JPS62282858A (en) | Manufacture of magnetic recording medium | |
| JPH02103726A (en) | Manufacturing method of perpendicular magnetic disk | |
| JPH0268712A (en) | Thin film magnetic recording medium | |
| JPH0291813A (en) | Magnetic recording medium |