第1図は本考案センサの第1実施例を示す斜視
図、第2図は第2実施例を示す斜視図、第3図a
,bはそれぞれ本考案における長尺膜状圧電素子
の例を示す断面図である。 1……長尺膜状圧電体、2,3……膜状電極、
4,5……リード線、6,6a……長尺膜状圧電
素子、7……弾性絶縁薄板。 Fig. 1 is a perspective view showing the first embodiment of the sensor of the present invention, Fig. 2 is a perspective view showing the second embodiment, and Fig. 3a.
, b are cross-sectional views each showing an example of a long film-like piezoelectric element in the present invention. 1... Long membrane piezoelectric body, 2, 3... Membrane electrode,
4, 5... Lead wire, 6, 6a... Long film piezoelectric element, 7... Elastic insulating thin plate.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987164359UJPH0167508U (en) | 1987-10-26 | 1987-10-26 |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987164359UJPH0167508U (en) | 1987-10-26 | 1987-10-26 |
| Publication Number | Publication Date |
|---|---|
| JPH0167508Utrue JPH0167508U (en) | 1989-05-01 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987164359UPendingJPH0167508U (en) | 1987-10-26 | 1987-10-26 |
| Country | Link |
|---|---|
| JP (1) | JPH0167508U (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04366702A (en)* | 1991-06-13 | 1992-12-18 | Agency Of Ind Science & Technol | Minute displacement detector |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS561302A (en)* | 1979-06-19 | 1981-01-09 | Hitachi Cable Ltd | Method for detecting position of moving object |
| JPS5649904A (en)* | 1979-09-29 | 1981-05-06 | Hitachi Cable Ltd | Detecting method for position of moving body |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS561302A (en)* | 1979-06-19 | 1981-01-09 | Hitachi Cable Ltd | Method for detecting position of moving object |
| JPS5649904A (en)* | 1979-09-29 | 1981-05-06 | Hitachi Cable Ltd | Detecting method for position of moving body |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04366702A (en)* | 1991-06-13 | 1992-12-18 | Agency Of Ind Science & Technol | Minute displacement detector |