【発明の詳細な説明】〔発明の目的〕（産業上の利用分野）本発明は長尺な電子ビームを放射する長尺に構成された
電子銃に係り、電子ビームを偏向させて利用する電子銃
に関するものである。[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention relates to an elongated electron gun that emits an elongated electron beam. It's about guns.
（従来の技術）金属塊を非接触に加熱、加工、溶融させるもしくは蒸発
させる熱源の一つに電子銃が上げられる。(Prior Art) An electron gun is one of the heat sources for heating, processing, melting, or vaporizing a metal lump without contact.
第２図に長尺な電子ビームが放射可能な長尺に構成され
た電子銃を示す。タングステン等の熱電子放出性に優れ
た高融点材料で作られる陰極１は凹状の断面形状を有す
る副電極（ウェーネルト）２の谷部に保持さオシるよう
に陰極ステー３により両端を支持固定される。陰極ステ
ー３は陰極１を通電加熱されるための電力を供給するた
めの接続端子４を介して固定ボルト５により片方には接
賃端子４が電気的に絶縁されるように絶縁環６を挿入し
、フレーム７に固定される。陰極１の、副電極２等より
構成された陰極部は負の高電圧が印加され、電子銃の電
子ビーム放射口となる開口部を有する陽極８は接地され
ており、電子銃自体は陰極部と陽極８との間で高耐圧構
造となっている。第３図に陰極１、副電極２及び陽極８
の配置を概略示す。電極８の開口面を水平面とし、同開
口部中線上に陰極］が配置され、また副電極２開１コ而
の中線と溶極８水平面中線は一致する。５陰極部１表面
より放出した熱電子は放射状となるが、陰極］と副電極
２が同電位の為、副電極２方向へ飛び出した熱電子は同
開口部方向へ向きを変えられ、陰極部に列して陽極８ば
正の電位の為、熱電子は陽極８方向へ飛んで行き、陰極
１と副電極２との隙間及び副電極２の形状による熱電子
収束、陰極部と陽極８のそれぞれの形状、寸法、電位差
による電界分布、ならびに陽極８の開口部寸法による電
子ビー１１収束の二段階の水平方向の絞り過程を経て電
子ヒームとして電子銃より放射される。FIG. 2 shows an elongated electron gun capable of emitting a long electron beam. A cathode 1 made of a high melting point material with excellent thermionic emission properties, such as tungsten, is held in the valley of an auxiliary electrode (Wehnelt) 2 having a concave cross-sectional shape, and is supported and fixed at both ends by cathode stays 3 so as to be oscillating. Ru. An insulating ring 6 is inserted into one side of the cathode stay 3 by a fixing bolt 5 via a connecting terminal 4 for supplying power for heating the cathode 1 so that the contact terminal 4 is electrically insulated. and is fixed to the frame 7. A negative high voltage is applied to the cathode part of the cathode 1, which is made up of the sub-electrode 2, etc., and the anode 8, which has an opening that becomes the electron beam emission port of the electron gun, is grounded, and the electron gun itself is connected to the cathode part. A high-voltage structure is formed between the anode 8 and the anode 8. Figure 3 shows cathode 1, sub-electrode 2 and anode 8.
The layout of the diagram is shown schematically. The opening surface of the electrode 8 is a horizontal plane, and the cathode is placed on the midline of the opening, and the midline of the auxiliary electrodes 2 and 1 coincides with the midline of the horizontal plane of the melt electrode 8. 5 Thermionic electrons emitted from the surface of the cathode part 1 become radial, but since the cathode] and the sub-electrode 2 are at the same potential, the thermionic electrons that jumped out in the direction of the sub-electrode 2 are redirected towards the same opening, and the cathode part Since the anode 8 has a positive potential in line with The electron beams are emitted from the electron gun as an electron beam through a two-step horizontal narrowing process of convergence of the electron beam 11 based on the electric field distribution due to the respective shapes, dimensions, and potential differences, and the aperture size of the anode 8.
（発明がｆ’ｆ（決しようとする課題）長尺に構成され
た電子銃から放射された長尺な電子ビームの軌道をコイ
ル、磁石等による磁気力の作用で、電子銃長手方向軸と
平行なある軸を中心として偏向させる場合の熱電子の運
動概念を第４図に示す。陰極１表面から放出した熱電子
は副電極２及び陰極部と陽極８の電位差により速度と方
向を与えられ熱電子ベクＩ〜ル５１を有する。また電子
ビームを偏向させるための磁気力も同じく磁気ベタ１ヘ
ル５２として作用し、熱電子は熱電子バク１ヘル５１、
磁気バク１〜ル５２の合成による軌道ベクトル５３によ
る速度と方向を持つ。したがって、陰極１表面から放出
された熱電子は陽極８開口部から電子ビームとして電子
銃から放射されかつ磁気力により偏向成分が加わるので
はなく、電子銃内陰極部と陽極８の空間ですでに偏向さ
れることになる。このような電子銃内での熱電子軌道の
偏向は陽極８の破損ｋまねく。また陰極部と陽極８との
空間に発生する電界に対して熱電子の軌道は不調和とな
り、電子ビームの収束性が低下する。陽極８の破損を防
ぐため、陽極８の開口部の幅を拡大する。陽極７の開口
部を電子ビーム偏向方向へ移動する、さらにこの二案を
組み合わせる等の方法はさほど効力を発揮せず、電子ビ
ームの収束性も低下する。陰極部と陽極８の間隔を拡げ
前述の二案を絹の合わせた場合有効な成果が得られるも
のの陰極部と陽極８との空間における電界分布が粗にな
るため出力の低下をまねく。(Problem to be solved by the invention) The trajectory of an elongated electron beam emitted from an elongated electron gun is adjusted to the longitudinal axis of the electron gun by the action of magnetic force from a coil, magnet, etc. Figure 4 shows the concept of the movement of thermionic electrons when they are deflected around a parallel axis. It has a thermionic vector I ~ 51. Also, the magnetic force for deflecting the electron beam also acts as a magnetic beta 1 hel 52, and the thermionic electron is
It has a speed and direction according to an orbit vector 53 which is a combination of magnetic fluxes 1 to 52. Therefore, thermionic electrons emitted from the surface of the cathode 1 are emitted from the electron gun as an electron beam through the opening of the anode 8, and instead of being subjected to a deflection component due to magnetic force, It will be deflected. Such deflection of the thermionic trajectory within the electron gun may lead to damage to the anode 8. Further, the trajectory of the thermoelectrons becomes incongruous with the electric field generated in the space between the cathode section and the anode 8, and the convergence of the electron beam deteriorates. In order to prevent damage to the anode 8, the width of the opening of the anode 8 is expanded. Methods such as moving the opening of the anode 7 in the direction of electron beam deflection or combining these two methods are not very effective, and the convergence of the electron beam also deteriorates. Although an effective result can be obtained by widening the distance between the cathode section and the anode 8 and combining the above two methods with silk, the electric field distribution in the space between the cathode section and the anode 8 becomes rough, resulting in a decrease in output.
本発明の目的は、電子銃から放射される電子ビームの収
束性、出力を低下させることなく、また低下をまねくも
最小限に抑え、かつ陽極を破損させることなく電子ヒー
ｌＸを偏向させる事が可能な電子銃を提供することであ
る。The purpose of the present invention is to deflect the electron heal 1X without reducing the convergence and output of the electron beam emitted from the electron gun, or to minimize the decline, and without damaging the anode. The objective is to provide a possible electron gun.
（課題を解決するための手段）本発明は、長尺な陰極と、この陰極に平行な長尺は開口
部を有する陽極と、陰極表面より放出されろ電子を陽極
の開口部方向へ収束させるための長尺て断面形状が門な
る副電極を有する電子銃において、電子銃より放射され
る電子ビームを磁気力で電子銃長手方向軸に対して左右
の一方向に偏向させる副電極の形状が、凹部間［」中心
軸が陰極と陽極開口部中心を結ぶ軸に対して電子ビー１
１偏向方向と反対方向に傾いていることを特徴とするも
のである。(Means for Solving the Problems) The present invention includes an elongated cathode, an anode having an elongated opening parallel to the cathode, and converging electrons emitted from the surface of the cathode toward the opening of the anode. In an electron gun that has a sub-electrode that is long and has a gate cross-sectional shape, the sub-electrode has a shape that deflects the electron beam emitted from the electron gun in one direction left or right with respect to the longitudinal axis of the electron gun using magnetic force. , the electron beam 1 is connected to the center axis between the recesses and the axis connecting the cathode and anode opening centers.
It is characterized by being tilted in a direction opposite to the first deflection direction.
（作 用）本発明による電子銃の副電極は、その凹断面の開口部中
心軸が陽極間開「」部中心軸に対して電子ビーム偏向方
向とは逆方向に傾いている。陰極表面より放出された熱
電子はウェーネルトによりつニーネル１〜開口方向へ収
束され、偏向磁気力が働いていない場合その軌道はほぼ
ウェーネルト開１」部中心軸に沿う。従って前述の如く
ウェーネル１〜の開１−１部中心軸が電子ビームの偏向
方向とは逆方向に傾いているため熱電子は電子ビームの
偏向方向と逆方向へ飛び出す。この状態で偏向磁気力が
働くと磁気力は常に電子ビーム偏向軌道の中心に熱電子
を引きつけるように作用するためこの偏向成分と前述の
反偏向成分の釣り合いにより見かけ」二熱電子は電子銃
内の陰極部と陽極間で偏向されないようにふるまう。(Function) In the auxiliary electrode of the electron gun according to the present invention, the central axis of the opening of the concave cross section is inclined in the direction opposite to the electron beam deflection direction with respect to the central axis of the opening between the anodes. Thermionic electrons emitted from the cathode surface are focused by the Wehnelt in the direction of the opening 1'', and when no deflection magnetic force is acting, their trajectory is approximately along the central axis of the Wehnelt opening 1''. Therefore, as described above, since the center axis of the opening 1-1 of Wehnel 1 is inclined in the direction opposite to the direction of deflection of the electron beam, the thermoelectrons fly out in the direction opposite to the direction of deflection of the electron beam. When the deflection magnetic force acts in this state, the magnetic force always acts to attract the thermionic electrons to the center of the electron beam deflection trajectory, so due to the balance between this deflection component and the aforementioned anti-deflection component, the dithermal electrons appear inside the electron gun. The beam behaves in such a way that it is not deflected between the cathode and the anode.
（実 施 例）本発明による電子銃の陰極、副電極、陽極等の配置及び
陰極表面より放出された後電子の運動の概念を第」図に
示す。本発明による電子銃の副電極２ａはその凹断面開
口面が電子ビーム偏向方向と逆方向に傾いて開放されて
いる。すなわち陽極８開口面を水平面とし、陰極１より
水平面へおろした集線とウェーネルト２８開口部中心軸
とは同一の線とはならず副電極２ａ開口部中心軸は電子
ビーム偏向方向と逆方向に傾くように構成される。(Example) The arrangement of the cathode, auxiliary electrode, anode, etc. of the electron gun according to the present invention and the concept of the movement of electrons after being emitted from the cathode surface are shown in FIG. The auxiliary electrode 2a of the electron gun according to the present invention has an open concave cross-sectional opening surface inclined in a direction opposite to the electron beam deflection direction. In other words, the aperture surface of the anode 8 is set as a horizontal plane, and the concentrated line brought down from the cathode 1 to the horizontal plane and the central axis of the Wehnelt 28 aperture are not the same line, and the central axis of the aperture of the sub-electrode 2a is tilted in the opposite direction to the electron beam deflection direction. It is configured as follows.
次に実施例の作用について述べる。第１図に陰極１表面
より放出される熱電子の運動の概念を示す。今、電子銃
から放射される電子ビームの偏向方向は第１図に向って
左方向とする。陰極」９表面より放出された熱電子は副
電極２ａの凹部開目方向に収集され、陽極８方向へ引張
られるため熱電子運動ベクトル５１ａを有す。またコイ
ル、磁石等による磁気力５２ａを働く為、最終的に熱電
子運動ベクトル５１ａと磁気力５２ａにより合成される
電子ビームベクトル５３ａが与えられる。ここで、電子
ビームを偏向させる磁気力５２ａの大きさと、陰極部と
陽極８との間に印加される電位差の大きさと電界分布に
より副電極２ａの形状及び開口部中心軸の傾きを決める
ことにより電子銃内における熱電子の軌道すなわち電子
ビームベクトル５３ａを見かけ上偏向させる為の磁気力
５２ａが働いていないかのようにすることができる。Next, the operation of the embodiment will be described. FIG. 1 shows the concept of the movement of thermionic electrons emitted from the surface of the cathode 1. It is now assumed that the deflection direction of the electron beam emitted from the electron gun is to the left as viewed in FIG. Thermionic electrons emitted from the surface of the cathode 9 are collected in the opening direction of the recess of the sub-electrode 2a and are pulled toward the anode 8, so that they have a thermionic motion vector 51a. In addition, since a magnetic force 52a is exerted by a coil, a magnet, etc., an electron beam vector 53a which is finally synthesized by the thermionic motion vector 51a and the magnetic force 52a is given. Here, by determining the shape of the sub-electrode 2a and the inclination of the aperture center axis based on the magnitude of the magnetic force 52a that deflects the electron beam, the magnitude of the potential difference applied between the cathode part and the anode 8, and the electric field distribution. It is possible to make it appear as if the magnetic force 52a for apparently deflecting the trajectory of thermionic electrons in the electron gun, that is, the electron beam vector 53a, is not working.
次に実施例による効果について述べる。本発明による電
子銃は陰極と陽極、陰極と副電極の相対的な配置側法を
変更することなく電子銃内での熱電子の流れに働く偏向
磁気力の影響をなくせる事により、陽極の破損を防止で
き、また電子ビームの収束性を低下させることはない。Next, the effects of the embodiment will be described. The electron gun according to the present invention eliminates the influence of the deflection magnetic force acting on the flow of thermionic electrons within the electron gun without changing the relative arrangement of the cathode and anode, or the cathode and the sub-electrode. Damage can be prevented, and the convergence of the electron beam will not be reduced.
本発明による電子銃の他の実施例として、陽極開口部中
線を陰極から陽極開口面へおろした垂線に対して電子ビ
ーム偏向方向へずらす例が上げられる。この方法は特に
偏向磁気力が大きい場合に有効な手段である。Another embodiment of the electron gun according to the present invention is an example in which the anode opening median line is shifted in the electron beam deflection direction with respect to a perpendicular line drawn from the cathode to the anode opening surface. This method is particularly effective when the deflection magnetic force is large.
本発明による電子銃は凹状になる副電極開口部中心軸を
電子銃から放射される電子ビームの偏向方向とは逆方向
に傾けることにより、電子銃内で偏向された熱電子の軌
道を陽極より離すことができ、陽極の破損を防ぐととも
に電子ビームの収束性、出力の低下を発生させることな
く安定な電子ビー１１を偏向させ放射させることができ
る。In the electron gun according to the present invention, by tilting the central axis of the concave sub-electrode opening in the direction opposite to the direction of deflection of the electron beam emitted from the electron gun, the trajectory of thermionic electrons deflected within the electron gun is directed from the anode. It is possible to prevent damage to the anode and to stably deflect and emit the electron beam 11 without causing a decrease in convergence or output of the electron beam.
＝７−=7-
第１図は本発明による電子銃の実施例の陰極部の配置図
、第２図は従来の電子銃の全体図、第３図は従来の電子
銃の陰極部の配置図、第４図は陰極表面から放出された
熱電子の運動の概念図である。１・・・陰極２．２ａ・・・副電極（ウェーネルト）８・・・陽極代理人 弁理士 則 近 憲 佑同 第子丸 健第１図第３図第４図FIG. 1 is a layout diagram of the cathode section of an embodiment of the electron gun according to the present invention, FIG. 2 is an overall diagram of a conventional electron gun, FIG. 3 is a layout diagram of the cathode section of a conventional electron gun, and FIG. FIG. 2 is a conceptual diagram of the movement of thermoelectrons emitted from the cathode surface. 1... Cathode 2.2a... Sub-electrode (Wehnelt) 8... Anode agent Patent attorney Noriyuki Chika Ken Yudo Daishimaru Ken Figure 1 Figure 3 Figure 4
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63145860AJPH01315934A (en) | 1988-06-15 | 1988-06-15 | Electron gun |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63145860AJPH01315934A (en) | 1988-06-15 | 1988-06-15 | Electron gun |
| Publication Number | Publication Date |
|---|---|
| JPH01315934Atrue JPH01315934A (en) | 1989-12-20 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63145860APendingJPH01315934A (en) | 1988-06-15 | 1988-06-15 | Electron gun |
| Country | Link |
|---|---|
| JP (1) | JPH01315934A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3901981A1 (en)* | 2020-04-24 | 2021-10-27 | IMS Nanofabrication GmbH | Charged-particle source |
| US12154756B2 (en) | 2021-08-12 | 2024-11-26 | Ims Nanofabrication Gmbh | Beam pattern device having beam absorber structure |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3901981A1 (en)* | 2020-04-24 | 2021-10-27 | IMS Nanofabrication GmbH | Charged-particle source |
| US11735391B2 (en) | 2020-04-24 | 2023-08-22 | Ims Nanofabrication Gmbh | Charged-particle source |
| US12154756B2 (en) | 2021-08-12 | 2024-11-26 | Ims Nanofabrication Gmbh | Beam pattern device having beam absorber structure |
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