【発明の詳細な説明】〔産業上の利用分野〕本発明は、アッシング方法に係り、特にウェーハ表面の
アッシングと同時に裏面の洗浄を行うに好適なアッシン
グ方法に係る。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an ashing method, and particularly to an ashing method suitable for ashing the front surface of a wafer and cleaning the back surface at the same time.
従来のアッシング方式については、たとえば。For traditional ashing methods, e.g.
特開昭６２−１６５９２３に論じられている。It is discussed in Japanese Patent Application Laid-Open No. 165923/1983.
上記従来技術は、ウェーハの裏面の汚れをアッシングの
工程で同時に行う点については配慮がされておらず、別
に裏面の洗浄を必要とする問題があった。The above-mentioned conventional technology does not take into consideration the fact that the back surface of the wafer is cleaned at the same time as the ashing process, and there is a problem in that the back surface needs to be cleaned separately.
本発明の目的は、アッシングの工程でウェーハ裏面の洗
浄を同時に行うことにある。An object of the present invention is to simultaneously clean the back surface of a wafer during the ashing process.
上記目的は、ウェーハの加熱を輻射熱による間接加熱と
して、ウェーハ裏面にもオゾンを含むガスを流すと同時
にＵＶ光を当てることによって達成される。The above object is achieved by indirectly heating the wafer using radiant heat, by flowing a gas containing ozone to the back surface of the wafer, and simultaneously applying UV light to the back surface of the wafer.
ウェーハの加熱を輻射熱による熱源としては。As a heat source for heating wafers, use radiant heat.
ハロゲンランプにより行い、洗浄にはＵＶ光とオゾンを
含む反応ガスによって生ずる活性酸化原子あるいは１分
子によって行われる。A halogen lamp is used, and cleaning is carried out by UV light and active oxidation atoms or molecules generated by a reactive gas containing ozone.
ウェーハ表面にあるＶシスト等の有機物は、ＵＶ光とオ
ゾンを含む反応ガスによって生ずる活性酸化性ガスとＵ
Ｖ光エネルギーによってアッシングされる。このアッシ
ング速度の向上には、ウェーハを加熱する必要がある。Organic substances such as V cysts on the wafer surface are combined with active oxidizing gas and U produced by UV light and a reactive gas containing ozone.
Ashed by V light energy. To improve this ashing rate, it is necessary to heat the wafer.
ウェーハの加熱は、ウェーハ裏側に配置されたハロゲン
ランプ等による輻射熱によって行われる。輻射熱とする
ことによってつ王−ハ裏面にオゾンを含む反応ガスを流
すギャップを設けることができる。裏面側に配置する熱
源のハロゲンランプの間に一部ＵＶ光を配置すれば、前
記のギャップに流す反応ガスをラジカル化させることが
できるので、ウェーハの裏面の有機物の汚れも洗浄でき
る。The wafer is heated by radiant heat from a halogen lamp or the like placed on the back side of the wafer. By using radiant heat, it is possible to provide a gap on the back surface of the tube through which the reaction gas containing ozone flows. If a portion of UV light is placed between the halogen lamps as heat sources placed on the back side, the reaction gas flowing into the gap can be radicalized, so that organic stains on the back side of the wafer can also be cleaned.
このようにしてアッシング工程で同時にウェーハの裏面
の洗浄ができるので、別にウェーハの裏面の汚れを洗浄
する工程を必要としないですむ。In this way, the back side of the wafer can be cleaned at the same time during the ashing process, so there is no need for a separate process for cleaning dirt from the back side of the wafer.
以下本発明の一実施例を第１図により説明する。An embodiment of the present invention will be described below with reference to FIG.
ウェーハ１は、３〜４点の支え点２によす支持され、ウ
ェーハ１の表側には、Ｖシスト等が塗布されており、表
側方向には、狭いギャップを介して。The wafer 1 is supported by three to four support points 2, and V-sist or the like is applied to the front side of the wafer 1 through a narrow gap in the front side direction.
ＵＶ光を透過する石英（合成石英）板３があり。There is a quartz (synthetic quartz) plate 3 that transmits UV light.
該石英板の上には１強力なＵＶ光源４が配置されている
。また、該石英板３には、ウェーハ表面に反応ガスを供
給するノズル５が複数個配置しである。前記支え点２は
１石英板６に固定してあり。A powerful UV light source 4 is placed above the quartz plate. Further, a plurality of nozzles 5 are arranged on the quartz plate 3 to supply a reactive gas to the wafer surface. The support point 2 is fixed to a quartz plate 6.
該石英板６の下にはウェーハ１への熱供給用のノ・ログ
ンランプ７とＵＶ光源８が配置しである。該石英板６に
は、ウェーハ裏面に反厄ガスを吹きつけるノズル９が配
置しである。A log lamp 7 and a UV light source 8 for supplying heat to the wafer 1 are arranged below the quartz plate 6. A nozzle 9 is arranged on the quartz plate 6 for spraying anti-fouling gas onto the back surface of the wafer.
本発明によれば、ウェーハ表面のＶシスト等有機物のア
ッシングと裏面の汚れの洗浄とが同時にできる効果が得
られる。According to the present invention, it is possible to simultaneously ash organic matter such as V cysts on the front surface of the wafer and clean dirt on the back surface.
本発明によれば、ウェーハの表面のアッシングと同時に
裏面の汚れを洗浄できるので、新たに裏面を洗浄する別
の工程を必要としない効果がある。According to the present invention, dirt on the back surface of the wafer can be cleaned at the same time as the front surface of the wafer is ashed, so there is an advantage that a separate step of cleaning the back surface is not required.
第１図は１本発明の一実施態様を示す要部断面図である
。FIG. 1 is a sectional view of essential parts showing one embodiment of the present invention.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1252288AJPH01189122A (en) | 1988-01-25 | 1988-01-25 | Ashing method |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1252288AJPH01189122A (en) | 1988-01-25 | 1988-01-25 | Ashing method |
| Publication Number | Publication Date |
|---|---|
| JPH01189122Atrue JPH01189122A (en) | 1989-07-28 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1252288APendingJPH01189122A (en) | 1988-01-25 | 1988-01-25 | Ashing method |
| Country | Link |
|---|---|
| JP (1) | JPH01189122A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| US8525139B2 (en) | 2009-10-27 | 2013-09-03 | Lam Research Corporation | Method and apparatus of halogen removal |
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|---|---|---|---|---|
| US5620525A (en)* | 1990-07-16 | 1997-04-15 | Novellus Systems, Inc. | Apparatus for supporting a substrate and introducing gas flow doximate to an edge of the substrate |
| US5843233A (en)* | 1990-07-16 | 1998-12-01 | Novellus Systems, Inc. | Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus |
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| US5830279A (en)* | 1995-09-29 | 1998-11-03 | Harris Corporation | Device and method for improving corrosion resistance and etch tool integrity in dry metal etching |
| DE19924058A1 (en)* | 1999-05-26 | 2000-11-30 | Bosch Gmbh Robert | Surface decontamination apparatus, especially for organic contaminant removal from a structured silicon wafer or body, comprises an ozone reactor in which a structured body is heated during ozone exposure |
| US8232538B2 (en) | 2009-10-27 | 2012-07-31 | Lam Research Corporation | Method and apparatus of halogen removal using optimal ozone and UV exposure |
| US8525139B2 (en) | 2009-10-27 | 2013-09-03 | Lam Research Corporation | Method and apparatus of halogen removal |
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