JP5256878B2 - Manufacturing method of wire saw - Google Patents

Description

Translated fromJapanese

本発明は、シリコンの単結晶などに代表される各種電子材料のスライス工程などで好適に使用される固定砥粒式のワイヤーソーの製造方法に関する。
The present invention relates to a method for producinga fixed abrasive type Waiyasoover suitably used such as in the slicing step of various electronic materials typified by silicon single crystal.

各種電子材料のスライス工程で使用される固定砥粒式ワイヤーソーは、ワイヤーの外周にダイヤモンド、ＣＢＮ等の超砥粒を固着したものであり、ダイヤモンドの固着法としてレジンボンド法や電着法がある。しかしながら、レジンボンド法はレジンによる超砥粒の保持力が弱いたいめに寿命が短く、また電着法は生産性が悪く、メッキ層が厚くなるため線径が太くなり、結果として疲労破断しやすいといった欠陥を持っている。  The fixed abrasive wire saw used in the slicing process of various electronic materials is one in which superabrasive grains such as diamond and CBN are fixed to the outer periphery of the wire. Resin bond method and electrodeposition method are used as diamond fixing methods. is there. However, the resin bond method has a short life because the holding power of the superabrasive grains by the resin is weak, and the electrodeposition method has poor productivity, and since the plating layer becomes thick, the wire diameter becomes thick, resulting in fatigue fracture. It has a defect such as easy.

これを改良するべく、本出願人はすでに、ワイヤーに超砥粒の粒径の５〜３５％の厚さのロー材、半田等による金属層を形成し、その金属層の溶融状態において超砥粒を付着固化させる方法として、より具体的には、溶融金属層を形成したワイヤーを溶融状態のまま超砥粒を収納したルツボ内に走行させて超砥粒をワイヤーにろう付けする方法を提案している（特許文献１参照）。この方法によると、超砥粒が金属材を介してワイヤーに固定されるのでレジンボンド法に比べ著しく保持力が強固となり、また電着法に比べ、金属材の太りがなく均一に形成されるので柔軟性にすぐれ長寿命化される。また、電着法によるもののように厚い金属材は不要であり、切削液の廻りや切り屑の排出が順調に行われ切削性能が向上するといったメリットがある。  In order to improve this, the present applicant has already formed a metal layer made of solder, solder or the like having a thickness of 5 to 35% of the grain size of the superabrasive grains on the wire, and in the molten state of the metal layer, the superabrasive More specifically, as a method of adhering and solidifying the grains, a method of brazing the superabrasive grains to the wire by running the wire in which the molten metal layer is formed in a crucible containing superabrasive grains in a molten state is proposed. (See Patent Document 1). According to this method, the superabrasive grains are fixed to the wire via the metal material, so that the holding power is remarkably stronger than that of the resin bond method, and the metal material is uniformly formed without being thicker than that of the electrodeposition method. So it has excellent flexibility and long life. In addition, a thick metal material is not required as in the electrodeposition method, and there is an advantage in that cutting performance is improved by smoothly turning around the cutting fluid and discharging chips.

しかしながら、上記特許文献１で提案したルツボ内で超砥粒をろう付けする方法では、少なくとも超砥粒のルツボ内を通過する間、金属材を加熱溶融状態にしておく必要があるが、溶融時間が長くなると金属材自体が劣化するという問題があった。また、特に金属材としてＣｕ−Ａｇ−Ｔｉ合金やＮｉ−Ｃｒ−Ｂ合金などの活性ろう材を用いる場合、加熱溶融時の酸化による劣化を防止するために雰囲気の酸素濃度を下げる必要がある。しかし、真空中か不活性ガス雰囲気中で上記超砥粒を収納したルツボを通すためには、ワイヤー走行機を含めて装置全体をチャンバー内に設置しなければならず、製造設備が大掛かりとなりコスト高になるとともに、各種調整、ワイヤーの交換、超砥粒の補充などの作業が煩雑となる問題もあった。  However, in the method of brazing superabrasive grains in the crucible proposed in Patent Document 1, it is necessary to heat and melt the metal material at least while passing through the crucible of superabrasive grains. When the length becomes longer, there is a problem that the metal material itself deteriorates. In particular, when an active brazing material such as a Cu—Ag—Ti alloy or Ni—Cr—B alloy is used as the metal material, it is necessary to lower the oxygen concentration in the atmosphere in order to prevent deterioration due to oxidation during heating and melting. However, in order to pass the crucible containing the above superabrasive grains in a vacuum or in an inert gas atmosphere, the entire device including the wire traveling machine must be installed in the chamber, resulting in large manufacturing equipment and cost. In addition to the increase in height, there are problems in that various adjustments, wire replacement, and superabrasive replenishment work become complicated.

特開２００６−１２３０２４号公報JP 2006-123024 A

そこで、本発明が前述の状況に鑑み、解決しようとするところは、製造時の金属材の溶融時間も短くて済み、金属材の劣化を防止することができ、さらに製造設備が大掛かりとならず、各種調整や交換・補充作業も容易に行うことができるワイヤーソー及びその製造方法を提供する点にある。  Therefore, in view of the above-mentioned situation, the present invention intends to solve the problem that the melting time of the metal material at the time of manufacture can be shortened, the deterioration of the metal material can be prevented, and the manufacturing equipment does not become large. Another object of the present invention is to provide a wire saw that can be easily adjusted and replaced / replenished, and a method for manufacturing the same.

本発明は、前述の課題解決のために、ワイヤーの外周にろう材、半田等の金属材を介して超砥粒を固着してなる固定砥粒式のワイヤーソーであって、前記金属材の溶融温度以下の温度で乾燥する仮付け用の液状接着材と、多数の超砥粒とを混入した容器を設け、該容器内の接着材の液中に、前記ワイヤーを軸方向に通過させることにより、該ワイヤー外面に前記接着材とともに超砥粒を付着させ、これにより該超砥粒をワイヤー外面に仮付けし、同じく容器内に多数混入して前記接着材とともにワイヤー外面に仮付けさせた粒状金属材、又は、容器内を通過させる前に予めワイヤー外面に下地層として被覆形成した金属材を加熱溶融させ、前記超砥粒をワイヤー外周にろう付けしてなることを特徴とするワイヤーソーを構成した。  In order to solve the above-mentioned problems, the present invention is a fixed abrasive type wire saw in which superabrasive grains are fixed to the outer periphery of a wire via a metal material such as a brazing material and solder, Provide a container in which a liquid adhesive for temporary drying that is dried at a temperature equal to or lower than the melting temperature and a large number of superabrasive grains are mixed, and allow the wire to pass through the liquid in the adhesive in the container in the axial direction. Thus, superabrasive grains are attached to the outer surface of the wire together with the adhesive, thereby temporarily attaching the superabrasive grains to the outer surface of the wire. A wire saw characterized in that a granular metal material or a metal material previously coated as an underlayer on the outer surface of the wire is heated and melted and brazed to the outer periphery of the wire before passing through the container. Configured.

また、本発明は、ワイヤーの外周にろう材、半田等の金属材を介して超砥粒を固着してなる固定砥粒式のワイヤーソーの製造方法であって、前記金属材の溶融温度以下の温度で乾燥する仮付け用の液状接着材と、多数の超砥粒とを混入した容器を設け、該容器内の接着材の液中に、前記ワイヤーを軸方向に通過させることにより、該ワイヤー外面に前記接着材とともに超砥粒を付着させ、これにより該超砥粒をワイヤー外面に仮付けした後、同じく容器内に多数混入して前記接着材とともにワイヤー外面に仮付けさせた粒状金属材、又は、容器内を通過させる前に予めワイヤー外面に下地層として被覆形成した金属材を加熱溶融させ、前記超砥粒をワイヤー外周にろう付けしてなることを特徴とするワイヤーソーの製造方法をも提供する。  Further, the present invention is a method for producing a fixed abrasive type wire saw in which superabrasive grains are fixed to the outer periphery of a wire through a metal material such as a brazing material and solder, and the melting temperature of the metal material or less. By providing a container mixed with a liquid adhesive for temporary drying that is dried at a temperature of a large number of superabrasive grains, and passing the wire in the axial direction in the liquid of the adhesive in the container, After the superabrasive grains are adhered to the outer surface of the wire together with the adhesive, and then the superabrasive grains are temporarily attached to the outer surface of the wire, a large number of the same are mixed in the container and temporarily attached to the outer surface of the wire together with the adhesive. A wire saw manufactured by heating and melting a metal material or a metal material previously formed as a base layer on the outer surface of the wire before passing through the container, and brazing the superabrasive grains to the outer periphery of the wire A method is also provided.

ここで、前記ワイヤーを、前記容器の底部から上部に向けて前記接着材の液中を上方向に走行させることにより、容器底部に沈積している超砥粒をワイヤー外面に沿って上方向に流動させる流れを生じさせ、これにより走行するワイヤー外面に超砥粒を接近させ、該ワイヤーが接着材の液面から出る際、接着材とともに超砥粒をワイヤー外面に付着させることが好ましい。  Here, the superabrasive grains deposited on the bottom of the container are moved upward along the outer surface of the wire by running the wire upward from the bottom of the container toward the top. It is preferable to cause a flow to be caused to flow, thereby causing the superabrasive grains to approach the outer surface of the running wire, and to attach the superabrasive grains to the outer surface of the wire together with the adhesive when the wire exits from the liquid surface of the adhesive.

また、容器底部を漏斗状に形成するとともに、該底部の中央部にワイヤーを通す細孔を設け、該細孔を通してワイヤーを上部に向けて走行させることにより、前記漏斗状の底部に沈積する超砥粒をワイヤー外面に沿って上方向に流動させることが好ましい。  In addition, the bottom of the container is formed in a funnel shape, and a pore through which a wire is passed is provided in the center of the bottom, and the wire is caused to travel upward through the pore to thereby deposit on the funnel-shaped bottom. It is preferable to cause the abrasive grains to flow upward along the outer surface of the wire.

以上にしてなる本願発明によれば、金属材の加熱溶融によるろう付けは、上記接着材により超砥粒をワイヤー表面に仮止めした後に行うことから、その溶融時間はろう付け固定に最低限必要な時間に限ることができる。したがって、金属材の劣化や酸化も問題にならず、真空チャンバー内に設備全体を収納する必要もなく、各種調整や交換・補充作業も容易に行える。また、多数の超砥粒を混入した接着材の容器中にワイヤーを通して付着させているため、接着材付着後に別途超砥粒を吹き付けたり刷り付けたりする場合に比べ、超砥粒がワイヤー周囲にほぼ均一な密度で付着・仮付けさせることができ、優れた切断加工性を有するワイヤーソーを安定して作製することができる。また、その超砥粒の付着密度は、ワイヤーの走行速度等を変えることで容易に調整できる。  According to the present invention as described above, brazing by heating and melting of a metal material is performed after the superabrasive grains are temporarily fixed to the wire surface by the above-mentioned adhesive, so that the melting time is the minimum necessary for brazing and fixing. It can be limited to a short time. Therefore, deterioration and oxidation of the metal material do not become a problem, and it is not necessary to store the entire equipment in the vacuum chamber, and various adjustments, replacement / replenishment operations can be easily performed. In addition, since the wire is attached to the container of the adhesive containing a large number of superabrasive grains through the wire, the superabrasive grains are placed around the wire as compared with the case where the superabrasive grains are separately sprayed or printed after the adhesive is applied. A wire saw having excellent cutting workability can be stably produced because it can be attached and temporarily attached at a substantially uniform density. Moreover, the adhesion density of the superabrasive grains can be easily adjusted by changing the traveling speed of the wire.

また、容器底部を漏斗状に形成するとともに、該底部の中央部にワイヤーを通す細孔を設け、該細孔を通してワイヤーを上部に向けて走行させることにより、前記漏斗状の底部に沈積する超砥粒をワイヤー外面に沿って上方向に流動させたので、ワイヤー周囲により均一な密度で超砥粒を付着させることができ、超砥粒の付着密度のばらづきを最小限に抑えることができる。  In addition, the bottom of the container is formed in a funnel shape, and a pore through which a wire is passed is provided in the center of the bottom, and the wire is caused to travel upward through the pore to thereby deposit on the funnel-shaped bottom. Since the abrasive grains are flowed upward along the outer surface of the wire, the superabrasive grains can be adhered at a uniform density around the wire, and the variation in the superabrasive density can be minimized. .

また、金属材を予め下地層として形成する方法以外に、粒状金属材を上記接着材に超砥粒とともに仮付けすることにより、当該仮付けされた粒状金属材を加熱溶融して超砥粒をろう付けすることもでき、これにより工程数や不要な金属材の使用を減らすことができ、コストダウンを図ることが可能となる。  In addition to the method of previously forming a metal material as a base layer, the granular metal material is temporarily attached to the adhesive material together with the superabrasive grains, whereby the temporarily abraded granular metal material is heated and melted to form superabrasive grains. It can also be brazed, which can reduce the number of steps and the use of unnecessary metal materials, thereby reducing the cost.

次に、本発明の実施形態を添付図面に基づき詳細に説明する。  Next, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

図１は、本発明に係る固定砥粒式のワイヤーソーを示す斜視図であり、図１、２は本発明の第１実施形態、図３は第２実施形態を示し、図中符号１はワイヤーソー、２は接着材、３は超砥粒、４は金属材、５は収納容器、６は加熱手段をそれぞれ示している。  FIG. 1 is a perspective view showing a fixed-abrasive wire saw according to the present invention, FIGS. 1 and 2 show a first embodiment of the present invention, FIG. 3 shows a second embodiment, and reference numeral 1 in FIG. A wire saw, 2 is an adhesive, 3 is a superabrasive grain, 4 is a metal material, 5 is a storage container, and 6 is a heating means.

ワイヤーソー１は、図１に示すように、ワイヤー１０の外周にろう材、半田等の金属材を介して超砥粒３を固着したものであり、本発明では、図２に示すように、金属材の溶融温度以下の温度で乾燥する仮付け用の液状接着材２と多数の超砥粒３，…とを混入した収納容器５を設け、該収納容器５内の接着材２の液中にワイヤー１０を軸方向に通過させて超砥粒３をワイヤー１０外面に仮付けし、その後、金属材４を加熱溶融させて超砥粒３をワイヤー１０外周にろう付けして作製される。  As shown in FIG. 1, the wire saw 1 is one in whichsuperabrasive grains 3 are fixed to the outer periphery of thewire 10 through a metal material such as a brazing material and solder. In the present invention, as shown in FIG. 2, There is provided astorage container 5 in which a temporaryadhesive liquid adhesive 2 that is dried at a temperature lower than the melting temperature of the metal material and a large number ofsuperabrasive grains 3 are mixed, and theadhesive 2 in thestorage container 5 is in a liquid. Thesuperabrasive grain 3 is temporarily attached to the outer surface of thewire 10 by passing thewire 10 in the axial direction, and then themetal material 4 is heated and melted to braze thesuperabrasive grain 3 to the outer periphery of thewire 10.

ワイヤー１０は、従来と同様、タングステンワイヤーやピアノ線、焼きもどし温度４００℃以上のダイス鋼、ハイス、ステンレス鋼等を用いることができ、超砥粒３としては、例えば粒径１００〜５μｍ程度のダイヤモンド、特にニッケルや銅等の金属材に対する濡れ性をよくするための金属コーティングを形成したコーティングダイヤモンドを用いることができるが、とくに限定されない。また金属材４は、従来と同様、ろう材、半田等を用いることができ、例えばＣｕ−Ａｇ−ＴｉやＮｉ−Ｃｒ−Ｂなどのダイヤモンドをよく濡らす活性ろう材を用いることができる。とくに、超砥粒３であるダイヤモンドをＳｎ−Ａｇ等の半田を用いて固定する場合、濡れ性に優れたコーティングダイヤモンドを用いることが好ましい。特に好ましい組み合せとしては、次の通りである。すなわち、超砥粒３として上記コーティングを有しないダイヤモンド等の超砥粒を用いる場合には、ワイヤー１０としてタングステン、モリブデン等の１０００℃以上で軟化しない線材を用い、且つ金属材４としてＴｉ又はＮｉ−Ｃｒ等を含む活性ろう材を用いることが好ましい。また、超砥粒３としてＮｉ（Ｎｉ−Ｐ）Ｃｕ等でコーティングしたダイヤモンド等の超砥粒を用いる場合には、ワイヤー１０としてステンレスを用い、且つ金属材４として低温ロー材を用いるか、或いはワイヤー１０としてピアノ線を用い且つ金属材４に半田等を用いることが好ましい。  Thewire 10 may be tungsten wire, piano wire, die steel having a tempering temperature of 400 ° C. or higher, high speed steel, stainless steel, and the like, and thesuperabrasive grains 3 may have a grain size of about 100 to 5 μm, for example. A diamond coated with a metal coating for improving wettability to a metal material such as nickel or copper can be used, but is not particularly limited. Themetal material 4 can be a brazing material, solder, or the like, as in the prior art, and an active brazing material that wets diamond such as Cu-Ag-Ti or Ni-Cr-B can be used. In particular, when the diamond that is thesuperabrasive grain 3 is fixed using a solder such as Sn—Ag, it is preferable to use a coated diamond having excellent wettability. Particularly preferred combinations are as follows. That is, when superabrasive grains such as diamond having no coating are used as thesuperabrasive grains 3, a wire material such as tungsten or molybdenum that does not soften at 1000 ° C. or higher is used as thewire 10, and Ti or Ni is used as themetal material 4. It is preferable to use an active brazing material containing -Cr or the like. When superabrasive grains such as diamond coated with Ni (Ni-P) Cu or the like are used as thesuperabrasive grains 3, stainless steel is used as thewires 10 and a low-temperature brazing material is used as themetal material 4, or It is preferable to use a piano wire as thewire 10 and solder or the like to themetal material 4.

まず、図１、２に基づき、本発明の第１実施形態を説明する。  First, a first embodiment of the present invention will be described with reference to FIGS.

本実施形態は、予めワイヤー１０の外面に下地層１１として金属材４（ろう材）を被覆形成しておき、図２に示すように、上記収納容器５内の液状接着材２に多数の超砥粒３を混入させた状態とし、（ａ）該収納容器５内の接着材２の液中に前記ワイヤー１０を軸方向に通過させることでワイヤー外面に接着材２及び超砥粒３を付着させ、これにより該超砥粒をワイヤー外面に仮付け（接着）した後、（ｂ）加熱手段６でワイヤー下地層１１の金属材４を加熱溶融させて、前記仮付けされている超砥粒３をワイヤー外周にろう付けするものである。  In the present embodiment, a metal material 4 (brazing material) is previously formed on the outer surface of thewire 10 as abase layer 11 and, as shown in FIG. (A) Adhesive 2 andsuperabrasive grains 3 are attached to the outer surface of the wire by passing thewire 10 in the axial direction through the liquid of theadhesive 2 in thestorage container 5. Thus, the superabrasive grains are temporarily attached (adhered) to the outer surface of the wire, and (b) themetal material 4 of thewire underlayer 11 is heated and melted by the heating means 6, so that the superabrasive grains that are temporarily attached 3 is brazed to the wire outer periphery.

下地層１１は、例えば金属材を加熱溶融状態で収納できるルツボを用意し、該ルツボ内にワイヤーを通して液状の金属材を連続的にワイヤー外周に被着・固化させることにより作製でき、その層厚は、好ましくはろう付けする超砥粒の粒径の５〜３５％程度の厚さに設定される。また、特に金属材４としてＣｕ−Ａｇ−Ｔｉ合金やＮｉ−Ｃｒ−Ｂ合金などの活性ろう材を用いる場合は、酸化による劣化を防止するために雰囲気の酸素濃度を下げる必要があり、真空中か不活性ガス雰囲気中での作業となるため、下地層１１を形成する工程をその後の工程とは別に独立して行うことが効率的である。  Theunderlayer 11 can be prepared, for example, by preparing a crucible capable of storing a metal material in a heated and melted state, and continuously depositing and solidifying a liquid metal material around the wire through the wire in the crucible. Is preferably set to a thickness of about 5 to 35% of the grain size of the superabrasive grains to be brazed. In particular, when an active brazing material such as a Cu-Ag-Ti alloy or Ni-Cr-B alloy is used as themetal material 4, it is necessary to lower the oxygen concentration in the atmosphere to prevent deterioration due to oxidation. Since the work is performed in an inert gas atmosphere, it is efficient to perform the step of forming thebase layer 11 independently of the subsequent steps.

下地層１１を別途独立した工程で行う場合は、被覆形成した下地層１１を冷却して固化した後、一旦、ワイヤー１０をボビンに巻取り、収納容器５内を走行させる工程で前記ボビンから下地層１１付きのワイヤー１０を供給すればよいが、このような独立した工程で行うこと以外に、冷却後にボビンに巻き取らずそのまま連続して収納容器５内を走行させることも勿論でき、この場合、被覆した下地層１１を強制冷却する手段を設けることが好ましい。下地層１１はルツボを用いて形成する方法以外にも種々の方法で形成できる。  In the case where theunderlayer 11 is performed in a separate independent process, after the coatedunderlayer 11 is cooled and solidified, thewire 10 is once wound around the bobbin and then moved down the bobbin in the step of running in thestorage container 5. What is necessary is just to supply thewire 10 with thestratum 11, but besides carrying out by such an independent process, of course, it can also run inside thestorage container 5 as it is without winding around a bobbin after cooling. It is preferable to provide means for forcibly cooling the coatedunderlayer 11. Theunderlayer 11 can be formed by various methods other than a method using a crucible.

収納容器５は、底部が漏斗状に形成されており、その中央部には前記ワイヤー１０を上下に走行可能に通すことができ且つワイヤー外面との隙間から液状接着材２が漏れない程度の径の細孔５ａが形成されている。そして、該細孔５ａを通して上記下地層１１を有するワイヤー１０を上下方向に走行可能に張り、容器内に液状接着材２を充填するとともにその液中に多数の超砥粒３，…を混入させ、ワイヤー１０を上方に走行させることにより、該ワイヤー１０が接着材液面から出る際、接着材２とともに超砥粒３がワイヤー外面に付着し、接着材２による接着で仮付けされることとなる。  Thestorage container 5 has a funnel shape at the bottom. The diameter of the central portion of thecontainer 5 is such that thewire 10 can run up and down and theliquid adhesive 2 does not leak from the gap with the outer surface of the wire. Pores 5a are formed. Then, thewire 10 having thebase layer 11 is stretched in the vertical direction through the pores 5a so that theliquid adhesive 2 is filled in the container and a large number ofsuperabrasive grains 3, ... are mixed in the liquid. By moving thewire 10 upward, when thewire 10 comes out of the adhesive liquid surface, thesuperabrasive grains 3 are adhered to the outer surface of the wire together with the adhesive 2 and are temporarily attached by adhesion by the adhesive 2. Become.

超砥粒３，…は接着材液中において容器底部に沈積するが、該液中にワイヤー１０を上方に走行させることで、超砥粒３をワイヤー外面に沿って上方向に流動させる流れが生じ、これにより走行するワイヤー外面に超砥粒が接近しながらワイヤーとともに上方へ流動し、ワイヤー１０が接着材液面から出る際、表面張力により接着材２と一緒にワイヤー外面に付着されるのである。また、容器底部を漏斗状に形成しているため、超砥粒３が多数存在する中をワイヤー１０が走行し、超砥粒３をワイヤー周囲に効率よく上方へ流動させることができ、ワイヤー周囲に偏りなくほぼ均一な密度で超砥粒を付着させることができる。  Thesuperabrasive grains 3, ... are deposited on the bottom of the container in the adhesive liquid, but the flow of causing thesuperabrasive grains 3 to flow upward along the outer surface of the wire by running thewire 10 upward in the liquid. As a result, superabrasive grains flow upward with the wire while approaching the outer surface of the traveling wire, and when thewire 10 comes out of the adhesive liquid surface, it adheres to the outer surface of the wire together with the adhesive 2 due to surface tension. is there. In addition, since the bottom of the container is formed in a funnel shape, thewire 10 travels in the presence of a large number ofsuperabrasive grains 3, and thesuperabrasive grains 3 can efficiently flow upward around the wire. Therefore, the superabrasive grains can be adhered with a substantially uniform density.

収納容器５の上部は開放してもよいが、好ましくは中央部に細孔５ａより若干大径で超砥粒３が付着したワイヤー１０が通される細孔が穿たれた上壁部を設けことが好ましく、該上壁部には超砥粒３や液状接着材２を供給できる蓋部を設けることが好ましい。また、収納容器５全体を振動させたり、ワイヤー１０と収納容器５を相対回転させるなどの手段を設けることも好ましく、更に、容器内の接着材２の液中に超砥粒３が集まるような渦を発生させる手段を設け、その中心にワイヤーを走行させるように構成することも好ましい。  The upper portion of thestorage container 5 may be opened, but preferably, an upper wall portion having a hole through which awire 10 having a diameter slightly larger than the pore 5a and attached with thesuperabrasive grains 3 passes is provided in the central portion. It is preferable that the upper wall portion is provided with a lid portion capable of supplying thesuperabrasive grains 3 and the liquidadhesive material 2. It is also preferable to provide means such as vibrating theentire storage container 5 or rotating thewire 10 and thestorage container 5 relative to each other. Further, thesuperabrasive grains 3 gather in the liquid of the adhesive 2 in the container. It is also preferable to provide a means for generating a vortex and to make the wire run in the center.

尚、収納容器５の形状は本例のように漏斗状の底部を設けたものに何ら限定されず、また本例では収納容器５内にワイヤー１０を上下方向に通しているが、斜め又は水平方向に通すように構成してもよく、その場合、容器ごと当該方向に向けて設置すればよい。また、収納容器５内に複数のワイヤー１０を平行に通して、複数のワイヤーについて超砥粒の仮付けを行うことも可能である。  The shape of thestorage container 5 is not limited to the one having a funnel-shaped bottom as in this example, and in this example, thewire 10 is passed through thestorage container 5 in the vertical direction. You may comprise so that it may pass in a direction, and what is necessary is just to install in the said direction with the container in that case. It is also possible to temporarily attach superabrasive grains to the plurality of wires by passing the plurality ofwires 10 through thestorage container 5 in parallel.

接着材２は、例えば「ニクロブレーズセメント」（ウオールコルモノイ社製）などに代表されるろう付け補助セメント（仮付け用）を用いることができ、エタノール等の希釈剤で適宜薄めることにより塗布後の硬化時間等の調整を行うことが好ましい。その他、一般的に用いられる液状の合成樹脂系接着剤、エマルション形接着剤、合成ゴム系接着剤などを用いることも可能である。  As the adhesive 2, for example, a brazing auxiliary cement (for temporary attachment) represented by “Niclo Blaze Cement” (manufactured by Wall Kolmonoy Co., Ltd.) can be used. It is preferable to adjust the curing time and the like. In addition, generally used liquid synthetic resin adhesives, emulsion adhesives, synthetic rubber adhesives, and the like can be used.

収納容器５から排出されるワイヤー１０の外面には、超砥粒３が仮付けされており、この状態のワイヤー１０を高周波誘導加熱コイル、ヒーター等の加熱手段６を通して下地層１１の金属材４が加熱溶融され、ワイヤー１０が加熱手段６を通過した後、自然冷却により温度が下がって金属材４は再度固化し、超砥粒３がしっかりとワイヤー外周の各領域にろう付け固定されることとなる。  Superabrasive grains 3 are temporarily attached to the outer surface of thewire 10 discharged from thestorage container 5, and thewire 10 in this state is passed through the heating means 6 such as a high-frequency induction heating coil and a heater, and themetal material 4 of thebase layer 11 is used. Is heated and melted, and after thewire 10 passes through the heating means 6, the temperature is lowered by natural cooling, themetal material 4 is solidified again, and thesuperabrasive grains 3 are firmly brazed and fixed to each region of the outer periphery of the wire. It becomes.

ワイヤー走行機構は、図示しないが下段にワイヤーボビンを設置し、その上方に下から順に、超砥粒３を仮付けする接着材２の収納容器５、仮付けした超砥粒３を固定するための加熱手段６を直列配置し、最上段に図示しない巻き取りボビンを設置している。勿論、別途独立に処理することもできるが、超砥粒仮付け工程（ａ）とろう付け工程（ｂ）の間は、仮付けした超砥粒の脱落を防止するためにも連続した工程で行われることが好ましい。  Although not shown in the drawing, the wire travel mechanism is provided with a wire bobbin in the lower stage, and in order from the bottom, thecontainer 5 for the adhesive 2 for temporarily attaching thesuperabrasive grains 3 and the temporarily attachedsuperabrasive grains 3 are fixed above the wire bobbin. The heating means 6 are arranged in series, and a winding bobbin (not shown) is installed at the uppermost stage. Of course, it can also be processed separately, but between the superabrasive tempering step (a) and the brazing step (b), it is a continuous process to prevent the temporary superabrasive particles from falling off. Preferably, it is done.

次に、図３に基づき、本発明の第２実施形態を説明する。  Next, a second embodiment of the present invention will be described based on FIG.

本実施形態では、下地層１１を形成する工程を省略し、代わりに図３（ａ）に示すように収納容器５内に上記第１実施形態の金属材４と同様の素材からなる多数の粒状金属材１２（４）を上記超砥粒３とともに混入しておき、第１実施形態と同様、収納容器５内の接着材２の液中に前記ワイヤー１０を軸方向に通過させることで、ワイヤー外面に接着材２、超砥粒３及び粒状金属材１２（４）を付着させ、これにより該超砥粒３及び粒状金属材１２（４）をワイヤー外面に仮付け（接着）した後、（ｂ）加熱手段６で、仮付けされた前記粒状金属材１２（４）を加熱溶融させ、超砥粒３をワイヤー外周にろう付けするものである。  In the present embodiment, the step of forming thebase layer 11 is omitted, and instead, as shown in FIG. 3A, a large number of granular materials made of the same material as themetal material 4 of the first embodiment are contained in thestorage container 5. The metal material 12 (4) is mixed with thesuperabrasive grains 3, and thewire 10 is passed through the liquid of the adhesive 2 in thestorage container 5 in the axial direction in the same manner as in the first embodiment.Adhesive material 2,superabrasive grain 3 and granular metal material 12 (4) are attached to the outer surface, and thereby superabrasivegrain 3 and granular metal material 12 (4) are temporarily attached (adhered) to the outer surface of the wire. b) The granular metal material 12 (4) temporarily attached is heated and melted by the heating means 6, and thesuperabrasive grains 3 are brazed to the outer periphery of the wire.

粒状金属材１２（４）は、加熱溶融することにより隣接して付着している他の粒状金属材１２（４）があれば一体化し、隣接して付着している超砥粒３とワイヤー１０表面の間に表面張力で超砥粒３の周りを包み込むように移動し、自然冷却により温度が下がって再度固化し、超砥粒３が金属材４を介してしっかりとワイヤー外周の各領域にろう付け固定されることとなる。本実施形態にように金属材を超砥粒の付着する部分にのみ存在させ、下地層１１の形成を不要にすることで、工程数や不要な金属材の使用を減らすことができ、コストダウンを図ることが可能となる。ただし、第１実施形態と同様下地層１１を予め形成したうえ、更に上記のとおり粒状金属材の仮付けをも行うようにすることも勿論可能である。  The granular metal material 12 (4) is integrated if there is another granular metal material 12 (4) adjoining by heating and melting, and thesuperabrasive grains 3 and thewire 10 adhering to each other. It moves so as to wrap around thesuperabrasive grains 3 with the surface tension between the surfaces, the temperature is lowered by natural cooling and solidifies again, and thesuperabrasive grains 3 are firmly attached to each region on the outer periphery of the wire via themetal material 4. It will be brazed and fixed. As in this embodiment, the metal material is present only in the portion where the superabrasive particles adhere, and the formation of thebase layer 11 is not required, thereby reducing the number of processes and the use of unnecessary metal material, thereby reducing the cost. Can be achieved. However, as in the first embodiment, it is of course possible to preliminarily form theunderlayer 11 and further perform temporary attachment of the granular metal material as described above.

以上、本発明の実施形態について説明したが、本発明はこうした実施例に何ら限定されるものではなく、本発明の要旨を逸脱しない範囲において種々なる形態で実施し得ることは勿論である。  Although the embodiments of the present invention have been described above, the present invention is not limited to these embodiments, and can of course be implemented in various forms without departing from the gist of the present invention.

本発明に係る固定砥粒式のワイヤーソーを示す斜視図。The perspective view which shows the fixed abrasive type wire saw which concerns on this invention.本発明の第１実施形態に係るワイヤーソーの製造手順を示す説明図。Explanatory drawing which shows the manufacture procedure of the wire saw which concerns on 1st Embodiment of this invention.本発明の第２実施形態に係るワイヤーソーの製造手順を示す説明図。Explanatory drawing which shows the manufacture procedure of the wire saw which concerns on 2nd Embodiment of this invention.

符号の説明Explanation of symbols

１ ワイヤーソー
２ 接着材
３ 超砥粒
４ 金属材
５ 収納容器
５ａ 細孔
６ 加熱手段
１０ ワイヤー
１１ 下地層
１２ 粒状金属材DESCRIPTION OF SYMBOLS 1 Wire saw 2Adhesive material 3Superabrasive grain 4Metal material 5 Storagecontainer 5a Pore 6 Heating means 10Wire 11Underlayer 12 Granular metal material

Claims (2)

Translated fromJapanese

ワイヤーの外周にろう材、半田等の金属材を介して超砥粒を固着してなる固定砥粒式のワイヤーソーの製造方法において、
前記金属材の溶融温度以下の温度で乾燥する仮付け用の液状接着材と、多数の超砥粒とを混入した容器を設け、
該容器内の接着材の液中に、前記ワイヤーを軸方向に通過させることにより、該ワイヤー外面に前記接着材とともに超砥粒を付着させ、これにより該超砥粒をワイヤー外面に仮付けした後、
同じく容器内に多数混入して前記接着材とともにワイヤー外面に仮付けさせた粒状金属材、又は、容器内を通過させる前に予めワイヤー外面に下地層として被覆形成した金属材を加熱溶融させ、前記超砥粒をワイヤー外周にろう付けしてなり、
前記ワイヤーを、前記容器の底部から上部に向けて前記接着材の液中を上方向に走行させることにより、容器底部に沈積している超砥粒をワイヤー外面に沿って上方向に流動させる流れを生じさせ、これにより走行するワイヤー外面に超砥粒を接近させ、該ワイヤーが接着材の液面から出る際、接着材とともに超砥粒をワイヤー外面に付着させてなることを特徴とするワイヤーソーの製造方法。In the manufacturing method of the fixed abrasive type wire saw formed by fixing superabrasive grains to the outer circumference of the wire through a metal material such as brazing material and solder,
Providing a container in which a liquid adhesive for temporary drying to be dried at a temperature lower than the melting temperature of the metal material and a large number of superabrasive grains are mixed;
By passing the wire in the axial direction in the adhesive liquid in the container, superabrasive grains are adhered to the outer surface of the wire together with the adhesive, thereby temporarily attaching the superabrasive grains to the outer surface of the wire. rear,
Similarly, a granular metal material mixed in a large number in the container and temporarily attached to the outer surface of the wire together with the adhesive, or a metal material previously coated as an underlayer on the outer surface of the wire before passing through the container, Brazing superabrasive grains around the wire,
A flow of causing the superabrasive grains deposited on the bottom of the container to flow upward along the outer surface of the wire by running the wire upward in the liquid of the adhesive from the bottom to the top of the container. cause, thereby to approximate superabrasive wire outer surface to travel, when the wire leaves the liquid surface of the adhesive,characterized in that together with the adhesive material comprising a superabrasive adhered to the wire outer surface wire Saw manufacturing method. 容器底部を漏斗状に形成するとともに、該底部の中央部にワイヤーを通す細孔を設け、該細孔を通してワイヤーを上部に向けて走行させることにより、前記漏斗状の底部に沈積する超砥粒をワイヤー外面に沿って上方向に流動させてなる請求項１記載のワイヤーソーの製造方法。A superabrasive grain which is deposited on the funnel-shaped bottom by forming a pore in the bottom of the container and providing a pore through which the wire passes in the center of the bottom and running the wire upward through the pore The wire saw manufacturing method according to claim1 , wherein the wire is made to flow upward along the outer surface of the wire.

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