【０００１】[0001]
【産業上の利用分野】本発明は、炉内が1600℃以上の高
温となる炉に適した炉の温度測定方法に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for measuring a temperature of a furnace suitable for a furnace having a high temperature of 1600 ° C. or more in the furnace.
【０００２】[0002]
【従来の技術】一般に炉の温度測定には熱電対温度計が
使用されているが、低温から高温まで精度よく測温でき
る熱電対温度計は知られていない。例えば、ある種類の
白金ロジウム温度計は1600℃以上の高温では測定精度が
低下し、また別の種類の白金ロジウム温度計は1600〜18
00℃では高い測定精度が得られるが、400 ℃以下では測
定精度が低下する。このため、常温から1600℃以上の高
温まで炉温を制御したいような場合、前者の熱電対温度
計を取り付けておくと1600℃以上の部分で測定精度が低
下し、後者の熱電対温度計を取り付けておくと400 ℃以
下の部分で測定精度が低下するという問題があった。ま
た２種類の熱電対温度計を切り替えて使用することも考
えられるが、切り替えの際に不可避的に温度表示が不連
続となり、制御系を混乱させる原因となっていた。2. Description of the Related Art In general, a thermocouple thermometer is used for measuring the temperature of a furnace, but a thermocouple thermometer capable of accurately measuring the temperature from a low temperature to a high temperature is not known. For example, one type of platinum rhodium thermometer has a reduced measurement accuracy at a high temperature of 1600 ° C. or higher, and another type of platinum rhodium thermometer has a
High measurement accuracy can be obtained at 00 ° C, but measurement accuracy decreases at 400 ° C or lower. For this reason, if you want to control the furnace temperature from room temperature to a high temperature of 1600 ° C or higher, if the former thermocouple thermometer is installed, the measurement accuracy will decrease in the area of 1600 ° C or higher, and the latter thermocouple thermometer will be used. If it is attached, there is a problem that the measurement accuracy is reduced at a temperature lower than 400 ° C. It is also conceivable that two types of thermocouple thermometers are used by switching, but at the time of the switching, the temperature display is inevitably discontinuous, causing confusion in the control system.
【０００３】[0003]
【発明が解決しようとする課題】本発明は上記した従来
の問題点を解決して、常温から高温まで精度よく測温す
ることができ、しかも切り替えの際に温度表示が不連続
となることもない炉の温度測定方法を提供するために完
成されたものである。SUMMARY OF THE INVENTION The present invention solves the above-mentioned conventional problems and can accurately measure the temperature from room temperature to a high temperature. In addition, the temperature display may be discontinuous at the time of switching. It has not been completed to provide a furnace temperature measurement method.
【０００４】[0004]
【課題を解決するための手段】上記の課題を解決するた
めになされた本発明は、高温用の熱電対温度計と低温用
の熱電対温度計とを近接位置に取り付けておき、低温時
には低温用の熱電対温度計の出力のみを取り出し、温度
が所定値を越えて上昇した時には低温用の熱電対温度計
を炉壁内に後退させるとともに、両方の熱電対温度計の
出力のうち高位側のみを選択して取り出すことを特徴と
するものである。SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a thermocouple thermometer for high temperature and a thermocouple for low temperature which are mounted in close proximity to each other. Only the output of the thermocouple thermometer is taken out, and when the temperature rises above a predetermined value, the thermocouple for low temperature is retracted into the furnace wall, and the higher side of the output of both thermocouple thermometers It is characterized in that only one is selected and taken out.
【０００５】[0005]
【実施例】以下に本発明を図示の実施例とともに更に詳
細に説明する。図中、１は高温炉の炉壁、２はこの炉壁
１を貫通させて先端を炉内に突出させた高温用の熱電対
温度計、３はその近接位置に取り付けられた低温用の熱
電対温度計である。これらの熱電対温度計２、３間の距
離が離れると、炉内の異なる点の温度を測定することと
なるため、両者は300mm 以内の距離に設置することが好
ましい。なお本実施例では前述したように、高温用の熱
電対温度計２として使用温度が1600℃以上の白金ロジウ
ム温度計が使用され、また低温用の熱電対温度計３とし
て使用温度が1600℃以下の白金ロジウム温度計が使用さ
れている。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in more detail with reference to the illustrated embodiments. In the figure, 1 is a furnace wall of a high-temperature furnace, 2 is a thermocouple thermometer for high temperature having a tip penetrating through the furnace wall 1 and protruding into the furnace, and 3 is a thermocouple for low temperature mounted in the vicinity thereof. It is a thermometer. If the distance between the thermocouple thermometers 2 and 3 is large, the temperature at different points in the furnace will be measured. Therefore, it is preferable that both are installed within a distance of 300 mm or less. In the present embodiment, as described above, a platinum rhodium thermometer whose operating temperature is 1600 ° C. or higher is used as the thermocouple thermometer 2 for high temperature, and an operating temperature of 1600 ° C. or lower is used as the thermocouple thermometer 3 for low temperature. Platinum rhodium thermometer is used.
【０００６】この高温用の熱電対温度計２は炉内への突
出量を一定として固定してあるが、低温用の熱電対温度
計３はエアシリンダ４によって図示のように突出位置と
後退位置との間を移動できるように支持されている。こ
のエアシリンダ４の動作は電磁弁５とスピードコントロ
ーラ６とによって制御されており、突出位置と後退位置
との間を10〜30秒をかけてゆっくりと移動するようにし
てある。これは急激な温度変化による破損を防止するた
めである。また７はプロセスコントローラ、８と９は信
号選択器である。The thermocouple thermometer 2 for high temperature has a fixed amount of protrusion into the furnace and is fixed. The thermocouple thermometer 3 for low temperature uses an air cylinder 4 to project and retract as shown in the figure. It is supported so that it can move between. The operation of the air cylinder 4 is controlled by a solenoid valve 5 and a speed controller 6, so that the air cylinder 4 moves slowly between the projecting position and the retracted position in 10 to 30 seconds. This is to prevent breakage due to a rapid temperature change. 7 is a process controller, and 8 and 9 are signal selectors.
【０００７】[0007]
【作用】次に本発明の炉の温度測定方法を順を追って説
明する。まず炉内が低温のときは、プロセスコントロー
ラ７が電磁弁５に指示を送って低温用の熱電対温度計３
を鎖線で示す位置まで突出させてある。このために両方
の熱電対温度計２、３から出力が生ずるが、プロセスコ
ントローラ７により制御されている信号選択器８の作用
により、低温用の熱電対温度計３の出力のみが選択され
て取り出される。従ってこの状態では低温用の熱電対温
度計３による精度の高い測温が可能となる。Next, the furnace temperature measuring method of the present invention will be described step by step. First, when the temperature in the furnace is low, the process controller 7 sends an instruction to the solenoid valve 5 and the thermocouple thermometer 3 for low temperature is used.
Is projected to the position shown by the chain line. For this reason, an output is generated from both thermocouple thermometers 2 and 3, but only the output of the low-temperature thermocouple thermometer 3 is selected and taken out by the operation of the signal selector 8 controlled by the process controller 7. It is. Therefore, in this state, highly accurate temperature measurement by the thermocouple thermometer 3 for low temperature is possible.
【０００８】次に炉温が上昇して低温用の熱電対温度計
３の適正測温範囲を越えると、プロセスコントローラ７
が電磁弁５に指示を送り、低温用の熱電対温度計３をゆ
っくりと後退させる。これと同時に信号選択器８がオフ
となり、信号選択器９がオンとなる。この信号選択器９
は高位信号選択器であり、高温用の熱電対温度計２の出
力と低温用の熱電対温度計３の出力とを比較し、高位側
のみを選択する。Next, when the furnace temperature rises and exceeds the proper temperature measurement range of the thermocouple thermometer 3 for low temperature, the process controller 7
Sends an instruction to the solenoid valve 5 to slowly retract the thermocouple thermometer 3 for low temperature. At the same time, the signal selector 8 is turned off and the signal selector 9 is turned on. This signal selector 9
Is a high-order signal selector, which compares the output of the thermocouple thermometer 2 for high temperature with the output of the thermocouple thermometer 3 for low temperature, and selects only the high-order side.
【０００９】このため、信号選択器９がオンとなった瞬
間には高温用の熱電対温度計２の出力と低温用の熱電対
温度計３の出力のいずれかが選択されるが、低温用の熱
電対温度計３は炉壁内に後退するためにその出力は次第
に低下し、高温用の熱電対温度計２の出力のみが選択さ
れることとなる。このため、炉内の温度は高温用の熱電
対温度計２によって精度良く測定されることとなる。Therefore, at the moment when the signal selector 9 is turned on, either the output of the thermocouple thermometer 2 for high temperature or the output of the thermocouple thermometer 3 for low temperature is selected. Since the thermocouple thermometer 3 moves back into the furnace wall, its output gradually decreases, and only the output of the thermocouple thermometer 2 for high temperature is selected. For this reason, the temperature in the furnace is accurately measured by the thermocouple thermometer 2 for high temperature.
【００１０】なお、両方の熱電対温度計２、３を移動さ
せる方式も考えられるが、可動部分が多くなるために本
発明のように片側を固定とする方が有利である。また低
温用の熱電対温度計３は完全に炉壁１から外部へ引き抜
くのではなく、実施例のように炉壁１の内部まで後退さ
せれば十分である。その理由は外部へ引き抜くと熱衝撃
が大きくなり破損の恐れがあるためである。Although a method of moving both thermocouple thermometers 2 and 3 is also conceivable, it is more advantageous to fix one side as in the present invention because the number of movable parts increases. It is sufficient that the thermocouple thermometer 3 for low temperature is not completely pulled out of the furnace wall 1 to the outside, but is retracted to the inside of the furnace wall 1 as in the embodiment. The reason is that when pulled out, the thermal shock increases and there is a risk of breakage.
【００１１】[0011]
【発明の効果】以上に説明したように、本発明の炉の温
度測定方法によれば、低温用の熱電対温度計と高温用の
熱電対温度計とを使い分けることにより、炉内の温度を
常温から高温まで精度よく測温することができる。しか
も一方を固定したので可動部分が少なくて済みトラブル
を生じにくいうえ、切り替えの際には高位信号選択器を
利用して高温側の出力のみを選択するようにしたので、
温度表示の不連続性を最小限とすることができる。よっ
て本発明は従来の問題点を解決した炉の温度測定方法と
して、業界に寄与するところはきわめて大である。As described above, according to the furnace temperature measuring method of the present invention, the temperature inside the furnace can be reduced by selectively using a low-temperature thermocouple thermometer and a high-temperature thermocouple thermometer. The temperature can be measured accurately from room temperature to high temperature. In addition, since one of them is fixed, the number of movable parts is small and trouble is unlikely to occur.In addition, when switching, only the high-temperature side output is selected using the high-order signal selector.
The discontinuity of the temperature display can be minimized. Therefore, the present invention greatly contributes to the industry as a furnace temperature measuring method which solves the conventional problems.
【図１】本発明の実施例を説明する断面図である。FIG. 1 is a sectional view illustrating an embodiment of the present invention.
１ 炉壁 ２ 高温用の熱電対温度計 ３ 低温用の熱電対温度計 ８ 信号選択器 ９ 信号選択器 DESCRIPTION OF SYMBOLS 1 Furnace wall 2 Thermocouple thermometer for high temperature 3 Thermocouple thermometer for low temperature 8 Signal selector 9 Signal selector
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) B27D 21/00 F27B 17/00 G01K 1/14 G01K 7/02 G05D 23/00──────────────────────────────────────────────────続 き Continuation of front page (58) Fields surveyed (Int. Cl.7 , DB name) B27D 21/00 F27B 17/00 G01K 1/14 G01K 7/02 G05D 23/00
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28686993AJP3254320B2 (en) | 1993-11-16 | 1993-11-16 | Furnace temperature measurement method |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28686993AJP3254320B2 (en) | 1993-11-16 | 1993-11-16 | Furnace temperature measurement method |
| Publication Number | Publication Date |
|---|---|
| JPH07139885A JPH07139885A (en) | 1995-06-02 |
| JP3254320B2true JP3254320B2 (en) | 2002-02-04 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28686993AExpired - Fee RelatedJP3254320B2 (en) | 1993-11-16 | 1993-11-16 | Furnace temperature measurement method |
| Country | Link |
|---|---|
| JP (1) | JP3254320B2 (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5734081B2 (en)* | 2010-10-18 | 2015-06-10 | 株式会社日立国際電気 | Substrate processing apparatus, temperature control method for substrate processing apparatus, and heating method for substrate processing apparatus |
| Publication number | Publication date |
|---|---|
| JPH07139885A (en) | 1995-06-02 |
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