【０００１】[0001]
【産業上の利用分野】本発明は、ＬＳＩなどの半導体を
製造する半導体製造装置等において、レチクルやフォト
マスクあるいはウエハ等基板を収容し、これらが収納中
あるいは露光装置等に搬送中に塵等によって汚染された
り、周囲の部材との接触によって損傷するのを防ぐため
のレチクルカセット等の基板収容容器に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing apparatus for manufacturing a semiconductor such as an LSI, which accommodates a substrate such as a reticle, a photomask or a wafer, and transfers dust or the like during storage or transport to an exposure apparatus or the like. The present invention relates to a substrate storage container such as a reticle cassette for preventing contamination of the substrate or damage due to contact with surrounding members.
【０００２】[0002]
【従来の技術】半導体製造装置においてはレチクルやフ
ォトマスクあるいはウエハ等基板（以下、「基板」とい
う。）を所定の収納場所に収納するとき、あるいは収納
場所から露光装置等に搬送する際には、基板が雰囲気中
の塵によって汚染されたり周囲の部材との接触によって
損傷するのを防ぐために、開閉自在な容器、例えばレチ
クルカセットに収容して取扱うのが一般的である。2. Description of the Related Art In a semiconductor manufacturing apparatus, when a reticle, a photomask, or a substrate such as a wafer (hereinafter, referred to as a "substrate") is stored in a predetermined storage location or transported from the storage location to an exposure apparatus or the like. In order to prevent the substrate from being contaminated by dust in the atmosphere or damaged by contact with surrounding members, the substrate is generally housed in an openable and closable container, for example, a reticle cassette.
【０００３】そこで、図７に示すように、基板のＲ0 の
下面を支持する当接部材１１１と基板の外周縁を拘束す
る図示しない外縁拘束部材を備えた下皿１１０と、基板
Ｒ0を下皿１１０の当接部材１１１に押圧する押圧部材
１２１を備えた上蓋１２０からなり、上蓋１２０に枢着
された掛け金部材１３０によって上蓋１２０と下皿１１
０を一体化する基板収容容器１００が開発された。前記
押圧部材１２１は、ゴム等の弾性材料で作られており、
上蓋１２０と下皿１１１を閉じたときに、押圧部材１２
１の先端１２１ａが基板の上面に弾力的に押圧されるよ
うに構成されている。Therefore, as shown in FIG. 7, a lower plate 110 provided with a contact member 111 for supporting the lower surface of the substrate R0 and an outer edge restricting member (not shown) for restricting the outer peripheral edge of the substrate, and a substrate R0 . The lower plate 110 includes an upper lid 120 having a pressing member 121 that presses against the contact member 111. The upper lid 120 and the lower plate 11 are fixed by a latch member 130 pivotally attached to the upper lid 120.
A substrate container 100 that integrates the C.O. The pressing member 121 is made of an elastic material such as rubber,
When the upper lid 120 and the lower plate 111 are closed, the pressing member 12
The first end 121a is configured to be elastically pressed against the upper surface of the substrate.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら上記従来
の技術によれば、前述のように上蓋の押圧部材がゴム等
の弾性材料で作られており比較的軟質であるために、基
板の表面に押圧されたときに押圧部材の先端が弾力的に
押しつぶされて拡大し、基板に吸着する傾向がある。However, according to the above-mentioned prior art, since the pressing member of the upper lid is made of an elastic material such as rubber as described above and is relatively soft, the pressing member is pressed against the surface of the substrate. When pressed, the tip of the pressing member is elastically crushed and expanded, and tends to be attracted to the substrate.
【０００５】このために図８に示すように、基板収容容
器を開くときに基板が押圧部材に吸着したまま上蓋とと
もに持ち上げられるおそれがあり、基板収容容器の開閉
作業を迅速に行うことができない。特に、基板が軽量で
ある場合は基板収容容器の開閉作業が著しく妨げられ
て、半導体製造工程を高速化するうえでの大きな障害と
なる。For this reason, as shown in FIG. 8, when the substrate container is opened, the substrate may be lifted together with the upper lid while being adsorbed by the pressing member, and the opening / closing operation of the substrate container cannot be performed quickly. In particular, when the substrate is lightweight, the opening / closing operation of the substrate storage container is significantly hindered, which is a great obstacle to speeding up the semiconductor manufacturing process.
【０００６】本発明は上記従来の技術の有する問題点に
鑑みてなされたものであり、基板収容容器内で基板に押
圧される押圧部材が基板に吸着するおそれのない基板収
容容器を提供することを目的とするものである。SUMMARY OF THE INVENTION The present invention has been made in consideration of the above-mentioned problems of the related art, and has as its object to provide a substrate storage container in which a pressing member pressed against the substrate in the substrate storage container is not likely to be attracted to the substrate. It is intended for.
【０００７】[0007]
【課題を解決するための手段】上記の目的を達成するた
め本発明の基板収容容器は、基板を載置する下皿と、前
記下皿に対し上向きに分離可能な上蓋を有する基板収容
容器において、前記下皿および前記上蓋は両者の間に収
容された前記基板を支持する基板支持手段をそれぞれ備
え、前記上蓋の前記基板支持手段は弾力的に変形自在で
ある少なくとも１つの押圧部材を有し、前記押圧部材の
少なくとも前記基板に接触する表面は前記基板に押し付
けられても密着するおそれのない非弾性材料で作られて
おり、前記上蓋には前記下皿のフランジ部に係合する係
合部材を枢着し、さらに、前記上蓋に対し前記係合部材
を枢動させて前記下皿のフランジ部に係合させる付勢力
を有するバネを備え、前記係合部材を前記バネに抗して
枢動させることで前記上蓋は前記下皿に対し解放され、
前記上蓋を持ち上げることで前記下皿に対し分離される
ことを特徴とする。Means for Solving the Problems] substrate container of the present invention for achieving the above object,the substrate housing of chromatic and lower tray, upwardly separable lid to said lower tray for placing a substrate
A container, the bottom pan and the upper coveris a substrate supporting means for supporting the substrate accommodated therebetweenrespectively Bei
For example, the substrate support means of said top coverhas at leastone pressing member is freely resiliently deformed, the surface in contact with at least the substrate of the pressingmember <br/>with pressing the substrate vignetting Made of inelastic material that does not even adhere
The upper lid has an engagement with a flange portion of the lower plate.
A joining member is pivotally mounted, and further, the engaging member is
Urging force to pivot the lever to engage the flange of the lower plate
Comprising a spring having the engaging member against the spring.
By pivoting the upper lid is released to the lower plate,
The lower plate is separated from the lower plate by lifting the upper lid .
【０００８】押圧部材が、弾性材料で作られた本体と非
弾性材料で作られた当接片によって構成されているとよ
い。[0008] The pressing member may be constituted by a main body made of an elastic material and a contact piece made of an inelastic material.
【０００９】また、互いに開閉自在である一対の容器部
材を有し、前記一対の容器部材のそれぞれが両者の間に
収容された基板を支持する基板支持手段を備えており、
少なくとも一方の前記容器部材の前記基板支持手段が少
なくとも１個の押圧部材を有し、前記押圧部材全体が非
弾性材料で作られており、その一部分を薄肉にすること
により弾力的に変形自在に構成されているとよい。Further, a pair of container parts which can be freely opened and closed witheach other.
Material, each of the pair of container members is between the two
Substrate supporting means for supporting the accommodated substrate,
The substrate supporting means of at least one of the container members is small.
It is preferable that the pressing member has at least one pressing member, the entire pressing member is made of an inelastic material, and a part of the pressing member is made thin to be elastically deformable.
【００１０】また、基板を載置する下皿と、前記下皿に
対し上向きに分離可能な上蓋を有し、前記下皿および前
記上蓋が両者の間に収容された前記基板を支持する基板
支持手段を備えており、前記上蓋の前記基板支持手段が
弾力的に変形自在である少なくとも１個の押圧部材を有
し、前記押圧部材の前記基板に接触する表面に前記基板
に押しつけられても前記基板に吸着するのを防ぐための
複数の溝が設けられていることを特徴とする。[0010] Further,a lower plate on which a substrate is placed, and the lower plate
An upper lid whichcan be separated upward, thelower plate and the front
Serial upper lid comprises a substrate supporting means for supportingthe substrate accommodated between them, have at least one pressing member andthe substrate supporting means ofthe lid can be freely resiliently deformed,the pressing The substrate is provided on a surface of the member that contacts thesubstrate.
To preventit from adsorbingto the substrateeven when pressed against
It is characterized in that aplurality of grooves are provided.
【００１１】[0011]
【００１２】[0012]
【作用】上蓋を下皿上に閉じて押圧部材を基板に押圧し
たときに、押圧部材の表面が非弾性材料で作られている
ために基板に吸着することなく、従って、基板収容容器
を開いても押圧部材とともに基板が持ち上げられるおそ
れがない。押圧部材全体が非弾性材料で作られており、
その一部分を薄肉にすることにより弾力的に変形自在に
構成されていれば、押圧部材全体を非弾性材料によって
一体的に製作し、その一部分に切欠等を設けるだけで、
基板に対して吸着するおそれのない安価な押圧部材を得
ることができる。[Action] The pressing member to close the uppercover on the lower tray when pressed against the substrate, without being adsorbed on the substrate to the surface of the pressing member is made of a non-elastic material, thus, the substrate container Even if it is opened, there is no possibility that the substrate is lifted together with the pressing member. Entirepress member have been made of a non-elastic material,
If it is configured to be elastically deformable by thinning a part of it, the entire pressing member is integrally made of an inelastic material, and only a cutout etc. is provided in that part,
It is possible to obtain an inexpensive pressing member that is not likely to be attracted to the substrate.
【００１３】また、基板を載置する下皿と、前記下皿に
対し上向きに分離可能な上蓋を有し、前記下皿および前
記上蓋が両者の間に収容された前記基板を支持する基板
支持手段を備えており、前記上蓋の前記基板支持手段が
弾力的に変形自在である少なくとも１個の押圧部材を有
し、前記押圧部材の前記基板に接触する表面に前記基板
に押しつけられても前記基板に吸着するのを防ぐための
複数の溝が設けられていれば、押圧部材全体を弾性材料
によって一体的に製作し、その表面に複数の溝を設ける
だけでよい。Further,a lower plate on which the substrate is placed, and the lower plate
An upper lid whichcan be separated upward, thelower plate and the front
Serial upper lid comprises a substrate supporting means for supportingthe substrate accommodated between them, have at least one pressing member andthe substrate supporting means ofthe lid can be freely resiliently deformed,the pressing The substrate is provided on a surface of the member that contacts thesubstrate.
To preventit from adsorbingto the substrateeven when pressed against
If a plurality of grooves are provided, it is only necessary to integrally manufacture the entire pressing member with an elastic material and provide theplurality of grooves on the surface thereof.
【００１４】[0014]
【実施例】本発明の実施例を図面に基づいて説明する。An embodiment of the present invention will be described with reference to the drawings.
【００１５】図１は一実施例による基板収容容器である
レチクルカセットを示すもので、（ａ）は容器部材であ
る上蓋１０、（ｂ）は容器部材である下皿２０をそれぞ
れ示す斜視図である。すなわち、レチクルカセット１は
互いに開閉自在な上蓋１０と下皿２０からなり、上蓋１
０は方形の天板１１とその外周縁を包囲する方形枠状の
側板１２からなり、側板１２の外側には係合部材である
一対の掛け金部材１３が配設され、各掛け金部材１３
は、図２に示すように、ピン１２ａによって側板１２に
枢着されたＬ形の本体１３ａと、その先端部に形成され
た爪１３ｂと、本体１３ａを天板１１の中央に向かって
付勢するバネ１３ｃを有する。FIG. 1 is a perspective view showing a reticle cassette which is a substrate storage container according to an embodiment. FIG. 1A is a perspective view showing an upper lid 10 which is a container member, and FIG. 1B is a perspective view showing a lower plate 20 which is a container member. is there. That is, the reticle cassette 1 includes an upper cover 10 and a lower plate 20 that can be opened and closed with respect to each other.
Numeral 0 comprises a rectangular top plate 11 and a rectangular frame-shaped side plate 12 surrounding the outer peripheral edge thereof. A pair of latch members 13 asan engaging member is disposed outside the side plate 12, and each latch is provided. Member 13
As shown in FIG. 2, an L-shaped main body 13a pivotally attached to the side plate 12 by a pin 12a, a claw 13b formed at the tip of the L-shaped main body 13a, and the main body 13a are biased toward the center of the top plate 11. Spring 13c.
【００１６】下皿２０は、方形の底板２１と、これと一
体的に設けられたフランジ部である一対のフランジ２２
を有し、各フランジ２２はその中央部に切欠２２ａを有
し、上蓋１０と下皿２０を閉じたときに、上蓋１０の各
掛け金部材１３を下皿２０の各フランジ２２の切欠２２
ａに嵌合させ、その先端部の爪１３ｂをフランジ２２の
下面に係合させることができるように構成されている。
下皿２０の底板２１上にはその４隅のそれぞれに近接す
る位置に基板支持手段である４個の支持部材２３と４個
の支柱２４が立設されており、各支持部材２３は基板で
あるレチクルＲ1の下面に当接される上向き当接部２３
ａとレチクルＲ1の側縁に対向する外縁対向部２３ｂを
有し、各支持部材２３の上向き当接部２３ａはレチクル
Ｒ1の下面を支持し、各支持部材２３の外縁対向部２３
ｂと各支柱２４はレチクルＲ1の外周縁に近接する位置
でこれに対向し、レチクルＲ1が横方向に大きくガタつ
くのを防ぐ役目をする。The lower plate 20 has a rectangular bottom plate 21 anda pair of flanges 22which are provided integrally with the bottom plate 21.
Each of the flanges 22 has a notch 22a at the center thereof. When the upper lid 10 and the lower plate 20 are closed, each latch member 13 of the upper lid 10 is connected to the notch 22a of each flange 22 of the lower plate 20.
a, and the claw 13b at the tip thereof can be engaged with the lower surface of the flange 22.
On the bottom plate 21 of the lower plate 20, four support members 23 and four columns 24, which are substrate support means, are erected at positions near each of the four corners, and each support member 23 is a substrate. upward contact portion 23 that contacts the lower surface of a reticle R1
having an outer edge facing portion 23b that faces the side edge of a reticle R1, an upward abutment portion 23a of each support member 23 supports the lower surface of the reticle R1, the outer facing portion 23 of the support members 23
b and each strut 24 is opposed thereto at a position close to the outer periphery of the reticle R1, serves to reticle R1 is prevented from largely rattling in the lateral direction.
【００１７】一方、上蓋１０の天板１１の下面には、上
蓋１０を下皿２０上に閉じたときにレチクルＲ1 の上面
に押圧される基板支持手段である４個の押圧部材１４が
固着され、各押圧部材１４は、図３に拡大して示すよう
に、ゴム等の弾性材料で作られた管状の本体１４ａとそ
の先端に一体的に設けられた当接片１４ｂからなり、各
押圧部材１４の本体１４ａの基部はその中空部に天板１
１の下面に設けられた突起１１ａを圧入させることで天
板１１に一体的に結合され、また、天板１１の上面に
は、図１に示すように、各押圧部材１４の位置を示すマ
ーク１５が設けられ、さらに、上蓋１０の側板１２は、
各掛け金部材１３に近接する位置に穴１６ａを有する案
内片１６を有し、前記穴１６ａは下皿２０の各フランジ
２２の切欠２２ａに近接して配設された位置決めピン１
７を挿通自在である。各押圧部材１４の当接片１４ｂは
本体１４ａより硬質でレチクルＲ1 の表面に押圧されて
もこれに密着するおそれのない非弾性材料、例えばポリ
アセタール樹脂、ＡＢＳ樹脂などで作られている。Meanwhile, on the lower surface of the top plate 11 of the upper lid 10, secured four pressing member 14 is a substrate supporting means is pressed against the upper surface of the reticle R1 is When closing lid 10 over Shitasara 20 As shown in an enlarged view in FIG. 3, each pressing member 14 includes a tubular main body 14a made of an elastic material such as rubber and a contact piece 14b integrally provided at the tip thereof. The base of the body 14a of the member 14 is
The projections 11a provided on the lower surface of the top plate 1 are press-fitted so as to be integrally connected to the top plate 11, and on the top surface of the top plate 11, as shown in FIG. 15 are provided, and the side plate 12 of the upper lid 10 is
A guide piece 16 having a hole 16a is provided at a position close to each latch member 13, and the hole 16a is provided with a positioning pin 1 disposed close to a notch 22a of each flange 22 of the lower plate 20.
7 can be inserted freely. Contact piece 14b of the pressing member 14 is made of a rigid than the body 14a inelastic material unlikely to cause close contact thereto be pressed against the surface of the reticle R1, for example polyacetal resin, ABS resin and the like.
【００１８】レチクルＲ1 をレチクルカセット１に入れ
るときは、上蓋１０を下皿２０から持ち上げて、レチク
ルＲ1 の外周縁を下皿２０の各支持部材２３の外縁対向
部２３ｂと各支柱２４に対向させた状態で下降させ、レ
チクルＲ1 の下面を下皿２０の各支持部材２３の上向き
当接部２３ａに支持させたうえで、図４に示すように、
図示しないアクチュエータによって上蓋１０の各掛け金
部材１３をバネ１３ｃに抗して外側へ枢動させ、この状
態で上蓋１０を下降させてレチクルＲ1 にかぶせる。こ
のとき上蓋１０の各案内片１６の穴１６ａに下皿２０の
位置決めピン１７を挿通させて下皿２０の各フランジ２
２の切欠２２ａと上蓋１０の各掛け金部材１３の位置合
わせを行う。When the reticle R1 is inserted into the reticle cassette 1, the upper lid 10 is lifted from the lower plate 20, and the outer peripheral edge of the reticle R1 is placed on the outer edge facing portion 23 b of each support member 23 of the lower plate 20 and each column 24. is lowered while being opposed, the lower surface of the reticle R1 in terms of was supported by the upward abutting portion 23a of the support member 23 of the lower tray 20, as shown in FIG. 4,
Each latch member 13 of the upper cover 10 pivoted outwardly against the spring 13c by an actuator (not shown), cover the reticle R1 lowers the upper cover 10 in this state. At this time, the positioning pins 17 of the lower plate 20 are inserted into the holes 16a of the respective guide pieces 16 of the upper
The notch 22a of the second and the respective latch members 13 of the upper lid 10 are aligned.
【００１９】上蓋１０が所定位置まで下降したら、前記
アクチュエータから各掛け金部材１３を解放する。各掛
け金部材１３がアクチュエータから解放されると、図２
に示すようにバネ１３ｃの付勢力によって各掛け金部材
１３が枢動し、下皿２０のフランジ２２の切欠２２ａに
嵌合したうえで、爪１３ｂをフランジ２２の下面に係合
させる。このとき、上蓋１０の各押圧部材１４はレチク
ルＲ1 の上面に押圧され、各押圧部材１４の本体１４ａ
は弾力的に変形し、当接片１４ｂはレチクルＲ1 の上面
に所定の圧力で押圧されて下皿２０の各支持部材２３の
上向き当接部２３ａとともにレチクルＲ1 をレチクルカ
セット１内にしっかりと保持する働きをする。各押圧部
材１４の本体１４ａはゴム等の弾性材料で作られている
ために弾力的に変形するものの、レチクルＲ1 に接触す
る当接片１４ｂは硬質であるためレチクルＲ1 に押しつ
けられてもレチクルＲ1 の表面に吸着するおそれはな
い。When the upper lid 10 is lowered to a predetermined position, each latch member 13 is released from the actuator. When each latch member 13 is released from the actuator, FIG.
As shown in (1), each latch member 13 is pivoted by the urging force of the spring 13c to fit into the notch 22a of the flange 22 of the lower plate 20, and then the claw 13b is engaged with the lower surface of the flange 22. At this time, the pressing members 14 of the upper cover 10 is pressed against the upper surface of the reticle R1, body 14a of the pressing member 14
Firmly resiliently deformed, the contact piece 14b is in the reticle cassette 1 reticle R1 together with the upward abutment portion 23a of the support member 23 of the lower tray 20 is pressed at a predetermined pressure to the upper surface of the reticle R1 And work to keep. Although the body 14a of the pressing member 14 is resiliently deformed because it is made of a resilient material such as rubber, even if pressed against the reticle R1 for contact piece 14b that contacts the reticle R1 is rigid possibility to adsorb to the surface of the reticle R1 is not.
【００２０】レチクルＲ1 はこのようにレチクルカセッ
ト１内に収容されて露光装置の収納棚等に収納され、所
定の露光プログラムが進むにつれて需要が生じたときに
手動またはロボット等によって収納棚から取りだされて
露光装置まで搬送される。レチクルカセット１内のレチ
クルＲ1 は、前述のように、各押圧部材１４と各支持部
材２３の間にしっかりと保持され、しかもレチクルＲ1
の外周縁は各支持部材２３の外縁対向部２３ｂと各支柱
２４によって拘束されているため、カセット１内におい
てレチクルＲ1 がガタついてその位置がずれたり、摩擦
による発塵のためにレチクルＲ1 が汚染するおそれはな
い。通常は、搬送路の途中に前述と同様のアクチュエー
タが設けられており、該アクチュエータが前述と同様に
レチクルカセット１の各掛け金部材１３をバネ１３ｃに
抗して枢動させ、下皿２０から解放する。上蓋１０を持
ち上げてレチクルカセット１を開くとき、各押圧部材１
４の当接片１４ｂは従来例のようにレチクルＲ1 の上面
を吸着していないため、レチクルＲ1 を下皿２０に残し
たままレチクルＲ1 から速やかに離れる。このように、
レチクルカセット１を開く作業を円滑に行うことができ
るため、露光サイクルの高速化を大きく促進できる。The reticle R1 is thus housed in the reticle cassette 1 and housed in a storage shelf of an exposure apparatus, and is taken out of the storage shelf manually or by a robot when demand arises as a predetermined exposure program proceeds. Then, it is transported to the exposure device. Reticle R1 of the reticle cassette 1, as described above, are firmly held between the pressing member 14 and the support member 23, moreover reticle R1
Reticle R1 for for the outer peripheral edge being restrained by the outer facing portion 23b and each strut 24 of each support member 23, or shift its position reticle R1 is rattling in the cassette 1, dust due to friction There is no risk of contamination. Usually, an actuator similar to that described above is provided in the middle of the transport path. The actuator pivots each latch member 13 of the reticle cassette 1 against the spring 13c and releases the latch member 13 from the lower plate 20 as described above. I do. When the reticle cassette 1 is opened by lifting the upper lid 10, each pressing member 1
Since the contact piece 14b of the 4 does not adsorb the upper surface of the reticle R1 as in the conventional example, quickly leaves the reticle R1 from the reticle R1 while remaining Shitasara 20. in this way,
Since the operation of opening the reticle cassette 1 can be performed smoothly, the speeding up of the exposure cycle can be greatly promoted.
【００２１】図５は第１変形例による押圧部材３４を示
すもので、これは、本実施例の押圧部材１４の本体１４
ａと同様に上蓋１０の天板１１の裏面に設けられた突起
１１ａを圧入させる中空部を備えた本体３４ａを有し、
硬質の当接片１４ｂを設ける替わりに、本体３４ａの端
面に吸着防止手段である複数の溝３４ｂを設けること
で、レチクルの上面に押圧しても押圧部材３４の先端が
レチクルを吸着するおそれのないように構成したもので
ある。本変形例は、筒状の本体をゴム等の弾力的に変形
自在な弾性材料によって製作し、その端面に複数の溝を
形成するだけであるから製造工程が簡単であり、従って
安価であるという利点を有する。FIG. 5 shows a pressing member 34 according to a first modification, which is the main body 14 of the pressing member 14 of this embodiment.
a, a main body 34a having a hollow portion into which the protrusion 11a provided on the back surface of the top plate 11 of the upper lid 10 is press-fitted,
By providing aplurality of grooves 34b as suction preventing means on the end face of the main body 34a instead of providing the hard contact piece 14b, the tip of the pressing member 34 may adsorb the reticle even when pressed against the upper surface of the reticle. It is configured so as not to exist. In this modification, the cylindrical body iselastically deformed with rubber or the like.
Since it is made of a flexible elastic material and only aplurality of grooves are formed on its end face, there is an advantage that the manufacturing process is simple and therefore inexpensive.
【００２２】図６は第２変形例による押圧部材４４を示
すもので、これは、本実施例の押圧部材１４と同様の中
空部と球面状の先端４４ｂを備えた本体４４ａをゴム等
に比べて硬質の非弾性材料、例えばポリアセタール樹
脂、ＡＢＳ樹脂などによって製作し、本体４４ａの中空
部の一部分を拡大して環状の薄肉部４４ｃを設けること
で本体４４ａに所定の弾性を付与し、押圧部材４４がレ
チクルの表面に押圧されたときに弾性変形できるように
構成したものである。押圧部材４４全体が硬質であるか
らその先端４４ｂがレチクルの表面に吸着されるおそれ
はない。本変形例も第１変形例と同様に製造工程が簡単
で従って安価であるという利点を有する。FIG. 6 shows a pressing member 44 according to a second modification, which is similar to the pressing member 14 of the present embodiment in that a main body 44a having a hollow portion and a spherical tip 44b is made of rubber or the like. The main body 44a is made of a hard and inelastic material, for example, polyacetal resin, ABS resin, or the like, and a part of the hollow portion of the main body 44a is enlarged to provide an annular thin portion 44c to impart predetermined elasticity to the main body 44a. 44 is configured so that it can be elastically deformed when pressed against the surface of the reticle. Since the entire pressing member 44 is hard, there is no possibility that the tip 44b is attracted to the surface of the reticle. This modified example also has an advantage that the manufacturing process is simple and therefore inexpensive as in the first modified example.
【００２３】[0023]
【発明の効果】本発明は上述のように構成されているの
で、以下に記載するような効果を奏する。Since the present invention is configured as described above, it has the following effects.
【００２４】基板収容容器を閉じて押圧部材を基板に押
圧したときに、これが基板に吸着し基板収容容器を開く
ときに基板が持ち上げられるおそれがないため、基板収
容容器の開閉作業を円滑に行うことができる。その結
果、露光装置等に対するレチクルやフォトマスクあるい
はウエハ等の基板の供給を大幅に高速化して半導体製造
工程全体の高速化を大きく促進できる。When the substrate accommodating container is closed and the pressing member is pressed against the substrate, the substrate is not attracted to the substrate and the substrate is not lifted when the substrate accommodating container is opened. be able to. As a result, the speed of supplying a reticle, a photomask, or a substrate such as a wafer to an exposure apparatus or the like can be greatly increased, and the speed of the entire semiconductor manufacturing process can be greatly increased.
【図１】一実施例によるレチクルカセットを示すもの
で、（ａ）は上蓋、（ｂ）は下皿をそれぞれ示す斜視図
である。FIGS. 1A and 1B are perspective views showing a reticle cassette according to an embodiment, wherein FIG. 1A is an upper cover and FIG. 1B is a lower plate.
【図２】図１のレチクルカセットを閉じた状態で示す断
面図である。FIG. 2 is a sectional view showing the reticle cassette of FIG. 1 in a closed state.
【図３】図１の押圧部材を拡大して示す部分拡大断面図
である。FIG. 3 is a partially enlarged cross-sectional view showing the pressing member of FIG. 1 in an enlarged manner.
【図４】図１のレチクルカセットの一部分を開いた状態
を示す部分断面図である。4 is a partial cross-sectional view showing a state where a part of the reticle cassette of FIG. 1 is opened.
【図５】第１変形例による押圧部材を拡大して示す部分
拡大断面図である。FIG. 5 is a partially enlarged cross-sectional view showing a pressing member according to a first modified example in an enlarged manner.
【図６】第２変形例による押圧部材を拡大して示す部分
拡大断面図である。FIG. 6 is a partially enlarged cross-sectional view showing a pressing member according to a second modified example in an enlarged manner.
【図７】従来例によるレチクルカセットの一部分を閉じ
た状態で示す部分断面図である。FIG. 7 is a partial cross-sectional view showing a state where a part of a conventional reticle cassette is closed.
【図８】図７のレチクルカセットを開いた状態で示す部
分断面図である。8 is a partial cross-sectional view showing the reticle cassette of FIG. 7 in an opened state.
Ｒ1 レチクル １ レチクルカセット １０ 上蓋 １１ 天板 １２ 側板 １３ 掛け金部材 １３ａ，１４ａ，３４ａ，４４ａ 本体 １４，３４，４４ 押圧部材 １４ｂ 当接片 １５ マーク １６ 案内片 １７ 位置決めピン ２０ 下皿 ２１ 底板 ２２ フランジ ２２ａ 切欠 ２３ 支持部材 ２４ 支柱 ３４ｂ 溝 ４４ｃ 薄肉部R1 reticle 1 reticle cassette 10 top lid 11 top plate 12 side plate 13 latch member 13a, 14a, 34a, 44a main body 14, 34, 44 pressing member 14b contact piece 15 mark 16 guide piece 17 positioning pin 20 lower plate 21 bottom plate 22 flange 22a Notch 23 Support member 24 Post 34b Groove 44c Thin portion
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11200294AJP3193567B2 (en) | 1994-04-27 | 1994-04-27 | Substrate storage container |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11200294AJP3193567B2 (en) | 1994-04-27 | 1994-04-27 | Substrate storage container |
| Publication Number | Publication Date |
|---|---|
| JPH07297272A JPH07297272A (en) | 1995-11-10 |
| JP3193567B2true JP3193567B2 (en) | 2001-07-30 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11200294AExpired - Fee RelatedJP3193567B2 (en) | 1994-04-27 | 1994-04-27 | Substrate storage container |
| Country | Link |
|---|---|
| JP (1) | JP3193567B2 (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101547077B1 (en) | 2003-04-09 | 2015-08-25 | 가부시키가이샤 니콘 | Exposure method and apparatus, and device manufacturing method |
| TWI573175B (en) | 2003-10-28 | 2017-03-01 | 尼康股份有限公司 | Optical illumination device, exposure device, exposure method and device manufacturing method |
| TWI385414B (en) | 2003-11-20 | 2013-02-11 | 尼康股份有限公司 | Optical illuminating apparatus, illuminating method, exposure apparatus, exposure method and device fabricating method |
| TWI389174B (en) | 2004-02-06 | 2013-03-11 | 尼康股份有限公司 | Polarization changing device, optical illumination apparatus, light-exposure apparatus and light-exposure method |
| JP4710308B2 (en) | 2004-10-29 | 2011-06-29 | 株式会社ニコン | Reticle conveying apparatus, exposure apparatus, and reticle conveying method |
| JP4581681B2 (en)* | 2004-12-27 | 2010-11-17 | 株式会社ニコン | Reticle protection apparatus and exposure apparatus |
| US7607543B2 (en) | 2005-02-27 | 2009-10-27 | Entegris, Inc. | Reticle pod with isolation system |
| KR20180128526A (en) | 2005-05-12 | 2018-12-03 | 가부시키가이샤 니콘 | Projection optical system, exposure apparatus and device manufacturing method |
| JP4644035B2 (en)* | 2005-05-25 | 2011-03-02 | ミライアル株式会社 | Single wafer storage container |
| JP4692238B2 (en)* | 2005-11-15 | 2011-06-01 | 株式会社ニコン | Mask storage container opening device, exposure device |
| JP5267029B2 (en) | 2007-10-12 | 2013-08-21 | 株式会社ニコン | Illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US8379187B2 (en) | 2007-10-24 | 2013-02-19 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US9116346B2 (en) | 2007-11-06 | 2015-08-25 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
| JP2009229639A (en)* | 2008-03-21 | 2009-10-08 | E-Sun Precision Industrial Co Ltd | Photomask case |
| JP5268142B2 (en)* | 2008-09-27 | 2013-08-21 | Ｈｏｙａ株式会社 | Mask blank storage case, mask blank storage method, and mask blank storage body |
| JP5393298B2 (en)* | 2009-07-06 | 2014-01-22 | 大日商事株式会社 | Mask case |
| JP2011108698A (en)* | 2009-11-13 | 2011-06-02 | Toyota Motor Corp | Wafer carrier |
| CN109116677A (en)* | 2018-09-07 | 2019-01-01 | 无锡中微掩模电子有限公司 | A kind of general mask box |
| US11442370B2 (en) | 2019-10-16 | 2022-09-13 | Gudeng Precision Industrial Co., Ltd | Reticle retaining system |
| US20210356858A1 (en)* | 2020-05-14 | 2021-11-18 | Gudeng Precision Industrial Co., Ltd. | Container for accommodating substrate with effective hermetic sealing |
| JP7648406B2 (en)* | 2021-03-03 | 2025-03-18 | 株式会社ディスコ | cassette |
| CN118076921A (en)* | 2021-09-09 | 2024-05-24 | 恩特格里斯公司 | Reticle pod with latch having beveled surface |
| US20250053100A1 (en)* | 2023-08-09 | 2025-02-13 | Gudeng Precision Industrial Co,. Ltd. | Reticle pod provided with reticle support for absorbing downward pressure |
| Publication number | Publication date |
|---|---|
| JPH07297272A (en) | 1995-11-10 |
| Publication | Publication Date | Title |
|---|---|---|
| JP3193567B2 (en) | Substrate storage container | |
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