【発明の詳細な説明】 ［発明の目的］ （産業上の利用分野） この発明は、一般測定機や精密産業機械器具特に測量
機器等の鉛直方向の傾斜、即ち水平度または水平面から
の微少な傾きを補正するするときに好適な静電容量式傾
斜センサに関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial application field) The present invention relates to a vertical inclination of a general measuring instrument or a precision industrial instrument, especially a surveying instrument, that is, a horizontal inclination or a slight inclination from a horizontal plane. The present invention relates to a capacitance-type inclination sensor suitable for correcting inclination.
（従来の技術） 一般測定機や精密産業機械器具特に測量機器等の鉛直
方向の傾斜、即ち水平度または水平面からの微少な傾き
を検出する傾斜センサとしては振子式及び液体式等が従
来利用されてきた。そして、振子式傾斜センサは機構が
複雑であり精密な加工と念入りな組立調整を要し、その
上、小型、安価に製作できないという問題点があった。
また、液体式傾斜センサとしては、気泡管式水準器、静
電容量型水準器が広く実用されている。(Prior Art) Pendulum type and liquid type are conventionally used as tilt sensors for detecting vertical tilt, that is, horizontality or minute tilt from horizontal plane, of general measuring instruments and precision industrial equipment, especially surveying instruments. Have been. In addition, the pendulum type tilt sensor has a complicated mechanism, requires precise processing and careful assembly adjustment, and has a problem that it cannot be manufactured small and inexpensively.
Further, as a liquid type inclination sensor, a bubble tube type level and a capacitance type level are widely used.
気泡管式水準器の一般的構成は容器内に２種類の流体
即ち第１の流体である液体と第２の流体である気体を封
入したものであつて、内壁面の上部が半径Ｒの円弧状を
成すガラス容器に、第２の流体である気体即ち気泡が残
るように第１の流体としてアルコールとテーテルの混合
液を封入して構成したものである。また静電容量型水準
器は容器内に誘電性流体を封入し、容器の傾きによつて
誘電性流体の動きを容器内に適宜設けた複数の電極の静
電容量の変化として取り出すよう構成したものである。A general configuration of a bubble tube type level is one in which two kinds of fluids, that is, a liquid which is a first fluid and a gas which is a second fluid, are sealed in a container, and an upper portion of an inner wall surface has a circle having a radius R. A glass container having an arc shape is formed by enclosing a mixed liquid of alcohol and tetral as a first fluid so that a gas, that is, a bubble as a second fluid remains. In addition, the capacitance level is configured such that a dielectric fluid is sealed in a container, and the movement of the dielectric fluid is taken out as a change in the capacitance of a plurality of electrodes appropriately provided in the container due to the inclination of the container. Things.
このような液体式傾斜センサにおいては、傾斜に伴う
液体中の気泡の動きや液面が常に水平であることを利用
しているものであるから、外気温の変化に対して気泡の
動きが不安定になったり、対流現像によって、液面が不
安定になったり、また外部衝撃によって液面が動揺する
ため傾斜センサによる検出が不安定になるということが
あった。In such a liquid-type inclination sensor, the movement of bubbles in the liquid due to the inclination and the fact that the liquid surface is always horizontal are utilized, so that the movement of the bubbles does not change with changes in the outside air temperature. In some cases, the liquid level becomes unstable due to convection development, or the liquid level fluctuates due to an external impact, so that the detection by the tilt sensor becomes unstable.
（発明が解決しようとする問題点） 容器の周囲温度が変化すると現実には容器および容器
内部に不均一な温度分布が生じるため、力学的なアンバ
ランスが発生し液体が動揺し静電容量の変化等により静
電容量式傾斜センサの出力が不安定になるという現象が
生ずる。これは前述したように容器の周囲温度が変化し
た場合に容器とその内部の温度が不均一になり易く、温
度勾配が生ずるため液体の移動の円滑性が失われいつま
でも揺動状態にあり安定しないためと推定される。その
ため検出値がかなりの時間不安定になり、検出誤差を生
じ迅速な測定が困難であつた。本発明のように電気的に
読取りをする方式を採用した静電容量式傾斜センサにお
いては、電気回路に温度補償回路を組込んで測定値の誤
差を少なくしているが、前記した熱による力学的な擾乱
に関してはなんらの効果がなかつた。［発明の構成］ （問題を解決するための手段、作用） この発明は、上記の欠点を解決するために静電容量式
傾斜センサの周囲温度が変化してもその温度に影響され
ずに測定作業が高い精度で、しかも迅速に行なえる静電
式傾斜センサを提供するものであり、容器およびその内
部における温度分布を一様にして温度勾配が生じない構
成としている。(Problems to be Solved by the Invention) When the ambient temperature of the container changes, a non-uniform temperature distribution actually occurs in the container and the inside of the container. A phenomenon occurs in which the output of the capacitance type inclination sensor becomes unstable due to a change or the like. This is because, as described above, when the ambient temperature of the container changes, the temperature of the container and the inside of the container tend to be uneven, and a temperature gradient is generated, so that the smoothness of the movement of the liquid is lost, and the liquid is in a rocking state forever and is not stable It is estimated to be. As a result, the detection value becomes unstable for a considerable period of time, causing a detection error and making rapid measurement difficult. In the capacitance type inclination sensor adopting the method of electrically reading as in the present invention, the error of the measured value is reduced by incorporating a temperature compensation circuit into the electric circuit. There was no effect on dynamic disturbance. [Constitution of the Invention] (Means for Solving the Problem, Function) In order to solve the above-mentioned drawbacks, the present invention measures even if the ambient temperature of the capacitance type inclination sensor changes, without being affected by the temperature. An object of the present invention is to provide an electrostatic inclination sensor capable of performing operations with high accuracy and at a high speed, and has a configuration in which a temperature gradient is not generated by making the temperature distribution in the container and the inside thereof uniform.
すなわち、容器内に対を成す第一電極と第二電極と共
通電極を交互に配置することによって、容器内の誘電性
流体に対して、第一電極と第二電極および共通電極を構
成する各電極板が熱拡散板としての作用を果たすように
し、また、誘電性流体の急撃な移動に対するダンパとし
て作用し流体の動揺を減少させるような構成となってい
る。That is, by alternately arranging a pair of the first electrode, the second electrode, and the common electrode in the container, for the dielectric fluid in the container, each of the first electrode, the second electrode, and the common electrode The electrode plate functions as a heat diffusion plate, and also functions as a damper against a sudden movement of the dielectric fluid to reduce the fluctuation of the fluid.
（実施例） 以下図面を参照してこの発明の実施例について説明す
る。Embodiment An embodiment of the present invention will be described below with reference to the drawings.
第１図において第一電極１、第二電極２及び共通電極
３はそれぞれ真鍮またはステンレス等の金属電極板1a、
1b、1c……、2a、2b、2c……、3a、3b、3c……からな
り、互いに絶縁された状態で第２図に示すようにガラス
またはプラスチック製容器４内には配置されており容器
４内にはその容積の1/2だけシリコン油等の誘電性流体
５が封入密閉されている。図示していないが各電極から
は電極端子が容器の外部に導出されており、第４図また
は第５図に示す処理回路６に接続されている。このよう
に構成された容器４が傾斜することにより、容器４内の
誘電性流体５により第一電極１と共通電極３間の静電容
量C1と第二電極２と共通電極３間の静電容量C2は変化し
て第３図のグラフに示す傾斜角と検出静電容量の関係と
なる。In FIG. 1, a first electrode 1, a second electrode 2 and a common electrode 3 are metal electrode plates 1a of brass or stainless steel, respectively.
, 2a, 2b, 2c,..., 3a, 3b, 3c,... Are arranged in a glass or plastic container 4 as shown in FIG. A dielectric fluid 5 such as silicon oil is sealed and sealed in the container 4 by half of its volume. Although not shown, an electrode terminal is led out of the container from each electrode, and is connected to the processing circuit 6 shown in FIG. 4 or FIG. When the container 4 thus configured is inclined, the dielectric fluid 5 in the container 4 causes the capacitance C1 between the first electrode 1 and the common electrode 3 and the capacitance between the second electrode 2 and the common electrode 3 to increase. The capacitance C2 changes to have a relationship between the tilt angle and the detected capacitance shown in the graph of FIG.
第４図は得られた第一電極１と共通電極３間の静電容
量C1と、第二電極２と共通電極３間の静電容量C2をパル
ス幅に変換する処理回路６で静電容量C1及び静電容量C2
をそれぞれ発振器７でトリガされた単安定マルチバイブ
レータ８に入力しパルス幅に変換し、平滑回路９によっ
て直流電圧に変換し差動増幅器10によって電圧変変化量
を求め電圧−角度変換部11で角度に対応した信号に変換
する。FIG. 4 shows a processing circuit 6 for converting the obtained capacitance C1 between the first electrode 1 and the common electrode 3 and the capacitance C2 between the second electrode 2 and the common electrode 3 into a pulse width. C1 and capacitance C2
Is input to a monostable multivibrator 8 triggered by an oscillator 7 and converted into a pulse width, converted into a DC voltage by a smoothing circuit 9, a voltage variation is obtained by a differential amplifier 10, and an angle is obtained by a voltage-angle converter 11. Is converted to a signal corresponding to.
第５図は第一電極１と共通電極３間の静電容量C1と、
第二電極２と共通電極３間の静電容量C2を周波数に変換
する処理回路に関するもので、静電容量C1及び静電容量
C2をそれぞれ発振器12に入力し、その出力をカウンタ13
で計数し、ついで周波数比較部14で比較した後、周波数
−角度変換部15で角度に対応した信号に変換する。この
ように構成された静電容量式傾斜センサを野外など温度
変化のある環境のもとで使用した場合にその影響を受け
て静電容量式傾斜センサの周囲温度が急激に変化したと
き、容器４内に設けられた第一電極１、第二電極２およ
び共通電極３が容器４に外部から伝導される熱を誘電性
流体５全体に逸早く伝導して誘電性流体５全体のの温度
を速く均一にして周囲温度に順応し、容器４内部の温度
も均一にする。これによつて容器４内部に温度勾配が生
ずることがなくなるので、その揺動状態は短時間で終息
され対流現象がなくなり安定した状態となる。FIG. 5 shows the capacitance C1 between the first electrode 1 and the common electrode 3,
It relates to a processing circuit for converting the capacitance C2 between the second electrode 2 and the common electrode 3 into a frequency, and includes a capacitance C1 and a capacitance
C2 is input to the oscillator 12 and the output is
After that, the signals are compared by the frequency comparing unit 14, and then converted into signals corresponding to angles by the frequency-angle converting unit 15. When the ambient temperature of the capacitance-type inclination sensor suddenly changes due to the influence of using the capacitance-type inclination sensor configured as described above in an environment where the temperature changes, such as outdoors, the container The first electrode 1, the second electrode 2 and the common electrode 3 provided in the inside 4 rapidly conduct heat conducted from the outside to the container 4 to the entire dielectric fluid 5, thereby increasing the temperature of the entire dielectric fluid 5. It is made uniform to adapt to the ambient temperature, and the temperature inside the container 4 is also made uniform. As a result, no temperature gradient is generated inside the container 4, so that the oscillating state is terminated in a short time, and the convection phenomenon is eliminated and the state becomes stable.
［発明の効果］ 以上説明したように、この発明の静電容量式傾斜セン
サは容器の周囲温度が変化した場合でも容器内に設けら
れた、静電容量を検出するための電極自身が熱の伝導 を良好にして、熱的応答速度を改善しているので容器内
部の誘電性流体の温度分布を迅速に均一化することが可
能であるから、容器内部の温度の不均一によつて生ずる
力学的アンバランスによる誘電性流体の動揺によつて、
検出値がかなりの時間不安定になったり誤差を生ずるこ
とはない。また電極自身が誘電性流体の動揺に対してダ
ンパの働きをしているため外部からの振動に対して従来
の傾斜センサより影響を受けることが少ない。[Effects of the Invention] As described above, the capacitance type inclination sensor of the present invention has a structure in which even if the ambient temperature of the container changes, the electrode itself for detecting the capacitance provided in the container has heat. Since the conductivity is improved and the thermal response speed is improved, the temperature distribution of the dielectric fluid inside the container can be quickly made uniform, so the dynamics caused by the non-uniform temperature inside the container. Of the dielectric fluid due to dynamic imbalance,
The detected values do not become unstable or cause errors for a considerable time. Further, since the electrode itself functions as a damper against the fluctuation of the dielectric fluid, the electrode is less affected by external vibration than the conventional tilt sensor.
したがつて、従来の電気回路に温度補償回路を設ける
手段でも解決することのできなかつた熱力学的な擾乱に
対してもセンサの安定性を確保できる優れた効果を有す
るものである。Therefore, the present invention has an excellent effect that the stability of the sensor can be ensured against thermodynamic disturbance which cannot be solved by means of providing a temperature compensation circuit in a conventional electric circuit.
第１図は本発明の一実施例の静電容量式傾斜センサの各
電極の分解斜視面、第２図は上記実施例の静電容量式傾
斜センサの各電極の配置構成を示す斜視図、第３図は傾
斜角と検出静電容量の関係を示すグラフ図、第４図、第
５図は検出信号の処理回路を示すブロック図である。 １……第一電極、２……第二電極、３……共通電極、1
a、2a、3a……金属電極板,4……容器、５……誘電性流
体、６……処理回路、C1……第一電極と共通電極間の静
電容量、C2……第二電極と共通電極間の静電容量FIG. 1 is an exploded perspective view of each electrode of a capacitance type inclination sensor according to one embodiment of the present invention, FIG. 2 is a perspective view showing an arrangement configuration of each electrode of the capacitance type inclination sensor of the above embodiment, FIG. 3 is a graph showing the relationship between the tilt angle and the detected capacitance, and FIGS. 4 and 5 are block diagrams showing a detection signal processing circuit. 1 ... first electrode, 2 ... second electrode, 3 ... common electrode, 1
a, 2a, 3a: metal electrode plate, 4: container, 5: dielectric fluid, 6: processing circuit, C1: capacitance between the first electrode and the common electrode, C2: second electrode And the capacitance between the common electrode
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62323097AJP2587844B2 (en) | 1987-12-21 | 1987-12-21 | Capacitive tilt sensor |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62323097AJP2587844B2 (en) | 1987-12-21 | 1987-12-21 | Capacitive tilt sensor |
| Publication Number | Publication Date |
|---|---|
| JPH01163607A JPH01163607A (en) | 1989-06-27 |
| JP2587844B2true JP2587844B2 (en) | 1997-03-05 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62323097AExpired - Fee RelatedJP2587844B2 (en) | 1987-12-21 | 1987-12-21 | Capacitive tilt sensor |
| Country | Link |
|---|---|
| JP (1) | JP2587844B2 (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6927583B2 (en)* | 2001-05-17 | 2005-08-09 | Siemens Vdo Automotive Inc. | Fuel sensor |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58151505A (en)* | 1982-03-05 | 1983-09-08 | Hitachi Constr Mach Co Ltd | Electric power source device of angle gauge |
| JPS60180412A (en)* | 1984-02-28 | 1985-09-14 | 昭和電線電纜株式会社 | Cablt penetrating portion |
| Publication number | Publication date |
|---|---|
| JPH01163607A (en) | 1989-06-27 |
| Publication | Publication Date | Title |
|---|---|---|
| KR950014819B1 (en) | Electronic inclinometer | |
| US4422243A (en) | Dual axis capacitive inclination sensor | |
| US4432238A (en) | Capacitive pressure transducer | |
| US4641434A (en) | Inclination measuring device | |
| CN102042823B (en) | A tilt angle measuring instrument and its measuring method | |
| US3442023A (en) | Vertical sensor | |
| US5930907A (en) | Uniaxial horizontal sensor | |
| JPS61126414A (en) | Tilt angle measuring device | |
| JPWO2014163076A1 (en) | Capacitive sensor and method for correcting nonlinear output | |
| US4377912A (en) | Apparatus for sensing and/or measuring changes in inclinations | |
| JPH0476408B2 (en) | ||
| JPS6379016A (en) | Liquid level measuring apparatus | |
| GB2159628A (en) | Capacitive inclination and levelness-measuring instrument | |
| JP2587844B2 (en) | Capacitive tilt sensor | |
| GB2204136A (en) | A capacitative inclination sensor | |
| JP2607482B2 (en) | Tilt measuring instrument | |
| CN1005169B (en) | capacitive gravity sensor | |
| JPS5935122A (en) | Pressure sensor for gas | |
| US6631641B1 (en) | Device and method for determining frequency and amplitude of an oscillating structure, especially for measuring acceleration or rotational rates | |
| JP3569772B2 (en) | Signal processing circuit for capacitive transducer | |
| JPH0526754A (en) | Sensor utilizing change in electrostatic capacitance | |
| JP2705257B2 (en) | Liquid level detector | |
| SU1561047A1 (en) | Capacitive accelerometer | |
| UA124786C2 (en) | CAPACITY HYDROSTATIC INCLINOMETER | |
| JP2001183217A (en) | Electrode of capacitance type liquid level meter |
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees | Free format text:JAPANESE INTERMEDIATE CODE: R250 | |
| R250 | Receipt of annual fees | Free format text:JAPANESE INTERMEDIATE CODE: R250 | |
| R250 | Receipt of annual fees | Free format text:JAPANESE INTERMEDIATE CODE: R250 | |
| LAPS | Cancellation because of no payment of annual fees |