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JP2011235202A - Atomizing device - Google Patents

Atomizing device
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JP2011235202A
JP2011235202AJP2010106035AJP2010106035AJP2011235202AJP 2011235202 AJP2011235202 AJP 2011235202AJP 2010106035 AJP2010106035 AJP 2010106035AJP 2010106035 AJP2010106035 AJP 2010106035AJP 2011235202 AJP2011235202 AJP 2011235202A
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nozzle plate
vibrator
frame
nozzle
frame body
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JP2011235202A5 (en
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Kiyoshizu Kinuta
精鎮 絹田
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Optnics Precision Co Ltd
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Optnics Precision Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide an atomizing device in which fine particles are monodispersed and uniformly sprayed.SOLUTION: The atomizing device includes a vibrator 15, a frame 16 vibrated by the vibrator 15, and a nozzle plate 18 provided at the frame 16 and having many nozzle holes 17 through which liquid passes. The frame 16 includes an annular flange 19 fixed to the vibrator 15 and a protrusion 21 protruding from the flange 19 and having a central opening 20 in which the nozzle plate 18 is provided, wherein the protrusion 21 is curved. Because the frame 16 is a curved structure having strength, the frame 16 is vibrated by elastic vibration generated by the vibrator 15 and the entire nozzle plate 18 is vertically vibrated integrally with the frame 16 so that fine particles are monodispersed and uniformly sprayed.

Description

Translated fromJapanese

本発明は、圧電振動子等の振動子によりノズル板を振動させて液体を霧化する霧化装置に関する。  The present invention relates to an atomizing apparatus that atomizes a liquid by vibrating a nozzle plate by a vibrator such as a piezoelectric vibrator.

従来、喘息患者が薬を吸引するためのネブライザーや、香料を散布する香料発生器等に使用される霧化装置は、多数の超微細なノズル孔を有するノズル板を圧電振動子で振動させることにより薬や香料の液体を霧化させるものであり、特許文献1や特許文献2で提唱されている。    Conventionally, nebulizers for asthma patients to suck drugs, and atomizers used for fragrance generators that disperse fragrances, etc., vibrate a nozzle plate having a large number of ultrafine nozzle holes with a piezoelectric vibrator. Is used to atomize liquids of medicines and fragrances, and is proposed inPatent Document 1 andPatent Document 2.

特開平4−371273号公報JP-A-4-371273特開平6−7720号公報JP-A-6-7720

しかしながら、上記の特許文献1及び特許文献2に記載のような霧化装置において、図9Aに示すようにノズル板1Aが平面形状である場合、圧電振動子2によって発生させた弾性振動によりノズル板1Aが一点鎖線で示すように図面の上下方向に波を打って振動するため、ノズル孔3から振幅の大きいA点では微粒子が多量に噴出されるが、振幅の小さいB点では微粒子が少量しか噴出されず、振幅されないC点では微粒子が噴出されない不具合があり、このため微粒子が単分散されず均一に噴霧されない課題があった。    However, in the atomization apparatus as described inPatent Document 1 andPatent Document 2 described above, when thenozzle plate 1A has a planar shape as shown in FIG. 9A, the nozzle plate is caused by elastic vibration generated by thepiezoelectric vibrator 2. Since 1A is oscillated by swelling in the vertical direction of the drawing as indicated by the alternate long and short dash line, a large amount of fine particles are ejected from thenozzle hole 3 at the point A having a large amplitude, but only a small amount of fine particles are ejected from the point B having a small amplitude. There is a problem that the fine particles are not ejected at the point C which is not ejected and is not oscillated. For this reason, there is a problem that the fine particles are not monodispersed and are not sprayed uniformly.

また、図9Bに示すように、ノズル板1Bが半球面形状である場合、圧電振動子2によって発生させた弾性振動によりノズル板1Bが図面の上下方向に波を打って振動する際、ノズル板1Bの中央部分D点のノズル孔3からは微粒子が多量に噴出されるが、ノズル板1Bの周辺部分E点からは微粒子が少量しか噴出されない不具合があり、このため、上述と同様、微粒子が単分散されず均一に噴霧されない課題があった。    As shown in FIG. 9B, when thenozzle plate 1B has a hemispherical shape, when thenozzle plate 1B vibrates in a vertical direction in the drawing due to elastic vibration generated by thepiezoelectric vibrator 2, the nozzle plate Although a large amount of fine particles are ejected from thenozzle hole 3 at the central portion D of 1B, there is a problem that only a small amount of fine particles are ejected from the peripheral portion E of thenozzle plate 1B. There was a problem that it was not monodispersed and was not sprayed uniformly.

本発明は、上記課題に着目し、微粒子が単分散されて均一に噴霧される霧化装置を提供することを目的とする。  An object of the present invention is to provide an atomization device in which fine particles are monodispersed and sprayed uniformly, paying attention to the above problems.

請求項1に記載の霧化装置では、振動子と、この振動子により振動される枠体と、この枠体に設けられ液体が通過する多数のノズル孔を有するノズル板とを備え、前記枠体は前記振動子と固定される環状の鍔部と、この鍔部から突き出し中央開口部に前記ノズル板が設けられる突出部とを有し、この突出部を湾曲させたものである。このように、枠体を湾曲した強度のある構造体としたため、枠体が振動子によって発生させた弾性振動により上下方向に振動するとともにこの枠体と一体になってノズル板全体が上下方向に振動するようになり、図9Aに示すようにノズル板が波を打つのを解決したものである。  The atomization device according toclaim 1, comprising: a vibrator; a frame body that is vibrated by the vibrator; and a nozzle plate that is provided in the frame body and includes a number of nozzle holes through which liquid passes. The body has an annular flange fixed to the vibrator, and a protrusion protruding from the flange and provided with the nozzle plate at a central opening, and the protrusion is curved. As described above, since the frame body has a curved and strong structure, the frame body vibrates in the vertical direction due to the elastic vibration generated by the vibrator, and the entire nozzle plate is integrated with the frame body in the vertical direction. As shown in FIG. 9A, the nozzle plate hits a wave.

請求項2に記載の霧化装置では、前記突出部を最も強度のある半球形の形状にしたものである。In the atomization apparatus according toclaim 2, the projecting portion has a hemispherical shape having the strongest strength.

請求項3記載の霧化装置では、ノズル孔を液体の入口側から出口側へ向かってこの出口側の途中まで先細形状にするとともに、この先細端部から出口端までストレート形状にしたものである。このようにすることにより、ノズル孔の入口側へ液体が円滑に供給されるとともに出口端からは微粒子が粒径制御され、均一に且つ垂直方向へ噴霧されるようにしたものである。In the atomizing apparatus according toclaim 3, the nozzle hole is tapered from the liquid inlet side to the outlet side to the middle of the outlet side, and straight from the tapered end to the outlet end. . In this way, the liquid is smoothly supplied to the inlet side of the nozzle hole, and the fine particles are controlled from the outlet end to be sprayed uniformly and vertically.

以上説明したように、本発明に係る請求項1に記載の霧化装置によれば、突出部が湾曲した強度のある枠体がノズル板と一体になって振動するため、ノズル板は従来のように波を打って振動することはなくノズル板全体が均一に上下方向に振動するため、ノズル板の全てのノズル孔から微粒子を単分散させて均一に噴霧させることができるという優れた効果を得ることができる。  As described above, according to the atomizing device of the first aspect of the present invention, the strong frame body with the curved projecting portion vibrates integrally with the nozzle plate. In this way, the entire nozzle plate vibrates in the vertical direction without causing waves to vibrate, so that it is possible to uniformly disperse fine particles from all the nozzle holes of the nozzle plate and to spray uniformly. Obtainable.

請求項2に記載の霧化装置によれば、突出部を半球形の形状にしたので、枠体は最も強度のある構造となって、枠体の全体が均一に振動するため、ノズル孔から微粒子を単分散させて均一に噴霧させるという優れた効果を確実に得ることができる。According to the atomizing device of the second aspect, since the projecting portion has a hemispherical shape, the frame body has the strongest structure, and the entire frame body vibrates uniformly. The excellent effect that the fine particles are monodispersed and sprayed uniformly can be surely obtained.

請求項3に記載の霧化装置によれば、ノズル孔を液体の入口側から出口側へ向かってこの出口側の途中まで先細形状にするとともに、この先細端部から出口端までストレート形状にしたため、ノズル孔の入口側へ液体が円滑に供給されるとともに出口端からは微粒子が粒径制御され、単分散されて均一に且つ垂直方向へ噴霧させるという優れた効果を得ることができる。According to the atomizing device of the third aspect, the nozzle hole is tapered from the liquid inlet side to the outlet side to the middle of the outlet side and straight from the tapered end to the outlet end. The liquid can be smoothly supplied to the inlet side of the nozzle hole, and fine particles can be controlled from the outlet end to be monodispersed and sprayed uniformly and vertically.

本発明の実施形態を示す霧化装置を使用したネブライザーの断面図である。It is sectional drawing of the nebulizer which uses the atomization apparatus which shows embodiment of this invention.本発明の実施形態を示す霧化装置を使用したネブライザーの平面図である。It is a top view of a nebulizer using an atomization device showing an embodiment of the present invention.本発明の実施形態を示す枠体の拡大断面図である。It is an expanded sectional view of the frame which shows the embodiment of the present invention.本発明の他の第1実施形態を示す枠体の断面図である。It is sectional drawing of the frame which shows other 1st Embodiment of this invention.本発明の他の第2実施形態を示す枠体の断面図である。It is sectional drawing of the frame which shows other 2nd Embodiment of this invention.本発明の実施形態を示すノズル板の断面図である。It is sectional drawing of the nozzle plate which shows embodiment of this invention.本発明の実施形態を示すノズル板の一部拡大断面図である。It is a partial expanded sectional view of the nozzle plate which shows embodiment of this invention.本発明の他の第1実施形態を示すノズル板の拡大断面図である。It is an expanded sectional view of the nozzle plate which shows other 1st Embodiment of this invention.本発明の他の第2実施形態を示すノズル板の拡大断面図である。It is an expanded sectional view of the nozzle plate which shows other 2nd Embodiment of this invention.本発明の他の第3実施形態を示すノズル板の拡大断面図である。It is an expanded sectional view of the nozzle plate which shows other 3rd Embodiment of this invention.従来の霧化装置の断面図である。It is sectional drawing of the conventional atomization apparatus.従来の他の霧化装置の断面図である。It is sectional drawing of the other conventional atomization apparatus.

以下、本発明の実施形態を図1〜図8に基づいて説明するが、本発明は以下の実施形態について何ら限定されるものではない。    Hereinafter, although embodiment of this invention is described based on FIGS. 1-8, this invention is not limited at all about the following embodiment.

図1及び図2において、10はネブライザーであり、本体11には薬の液体を本体11内に注入する注入口12と本発明の霧化装置13が設けられている。    1 and 2,reference numeral 10 denotes a nebulizer, and amain body 11 is provided with aninjection port 12 for injecting a liquid of medicine into themain body 11 and an atomizingdevice 13 of the present invention.

この霧化装置13は、リード線14より電圧が印加され図面の左右方向へ振動する圧電振動子タイプの振動子15と、この振動子15により図面の上下方向に振動される枠体16と、この枠体16に設けられ液体が通過する多数のノズル孔17を有するノズル板18とを備えている。  The atomizingdevice 13 includes a piezoelectricvibrator type vibrator 15 that is applied with a voltage from alead wire 14 and vibrates in the horizontal direction of the drawing, aframe body 16 that is vibrated in the vertical direction of the drawing by thevibrator 15, And anozzle plate 18 having a large number ofnozzle holes 17 provided in theframe 16 and through which liquid passes.

枠体16は振動子15と固定される環状の鍔部19と、この鍔部から突き出し中央開口部20にノズル板18が設けられる突出部21とを有し、この突出部21を湾曲した半球形の形状にしている。このように枠体16は半球形の形状にしたことにより最も強度のある構造としている。  Theframe 16 has anannular flange 19 fixed to thevibrator 15 and aprotrusion 21 protruding from the flange and provided with anozzle plate 18 at thecentral opening 20, and theprotrusion 21 has a curved hemisphere. It has a shape. As described above, theframe body 16 has a hemispherical shape and has the strongest structure.

そして、中央開口部20にはこの開口部20を覆うようにノズル板18が、鍔部19には振動子15がそれぞれ接着剤により固着されている。Thenozzle plate 18 is fixed to thecentral opening 20 so as to cover theopening 20, and thevibrator 15 is fixed to theflange 19 by an adhesive.

枠体16は、図3に示すように、厚さTが50μm〜2mm、鍔部19の外径Aが15mm、鍔部19の内径Bが5mm、突出部21の高さHが1.8mmで、ニッケルやステンレスまたはこれらの合金から形成されている。中央開口部20の口径Cは2mmである。As shown in FIG. 3, theframe 16 has a thickness T of 50 μm to 2 mm, an outer diameter A of theflange portion 19 of 15 mm, an inner diameter B of theflange portion 19 of 5 mm, and a height H of theprotruding portion 21 of 1.8 mm. And formed of nickel, stainless steel or an alloy thereof. The diameter C of thecentral opening 20 is 2 mm.

上述した実施形態は、ネブライザーに使用する霧化装置の場合であるが、本発明の霧化装置を、例えば、香料を多量に発生する香料発生器や農薬を多量に噴霧させる噴霧器等に使用する場合は、図4に示すように複数個の枠体16Aを一体成形すれば極めて有用である。Although embodiment mentioned above is the case of the atomization apparatus used for a nebulizer, the atomization apparatus of this invention is used for the sprayer etc. which spray a lot of fragrance | flavor generators and agricultural chemicals which generate | occur | produce a fragrance | flavor in large quantities, for example. In this case, it is extremely useful if a plurality offrames 16A are integrally formed as shown in FIG.

即ち、鍔部19に固着された振動子15により複数個の枠体16Aが同時に図面の上下方向に振動されることにより、突出部21Aに設けられた複数個のノズル板18で同時に多量な超微細な粒子が噴霧させることができる。That is, the plurality offrames 16A are simultaneously vibrated in the vertical direction of the drawing by thevibrator 15 fixed to theflange portion 19, so that a plurality ofnozzle plates 18 provided on the projectingportion 21A can be Fine particles can be sprayed.

図5は枠体16の他の実施形態を示すもので、突出部21Bの一部22を湾曲させて、枠体16Bに強度を持たせ、この湾曲部22の振動によりノズル板18を図面の上下方向に振動させるようにしたものであるが、図3に示した枠体16の方が上述したように突出部21を半球形の形状にした方が最も強度があり、好ましい。FIG. 5 shows another embodiment of theframe body 16. Apart 22 of the projectingportion 21B is curved to give strength to theframe body 16B, and thenozzle plate 18 is moved by the vibration of thecurved portion 22 in the drawing. Theframe body 16 shown in FIG. 3 has the highest strength and is preferably formed in the hemispherical shape as described above.

図6はノズル板18の断面図、図7はノズル板18の一部拡大断面図であり、ノズル孔17を液体の入口23側から出口24側へ向かってこの出口24側の途中まで先細形状にするとともに、この先細端部25から出口24端までストレート部26にした形状にしている。6 is a cross-sectional view of thenozzle plate 18, and FIG. 7 is a partially enlarged cross-sectional view of thenozzle plate 18. Thenozzle hole 17 tapers from theliquid inlet 23 side toward theoutlet 24 side to the middle of theoutlet 24 side. In addition, thestraight portion 26 is formed from thetapered end portion 25 to theoutlet 24 end.

具体例として、ノズル板18の厚みtを30μm〜300μm、入口23の角度aを30°〜120°、ストレート部25は長さbを5μm〜50μm、口径cを0.5μm〜100μmとしている。As a specific example, the thickness t of thenozzle plate 18 is 30 μm to 300 μm, the angle a of theinlet 23 is 30 ° to 120 °, thestraight portion 25 has a length b of 5 μm to 50 μm, and a diameter c of 0.5 μm to 100 μm.

このような形状にすることにより、ノズル孔17の入口23側へ液体が円滑に供給されるとともに出口24端からは微粒子が粒径制御され、均一に且つ垂直方向へ噴霧されるようにしたものである。By adopting such a shape, the liquid is smoothly supplied to theinlet 23 side of thenozzle hole 17 and the particle diameter is controlled from the end of theoutlet 24 to be sprayed uniformly and vertically. It is.

図8A〜図8Cはノズル板18の他の実施形態を示したものである。図8Aに示すようにノズル孔17Aを入口23Aから出口24Aまでストレートに形成したり、図8Bに示すようにノズル孔17Bを入口23Bから出口24Bまで徐々に曲線的に細くしたり、図8Cに示すようにノズル孔17Cを入口23Cから出口24Cまで徐々に直線的に細くしたりしても良い。8A to 8C show another embodiment of thenozzle plate 18. As shown in FIG. 8A, thenozzle hole 17A is formed straight from theinlet 23A to theoutlet 24A, or thenozzle hole 17B is gradually narrowed from theinlet 23B to theoutlet 24B as shown in FIG. 8B. As shown, the nozzle hole 17C may be gradually narrowed linearly from theinlet 23C to theoutlet 24C.

但し、図8Aの場合は入口23A側へ液体が円滑に供給されない恐れがある。図8B及び図8Cの場合は出口24B及び24Cにストレート部26がないため垂直方向へ噴霧されない恐れがある。このため、ノズル孔17は図6に示す形状にした方が好ましい。However, in the case of FIG. 8A, the liquid may not be smoothly supplied to theinlet 23A side. In the case of FIG. 8B and FIG. 8C, since there is nostraight part 26 inoutlet 24B and 24C, there exists a possibility that it may not spray in a perpendicular direction. For this reason, it is preferable that thenozzle hole 17 has a shape shown in FIG.

(作用)
本実施形態は上記のように構成されており、以下その作用について説明する。図1において、振動子15がリード線14より電圧が印加されて図面の左右方向へ振動すると、発生した弾性振動により枠体16の突出部21が図面の上下方向に振動する。
(Function)
This embodiment is configured as described above, and the operation thereof will be described below. In FIG. 1, when thevibrator 15 is applied with a voltage from thelead wire 14 and vibrates in the horizontal direction of the drawing, the protrudingportion 21 of theframe 16 vibrates in the vertical direction of the drawing by the generated elastic vibration.

このとき、突出部21は強度のある湾曲した半球形の形状となっているため、図1において一点鎖線で示すように突出部21の全体が振動するので、ノズル板18が枠体16と一体になって一点鎖線で示すように上下方向に振動する。At this time, since the projectingportion 21 has a strong curved hemispherical shape, the entire projectingportion 21 vibrates as shown by a one-dot chain line in FIG. 1, so that thenozzle plate 18 is integrated with theframe body 16. As shown by the alternate long and short dash line, it vibrates up and down.

このように、ノズル板18全体が均一に上下方向に振動するため、図9Aに示した従来のように波を打って振動することはなく、ノズル板18の全てのノズル孔17から微粒子が単分散されて均一に、且つ多量に噴霧される。In this way, theentire nozzle plate 18 vibrates uniformly in the vertical direction, so that thenozzle plate 18 does not vibrate and vibrate unlike the conventional case shown in FIG. It is dispersed and sprayed uniformly and in large quantities.

しかも、ノズル孔17を液体の入口23側から出口24側へ向かってこの出口24側の途中まで先細形状にするとともに、この先細端部25から出口24端までストレート部26にした形状にすることにより、ノズル孔17の入口23側へ液体が円滑に供給されるとともに出口24端からは微粒子が粒径制御され、単分散されて均一に且つ垂直方向へ噴霧されることが確認できた。  In addition, thenozzle hole 17 is tapered from theliquid inlet 23 side toward theoutlet 24 side to the middle of theoutlet 24 side, and thestraight hole 26 is formed from thetapered end 25 to theoutlet 24 end. As a result, it was confirmed that the liquid was smoothly supplied to theinlet 23 side of thenozzle hole 17 and the particle size was controlled from the end of theoutlet 24 to be monodispersed and uniformly sprayed in the vertical direction.

13 霧化装置
15 振動子
16 枠体
17 ノズル孔
18 ノズル板
19 鍔部
20 開口部
21 突出部

DESCRIPTION OFSYMBOLS 13Atomizer 15Vibrator 16Frame 17Nozzle hole 18Nozzle plate 19Gutter part 20Opening part 21 Projection part

Claims (3)

Translated fromJapanese
振動子と、この振動子により振動される枠体と、この枠体に設けられ液体が通過する多数のノズル孔を有するノズル板とを備えた霧化装置において、前記枠体は前記振動子と固定される環状の鍔部と、この鍔部から突き出し中央開口部に前記ノズル板が設けられる突出部とを有し、この突出部を湾曲させていることを特徴とする霧化装置。In an atomization apparatus including a vibrator, a frame body that is vibrated by the vibrator, and a nozzle plate that is provided in the frame body and has a number of nozzle holes through which liquid passes, the frame body includes the vibrator and An atomizing device characterized by having an annular flange fixed and a protrusion protruding from the flange and provided with the nozzle plate at a central opening, and the protrusion is curved.前記突出部は、半球形の形状である請求項1記載の霧化装置。The atomization device according to claim 1, wherein the protrusion has a hemispherical shape. 前記ノズル孔は、液体の入口側から出口側へ向かってこの出口側の途中まで先細形状であるとともに、この先細端部から出口端までストレート形状である請求項1記載の霧化装置。
2. The atomization device according to claim 1, wherein the nozzle hole has a tapered shape from the liquid inlet side toward the outlet side to the middle of the outlet side, and has a straight shape from the tapered end portion to the outlet end.
JP2010106035A2010-05-012010-05-01Atomizing devicePendingJP2011235202A (en)

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JP2013141531A (en)*2012-01-112013-07-22Dainippon Printing Co LtdLiquid cartridge for spraying device, liquid cartridge package, spraying device and mesh-furnished container for spraying device
JP2014008468A (en)*2012-06-292014-01-20Dainippon Printing Co LtdLiquid cartridge for spraying device, mesh member for spraying device, spraying device, and container with mesh for spraying device
JP2014140524A (en)*2013-01-242014-08-07Tanaka Kikinzoku Kogyo KkMesh for nebulizer and method for manufacturing the same
JP2014159025A (en)*2013-02-192014-09-04Micro Base Technology CorpLiquid atomization module including geometric solid spray plate
JP2015096235A (en)*2015-01-282015-05-21田中貴金属工業株式会社 Mesh for sprayer and manufacturing method thereof
JP2015519952A (en)*2012-05-142015-07-16アイノビア,インコーポレイティド Laminar flow droplet generator apparatus and method of use
WO2017154937A1 (en)*2016-03-112017-09-14株式会社ニコンMist generating device, film forming device, mist generating method, film forming method, and device manufacturing method
CN110918357A (en)*2019-12-052020-03-27湖南嘉业达电子有限公司Frequency-adaptive microporous atomization element and preparation method thereof
CN116060621A (en)*2021-10-292023-05-05中国石油化工股份有限公司Processing method of wear-resistant atomizing nozzle and nozzle

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Cited By (14)

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JP2013141531A (en)*2012-01-112013-07-22Dainippon Printing Co LtdLiquid cartridge for spraying device, liquid cartridge package, spraying device and mesh-furnished container for spraying device
JP2015519952A (en)*2012-05-142015-07-16アイノビア,インコーポレイティド Laminar flow droplet generator apparatus and method of use
JP2014008468A (en)*2012-06-292014-01-20Dainippon Printing Co LtdLiquid cartridge for spraying device, mesh member for spraying device, spraying device, and container with mesh for spraying device
US9700685B2 (en)2013-01-242017-07-11Tanaka Kikinzoku Kogyo K.K.Nebulizer mesh and production method thereof
JP2014140524A (en)*2013-01-242014-08-07Tanaka Kikinzoku Kogyo KkMesh for nebulizer and method for manufacturing the same
US9889261B2 (en)2013-01-242018-02-13Tanaka Kikinzoku Kogyo K.K.Nebulizer mesh and production method thereof
JP2014159025A (en)*2013-02-192014-09-04Micro Base Technology CorpLiquid atomization module including geometric solid spray plate
JP2015096235A (en)*2015-01-282015-05-21田中貴金属工業株式会社 Mesh for sprayer and manufacturing method thereof
WO2017154937A1 (en)*2016-03-112017-09-14株式会社ニコンMist generating device, film forming device, mist generating method, film forming method, and device manufacturing method
CN108778527A (en)*2016-03-112018-11-09株式会社尼康Device for producing mist, film formation device, fog production method, film build method and manufacturing method
JPWO2017154937A1 (en)*2016-03-112019-01-10株式会社ニコン Mist generating apparatus, film forming apparatus, mist generating method, film forming method, and device manufacturing method
CN108778527B (en)*2016-03-112022-01-21株式会社尼康Mist generating device, film forming device, mist generating method, film forming method, and device manufacturing method
CN110918357A (en)*2019-12-052020-03-27湖南嘉业达电子有限公司Frequency-adaptive microporous atomization element and preparation method thereof
CN116060621A (en)*2021-10-292023-05-05中国石油化工股份有限公司Processing method of wear-resistant atomizing nozzle and nozzle

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