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JP1746406S - Susceptor unit - Google Patents

Susceptor unit

Info

Publication number
JP1746406S
JP1746406SJP2023000285FJP2023000285FJP1746406SJP 1746406 SJP1746406 SJP 1746406SJP 2023000285 FJP2023000285 FJP 2023000285FJP 2023000285 FJP2023000285 FJP 2023000285FJP 1746406 SJP1746406 SJP 1746406S
Authority
JP
Japan
Prior art keywords
susceptor unit
susceptor
unit
wafer
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023000285F
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Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filedfiledCritical
Priority to JP2023000285FpriorityCriticalpatent/JP1746406S/en
Application grantedgrantedCritical
Publication of JP1746406SpublicationCriticalpatent/JP1746406S/en
Priority to US29/896,274prioritypatent/USD1094323S1/en
Activelegal-statusCriticalCurrent
Anticipated expirationlegal-statusCritical

Links

Abstract

Translated fromJapanese

本物品は、半導体製造装置等においてウェハを保持するために用いるサセプタユニットである。This article is a susceptor unit used for holding a wafer in a semiconductor manufacturing apparatus or the like.

JP2023000285F2023-01-112023-01-11 Susceptor unitActiveJP1746406S (en)

Priority Applications (2)

Application NumberPriority DateFiling DateTitle
JP2023000285FJP1746406S (en)2023-01-112023-01-11 Susceptor unit
US29/896,274USD1094323S1 (en)2023-01-112023-06-30Susceptor unit

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
JP2023000285FJP1746406S (en)2023-01-112023-01-11 Susceptor unit

Publications (1)

Publication NumberPublication Date
JP1746406Strue JP1746406S (en)2023-06-15

Family

ID=86720906

Family Applications (1)

Application NumberTitlePriority DateFiling Date
JP2023000285FActiveJP1746406S (en)2023-01-112023-01-11 Susceptor unit

Country Status (2)

CountryLink
US (1)USD1094323S1 (en)
JP (1)JP1746406S (en)

Cited By (4)

* Cited by examiner, † Cited by third party
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USD1082731S1 (en)*2023-01-112025-07-08Nuflare Technology, Inc.Susceptor
USD1082729S1 (en)*2023-01-112025-07-08Nuflare Technology, Inc.Susceptor cover
USD1082728S1 (en)*2023-01-112025-07-08Nuflare Technology, Inc.Susceptor

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JP1646504S (en)*2018-12-062019-11-25
JP1646505S (en)*2018-12-072019-11-25
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TWD235071S (en)*2020-12-102024-12-01日商紐富來科技股份有限公司 (日本)Top plate
US20220361300A1 (en)*2021-05-102022-11-10The Boeing CompanyInduction-heating system including a susceptor for generating induction heating below a selected curie temperature
JP7488796B2 (en)*2021-06-102024-05-22日本碍子株式会社 Focus ring mounting stand
JP1711119S (en)*2021-10-222022-03-29 Susceptoring
JP1711120S (en)*2021-10-222022-03-29 Suceptor cover
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JP1741172S (en)*2022-10-202023-04-06 Susceptor cover
JP1741174S (en)*2022-10-202023-04-06 Susceptor
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD1082730S1 (en)*2023-01-112025-07-08Nuflare Technology, Inc.Cover base for susceptors
USD1082731S1 (en)*2023-01-112025-07-08Nuflare Technology, Inc.Susceptor
USD1082729S1 (en)*2023-01-112025-07-08Nuflare Technology, Inc.Susceptor cover
USD1082728S1 (en)*2023-01-112025-07-08Nuflare Technology, Inc.Susceptor

Also Published As

Publication numberPublication date
USD1094323S1 (en)2025-09-23

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