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JP1745874S - Susceptor cover - Google Patents

Susceptor cover

Info

Publication number
JP1745874S
JP1745874SJP2022022680FJP2022022680FJP1745874SJP 1745874 SJP1745874 SJP 1745874SJP 2022022680 FJP2022022680 FJP 2022022680FJP 2022022680 FJP2022022680 FJP 2022022680FJP 1745874 SJP1745874 SJP 1745874S
Authority
JP
Japan
Prior art keywords
susceptor
cover
susceptor cover
constitutes
serves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022022680F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filedfiledCritical
Priority to JP2022022680FpriorityCriticalpatent/JP1745874S/en
Priority to US29/888,131prioritypatent/USD1095472S1/en
Application grantedgrantedCritical
Publication of JP1745874SpublicationCriticalpatent/JP1745874S/en
Activelegal-statusCriticalCurrent
Anticipated expirationlegal-statusCritical

Links

Abstract

Translated fromJapanese

本物品は、半導体製造装置等においてウェハを保持するために用いるサセプタユニットを構成するカバー部品であり、基台となるサセプタ部品上に、その一部がカバーベース部品を介して載置される部品である。This product is a cover part that constitutes a susceptor unit used to hold wafers in semiconductor manufacturing equipment, etc., and is partly placed on the susceptor part that serves as a base via a cover base part. is.

JP2022022680F2022-10-202022-10-20 Susceptor coverActiveJP1745874S (en)

Priority Applications (2)

Application NumberPriority DateFiling DateTitle
JP2022022680FJP1745874S (en)2022-10-202022-10-20 Susceptor cover
US29/888,131USD1095472S1 (en)2022-10-202023-03-28Susceptor cover

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
JP2022022680FJP1745874S (en)2022-10-202022-10-20 Susceptor cover

Publications (1)

Publication NumberPublication Date
JP1745874Strue JP1745874S (en)2023-06-08

Family

ID=86610957

Family Applications (1)

Application NumberTitlePriority DateFiling Date
JP2022022680FActiveJP1745874S (en)2022-10-202022-10-20 Susceptor cover

Country Status (2)

CountryLink
US (1)USD1095472S1 (en)
JP (1)JP1745874S (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD1082729S1 (en)2023-01-112025-07-08Nuflare Technology, Inc.Susceptor cover

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JPH0834187B2 (en)*1989-01-131996-03-29東芝セラミックス株式会社 Susceptor
TW524873B (en)*1997-07-112003-03-21Applied Materials IncImproved substrate supporting apparatus and processing chamber
USD404370S (en)*1997-08-201999-01-19Tokyo Electron LimitedCap for use in a semiconductor wafer heat processing apparatus
JPH11343571A (en)*1998-05-291999-12-14Ngk Insulators LtdSusceptor
JP4034145B2 (en)*2002-08-092008-01-16住友大阪セメント株式会社 Susceptor device
CN100565786C (en)*2002-12-092009-12-02Nxp股份有限公司The system and method that in the cold wall CVD system, suppresses the chip temperature skew
USD525127S1 (en)*2004-03-012006-07-18Kraft Foods Holdings, Inc.Susceptor ring
US20060005767A1 (en)*2004-06-282006-01-12Applied Materials, Inc.Chamber component having knurled surface
DE102005045081B4 (en)*2004-09-292011-07-07Covalent Materials Corp. susceptor
USD600223S1 (en)*2008-08-072009-09-15Ravinder AggarwalSusceptor ring
CN104704626B (en)*2012-10-242017-12-05应用材料公司 Minimal contact edge ring for rapid heat treatment
USD743357S1 (en)*2013-03-012015-11-17Asm Ip Holding B.V.Susceptor
USD784276S1 (en)*2013-08-062017-04-18Applied Materials, Inc.Susceptor assembly
US10269614B2 (en)*2014-11-122019-04-23Applied Materials, Inc.Susceptor design to reduce edge thermal peak
USD830981S1 (en)*2017-04-072018-10-16Asm Ip Holding B.V.Susceptor for semiconductor substrate processing apparatus
US20200109484A1 (en)*2018-10-032020-04-09Asm Ip Holding B.V.Susceptor and susceptor coating method
USD864134S1 (en)*2018-10-242019-10-22Asm Ip Holding B.V.Susceptor
USD948463S1 (en)*2018-10-242022-04-12Asm Ip Holding B.V.Susceptor for semiconductor substrate supporting apparatus
US11764101B2 (en)*2019-10-242023-09-19ASM IP Holding, B.V.Susceptor for semiconductor substrate processing
JP1711119S (en)2021-10-222022-03-29 Susceptoring
JP1711120S (en)2021-10-222022-03-29 Suceptor cover
USD1067204S1 (en)*2022-05-312025-03-18Asm Ip Holding B.V.Susceptor
USD1030687S1 (en)*2022-05-312024-06-11Asm Ip Holding B.V.Susceptor
JP1741173S (en)*2022-10-202023-04-06 Heaters for heating semiconductor wafers and susceptors

Cited By (1)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
USD1082729S1 (en)2023-01-112025-07-08Nuflare Technology, Inc.Susceptor cover

Also Published As

Publication numberPublication date
USD1095472S1 (en)2025-09-30

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