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| PCT/US2016/049157WO2017040351A1 (en) | 2015-08-28 | 2016-08-27 | Self directed metrology and pattern classification |
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| KR (1) | KR102340756B1 (en) |
| CN (1) | CN107924850B (en) |
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| TW (1) | TWI684225B (en) |
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| Date | Code | Title | Description |
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| FF | Patent granted | ||
| KB | Patent renewed |