GB1326412A - Radio-frequency plasma generators - Google Patents

Abstract

1326412 High-frequency discharge apparatus G LISITANO 5 Nov 1970 [6 Nov 1969] 52671/70 Heading H1D A plasma generator comprises an outer container 14 for plasma, a radio-frequency generator 10, a transmission member 61 which is coupled to the radio-frequency generator and is disposed within the outer container so as to convey radio-frequency power to the plasma, the transmission member including a slotted substantially tubular hollow conductive body disposed such that radio-frequency power supplied to it from the generator is propagated, axially of the body, with a diminished velocity, and means 24 for producing a static magnetic field to confine the generated plasma to the said body. In the embodiment shown the inner conductor of a coaxialline 12 is connected to the member 16, and the outer conductor to container 14. A helical slot 18 in the member 16 may be either open or filled with dielectric material 25. The container 14 can be connected by flanges 22 to a system containing gas e.g. argon, at a pressure from 10<SP>-4</SP> torr. up to atmospheric. An axial magnetic field B is generated by coils 24. In alternative embodiments (Figs. 2, 3, not shown) the coaxial line 12 is connected either at a point nearer one end of the cylinder 16 or at a central point so that a shot extends in each direction from the point of connection. Further alternative embodiments (Figs. 4 and 5, not shown) include waveguide input arrangements.