FR2727474B1 - INTEGRATED ELECTRIC DISCHARGE MICRO ACTUATOR AND MICROSYSTEM COMPRISING THIS MICRO ACTUATOR - Google Patents

INTEGRATED ELECTRIC DISCHARGE MICRO ACTUATOR AND MICROSYSTEM COMPRISING THIS MICRO ACTUATOR

Info

Publication number: FR2727474B1
Authority: FR; France
Prior art keywords: micro actuator; microsystem; electric discharge; integrated electric; actuator
Prior art date: 1994-11-25
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Other versions

Inventor

Daniel Esteve

Pierre Bayle

Robert Caen

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Centre National de la Recherche Scientifique CNRS

Original Assignee

Centre National de la Recherche Scientifique CNRS

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-11-25

Filing date

1994-11-25

Publication date

1997-01-10

1994-11-25Application filed by Centre National de la Recherche Scientifique CNRSfiledCriticalCentre National de la Recherche Scientifique CNRS

1994-11-25Priority to FR9414262ApriorityCriticalpatent/FR2727474B1/en

1995-11-20Priority to PCT/FR1995/001525prioritypatent/WO1996017172A1/en

1996-05-31Publication of FR2727474A1publicationCriticalpatent/FR2727474A1/en

1997-01-10Application grantedgrantedCritical

1997-01-10Publication of FR2727474B1publicationCriticalpatent/FR2727474B1/en

2014-11-25Anticipated expirationlegal-statusCritical

StatusExpired - Fee Relatedlegal-statusCriticalCurrent

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F99/00—Subject matter not provided for in other groups of this subclass
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/20—Other positive-displacement pumps
- F04B19/24—Pumping by heat expansion of pumped fluid
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F1/00—Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped
- F04F1/06—Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped the fluid medium acting on the surface of the liquid to be pumped
- F04F1/16—Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped the fluid medium acting on the surface of the liquid to be pumped characterised by the fluid medium being suddenly pressurised, e.g. by explosion
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/10—Characterised by the construction of the motor unit the motor being of diaphragm type
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Fluid Mechanics (AREA)
Micromachines (AREA)

FR9414262A1994-11-251994-11-25 INTEGRATED ELECTRIC DISCHARGE MICRO ACTUATOR AND MICROSYSTEM COMPRISING THIS MICRO ACTUATORExpired - Fee RelatedFR2727474B1 (en)

Priority Applications (2)

Application Number	Priority Date	Filing Date	Title
FR9414262AFR2727474B1 (en)	1994-11-25	1994-11-25	INTEGRATED ELECTRIC DISCHARGE MICRO ACTUATOR AND MICROSYSTEM COMPRISING THIS MICRO ACTUATOR
PCT/FR1995/001525WO1996017172A1 (en)	1994-11-25	1995-11-20	Integrated electrical discharge microactuator and microsystem comprising same

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FR9414262AFR2727474B1 (en)	1994-11-25	1994-11-25	INTEGRATED ELECTRIC DISCHARGE MICRO ACTUATOR AND MICROSYSTEM COMPRISING THIS MICRO ACTUATOR

Publications (2)

Publication Number	Publication Date
FR2727474A1 FR2727474A1 (en)	1996-05-31
FR2727474B1true FR2727474B1 (en)	1997-01-10

Family

ID=9469232

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR9414262AExpired - Fee RelatedFR2727474B1 (en)	1994-11-25	1994-11-25	INTEGRATED ELECTRIC DISCHARGE MICRO ACTUATOR AND MICROSYSTEM COMPRISING THIS MICRO ACTUATOR

Country Status (2)

Country	Link
FR (1)	FR2727474B1 (en)
WO (1)	WO1996017172A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2002532655A (en)*	1998-12-11	2002-10-02	アメリカ合衆国	Ferroelectric pump
US8353682B2 (en)	2007-11-23	2013-01-15	Stichting Imec Nederland	Microfluidic-device systems and methods for manufacturing microfluidic-device systems

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3266438A (en)*	1965-07-21	1966-08-16	William H Savage	Pumps
US3586461A (en)*	1969-01-16	1971-06-22	Continental Can Co	Sonic multistage pump
DE4105675C1 (en)*	1991-01-30	1992-04-30	Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De	Miniature electrostatic pump or flow velocity sensor - has semiconductor device sandwiched between facing plates with flow apertures
US5256036A (en)*	1991-04-11	1993-10-26	Southwest Research Institute	Method and apparatus for pumping a medium
DE4239464A1 (en)*	1992-11-24	1994-05-26	Heinzl Joachim	Electrothermal static micro-pump with fluid-pressure-operated valve - drives liq. past resilient flap into outlet by expansion of vapour bubble generated by electric heating element

1994
- 1994-11-25FRFR9414262Apatent/FR2727474B1/ennot_activeExpired - Fee Related
1995
- 1995-11-20WOPCT/FR1995/001525patent/WO1996017172A1/enactiveApplication Filing

Also Published As

Publication number	Publication date
FR2727474A1 (en)	1996-05-31
WO1996017172A1 (en)	1996-06-06

Publication	Publication Date	Title
IL134416A0 (en)	2001-04-30	Electrical devices and a method of manufacturing the same
DE69609458D1 (en)	2000-08-31	Electromechanical RF micro switch
DE69814956D1 (en)	2003-07-03	Electrostatic actuator
DE19882261T1 (en)	2000-02-24	Micro actuator with bending element
DE69840749D1 (en)	2009-05-28	MICRO STRIP CONDUCTOR STRUCTURE
DE69734079D1 (en)	2005-10-06	Electric actuator
DE69826907D1 (en)	2004-11-18	electric motor
DE69512526D1 (en)	1999-11-04	ELECTRICAL CONTACT ELEMENT
DE59502013D1 (en)	1998-05-28	MICROMECHANICAL ACTUATOR
IT1296664B1 (en)	1999-07-14	ELECTRIC ACTUATOR CONTROL DEVICE.
DE59804222D1 (en)	2002-07-04	ELECTRIC MOTOR
DE59807328D1 (en)	2003-04-03	ELECTRIC MOTOR
DE69816442D1 (en)	2003-08-21	ELECTRIC HEATING ELEMENT
FR2727474B1 (en)	1997-01-10	INTEGRATED ELECTRIC DISCHARGE MICRO ACTUATOR AND MICROSYSTEM COMPRISING THIS MICRO ACTUATOR
DE59805512D1 (en)	2002-10-17	ELECTROMECHANICAL SWITCHGEAR
EP1026705A4 (en)	2008-03-05	Electric assembly and device
FI951835L (en)	1995-10-20	Creating contacts between operating and display devices
ATA157898A (en)	2002-08-15	MOTOR ACTUATOR
NO990165D0 (en)	1999-01-14	Electric display device
FR2759778B3 (en)	1999-02-05	ELECTRIC TRANSDUCER
KR970002224U (en)	1997-01-24	Electric fan
FR2724103B1 (en)	1998-01-02	ELECTRIC TOASTER
KR960025066U (en)	1996-07-22	Micro switch
TW313836U (en)	1997-08-21	Micro air pump
IT1291347B1 (en)	1999-01-07	ELECTRIC CIRCUIT DEVICE AND ITS APPLICATIONS

Legal Events

Date	Code	Title	Description
2004-09-10	ST	Notification of lapse

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