| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US2016/027267WO2016145458A1 (en) | 2015-03-10 | 2016-04-13 | Apparatus of plural charged-particle beams |
| Publication Number | Publication Date |
|---|---|
| EP3268979A1 EP3268979A1 (en) | 2018-01-17 |
| EP3268979A4true EP3268979A4 (en) | 2019-05-08 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP16762718.1APendingEP3268979A4 (en) | 2016-04-13 | 2016-04-13 | Apparatus of plural charged-particle beams |
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| EP (1) | EP3268979A4 (en) |
| JP (1) | JP6550478B2 (en) |
| CN (1) | CN108292583B (en) |
| WO (1) | WO2016145458A1 (en) |
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| Publication number | Publication date |
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| JP2018513543A (en) | 2018-05-24 |
| CN108292583B (en) | 2020-03-20 |
| EP3268979A1 (en) | 2018-01-17 |
| CN108292583A (en) | 2018-07-17 |
| JP6550478B2 (en) | 2019-07-24 |
| WO2016145458A1 (en) | 2016-09-15 |
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