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EP1426992A3 - Electrostatic mems switch - Google Patents

Electrostatic mems switchDownload PDF

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Publication number
EP1426992A3
EP1426992A3EP03104514AEP03104514AEP1426992A3EP 1426992 A3EP1426992 A3EP 1426992A3EP 03104514 AEP03104514 AEP 03104514AEP 03104514 AEP03104514 AEP 03104514AEP 1426992 A3EP1426992 A3EP 1426992A3
Authority
EP
European Patent Office
Prior art keywords
fixed contacts
mems switch
signal lines
fixed
movable contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03104514A
Other languages
German (de)
French (fr)
Other versions
EP1426992A2 (en
Inventor
Tomonori c/o OMRON Corp SEKI
Yutaka c/o OMRON Corp. UNO
Takahiro OMRON Corp. MASUDA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics CofiledCriticalOmron Corp
Publication of EP1426992A2publicationCriticalpatent/EP1426992A2/en
Publication of EP1426992A3publicationCriticalpatent/EP1426992A3/en
Withdrawnlegal-statusCriticalCurrent

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Abstract

A plurality of fixed contacts and signal lines are providedon a fixed substrate. A movable contact which is closed oropened with the fixed contacts is provided on a movable substrateopposed to the fixed substrate. A film thickness of the fixedcontacts is made to be smaller than that of the signal linesso that the movable contact is set in a concave portionconstituted by the fixed contacts when the fixed contacts, andthe movable contact are closed and the signal lines are linearlyconnected.
EP03104514A2002-12-052003-12-03Electrostatic mems switchWithdrawnEP1426992A3 (en)

Applications Claiming Priority (2)

Application NumberPriority DateFiling DateTitle
JP20023540412002-12-05
JP20023540412002-12-05

Publications (2)

Publication NumberPublication Date
EP1426992A2 EP1426992A2 (en)2004-06-09
EP1426992A3true EP1426992A3 (en)2005-11-30

Family

ID=32310743

Family Applications (1)

Application NumberTitlePriority DateFiling Date
EP03104514AWithdrawnEP1426992A3 (en)2002-12-052003-12-03Electrostatic mems switch

Country Status (1)

CountryLink
EP (1)EP1426992A3 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JP4506529B2 (en)*2005-03-182010-07-21オムロン株式会社 Electrostatic microswitch and method for manufacturing the same, and apparatus provided with electrostatic microswitch
KR20080019577A (en)2005-03-182008-03-04심플러 네트웍스, 인코포레이티드 MEMS actuators and MEMS switches
DE102006001321B3 (en)*2006-01-092007-07-26Protron Mikrotechnik GmbhSwitching device, has two signal lines and ground lines which are controlled by plated-through hole through laminar extending substrate, where signal lines surrounded by ground lines
DE102007035633B4 (en)2007-07-282012-10-04Protron Mikrotechnik Gmbh Process for producing micromechanical structures and micromechanical structure
US8610519B2 (en)*2007-12-202013-12-17General Electric CompanyMEMS microswitch having a dual actuator and shared gate
EP3161847B1 (en)*2014-06-252023-05-31General Electric CompanyIntegrated micro-electromechanical switches and a related method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
WO2000044012A1 (en)*1999-01-252000-07-27GFD-Gesellschaft für Diamantprodukte mbHMicroswitching contact
WO2002079076A1 (en)*2001-03-302002-10-10Jds Uniphase CorporationMems device members having portions that contact a substrate and associated mehtods of operating
US20020163408A1 (en)*2000-04-212002-11-07Mitsuru FujiiStatic relay and communication device using static relay

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
WO2000044012A1 (en)*1999-01-252000-07-27GFD-Gesellschaft für Diamantprodukte mbHMicroswitching contact
US20020163408A1 (en)*2000-04-212002-11-07Mitsuru FujiiStatic relay and communication device using static relay
WO2002079076A1 (en)*2001-03-302002-10-10Jds Uniphase CorporationMems device members having portions that contact a substrate and associated mehtods of operating

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PARK J Y ET AL: "Fully integrated micromachined capacitive switches for RF applications", MICROWAVE SYMPOSIUM DIGEST. 2000 IEEE MTT-S INTERNATIONAL BOSTON, MA, USA 11-16 JUNE 2000, PISCATAWAY, NJ, USA,IEEE, US, vol. 1, 11 June 2000 (2000-06-11), pages 283 - 286, XP010505974, ISBN: 0-7803-5687-X*

Also Published As

Publication numberPublication date
EP1426992A2 (en)2004-06-09

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