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EP1026718A3 - Electrostatically controlled micro-relay device - Google Patents

Electrostatically controlled micro-relay deviceDownload PDF

Info

Publication number
EP1026718A3
EP1026718A3EP99830731AEP99830731AEP1026718A3EP 1026718 A3EP1026718 A3EP 1026718A3EP 99830731 AEP99830731 AEP 99830731AEP 99830731 AEP99830731 AEP 99830731AEP 1026718 A3EP1026718 A3EP 1026718A3
Authority
EP
European Patent Office
Prior art keywords
base
relay device
petal
controlled micro
electrostatically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99830731A
Other languages
German (de)
French (fr)
Other versions
EP1026718A2 (en
EP1026718B1 (en
Inventor
Marco Pizzi
Valerian Koniachkine
Piero Perlo
Sabino Sinesi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centro Ricerche Fiat SCpA
Original Assignee
Centro Ricerche Fiat SCpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centro Ricerche Fiat SCpAfiledCriticalCentro Ricerche Fiat SCpA
Publication of EP1026718A2publicationCriticalpatent/EP1026718A2/en
Publication of EP1026718A3publicationCriticalpatent/EP1026718A3/en
Application grantedgrantedCritical
Publication of EP1026718B1publicationCriticalpatent/EP1026718B1/en
Anticipated expirationlegal-statusCritical
Expired - Lifetimelegal-statusCriticalCurrent

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Abstract

An electrostatically controlled micro-relay devicecomprises a base (2) provided with a pair of separateelectrodes (5, 6) and a petal (8) constituted by aconductive film having the ends connected to the base(2) and a movable part carrying a pair of movablecontacts (10) adapted to co-operate with respectivefixed contacts (11, 12) carried by the base (2). Byapplying an electric voltage between the petal (8) andone of electrode (5, 6) of the other, an adhesion iscaused by electrostatically effect of one part of thepetal to the base, which causes engagement of one orthe other of the movable contacts (10) with therespective fixed contacts (11, 12).
EP199908307311999-02-021999-11-25Electrostatically controlled micro-relay deviceExpired - LifetimeEP1026718B1 (en)

Applications Claiming Priority (2)

Application NumberPriority DateFiling DateTitle
ITTO9900721999-02-02
ITTO990072IT1307131B1 (en)1999-02-021999-02-02 ELECTROSTATIC CONTROL MICRO-RELAY DEVICE.

Publications (3)

Publication NumberPublication Date
EP1026718A2 EP1026718A2 (en)2000-08-09
EP1026718A3true EP1026718A3 (en)2001-09-12
EP1026718B1 EP1026718B1 (en)2003-02-05

Family

ID=11417411

Family Applications (1)

Application NumberTitlePriority DateFiling Date
EP19990830731Expired - LifetimeEP1026718B1 (en)1999-02-021999-11-25Electrostatically controlled micro-relay device

Country Status (4)

CountryLink
EP (1)EP1026718B1 (en)
DE (1)DE69905233T2 (en)
ES (1)ES2189379T3 (en)
IT (1)IT1307131B1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
DE10040867A1 (en)*2000-08-212002-05-23Abb Research Ltd microswitch
FR2854726B1 (en)*2003-05-092005-08-26St Microelectronics Sa MICROCOMMUTER WITH SEVERAL CLOSED POSITIONS WITH SIDE MOVEMENT
DE102004010150B9 (en)2004-02-272012-01-26Eads Deutschland Gmbh High-frequency MEMS switch with bent switching element and method for its production
KR100693345B1 (en)*2005-11-302007-03-09삼성전자주식회사 MEMS switch

Citations (3)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JPH10162713A (en)*1996-11-291998-06-19Omron Corp Micro relay
DE19736674C1 (en)*1997-08-221998-11-26Siemens AgMicromechanical electrostatic relay
DE19730715C1 (en)*1996-11-121998-11-26Fraunhofer Ges Forschung Method of manufacturing a micromechanical relay

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
DE19730715C1 (en)*1996-11-121998-11-26Fraunhofer Ges Forschung Method of manufacturing a micromechanical relay
US6162657A (en)*1996-11-122000-12-19Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V.Method for manufacturing a micromechanical relay
JPH10162713A (en)*1996-11-291998-06-19Omron Corp Micro relay
DE19736674C1 (en)*1997-08-221998-11-26Siemens AgMicromechanical electrostatic relay

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 11 30 September 1998 (1998-09-30)*

Also Published As

Publication numberPublication date
ES2189379T3 (en)2003-07-01
DE69905233T2 (en)2003-11-06
DE69905233D1 (en)2003-03-13
EP1026718A2 (en)2000-08-09
ITTO990072A1 (en)2000-08-02
EP1026718B1 (en)2003-02-05
IT1307131B1 (en)2001-10-29

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