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EP0285020A3 - Arrangement for coupling microwave energy to a leaky microwave line - Google Patents

Arrangement for coupling microwave energy to a leaky microwave lineDownload PDF

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Publication number
EP0285020A3
EP0285020A3EP88104822AEP88104822AEP0285020A3EP 0285020 A3EP0285020 A3EP 0285020A3EP 88104822 AEP88104822 AEP 88104822AEP 88104822 AEP88104822 AEP 88104822AEP 0285020 A3EP0285020 A3EP 0285020A3
Authority
EP
European Patent Office
Prior art keywords
microwave
energy
arrangement
leaky
coupling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP88104822A
Other languages
German (de)
French (fr)
Other versions
EP0285020A2 (en
Inventor
Jörg Dr. Kieser
Hans-Georg Dr. Lotz
Gonde Dr. Dittmer
Michael Dr. Sellschopp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AGfiledCriticalLeybold AG
Publication of EP0285020A2publicationCriticalpatent/EP0285020A2/en
Publication of EP0285020A3publicationCriticalpatent/EP0285020A3/en
Withdrawnlegal-statusCriticalCurrent

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Abstract

Translated fromGerman

Vorrichtung zur Einbringung von Mikrowellenenergie in einen mindestens teilweise für Mikrowellenenergie durchlässigen Behälter. Mindestens ein Mikrowellen­sender (21, 22) und ein an den Mikrowellensender ange­schlossener offener Mikrowellenleiter (1) befinden sich in unmittelbarer Nachbarschaft des Behälters. Um die Längenausdehnung des durch die Mikrowellen­energie erzeugten Plasmas zu vergrößern und die Energieverteilung zu vergleichmäßigen, ist der offene Mikrowellenleiter (1) mindestens an seinen beiden Enden mit einer Mikrowellenzuleitung (17, 18; 24, 25) versehen.Device for introducing microwave energyin an at least partially for microwave energypermeable container. At least one microwavetransmitter (21, 22) and a to the microwave transmitterclosed open microwave conductor (1)itself in the immediate vicinity of the container.To the linear expansion of the microwavesto increase energy generated plasma andTo even out energy distribution is thatopen microwave conductor (1) at least on itsboth ends with a microwave feed (17, 18;24, 25).

EP88104822A1987-04-021988-03-25Arrangement for coupling microwave energy to a leaky microwave lineWithdrawnEP0285020A3 (en)

Applications Claiming Priority (2)

Application NumberPriority DateFiling DateTitle
DE19873711184DE3711184A1 (en)1987-04-021987-04-02 DEVICE FOR THE APPLICATION OF MICROWAVE ENERGY WITH AN OPEN MICROWAVE LEAD
DE37111841987-04-02

Publications (2)

Publication NumberPublication Date
EP0285020A2 EP0285020A2 (en)1988-10-05
EP0285020A3true EP0285020A3 (en)1990-04-04

Family

ID=6324755

Family Applications (1)

Application NumberTitlePriority DateFiling Date
EP88104822AWithdrawnEP0285020A3 (en)1987-04-021988-03-25Arrangement for coupling microwave energy to a leaky microwave line

Country Status (3)

CountryLink
US (1)US4847460A (en)
EP (1)EP0285020A3 (en)
DE (1)DE3711184A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
DE4037091C2 (en)*1990-11-221996-06-20Leybold Ag Device for generating a homogeneous microwave field
US5146058A (en)*1990-12-271992-09-08E. I. Du Pont De Nemours And CompanyMicrowave resonant cavity applicator for heating articles of indefinite length
EP0502269A1 (en)*1991-03-061992-09-09Hitachi, Ltd.Method of and system for microwave plasma treatments
FR2685821B1 (en)*1991-12-311994-03-25Thomson Tubes Electroniques CIRCUIT OF HYPERFREQUENCY ENERGY DISTRIBUTION AND COUPLING.
DE69412419T2 (en)*1993-11-011998-12-24Unilever N.V., Rotterdam Process for the thermal fixation of the coating of a coated food by dielectric heating
US5714009A (en)1995-01-111998-02-03Deposition Sciences, Inc.Apparatus for generating large distributed plasmas by means of plasma-guided microwave power
FR2798552B1 (en)*1999-09-132001-11-30Centre Nat Rech Scient DEVICE FOR PROVIDING A PREDETERMINED MICROWAVE POWER DIVISION ON A PLURALITY OF LOADS, PARTICULARLY FOR THE PRODUCTION OF PLASMA
DE10138693A1 (en)*2001-08-072003-07-10Schott Glas Device for coating objects
US7326872B2 (en)*2004-04-282008-02-05Applied Materials, Inc.Multi-frequency dynamic dummy load and method for testing plasma reactor multi-frequency impedance match networks
WO2011027963A2 (en)*2009-09-012011-03-10엘지전자 주식회사Cooking appliance employing microwaves
EP2815405B1 (en)*2012-02-142018-01-10Goji LimitedA device for applying rf energy to a cavity
DE102014204105B3 (en)*2014-03-062015-08-06Karlsruher Institut für Technologie Device for recording a material to be loaded into a reactor and its use

Citations (7)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
DE1029963B (en)*1956-12-241958-05-14Mikrowellen Ges M B H Deutsche Device for irradiating microwave energy into dielectric bodies
EP0027471A1 (en)*1979-03-311981-04-29Osaka Gas Co., LtdHigh-frequency heating device
EP0036040A1 (en)*1980-03-181981-09-23Robert Bosch GmbhMicrowave direct contact radiator for diathermy applications
FR2520160A1 (en)*1982-01-201983-07-22Sairem SarlHomogeneous thermal treatment of materials by microwaves - transmitted by pairs of aerials penetrating the waveguides
EP0085110A1 (en)*1981-08-071983-08-10Matsushita Electric Industrial Co., Ltd.High frequency heater
FR2525063A1 (en)*1982-04-101983-10-14Toyoda Gosei Kk
US4688009A (en)*1985-05-131987-08-18Varian Associates, Inc.Triple-pane waveguide window

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US2921174A (en)*1959-02-131960-01-12Gen ElectricElectric surface heating unit system
DE6606894U (en)*1962-11-071970-12-10Siemens Ag PRESSURE-RESISTANT REFLECTION-COMPENSATED ENCLOSURE WINDOW FOR HOLLOW PIPES
US3472200A (en)*1964-05-151969-10-14Litton Industries IncStriping apparatus for highways
US3496571A (en)*1967-01-091970-02-17Univ Ohio State Res FoundLow profile feedback slot antenna
BE758571A (en)*1969-11-061971-04-16Euratom HIGH FREQUENCY PLASMA GENERATOR
US3611582A (en)*1969-11-071971-10-12Canadian Patents DevMicrowave package for control of moisture content and insect infestations of grain
FR2076405A5 (en)*1970-01-141971-10-15Materiel Telephonique
US3715551A (en)*1971-07-011973-02-06Raytheon CoTwisted waveguide applicator
US3814983A (en)*1972-02-071974-06-04C WeissflochApparatus and method for plasma generation and material treatment with electromagnetic radiation
US3851132A (en)*1973-12-101974-11-26Canadian Patents DevParallel plate microwave applicator
GB2040103B (en)*1978-12-081983-03-02Raytheon CoSlow wave coupling circuit
US4266162A (en)*1979-03-161981-05-05Gte Laboratories IncorporatedElectromagnetic discharge apparatus with double-ended power coupling
US4314128A (en)*1980-01-281982-02-02Photowatt International, Inc.Silicon growth technique and apparatus using controlled microwave heating
DE3147986C2 (en)*1981-12-041992-02-27Leybold-Heraeus GmbH, 5000 Köln Device for generating a microwave plasma for the treatment of substrates, in particular for the plasma polymerization of monomers
EP0086558A1 (en)*1982-02-081983-08-24The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain andImprovements in or relating to antenna array circuits
US4629847A (en)*1985-11-071986-12-16Gics Paul WResonator device for a microwave heat applicator

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
DE1029963B (en)*1956-12-241958-05-14Mikrowellen Ges M B H Deutsche Device for irradiating microwave energy into dielectric bodies
EP0027471A1 (en)*1979-03-311981-04-29Osaka Gas Co., LtdHigh-frequency heating device
EP0036040A1 (en)*1980-03-181981-09-23Robert Bosch GmbhMicrowave direct contact radiator for diathermy applications
EP0085110A1 (en)*1981-08-071983-08-10Matsushita Electric Industrial Co., Ltd.High frequency heater
FR2520160A1 (en)*1982-01-201983-07-22Sairem SarlHomogeneous thermal treatment of materials by microwaves - transmitted by pairs of aerials penetrating the waveguides
FR2525063A1 (en)*1982-04-101983-10-14Toyoda Gosei Kk
US4688009A (en)*1985-05-131987-08-18Varian Associates, Inc.Triple-pane waveguide window

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN, Band 7, Nr. 229 (E-203)[1374], 12. Oktober 1983; & JP-A-58 120 303 (SANYO DENKI K.K.) 18-07-1983*

Also Published As

Publication numberPublication date
DE3711184A1 (en)1988-10-20
EP0285020A2 (en)1988-10-05
US4847460A (en)1989-07-11

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