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DE10337732A1 - Coating method for optical component substrates, in which a planetary drive is used to move a substrate relative to a coating source so that overlapping of the coating path during coating is essentially avoided - Google Patents

Coating method for optical component substrates, in which a planetary drive is used to move a substrate relative to a coating source so that overlapping of the coating path during coating is essentially avoidedDownload PDF

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Publication number
DE10337732A1
DE10337732A1DE10337732ADE10337732ADE10337732A1DE 10337732 A1DE10337732 A1DE 10337732A1DE 10337732 ADE10337732 ADE 10337732ADE 10337732 ADE10337732 ADE 10337732ADE 10337732 A1DE10337732 A1DE 10337732A1
Authority
DE
Germany
Prior art keywords
coating
planetary drive
overlapping
source
move
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE10337732A
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German (de)
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DE10337732B4 (en
Inventor
Matthias Heller
Hans-Jochen Paul
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbHfiledCriticalCarl Zeiss SMT GmbH
Priority to DE10337732ApriorityCriticalpatent/DE10337732B4/en
Publication of DE10337732A1publicationCriticalpatent/DE10337732A1/en
Application grantedgrantedCritical
Publication of DE10337732B4publicationCriticalpatent/DE10337732B4/en
Anticipated expirationlegal-statusCritical
Expired - Fee Relatedlegal-statusCriticalCurrent

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Abstract

Method for coating substrates of optical components in a coating system equipped with a planetary drive, whereby the substrate is moved using the planetary drive relative to a coating source so that a repetition of a geometrical relative configuration between the coating source and the substrate surface, at least during coating, is essentially avoided. An independent claim is made for a coating system for coating the substrates of optical components.
DE10337732A2003-08-112003-08-11 Method and coating system for coating substrates for optical componentsExpired - Fee RelatedDE10337732B4 (en)

Priority Applications (1)

Application NumberPriority DateFiling DateTitle
DE10337732ADE10337732B4 (en)2003-08-112003-08-11 Method and coating system for coating substrates for optical components

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
DE10337732ADE10337732B4 (en)2003-08-112003-08-11 Method and coating system for coating substrates for optical components

Publications (2)

Publication NumberPublication Date
DE10337732A1true DE10337732A1 (en)2005-03-10
DE10337732B4 DE10337732B4 (en)2009-11-19

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ID=34177646

Family Applications (1)

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DE10337732AExpired - Fee RelatedDE10337732B4 (en)2003-08-112003-08-11 Method and coating system for coating substrates for optical components

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DE (1)DE10337732B4 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
EP2348139A1 (en)*2010-01-262011-07-27Stefan EsserSubstrate plate and coating assembly for coating substrates
CN113699500A (en)*2021-08-192021-11-26北京北方华创真空技术有限公司Vacuum coating monomer machine work piece frame
US12024769B2 (en)2019-05-072024-07-02Oerlikon Surface Solutions Ag, PfäffikonMovable work piece carrier device for holding work pieces to be treated

Citations (6)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US3523517A (en)*1968-09-041970-08-11Sloan Instr CorpRotating workpiece holder
DE2651976A1 (en)*1975-12-311977-07-14Ibm STEAMING DEVICE
DE3934877A1 (en)*1988-10-271990-05-03Salomon Sa TIE TO KEEP THE FRONT END OF A SHOE ON A CROSS-COUNTRY SKI
JPH07292471A (en)*1994-04-261995-11-07Mitsubishi Chem Corp Sputtering method
EP1101836A1 (en)*1999-11-222001-05-23Satis Vacuum Industries Vertriebs - AGVacuum coating apparatus for depositing coatings on optical substrates
US20020176097A1 (en)*2001-04-172002-11-28Rodgers Wayne E.Apparatus and method for thin film deposition onto substrates

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
JP2592311B2 (en)*1988-10-191997-03-19富士写真フイルム株式会社 Method and apparatus for manufacturing magneto-optical recording medium

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US3523517A (en)*1968-09-041970-08-11Sloan Instr CorpRotating workpiece holder
DE2651976A1 (en)*1975-12-311977-07-14Ibm STEAMING DEVICE
DE3934877A1 (en)*1988-10-271990-05-03Salomon Sa TIE TO KEEP THE FRONT END OF A SHOE ON A CROSS-COUNTRY SKI
JPH07292471A (en)*1994-04-261995-11-07Mitsubishi Chem Corp Sputtering method
EP1101836A1 (en)*1999-11-222001-05-23Satis Vacuum Industries Vertriebs - AGVacuum coating apparatus for depositing coatings on optical substrates
US20020176097A1 (en)*2001-04-172002-11-28Rodgers Wayne E.Apparatus and method for thin film deposition onto substrates

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP 07292471 A, in: Patent Abstract of Japan inkl. computergestützte englische Übersetzung der japan.Offenlegungsschrift*

Cited By (4)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
EP2348139A1 (en)*2010-01-262011-07-27Stefan EsserSubstrate plate and coating assembly for coating substrates
DE102010001218A1 (en)*2010-01-262011-07-28Esser, Stefan, Dr.-Ing., 52072 Substrate plate and coating system for coating substrates
US12024769B2 (en)2019-05-072024-07-02Oerlikon Surface Solutions Ag, PfäffikonMovable work piece carrier device for holding work pieces to be treated
CN113699500A (en)*2021-08-192021-11-26北京北方华创真空技术有限公司Vacuum coating monomer machine work piece frame

Also Published As

Publication numberPublication date
DE10337732B4 (en)2009-11-19

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Legal Events

DateCodeTitleDescription
OP8Request for examination as to paragraph 44 patent law
8364No opposition during term of opposition
8327Change in the person/name/address of the patent owner

Owner name:CARL ZEISS SMT GMBH, 73447 OBERKOCHEN, DE

R119Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date:20110301
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