A kind of water cutter deviceTechnical field
The utility model belongs to field of semiconductor devices；It is related to cleaning device technology；Specifically a kind of water cutter device.
Background technique
Semiconductor/semiconductor encapsulation at present/passive device/PCB technology is fast-developing, however in semiconductor wet processIn, in order to remove the pollutant of crystal column surface, crystal column surface can generally be cleaned by water or chemical reagent, and it is traditionalCleaning device mostly use greatly on pipeline connect nozzle mode.Because spray orifice has attenuation to pressure of supply water, usingDifferent location cleaning dynamics are inconsistent when the conventional clean device of nozzle-type cleans wafer, cause wafer cleaning unevenIt is even.
Utility model content
The purpose of this utility model is to provide a kind of water cutter devices.
The purpose of this utility model can be achieved through the following technical solutions:
A kind of water cutter device, including driving belt, rolling bearing, driving belt pulley, driven pulley, bearing, water knife, enterWaterpipe enters water adapter, water knife water inlet pipe, crust of the device, motor fixing frame, motor and follower belt wheel shaft,The motor is fixed on crust of the device lower end by motor fixing frame, and the driving belt pulley is installed on rolling bearing one end, instituteIt states the rolling bearing other end and is held with motor output shaft and is connect, the driven pulley is installed on follower belt wheel shaft one end,The follower belt wheel shaft other end passes through bearing and connect with water knife one end, and the bearing is installed on crust of the device side,The driving belt connection driving belt pulley and driven pulley, the water knife are set on the inside of crust of the device, and the water knife enters waterPipeline connects the one end of water knife without driven pulley rotation axis, and the water knife water inlet pipe passes through bearing and enters water adapter companyConnect, it is described enter water adapter be fixed on crust of the device, be connected with water inlet pipe on the water adapter.
It is described enter water adapter for will rotate water inlet pipe and fixation water inlet pipe separate, the water knife water inlet pipe isRotating pipe, the water inlet pipe are fixed -piping.
The water knife includes internal nozzle, internal nozzle apopore, external spout and external water jet, external spoutInternal diameter is greater than the outer diameter of internal nozzle, the two concentric cooperations of pipe, and described internal nozzle one end is set to inside external spout, the other endOn the outside of the external spout and connection water knife water inlet pipe, the internal nozzle apopore is round and in one line is uniformly distributedIt is located inside external spout on the pipeline of one end in internal nozzle, the external water jet is set on the outside of external spout, described outerPortion's water jet nozzle is the fine crack of a strip, the position just phase of the internal nozzle apopore and the nozzle of outside water jetIt is right.
The external spout is connected with follower belt wheel shaft without one end outside of internal nozzle.
It is described enter water adapter include outlet conduit connector, bearing inner ring, water inlet pipe connector, enter water adapter shell,Sealing ring and outer race, the outlet conduit connector are installed on bearing inner ring inner sidewall, and the outer race is fixed onEnter on water adapter side wall of outer shell, the outer race and the mating installation of bearing inner ring form rolling bearing, the rolling bearingOutside is equipped with sealing ring, and the water inlet pipe connector is installed on the side into the non-outlet conduit connector of water adapter shell, describedEnter water adapter shell to be fixed on crust of the device.
Product is put into crust of the device, water or chemical reagent are inputted by water inlet pipe into water adapter, turned by entering waterConnect device and enter in water knife by water knife water inlet pipe, liquid sprayed from internal nozzle nozzle enter internal nozzle and external spout itBetween gap in, after sprayed by the strip slot nozzle of external spout and form the very thin water curtain of one side, when needing to adjust injection water curtainAngle when, start switch, then motor starts turning, to drive driving belt pulley, by driving belt, makes driven pulleyRotation, so that follower belt wheel shaft rotates, and then it is dynamic to drive water swivel, so that the water curtain angle of water knife ejection is adjusted, whenWhen reaching proper angle, turn off the switch.
It is easily caused the utility model has the beneficial effects that the utility model is directed in semiconductor wet process using nozzle cleaningIt cleans non-uniform problem to improve cleaning device, traditional nozzle cleaning is changed to two jet pipe sleeve structures,Its internal nozzle nozzle is the circular hole nozzle being evenly distributed, and the nozzle of outer nozzle is changed to strip slot type, water or chemistry examinationAgent enters the part between two pipes by spray orifice, then sprays using the strip slot nozzle of outer nozzle, and it is very thin to form one sideWater curtain.Water curtain is uninterrupted within the scope of strip slot nozzle and outlet pressure is consistent, thereby may be ensured that the uniformity to wafer cleaning.In addition bigger using strip slot nozzle water yield, also it is more suitable for immersion type cleaning way.
Detailed description of the invention
In order to facilitate the understanding of those skilled in the art, the utility model will be further described below with reference to the accompanying drawings.
Fig. 1 is a kind of overall structure diagram of water cutter device of the utility model；
Fig. 2 is a kind of water knife structural schematic diagram of water cutter device of the utility model；
Fig. 3 is that a kind of water cutter device of the utility model enters water adaptor structure schematic diagram.
Specific embodiment
As shown in Figure 1-3, a kind of water cutter device, including driving belt 1, rolling bearing 2, driving belt pulley 3, follower beltWheel 4, bearing 5, water knife 6, water inlet pipe 7, enter water adapter 8, water knife water inlet pipe 9, crust of the device 10, motor fixing frame 11,Motor 12 and follower belt wheel shaft 13, motor 12 are fixed on 10 lower end of crust of the device by motor fixing frame 11, driveBelt pulley 3 is installed on 2 one end of rolling bearing, and 2 other end of rolling bearing exports bearing with motor 12 and connect, and driven pulley 4 is pacifiedLoaded on 13 one end of follower belt wheel shaft, 13 other end of follower belt wheel shaft passes through bearing 5 and connect with 6 one end of water knife,Bearing 5 is installed on 10 side of crust of the device, and driving belt 1 connects driving belt pulley 3 and driven pulley 4, and water knife 6 is set to device10 inside of shell, water knife water inlet pipe 9 connect the one end of water knife 6 without driven pulley rotation axis 13, and water knife water inlet pipe 9 passes throughBearing 5 is connect with water adapter 8 is entered, and is entered water adapter 8 and is fixed on crust of the device 10, is connected with water inlet pipe on water adapter 8Road 7.
Enter water adapter 8 and separated for water inlet pipe and fixed water inlet pipe will to be rotated, water knife water inlet pipe 9 is rotation pipeRoad, water inlet pipe 7 are fixed -piping.
As shown in Fig. 2, water knife 6 includes internal nozzle 61, internal nozzle apopore 62, external spout 63 and external water sprayMouth 64, the internal diameter of external spout 63 are greater than the outer diameter of internal nozzle 61, and the two concentric cooperations of pipe, 61 one end of internal nozzle is set to outerInside portion's jet pipe 63, the other end is set to 63 outside of external spout and connection water knife water inlet pipe 9, and internal nozzle apopore 62 is circleThe shape and internal nozzle 61 in one line that is uniformly distributed in is located on the pipeline of 63 inside one end of external spout, external water jet 64 is setIn 63 outside of external spout, external 64 nozzle of water jet is the fine crack of a strip, internal nozzle apopore 62 and external water sprayThe position of the nozzle of mouth 64 is just opposite.
External spout 63 is connected with follower belt wheel shaft 13 without one end outside of internal nozzle 61.
Include outlet conduit connector 81, bearing inner ring 82, water inlet pipe connector 83, enter as shown in figure 3, entering water adapter 8Water adapter shell 84, sealing ring 85 and outer race 86, outlet conduit connector 81 are installed on 82 inner sidewall of bearing inner ring,Outer race 86 is fixed on 84 side wall of water adapter shell, and outer race 86 and the mating installation of bearing inner ring 82 composition rotateBearing, rolling bearing outside are equipped with sealing ring 85, and water inlet pipe connector 83 is installed on into the non-outlet conduit of water adapter shell 84The side of connector 81 enters water adapter shell 84 and is fixed on crust of the device 10.
Product is put into crust of the device 10, water or chemical reagent are inputted by water inlet pipe 7 into water adapter 8, by enteringWater adapter 8 enters in water knife 6 by water knife water inlet pipe 9, and liquid is sprayed from internal nozzle apopore 62 enters internal nozzleIn gap between 61 and external spout 63, after sprayed by the strip slot nozzle of external spout 63 and form the very thin water curtain of one side,It when needing to adjust the angle of injection water curtain, starts switch, then motor 12 starts turning, to drive driving belt pulley 3, passes throughDriving belt 1 rotates driven pulley 4, so that follower belt wheel shaft 13 rotates, and then drives water knife 6 to rotate, thusThe water curtain angle that water knife 6 sprays is adjusted to turn off the switch when reaching proper angle.
The utility model easily causes the non-uniform problem of cleaning to clear in semiconductor wet process using nozzle cleaningCleaning device improves, and traditional nozzle cleaning is changed to two jet pipe sleeve structures, internal nozzle nozzle is distributionUniform circular hole nozzle, the nozzle of outer nozzle are changed to strip slot type, water or chemical reagent and enter two pipes by spray orificeBetween part, then sprayed using the strip slot nozzle of outer nozzle, form the very thin water curtain of one side.Within the scope of strip slot nozzleWater curtain is uninterrupted and outlet pressure is consistent, thereby may be ensured that the uniformity to wafer cleaning.In addition gone out using strip slot nozzleWater is bigger, is also more suitable for immersion type cleaning way.
Above content is only to the utility model structure example and explanation, the technology people of affiliated the artMember makes various modifications or additions to the described embodiments or is substituted in a similar manner, without departing from realityWith novel structure or beyond the scope defined by this claim, all should belong to the protection range of the utility model.